3T]%QW b CP ]

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JaSV Sb KfdgUfgdW)HdabWdf We

Ggf W

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9 d X ai eW ead e fZW eW ead fa WSegdW fZW See aX S d fS WfZW Sgfa af hW W Y W Ua fda ekefW (

-dV YW WdSf a v9>K e S Zaf X fkbW S d X ai eW ead ge Y e UaUda SUZ Y fWUZ a aYk& iZ UZ Ua fd TgfWe fa XgW WXX U W Uk i fZfe Z YZ SUUgdSUk S V g f eW e Y Xg Uf a (9UUgdSUk aX bg eSf a X ai eW e Y e bdahWV Tk VWfWUf YTSU iSdV X ai S V Ua bW eSf Y bg eSf a Wddad(@ YZ bdWU e a V Y fS agfbgf "K FL e SVabfWV(A fWYdSfWV Zg V fk eW ead dWS lWe g f Xg Uf a S fk("LZW Zg V fk Xad Sf a US TW geWV fa bdahW S XgW WUa a k(

K FL K Y W VYW F TT W LdS e ee a

C7 D _d[P C7 D _d[P bT_S XTO 8]P P Nd _d[P

> ai agfbgf K FL K FL >dWcgW Uk

LW b( agfbgf K FL K FL LZWd efad

@g V( agfbgf K FL

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jfWd S N Wi

3T]%QW b CP ]

Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We

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3T]%QW b CP ]

Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We

,*** ,**/ ,*+* ,*+/ ,*,* QWSd

> def Uda fkbW 9>K BSbSA fWYdSfW S d fW bWdSfgdW eW ead

) _ 9P h38C

O 9P h38C +]O 9P h38C

+]O 9P h38C W_T% P T R

A fWYdSfW Zg V fk eW ead

K FL K Y W VYW F TT W LdS e ee a

JaSV Sb

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A bdahW W f aX efSf a Sdk UZSdSUfWd ef U SUUgdSUkKW WUfST W V Y fS A)> "K FL

A bdahW W f aX bg eSf a VWfWUf a SUUgdSUk"VWfWUf a aX S dWhWdeW X ai

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output

flowrate[g/s]

2ndGen.3rdGen.

-40-200

20406080

0 1 2 3 4

Error[%]

Amp.ratio

-40-200

20406080

0 1 2 3 4

Error[%

]

Amp.ratio

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T _PR]L_PO S XTO P ]"TSU e VW aX U dUg f TaSdV

KW e Y W W W f"a UZ b fW b( eW ead

dUg f TaSdV

KfdgUfgdWʻ

> ai UZSdSUfWd ef Ueʻ

4LNVbL]O QW b T OP_PN_LMWP Md +]O 9P

9:

LZdWW b Ua WUfad

K FL agfbgfʻ

)%WT P _]L XT T Q[W ]LW TR LW

Hg eSf a Wddadʻ10g/s25Hz20g/s50Hz30g/s75Hz40g/s100Hz

ddad~"Ie)IShW + t+**

IShW ShWdSYW aX bgf X aiIS b bgf X ai S b fgVW

Ie ShWdSYW aX WSegdWV X ai

9 b( dSf a~IS b)IShW

Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We

, V W ( v9>K -dV W ( v9>K

BPO NP P]] ]