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Bipolar transistor. § 3-1 Introduction. Bipolar Transistor. First bipolar transistor (BJT) was invented in 1948. The term bipolar came from the fact that both types of carriers, i.e., electron and hole play important roles in operation. - PowerPoint PPT Presentation
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23/4/19 Physics of Semiconductor Devices 1
理学院量子智能信息处理实验室
Bipolar transistor
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§3-1 Introduction
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Bipolar Transistor
First bipolar transistor (BJT) was invented in 1948
The term bipolar came from the fact that both types of carriers, i.e., electron and hole play important roles in operation
Field Effect Transistor (FET) is unipolar, in which only one type of carrier is important
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Bipolar Transistor
In VLSI era, BJTs starts to lose their show stage due to the emergence of MOSFETs, which possess advantage of simplicity in term of process and circuit design However, BJT’s refuse to step down because of their high current drive capability and superior analog performance (also useful in power applications) Current trend is to combine the best of MOSFETs and Bipolar devices, which is known as BiCMOS process BJT devices are also the preferred device for high speed (e.g. Emitter Couple Logic .ECL) and RF applications
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Bipolar Transistor
n+
p n
p+
n p
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理学院量子智能信息处理实验室Bipolar Transistor
The ”Planar Process” developed by Fairchild in the late 50s shaped the basic structure of the BJT, even up to the present day.
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Modern BJT
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Close enough that minority carriers interact (negligible recombination in base)
BJT basically consists of two neighbouring pn junctions back to back:
For apart enough that depletion regions don’t interact (no “punchthrough”)
Uniqueness of BJT: high current drivability per input capacitance fast excellent for analog and front-end communications applications.
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Bipolar operation
Operation depends on the bias condition
IB
IC
IE
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§3-2 Carrier distribution
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理学院量子智能信息处理实验室Current Flow
emitter current injected into the base
base current injected into the emitter
recombination in the base current region
reverse biased current across the BCJ
reverse biased current across the BCJ
electron current from the emitter
EBnI
BEpI
BERI
CBpI
CBnI
CnI
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Bipolar TransistorModes of
operation
VCB
SaturationForward active
CutoffInverted active
VEBPNP NPN
SaturationForward active
CutoffInverted active
VBC
VBE
activeinvertedsaturationcutoff
forwardreverseforwardreverse
forward
reverse
reverse
forward
E-B C-B Mode
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An idealized p-n-p transistor in thermal equilibrium, that is ,where all there leads are connected together or all are ground.
The impurity densities in the three doped regions, where the emitter is more heavily doped than the collector. However the base doping is less than the emitter doping, but greater than the collector doping.
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Transistor Action
ACTIVE MODE
In active mode, the emitter-base junction is forward biased and collector base-junction is reverse biased.
23/4/19 Physics of Semiconductor Devices 16
理学院量子智能信息处理实验室Current FlowForward bias Reverse bias
Electron FlowHole Flow
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Transistor Action
Saturation Mode
Both junction are in forward bias
Cutoff Mode
Both junctions are in reverse bias and all currents in the transistor are zero.
Inverse-active Mode
Junction between E and B is in forward bias and junction between B and C is in reverse bias.
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Current Gain
IE=IEp+IEn
IC=ICp+ICn
IB=IE-IC=IEn+(IEp-ICp)-ICn
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Current GainCommon base current
gain
Emitter efficiency
Base transport fact
Ep
Cp
EnEp
Ep
EnEp
Cp
E
Cp
I
I
II
I
II
I
I
I00
EnEp
Ep
E
Ep
II
I
I
I
Ep
CpT I
I
T 0
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Collector current
CB: current measured between these two terminals
O: refers to the state of the third terminal with respect to the second
CBOEC III 0
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Carrier Profile in Active Mode
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Carrier distribution in this region
To derive the current-voltage expression for an ideal transistor, we assume the following:
1. The device has uniform doping in each region.
2. The hole drift current in the base region as well as the collector saturation current is negligible.3. There is low-level injection.
4. There are no generation-combination currents in the depletion region.
5. There are no series resistance in the devices.
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Carrier Distribution in each RegionBase
regionSteady-state continuity equation
The general solution is
002
2
p
nnnp
pp
dx
pdD
pp LxLxnn eCeCpxp 21
Where is the diffusion length of holes.
ppp DL
where and are the diffusion constant and the life time of minority carriers, respectively.
pD p
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By the boundary conditions for the active mode:
the solution can expressed
When W/Lp<<1, the distribution equation can be simplified as
kTqVnn
EBepp 00
0Wpn
0Wpn
p
p
n
p
pkTqVnn
L
W
L
x
p
L
W
L
xW
epxp EB
sinh
sinh
1
sinh
sinh
1 00
W
xp
W
xepxp n
kTqVnn
EB 1010
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Carrier distribution
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Carrier Distribution in each RegionEmitter and collector region
The boundary condition in the neutral region and collector region are:
When nE0 and nC0 are the equilibrium electron concentrations in the emitter and collector, respectively. Substituting these boundary conditions into expressions similar to Eq.1 yields
kTqV
EEE
EBenxxn0
00
CBVq
CCCenxxn
E
E
EB L
xx
kTqV
EEEeennxn
100
C
C
L
xx
CCCennxn
00
Exx
Cxx
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Common base Active mode is BEJ forward biased while
CBJ reverse biased Saturation occurs when CBJ is forward biased When IE=0, the device is cutoff, IC is the reverse leakage current of the CBJ. Note that IC≠0 for VCB=0. The current is contributed by IE if the BEJ is forward biased.
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Common base configuration
Minority carrier distributions in the base region of a p-n-p transistor.
a) Active mode for VBC=0.
b) Saturation mode with both junctions forward biased.
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Common emitter
Saturation occurs when both EBJ and CBJ are forward biased Active mode is the most useful for linear applications Saturation and cut-off modes are most useful for switching applications
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Common emitter configuration
Common emitter current gain
00 CBCBC IIII
0
0
0
0
11
CB
BC
III
0
00 1 CB
CE
II
00 CEBC III
0
00 1
B
C
I
I
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§3-3 Current-voltage characteristics of ideal BJT
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Ideal BJT
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Ideal BJT simplifications:
1D Uniform doping distributions. Minority carrier G&R in intrinsic base is negligible. Emitter extrinsic base and collector also assumed “short” from minority carrier point of view. Low level injection. QNR thicknesses independent of VBE and VBC. Ignore sidewall effects. No parasitic resistances. Ignore substrate.
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Simplified 1D model of intrinsic device:
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Regimes of operation:
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Basic operation in forward regime:Two junctions back-to-back:
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VBE>0Injection of electrons from E to B
Injection of holes from B to E
VBC<0
Extraction of electrons from B to C
Extraction of holes from C to B
IB -IE>>IC
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Transistor effect: electrons injected from E to B, extracted by C
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In forward-active regime:
VBE controls IC (“transistor effect”)
IC independent of VBC (“isolation”)
Price to pay for control: IB
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Carrier profiles in TE and FAR:
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Dominant current paths in forward active regime:
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IC: electron injection from E to B and collection into C IB: hole injection from B to E
IE=-IC-IBKey dependencies (choose one):IC on VBE: , ,none,
other
IC on VBC: , ,
IB on VBE: , ,
IB on VBC: , ,
IC on IB: exponential, quadratic, none, other
none, other
none, other
none, other
kTqVBEe
kTqVBEe
kTqVBCe
kTqVBCe
BEV1
BEV1
BCV1
BCV1
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Forward-active regime (VBE>0,VBC<0)
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Boundary conditions:
Electron profile:
Electron current density:
0,exp0 0 BBBE
BB WnkT
qVnn
BBB W
xnxn 10
B
BB
BBeB W
nqD
dx
dnqDJ
0
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Collector current scales with area of base-emitter junction AE:
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Collector terminal current :
or
kT
qV
WN
DnqAAJI BE
BB
BiEEeBC exp
2
kT
qVII BE
SC exp
Collector saturation currentSI
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Base current: focus on hole injection and recombination in emitter (assume “short” or “transparent” and S= at surface)
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Boundary conditions:
Hole profile:
Hole current density:
00 ,exp EBEEEBE
EBEE pxWpkT
qVpxp
00 1 EE
BEEBEEE p
W
xxpxpxp
E
EBEEE
EEhE W
pxpqD
dx
dpqDJ 0
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Base current scales with area of base-emitter junction AE:
Base terminal current:
1exp1exp
2
kT
qVI
kT
qV
W
D
N
nqAAJI BE
F
SBE
E
E
E
iEEhEB
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Gummel plot:
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Key conclusions
BJT is minority-carrier type device: in npn BJT in forward active regime: Emitter “injects” electrons into Base, Collector “collects” electrons from Base.
IC controlled by VBE, but independent of VBC (transistor effect):
Base injects hole into emitter IB depends only on VBE
kT
qVII BE
SC exp
1exp
kT
qVII BE
F
SB
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Key questions:
How does the BJT operate in other regime?
How does a complete model for the ideal BJT look like?
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Forward-active regime (VBE>0, VBC<0)
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1exp
kT
qVII BE
F
SB
1expexp
kT
qVI
kT
qVIIII BE
F
SBESBCE
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Current gain
BEB
EBE
E
E
E
i
B
B
B
i
B
CF WDN
WDN
W
D
N
n
W
D
N
n
I
I
2
2
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To maximize :F
NE>>NB
WE>>WB (for manufacturing reasons, WE≈WB) want npn rather than pnp, because this way DB>DE
hard to control if is high enough (>50), circuit techniques effectively compensate for this.
FF
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Equivalent circuit model
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Energy band diagram
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Summery of minority carrier profiles (not to scale)
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Reverse regime (VBE<0,VBC>0)IE: electron injection from C to B, collection into E
IB: hole injection from B to C, recombination in C
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Minority carrier profiles (not to scale):
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Current equations (just like FAR, but role of collector and emitter reversed):
kT
qVII BC
SE exp
1exp
kT
qVII BC
R
SB
1expexp
kT
qVI
kT
qVIIII BC
R
SBCSBEC
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Equivalent-circuit model representation:
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Prefactor in IE expression is IS: emitter current scales with AE.
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But, IB scales roughly as AC:
downward component scales as AC
upward component scales as AC-AE ≈AC
Hence, <<
51.0 R F
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Energy band diagram:
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Cut-off regime (VBE<0,VBC>0)
IE: hole generation in E, extraction into B.
IC: hole generation in C, extraction into B
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Minority carrier profiles (not to scale):
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Current equations:
F
SE
II
R
S
F
SB
III
R
SC
II
These are tiny leakage currents (~10-
12A)
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Equivalent circuit model representation:
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Energy band diagram
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Saturation regime (VBE>0,VBC>0)IC,IE: balance of electron injection from E/C into B
IB: hole injection into E/C, recombination in E/C, respectively
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Minority carrier profiles (not to scale):
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Current equations: superposition of forward active + reverse:
1expexpexp
kT
qVI
kT
qV
kT
qVII BC
R
SBCBESC
1exp1exp
kT
qVI
kT
qVII BC
R
SBE
F
SB
kT
qV
kT
qVI
kT
qVII BCBE
SBE
F
SE expexp1exp
IC and IE can have either sign, depending on relative magnitude of VBE and VBC and F R
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Equivalent circuit model representation (Non-linear Hybrid- Model):
Complete model has only three parameters: IS, and .
F R
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Energy band diagram:
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In saturation, collector and base flooded with excess minority carriers take lots of time to get transistor out of saturation.
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Key conclusions
In FAR, current gain maximized if NE>>NB.
F
hard to control precisely: if big enough (>50), circuit techniques can compensate for variations in .
F
F
BJT design optimized for operation in forward-active regime operation in inverse is poor: << .
RF
In saturation, BJT flooded with minority carrier takes time to get BJT out of saturation.
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Hybrid- model: equivalent circuit description of BJT in all regimes:
Only three parameters needed to describe behavior of BJT in four regimes: IS, and .F R
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Key questions
How do the output characteristics of the ideal BJT look like?
How do the charge-voltage characteristics of the ideal BJT look like?
What is the topology of the small-signal equivalent circuit model of the ideal BJT in the FAR? What are the key dependencies of its elements?
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Ideal BJT current equations (superposition of forward active + reverse)
1expexpexp
kT
qVI
kT
qV
kT
qVII BC
R
SBCBESC
1exp1exp
kT
qVI
kT
qVII BC
R
SBE
F
SB
kT
qV
kT
qVI
kT
qVII BCBE
SBE
F
SE expexp1exp
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Equivalent circuit model representation:
Complete model has only three parameters: IS, and .
F R
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Common-emitter output I-V characteristics
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I-V for Active Mode
kTqVnp
xx
nPEp
EBeW
pqAD
d
dpqDAI 0
0
kTqVnp
Wx
npCp
EBeW
pqAD
dx
dpqDAI 0
10
kTqVEE
xx
EEEn
EB
E
eW
nqAD
dx
dnqDAI
C
CC
xx
CCCn L
nqAD
dx
dnqDAI
C
0
IE=IEp+IEn
IC=ICp+ICn
W/Lp<<1
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1211 1 aeaI kTqVE
EB
0
0011
E
EEnP
L
nD
W
pDqAa
W
pqADa np 012
2221 1 aeaI kTqVC
EB
W
pqADa np 021
C
CCnp
L
nD
W
pDqAa 00
22
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E
B
B
E
E
B
x
x
D
D
N
NB
1
1
Emitter efficiency
(xB<<LB), (xE<<LE)
How to improve emitter efficiencyWe should decrease the ratio of NB/NE
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General I-V for various modes
Base of EBERS-MOLL Model
11 1211 kTqVkTqVE
CBEB eaeaI
11 2221 kTqVkTqVC
CBEB eaeaI
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I-V for active mode
1211 1 aeaI kTqVE
EB
0
0011
E
EEnP
L
nD
W
pDqAa
W
pqADa np 012
2221 1 aeaI kTqVC
EB
W
pqADa np 021
C
CCnp
L
nD
W
pDqAa 00
22
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Base of EBERS-MOLL Model
RRFE III RFFC III
10 kTqVFF
EBeII
B
B
EE
EiF WN
D
NL
DqAnI 2
0
10 kTqVRR
CBeII
CC
C
B
BiR NL
D
WN
DqAnI 2
0
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Base of EBERS-MOLL Model
RRFE III RFFC III
RRFFCEB IIIII 11
B
BiRRFFS WN
DqAnIII
2
00
F
FF
1
R
RR
1
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§3-4 Charge-voltage characteristics of ideal BJT
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In BJT, two types of stored charge:
depletion layer charge
minority carrier charge
In forward-active regime:
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Depletion layer charge
In B-E and B-C SCR’s respectively
BE
BEbiEBEEjE NN
VNqNAQ
2
CB
BCbiCCBCjC NN
VNqNAQ
2
are respective built-in potentials.
biE biC
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Since NE>>NB>>NC
Depletion capacitance:
BEbiEBEjE VqNAQ 2
BCbiCCCjC VqNAQ 2
biE
BE
je
BEbiE
BE
BE
jEje
V
C
V
qNA
V
QC
12
0
biC
BC
jc
BCbiC
CC
BC
jCjc
V
C
V
qNA
V
QC
12
0
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Minority carrier charge
Key result from pn diode: in “short” or “transparent” QNR:
Stored charge=minority carrier transit time × injected minority carrier current
Diffusion capacitance.
Excess minority carrier in QNR’s excess majority carriers to keep quasi-neutrality
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For emitter in FAR:
with hole transit time
BtEE IQ
E
EtE D
W
2
2
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For base in FAR:
with electron transit time:
CtBB IQ
B
BtB D
W
2
2
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Comments:
Units of QB and QE are C.
QE and QB scale with AE.
Total minority carrier in FAR:
CFCtBF
tECtBBtBBEF IIIIQQQ
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F intrinsic delay [s]
tBF
tEF
is overall time constant for minority carrier storage in BJT in FAR:
F
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Note: emitter contribution to is because IB is times smaller than IC.
FF
FtE
If VBE changes, QE and QB change capacitive effect:
kT
qI
dV
dQC C
FBE
FF
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Location of this capacitance? Think of which terminals supply stored change (minority and majority carriers):
For QE:
minority carriers (holes) injected from base
majority carriers (electrons) come from emitter contactFor QB:
minority carriers (electrons) injected from emitter majority carriers (holes) come from base contact
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Equivalent-circuit model:
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Similar picture in reverse regime: charge storage in base and collector
a bit complicated because it accounts for charge storage in intrinsic and extrinsic base and collector regions.
RERR IQ
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Diffusion capacitance:
Located between base and collector terminals.
kT
qI
dV
dQC E
RBC
RR
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By superposition, complete equivalent circuit model valid in all four regimes:
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§3-5 Small-signal behavior of ideal BJT
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In analog (and digital) application, interest in behavior of BJT to small-signal applied on top biasSmall signal equivalent circuit
model.
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Small-signal equivalent circuit model in FARMust linearize hybrid- model in FAR:
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-Non-linear voltage-controlled current source linear voltage-controlled current source.
-Diode linearized to resistor.
-Charge storage elements linearized to capacitance.
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Linearized voltage-controlled current sourceApply small signal vbe on top of bias
VBE.
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kT
qvI
kT
qv
kT
qVI
kT
vVqIiI be
CbeBE
SbeBE
SCC 11expexp
Small signal collector current:
Define transconductance:
gm depends only on absolute value of IC and T (unlike MOSFET, where gm depends on device geometry)
Collector current:
beC
C vkT
qIi
kT
qIg C
m
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Linearized diode
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kT
qv
kT
qVI
kT
vVqIiI beBE
F
SbeBESbB 1expexp
Base current:
Small-signal base current:
beB
b vkT
qIi
Define conductance:
Then, in general,
F
m
F
CB gI
kT
q
kT
qIg
mgg
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capacitors
QjE Cje
QjC Cjc
QF C
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Two components in C :
Note:
mF gC
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Small-signal equivalent circuit model for ideal BJR in FAR:
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Key conclusions
Emitter contribution to is times smaller than because IB is times smaller than IC
F F
FtE
tBF
tEF
In BJT, two types of stored charge: depletion layer charge and minority charge.
Depletion layer charge accounted through depletion capacitances.
Minority carrier charge accounted through time constant (intrinsic delay):F
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Non-linear hybrid- model for ideal BJT including charge storage elements:
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Small-signal equivalent circuit model of ideal BJT in FAR:
with:
kT
qIg C
m F
mB g
kT
qIg
mF gC
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§3-6 Frequency Characteristics
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Common-emitter short-circuit current-gain cut-off frequency, fT
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fT: high-frequency figure of merit for transistors
Short-circuit means from the small-signal point of view.
BJT is biased in FAR.
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Focus on small-signal current gain:
Definition of fT: frequency at which |h21|=1.
For low frequency, h21 , for high frequency h21 rolls off due to capacitors.
F
021
cevb
c
i
ih
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Small-signal equivalent circuit model:
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Then:
Magnitude of h21:
bejcbemc vCjvgi
bejcjeb vCCCjgi
jcje
jcm
CCCjg
Cjgh
21
222
222
21
jcje
jcm
CCCg
Cgh
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222
222
21
jcje
jcm
CCCg
Cgh
Bode plot of |h21|:
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Three regimes in |h21|:
jcje
jc
CCC
Ch
21
jcje
m
CCC
gh
21
Fm
g
gh
21
intermediate frequency,
low frequency,
c
high frequency,
c
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Angular frequencies that separate three regimes:
Angular frequency at which |h21|=1:
jcje CCC
g
jc
mc C
g
jcje
mT CCC
g
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In terms of frequency:
Note:
jcje
mT CCC
gf
2
F
T
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Physical meaning of fT
fT has units of time. Define delay time:
21
Four delay components in .
d
m
jc
m
je
F
tEtB
m
jc
m
je
mTd g
C
g
C
g
C
g
C
g
C
f
2
1
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Consider response of BJT to a step-input base current:
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bBB iII
beBEBE vVV
bFCcCC iIiII
At 0t
As t
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How much time does it takes for ic to reach its final value?
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Charge must be delivered to four regions in BJT: Quasi-neutral emitter
Quasi-neutral base
Emitter-base depletion region
Base-collector depletion region
btEe iq
ctBb iq
cm
jebejeje i
g
CvCq
cm
jcbejcbcjcjc i
g
CvCvCq
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Charge delivered at constant rate to base. Time that it takes for all charge to be delivered:
fg
C
g
C
i
qqqq
m
jc
m
jetBFtE
b
jcjebe
2
1
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How much time does it take for ic to build up to IC + ib ?
: delay time before ic increase to
bFC iI
f2
1
: delay time before ic increase to bC iI T
d f
2
1
Since ,
bFc ii
Tm
jc
m
jetB
F
tE
Fd fg
C
g
C
2
1
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With sinusoidal input:
fraction of that goes into capacitance
cbe ivbif
bc ii At fT:
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Key dependencies of fT in ideal BJTfT dependence on IC:
Rewrite fT:
C
jcje
F
Fjcje
mT
I
CC
q
kTCCC
gf
1
1
2
1
2
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Two limits:
Small IC: limited by depletion capacitances
Large IC: limited by intrinsic delay (dominated by )
tB
FTf 2
1
jcje
CT CC
I
kT
qf
2
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Alternative view of IC dependence:
Tm
jc
m
jetB
F
tEd fg
C
g
C
2
1
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Standard experimental technique to extract and :jcje CC
F
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fT dependence on VBC:
[but only in low IC regime of fT]
(B-C junction is more reverse biased)
CBV Tjc fC
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Key conclusions fT: high frequency figure of merit for
transistors: frequency at which |h21|=1.
fT of ideal BJT:
jcje
mT CCC
gf
2
Delay time, :time it takes for step increase in iB to yield an identical step increase in iC.
Td f
2
1
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Key questions
How can the frequency response of a BJT be engineered?
Why are the output characteristics of a BJT in FAR not perfectly flat?
What is the maximum voltage that the collector of a BJT can sustain in FAR? What are the key design issues for the break-down voltage?
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Key dependencies of fT in ideal BJT (cont.)fT dependence on device
layout: For low IC: fT dominated by Cje, Cjc
If AE or AC (keep IC constant) Tf
C
jeE
m
je
I
CA
g
C 0
C
jcC
m
jc
I
CA
g
C 0
For high IC: fT dominated by intrinsic delay ;fT independent of AE or AC
F
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Device design strategies for improving fT
Four delay terms in fT:
Strategies to reduce each delay component:
building steep doping profile in emitter.
Emitter charging time, , minimized by F
tE
small contribution to , not much payoff.
F
tE
d
having a shallow emitter ( ~ ),
tE 2EW
enhancing ,
F
m
jc
m
jetB
F
tE
Td g
C
g
C
f
2
1
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introducing drift field in base (through impurity gradient or SiGe composition gradient).
reducing WB
( ~ ),tB 2
BW
Base transit time, ,minimized by
tB
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Example 1 [Kasper 1993]
Significant device engineering towards minimizing .
tB
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Example 2 [Yamazaki, IEDM 1990, p. 309]:
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Example 3 [Crabbe, IEDM 1990, p. 17]:
Collector current dependence of fT at 298K and 85K for Si and SiGe devices. In both cases, the peak fT increase at lower temperature as well as the associated collector current.
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E-B SCR charging time, Cje/gm:
Minimized by:
tailoring doping profiles at E-B junction
NB
C
je
C
jeE
m
je
J
C
I
CA
g
C 00
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B-C SCR charging time, Cjc/gm:
Minimized by:
C
jc
E
C
C
jcC
m
jc
J
C
A
A
I
CA
g
C 00
NC
tailoring doping profiles at B-C junction. tightening layout of transistor: 1
E
C
A
A
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2/1])(8
[eTbc
Tm LfrC
ff
)(8 22
eTbc
Tpm LfrC
ffG
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§3-7 Non-ideal effects in BJT
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Early effect: impact of VBC on WB
Reverse early effect: impact of VBE on WB
IB unchanged
, CBBCBC IWxV
smaller IC than ideal , BBEBE WxV
IB unchanged
F
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Early effect: impact of VBC on WB
BCC VfI
Note: 0BC
B
dV
dW
VBC more negative BCCBCB VIVW
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To capture first-order impact, linearize WB (VBC):
VA is Early voltage:
A
BCBCBBCB V
VVWVW 10
0
0
jc
BBA C
WqNV
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Impact on IC:
kT
qV
VW
D
N
nqAVI BE
BCB
B
B
iEBCC exp
2
kT
qV
V
VVW
D
N
nqA BE
A
BCBCB
B
B
iE exp
10
2
A
BC
BCC
V
VVI
1
0
A
BCBCC V
VVI 10
since typically .BCA VV
Notice: .Then
0BCV CBC IV
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Also, since IB unchanged:
A
BCBCF
A
BC
BCFBCF V
VV
V
VV
V 101
0
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Manifestation of Early effect in output characteristics:
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Main consequence of Early effect: finite slope in output characteristics in FAR: out put conductance.
With go given by:
A
C
V
Ig 0
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Base-width modulationVBE and VBC affect xBC , respectively ).,( BCBEB VVfW
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Kirk effect
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s
CqN
dx
d
)( BCbi VVEdx
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基区纵向扩展时的势垒区
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基区有横向扩展时少子的运动情况
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High Injection Effect(Webster Effect)
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High Injection Effect
As VBE increases, the injected minority carrier concentration may approach, or even become large than, the majority carrier concentration.
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High Injection Effect
Reduction in emitter injection efficiency, since JPE increases
Collector current will become an exponential function of VBE in terms of qVBE/2kT
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dx
dnqDnEqJ nnn
dx
dPqDPEqJ ppp
dx
dPDPE pp
dx
dP
Pq
kTE
1
)()()( xnxNxP bB
)11
()(1
dx
dn
nNdx
dN
NnN
N
q
kTnN
dx
d
nNq
kTE b
bB
B
BbB
BbB
bB
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High Collector Current Effect
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High collector current effects
Then, as IC approaches:
satCECK NqAI
As IC↑, electron velocity in collector↑.
satBut,there is a limit:
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The electrostatics of the collector are profoundly modifiedtransistor performance degrades:
To first order:
CKCpkC III 2
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Key design issue: NC
F
Main origin: formation of current-induced base inside collector SCR effective quasi-neutral base width new delay
component
F Tpkf
TpkCKC fIN
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Current Crowding Effect
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Current Crowding
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Current Crowding
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Breakdown Effect
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Avalanche breakdownSudden rise in IC for large reverse VCB.Key issue: breakdown voltage depends on terminal configuration:
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Experimental observation:
BVCB0 < BVCB0
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Common-base configuration: breakdown as in isolated p-n junction
Breakdown when M
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Common-emitter configuration: BE and BC junctions interact in a positive feedback loop
Breakdown occurs at finite M and enhanced by high .
F
With IB=0 (or fixed), holes generated in B-C junction must be injected into E B-E goes into forward bias . CI
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Key dependencise: CBOCEOC BVBVN ,
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more than necessary!
CEOF BV but BVCBO unchanged don’t wantF
[Yamaguchi 1993]
Collector-to-emitter breakdown voltage dependent on current gain
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理学院量子智能信息处理实验室Breakdown VoltageIn the extreme, the entire neutral region may be
totally depletedBand diagram illustrating punch-through
EB barrier lowered by VCE
When punch-through happens, there is no flat-band region in base( no quasi-neutral)
potential barrier seen by hole before punch-through
C
BCB
S
Bpt N
NNNqWV
)(
2
2
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Avalanche Breakdown
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§3-8 Switching Transistor
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§3-9 Design of BJT
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Junction-isolated BJT
First integrated BJT
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Poly-Si emitter BJT
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Problem of metal-contacted emitter: emitter thickness scales badly.
FBE IW
Poly-Si extension effectively increases emitter thickness:
Fpreserved when WE scales down.
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Single-poly self-aligned BJT
Unique feature:- extrinsic base self-aligned to intrinsic device Bext
E
C RA
A,
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Double-poly self-aligned BJT
Unique feature:- base contacts made on poly Si over isolation , smaller footprint
E
C
A
A
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Selectively-implanted collector (SIC) BJT
Unique feature:- intrinsic collector doping level raised through self-aligned implant TC fJ ,max
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Trench-isolated BJT
Unique feature:- deep-trench isolation SA
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SOI-BJT
Unique feature:- silicon-on-insulator substrate , smaller footprint
SC
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Epitaxial SiGe HBT
Unique features:- epitaxial base: enhanced thickness and doping control BTBB RfNW ,- Ge in base: heterojunction effect, drift field in base (if gradient in Ge composition) ABTS VRfI ,,,
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Bipolar issues in CMOS
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Latch up: interaction of two hidden BJT’s inside a CMOS pair.
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In principle, no problem because in both BJTs, VBE=0.
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But there are also two parasitic resistors:
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More complete equivalent circuit model:
POSITIVE FEEDBACK LOOP can cause device destruction.
Suppose for some reason, current flows through RX pnp goes into FAR IC (pnp) ohmic drop in RW npn goes into FAR IC (npn) more ohmic drop in RX
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Latch-up started by: Minority carrier injection into substrate by transient forward bias on pn junctions (typically in input or output circuits)
photogeneration by ionizing radiation impact ionization by hot carriers
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Elimination of latch up:
Then do: use heavily doped substrate (need lower doping epi layer on top for devices) sufficient transistor spacing guard rings at sensitive locations
reduce RX and RW
reduce andnpn pnp
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An advanced twin-well process for VLSI CMOS applications.The high-conductivity substrate reduces susceptibilty to
latch-up;the separately doped well regions provide precise control of MOSFET
characteristics.Adapted from R. S. Muller and T. L. Kamins.Device Electronics for integrated Circuits, 2nd ed, Wiley. 1986. p.
463.
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the higher the trigger current, the higher the immunity to latch-up
larger n+ -p+ spacing better immunity
thinner epi on top of n+ -substrate better immunity
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Guard ring: reverse-biased pn junction that collects injected holes.
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Other bipolar effects in MOSFETs: Can’t implement floating pn diodes in CMOS process Breakdown and snap-back (bipolar-induced breakdown) Floating-body effects in SOI MOSFETs
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Key conclusions
Bipolar effects pervasive in any device with multiple n and p regions.
CMOS latch-up interaction of parasitic npn and pnp BJTs; can lead to device destruction.
Maximum current: satCECpk NqAI
At high collector current, velocity saturation of electrons in collector performance degrades:
F Tf,
Megatrends of BJT development:footprint , vertical dimensions , JC , , ,BV
. f