3T]%QW b CP ]
Ggf W)>WSfgdWe D W gb
-dV W WdSf a v9>K
JaSV Sb KfdgUfgdW)HdabWdf We
Ggf W
>WSfgdWe
9 d X ai eW ead e fZW eW ead fa WSegdW fZW See aX S d fS WfZW Sgfa af hW W Y W Ua fda ekefW (
-dV YW WdSf a v9>K e S Zaf X fkbW S d X ai eW ead ge Y e UaUda SUZ Y fWUZ a aYk& iZ UZ Ua fd TgfWe fa XgW WXX U W Uk i fZfe Z YZ SUUgdSUk S V g f eW e Y Xg Uf a (9UUgdSUk aX bg eSf a X ai eW e Y e bdahWV Tk VWfWUf YTSU iSdV X ai S V Ua bW eSf Y bg eSf a Wddad(@ YZ bdWU e a V Y fS agfbgf "K FL e SVabfWV(A fWYdSfWV Zg V fk eW ead dWS lWe g f Xg Uf a S fk("LZW Zg V fk Xad Sf a US TW geWV fa bdahW S XgW WUa a k(
K FL K Y W VYW F TT W LdS e ee a
C7 D _d[P C7 D _d[P bT_S XTO 8]P P Nd _d[P
> ai agfbgf K FL K FL >dWcgW Uk
LW b( agfbgf K FL K FL LZWd efad
@g V( agfbgf K FL
Fa( aX ZSd Wee LZdWW "HaiWd& F<& Ggfbgf LZdWW "HaiWd& F<& Ggfbgf >agd "HaiWd& F<& Ggfbgf& LZWd efad
jfWd S N Wi
3T]%QW b CP ]
Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We
@g V fkKW e Yi Vai
LZWd efad
D W gb
3T]%QW b CP ]
Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We
,*** ,**/ ,*+* ,*+/ ,*,* QWSd
> def Uda fkbW 9>K BSbSA fWYdSfW S d fW bWdSfgdW eW ead
) _ 9P h38C
O 9P h38C +]O 9P h38C
+]O 9P h38C W_T% P T R
A fWYdSfW Zg V fk eW ead
K FL K Y W VYW F TT W LdS e ee a
JaSV Sb
A bdahW W f aX daTgef Wee "Vgef& iSfWd@ YZ bdWU e a A)> "dSf a ha fSYW& XdWcgW UkA bdahW W f aX bg eSf a VWfWUf a SUUgdSUk
"Ua bW eSf a aX S dWhWdeW X ai
A bdahW W f aX efSf a Sdk UZSdSUfWd ef U SUUgdSUkKW WUfST W V Y fS A)> "K FL
A bdahW W f aX bg eSf a VWfWUf a SUUgdSUk"VWfWUf a aX S dWhWdeW X ai
���� � ��� ��� ���
output
flowrate[g/s]
2ndGen.3rdGen.
-40-200
20406080
0 1 2 3 4
Error[%]
Amp.ratio
-40-200
20406080
0 1 2 3 4
Error[%
]
Amp.ratio
3T]%QW b CP ]KfdgUfgdW)HdabWdf We
[T LXP TR LW
9 F< Ydag V Y
: K FL > ai fW b( Zg V( V SY(
NdWX /N baiWd egbb k
T _PR]L_PO S XTO P ]"TSU e VW aX U dUg f TaSdV
KW e Y W W W f"a UZ b fW b( eW ead
dUg f TaSdV
KfdgUfgdWʻ
> ai UZSdSUfWd ef Ueʻ
4LNVbL]O QW b T OP_PN_LMWP Md +]O 9P
9:
LZdWW b Ua WUfad
K FL agfbgfʻ
)%WT P _]L XT T Q[W ]LW TR LW
Hg eSf a Wddadʻ10g/s25Hz20g/s50Hz30g/s75Hz40g/s100Hz
ddad~"Ie)IShW + t+**
IShW ShWdSYW aX bgf X aiIS b bgf X ai S b fgVW
Ie ShWdSYW aX WSegdWV X ai
9 b( dSf a~IS b)IShW
Ggf W)>WSfgdWe D W gb JaSV Sb KfdgUfgdW)HdabWdf We
, V W ( v9>K -dV W ( v9>K
BPO NP P]] ]