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MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS)
Module-I 14
Lectures
Overview of MEMS and Microsystems. (Chapter 1 of Text Book
1)
Micromachinin Techni!"es# Si$icon as materia$ for
micromachinin%
&hoto$ithoraphy%thin '$m deposition% dopin% wet and dry
etchin% s"rface and "$k micromachinin%
afer
ondin% packain. (Chapter * and Section +., of Text Book 1%
Chapter , of Text
Book ,)
Module II 10
lectures
Microsystem Mode$in and -esin# Mechanics of deforma$e odies%
Enery
method%
Estimation of stiness and dampin for dierent micro/str"ct"res%
Mode$in of
e$ectromechanica$ systems% &"$$/in vo$tae. (Section 0.1 to
0.* and .,., of Text
Book 1%
Section *.0 of Text Book ,)
Module III 15
Lectures
MEMS 2pp$ications# Mechanica$ sensors and act"ators#
&ie3oresistive press"re
sensors%
MEMS capacitive acce$erometer% 4yroscopes% &ie3oe$ectric
act"ators. (Section +.* of
Text Book 1 and Section 5.* and 5.11 of Text Book ,)
Optica$# Micro/$ens% Micro/mirror% Optica$ switch (Section 6.5
to 6.6 of Text Book ,)
7adio fre!"ency MEMS# 8nd"ctor% 9aractor% :i$ter% 7esonator.
(Section ;.* to ;.6 of
TextBook ,)
Micro.1 to 1>.+ of Text Book ,)
Text oo!s"
1# $#%# A&'&tsures %#*# +,&o S#
$o.'l'!r,s&'& %#N# 't '&d +#%#
Atre" M,cro
'&d S/'rt Sste/s ,le I&d,' Ne 2el, 3010#
3# N## M''l,!" MEMS T't' Mc$r'-H,ll Ne 2el, 300#
Re6ere&ce oo!"
1# T# Hsu" MEMS '&d M,crosste/s" 2es,7& '&d
M'&u6'cture T't' Mc$r'-H,ll Ne
2el, 3003#
IRELESS SENSOR NETOR%
8&,t I 9Hrs
Sensor ?etwork Concept# 8ntrod"ction% ?etworked wire$ess sensor
devices%
2dvantaes of
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Sensor networks% 2pp$ications% @ey desin cha$$enes.
?etwork dep$oyment# Str"ct"red vers"s randomi3ed dep$oyment%
?etwork topo$oy%
Connectivity% Connectivity "sin power contro$% Coverae metrics%
Moi$e
dep$oyment.
8&,t II 9Hrs=oca$i3ation and Trackin# 8ss"es and approaches%
&ro$em form"$ations# Sensin
mode$%
co$$aorative $oca$i3ation. Coarse/rained and :ine/rained node
$oca$i3ation.
Trackin
m"$tip$e oAects# State space decomposition.
Synchroni3ation# 8ss"es and Traditiona$ approaches% :ine/rained
c$ock
synchroni3ation%
and Coarse/rained data synchroni3ation.
8&,t III
14Hrs
ire$ess Comm"nications# =ink !"a$ity% shadowin and fadin
eects
Medi"m/access and s$eep sched"$in# Traditiona$ M2C protoco$s%
Enery eciency in
M2C protoco$s% 2synchrono"s s$eep techni!"es% S$eep/sched"$ed
techni!"es% and
Contention/free protoco$s.
7o"tin# Metric/ased approaches% M"$ti/path ro"tin%
=ifetime/maximi3in enery/
aware
ro"tin techni!"es% 4eoraphic ro"tin.
Sensor network -ataases# -ata/centric ro"tin% -ata/atherin with
compression%
"eryin% -ata/centric storae and retrieva$% the dataase
perspective on sensor
networks.Sec"rity# &rivacy iss"es% 2ttacks and
co"ntermeas"res.
Text oo!s"
1# ,reless Se&sor Netor!s" A& I&6or/'t,o&
rocess,&7 A..ro'c- :
;e&7
