2 ～ 3ｍｍ Total 10ｍｍ 2.5 ～ 3ｍｍ Total 10ｍｍ 2 ～ 3ｍｍ Total 10ｍｍ Conductive Nanoprobe for Probers Conductive Nanoprobe for Probers PtIr Coating Tungsten Probes Type: P-100W/PtIr Platiniridium Probes Type: P-100PtIr (P) Tungsten Probes Type: P-100WP SEM Image SEM Image SEM Image Shape: Cone Wire Rod: Polycrystalline tungsten 0.25mm diameter Curavant Radius of a Tip: <35nm PtIr (80:20) Coating Thickness: 3nm Shape: Cone Wire Rod: Polycrystalline Platiniridium 0.5mm diameter Curavant Radius of a Tip: <20nm Grind Process: Electro-polishing after mechanical grind Shape: Cone Wire Rod: Polycrystalline tungsten 0.25mm diameter Curavant Radius of a Tip: <35nm (Low Contact Resistance) (Low Contact Resistance) (Low Contact Resistance) Small Tip Angle Produce Better Tip Shapes for Multi-probe Applications Capable of Soft Contact with Samples *1 *1: Applies only to Nickel probes *2 , PtIr-coated tungsten probes, and Platiniridium probes and not to Tungsten probes. *2: Please refer to “Ni Probes Type: P-100Ni (S)”, in “High Performance STM Probes for Ni Probes” leaflet. SEM image of Tungsten probe tip 20130516 Probe tips are shaped with a small tip angle so that probes can be placed close together at acute angles without touching one another. Without an intervening surface oxide film, Nickel probes, PtIr-coated tungsten probes and Platiniridium probes make it possible to quickly achieve conductivity on contact, minimizing damage to samples and probes. Micro and nano-scale multi-probing techniques are used in semiconductor device R&D and production to probe sample surfaces, as when measuring the surface electrical characteristics for failure analysis. With the in- creasing intricacy of device structures in recent years, higher demands are placed on probe specifications such as increased sharpness and control of surface oxide films. Demand for such probes is also increasing in vari- ous other fields, including nanobiology. To meet these needs, UNISOKU has developed contact inspection nanoprobes for a variety of applications. Tel +81-72-858-6456 Fax +81-72-859-5655 e-mail [email protected]URL http://www.unisoku.com UNISOKU Co., Ltd. 2-4-3 Kasugano, Hirakata, Osaka 573-0131 Japan
Conductive Nanoprobe for Probers - Nanoscore GmbHnanoscore.de/wp-content/uploads/2015/09/conductive_Nano... · 2015. 9. 8. · Conductive Nanoprobe for Probers PtIr Coating Tungsten
