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Advanced power and gas delivery subsystems for photovoltaic manufacturing
• OptimizedPVefficiencywithimproved layer performance
• Improvedproductionvalue:increasedefficiency, yield, and throughput
• Customer-focusedequipmentsupplierwith broad technologies and vast product offerings
• Premierglobalinfrastructurewithfast, effective product service and expert applications support
With a vast and diverse product portfolio, AE®isacompleteequipmentandsupportsolutionforthevariedpower-andgas-deliverysubsystemsusedinphotovoltaicproduction.Weofferhigh-value,high-performingproductsfortoday’sPVmanufacturingsystems,
aswellasproductswithenablingfeaturesforprocessoptimizationandinnovation.
Process Function
Deposition Metal & Glass Pre-Treatment Chamber Clean/Abatement Temperature Measurement Gas and Vapor Flow Control
RF DC Low/Mid-Frequency
High value and performance for today’s PV manufacturing systems
Cesar® RF Power SuppliesVarioMatch™MatchingNetworks
Pinnacle®DCPowerSupplies PDX®Mid-FrequencyPowerSuppliesPEIILow-FrequencyPowerSupplies
Pinnacle®DCPowerSuppliesPinnacle®Plus+DC/Pulsed-DCPower SuppliesPulsar™DCPulsingAccessory
Litmas® RPS Remote Plasma Sources Aera®FC-7700SeriesMFCs
Rich feature sets for tomorrow’s innovations in PV manufacturing
Apex® RF Power-Delivery Systems Ovation™VHFPower-DeliverySystemsNavigator®DigitalMatchingNetworksZ’Scan®RFImpedanceSensors
Pinnacle®Plus+DC/Pulsed-DCPowerSuppliesPulsar™DCPulsingAccessory
Crystal®Mid-FrequencyPowerSupplies SekidenkoOpticalFiberThermometers&Emissometers Aera®PI-980®Pressure-InsensitiveMFCsAera® Transformer™DigitalMFCsAera®FC-D770IndustrialMFCsAera®ASandGSSeriesThermalVaporizersAera®RSSeriesVaporizerRefillSystems
Power your entire system with AE®power-deliveryproducts.WeofferabroadselectionfromDCupto60MHz.Addvaluetoyourmanufacturingoperationwiththeefficiencyofasingleequipmentsource,thedependabilityofprecise,reliableproducts,andthetimelysupportofexperttechniciansandapplicationsengineers.
Fulfill all of your power- and gas-delivery needs from a single global leader. AE®’s comprehensive portfolio of photovoltaic (PV) manufacturing equipment is among the broadest in the industry, providing a virtually unprecedented array of options for your manufacturing operation. These products feature highly developed designs and technologies based on our 25 years of innovating solutions that increase precision, prevent defects, and improve throughput. Through our established worldwide presence, we provide highly responsive service and support for every product we offer.
Both OEMs and end users benefit from AE technologies for reducing cost and improving efficiency in crystalline and thin-film silicon photovoltaics, as well as advanced anti-reflective coating manufacturing. For more than 20 years, companies developing and manufacturing photovoltaics have chosen our products. Today, AE is a chief supplier to many photovoltaic manufacturing companies.
Worldwide Support NetworkAs photovoltaic manufacturing techniques become more complex, our products and
support services help maintain high production value over the long term.
• Establishedglobalinfrastructure—AEmaintains13globalservicecenters,withfocusedefforts in North America, Europe, and Asia, enabling easy support and repair virtually anywhere in the world.
• Immediateassistance—Contactusanytime,24hoursperday,365daysperyear,byphone, web, or e-mail. Receive live assistance by phone no matter what time of day or night.
• Expertapplicationssupport—AEapplicationsengineersareoncalltosupportyourprocessdevelopmentefforts.Theyoffervaluableinsightandexpertisebasedonlong-termexperiencewithahostofmanufacturingtechniquesandconditions.
• Quickmaintenanceandrepair—AErepairtechniciansarefullycross-trainedonourentire product portfolio and easily accessible at your local sales or service center.
BenefitsOptimized PV efficiency with improved layer performance
Improved production value: increased efficiency, yield, and throughput
Customer-focused equipment supplier with broad technologies and vast product offerings
Premier global infrastructure with fast, effective product service and expert applications support
FeaturesHighly developed product platforms based on 25 years of technological innovation
One of the most broad, complete power and gas portfolios in the industry
Longstanding global presence, with well established support infrastructure
13 global service centers, with focused efforts in North America, Europe, and Asia
AE®’s Vast, Diverse Product PortfolioPV Subsystem Category AE® Product Features
Power supplies (DC, RF, & low/mid-frequency)
Advanced power-delivery technology
Wide variety of frequencies, power levels, and functionality
Sophisticated arc management
Gas, vapor, and pressure control products
Extreme precision for enhanced process repeatability, throughput, and resource usage efficiency
Wide variety of flow ranges and functionality
Ion and plasma sources Seamless integration
High level of functionality
Products for manufacturing and abatement
Instrumentation Unique insight into process parameters for advanced development of breakthrough processes
Sophisticated AE® arc-management technology improves layer
performance and yield by dramatically reducing substrate damage.
Regulatory ComplianceAll AE subsystems meet the strict compliance directives and standards required
for semiconductor and FPD fabrication, which also suits the needs of PV
manufacturing systems.
Contact AE® Today!AE knows the marketplace for solar energy solutions and is a leader in advanced
power capital equipment. By offering high-value, reliable, leading-edge solar energy
technology and long-term support services, AE will provide you with high returns
on your solar energy investment.
To learn more, visit our website at www.advanced-energy.com/en/Solar_Cells.html
or contact us directly at 800.446.9167.
Advanced Energy Industries, Inc. • 1625 Sharp Point Drive • Fort Collins, Colorado 80525 U.S.A.T: 800.446.9167 or 970.221.4670 • F: 970.221.5583 • [email protected] • www.advanced-energy.comPlease see www.advanced-energy.com for worldwide contact information.
© Advanced Energy Industries, Inc. 2007
All rights reserved. Printed in U.S.A.
ENG-SolarA-220-03P 1.5M 8/07
For more information on AE's equipment and support solutions for photovoltaic manufacturing, visit: www.advanced-energy.com/en/Solar_Cells.html
To view AE’s complete product portfolio, visit: www.advanced-energy.com/en/products.html
Specifications are subject to change without notice.
Advanced Energy®, AE®, Aera®, Apex®, Cesar®, Crystal®, Litmas®, Navigator®, Ovation™, PI-980®, Pinnacle®, Pulsar™, Transformer™, VarioMatch™, Xstream®, and Z’Scan® are U.S. trademarks of Advanced Energy Industries, Inc.
