Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Status of Process Qualification CentersFlorence , Strasbourg, Vienna

Mirko Brianzi

Anna Macchiolo

Jean-Charles Fontaine

Jean-Marie Helleboid

Christophe Hoffmann

Thomas Bergauer

Margit Oberegger

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

System Configuration

Probe-card to contact the 9 test-structures

Switching matrix

in K7002 main-frame

PC or MAC to control the system through Labview software

Measuring Instruments

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Probe-card After finalisation of HPK and ST mask designs we have

agreed upon the positions of the probe-card 52 contacts

The same probe-card is compatible for the test-structures of both the suppliers for all the sensor-types

Contacts on the baby detector designed to align the probe-card with the probe-station chuck and the standard moon

Cap-ts

Sheet

GCD

Cap-AC

Baby

Cap-DC

Diode

Mos

Mos

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

From the probe-card to the switching matrix

Flat cable from the probe-card

Connection box between flat-cable and cables to the switching matrix

4 K7154 modules of the

switching matrix:

10 inputs each

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Measuring InstrumentsHV source : up to 1000 V (IV_baby)

V source:

20 V

All the instrument drivers are ready and included in the

common software

LCR meter + decoupling box

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

New measurement configuration

Change of the previous measurement configuration in order to:

Make it compatible for the different instrumentation present in the three laboratories

Improve the accuracy of some measurements

Reduce the needed electronic equipment

At the moment each lab is testing the new configuration. After

this phase it will be implemented in the common software

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Switching matrix

Slot 2 k7154

Switch System

K7002

Slot 5

K7153

Slot 1

K7154

Slot3

k7154

Slot 4

k7154

K7153: 5 input channels from the

measuring instruments New configuration:

Using a common Low for the HV and V sources we could remove a K7153 module from the Switching System, now available as spare

Common Low (HV+V source)

High HV source

High V source

4 outputs to the

K 7154 modules

In Florence we are now replacing our old multiplexers

K7158 (30 V limit on input voltage) with K7154 (1100 V

limit) the switching system is going to be exactly

the same in the 3 labs

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Common SoftwareSelection of the lab

Strasbourg is now implementing the

last changes in the common software

Visualisation of the full set of results of the 9 measurements on a standard moon

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Gate Controlled Diode

V gate (V)

New configuration:

Common LOW for HV source and V source

Florence: we had to swap HV and V source

because of worse resolution of the

A-meter of HV generator

V back = 10V

Surface generated

current

(A)

inversion depletion accumulation

CSEM M200

Standard moon

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Gate Controlled Diode(Strasbourg)

OLD= HV source and V source HIGH were

referred to the same potential

NEW= HV source and V source LOW are referred to

a common GRND

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

CV MOS

HPK M200 standard moon, similar behaviour for STM

M200

Changed the connection between High and Low of HV source and LCR meter through the switching matrix (same for CV on diode)

VfbVfb

(F)

V gate (V) LCR meter + decoupling box

HV source

LCR Low to 0V since all

the instrument GNDs are connected together

To back

To MOS metal

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Tests of the new configuration

(Strasbourg)

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

CV on CSEM MOS

Vgate (V) V gate (V)

f = 100 Hz f =100 Khz

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

R interstrip

Polarisation bias to the back

To the central

strip

To the first neighbouring

strips

Need high sensitivity of A-meter on HV

source

Measured on CAP-DC: 9 strips without bias resistor

Voltage applied across

the central strip and the neighbouring

ones

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

IV dielectric

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Still to do ...

• Implement the new configuration in the final

software and then test it.

• Install the probe-card and complete the connection with the switching system. Test the fully automatic procedure with the probe-card.

• Interface to the DB: a first draft of the output file and of the VI files to generate it was prepared in Vienna. The connection to the main acquisition software has to be implemented in Strasbourg.

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001

Logistic

• Florence: IB1, IB2, OB1, OB2 (no-longtime IV)

from QTC Perugia and Pisa

5% of the wafers = 693 standard moons

• Strasbourg: W3, W5A, W5b, W6a, W6b

from QTC Karlsruhe

271 standard moons

• Vienna: W1, W2, W4, W7A, W7b

from QTC Vienna

235 standard moons