Enhanced Current Gain in SiC Power BJTs using a novel Surface Accumulation Layer Transistor (SALTran) Concept

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    Enhanced Current Gain in SiC Power BJTs using a novel

    Surface Accumulation Layer Transistor (SALTran) Concept

    M. Jagadesh Kumar and Vinod PariharDepartment of Electrical Engineering, Indian Institute of Technology,

    Hauz Khas, New Delhi 110016, India

    Email: [email protected]: 091-11-25681264

    Abstract: In this paper, we demonstrate that the current gain of SiC power bipolar transistors

    can be improved by as large as 100 % by using a novel Surface Accumulation Layer Transistor

    (SALTran) concept in which a reflecting boundary in the emitter reduces the base current. The

    reasons for the improved current gain are explained based on simulation results.

    Key words: Semiconductor Devices, Current gain, Bipolar Transistors, Silicon Carbide.

    M. Jagadesh Kumar and Vinod Parihar, "Enhanced Current Gain in SiC Power BJTs usinga novel Surface Accumulation Layer Transistor (SALTran) Concept," MicroelectronicEngineering, Vol.81, pp.90-95, July 2005

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    1. Introduction

    Silicon Carbide (SiC) has been recognized as the choice for high voltage, high temperature,

    high power applications because of its large bandgap and high critical electric field [1-3]. SiC

    bipolar junction transistors [4] have been demonstrated with high blocking voltage and high on

    currents taking the full advantage of the material properties of SiC. Current gain is a key

    parameter for the power BJTs as it decides the driving loss of the transistor. But the power SiC

    BJTs reported in literature exhibit a low current gain usually in the range of 10-15. This is

    mainly because of the poor carrier lifetimes in SiC material. Both heterojunction bipolar

    transistors(HBTs) and polysilicon emitter transistors have been used for realizing high current

    gains in silicon BJTs.. Another method used to improve the current gain of silicon bipolar

    transistors is the application of high-low emitter junction in which a lightly doped n-region is

    introduced between the n+-region and the p-base region [5]. However, the above methods are

    not technologically well suited for increasing the current gain in SiC BJTs. Recently, it has

    been shown that by using the Surface Accumulation Layer Transistor(or SALTran) concept in

    which a reflecting boundary for the minority carriers is created in the emitter region, the base

    current of a silicon BJT can be significantly reduced resulting in a large current gain

    enhancement[6]. It would be very beneficial if the current gain of a SiC BJT can be enhanced

    using such a simple emitter contact concept.

    Since the properties of SiC are different from that of silicon, we do not yet know how the

    SALTran concept works for the SiC bipolar transistors. The main objective of this work is,

    therefore, to implement the SALTran concept on power SiC BJT using a two dimensional

    device simulator ATLAS [7] and examine if the current gain of the SiC BJT can be improved.

    Based on our simulation results we demonstrate that for identical minority carrier lifetime, the

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    performance of the power SiC SALTran is better than the conventional power SiC BJT in terms

    of high current gain mainly because of the improved emitter injection efficiency due to the

    reflecting boundary at the emitter contact. Also we observe that due to the low emitter doping

    required in the case of the SALTran, the complexity involved in high doping epitaxial growth

    can be avoided for the SiC BJT.

    2 Device structure and parameters

    In order to validate our simulation results we have first implemented the power SiC BJT

    already reported in literature [8] in ATLAS with the following parameters. The collector drift-

    region thickness is 20 m with a uniform doping of 2.5x1015

    /cm3

    and the n+

    collector doping is

    1x1019/cm3, the p-base thickness is taken as 1 m with a uniform doping of 2.5x1017/cm3

    while the emitter doping is 1x1019/cm

    3with thickness 0.75 m. The JTE doping is taken as

    2.5x1017/cm3. The cell pitch for the structure is taken to be 14 m. For the above dimensions,

    we have adjusted the recombination parameters in our simulation so that our simulated peak

    current gain matches with the reported experimental current gain of the published structure[8].

    3 Design methodology

    Fig. 1 shows the cross-sectional view of the optimized power SiC BJT and power SiC

    SALTran. To apply the SALTran concept to the power SiC BJT reported in [8], we have

    optimized the thickness of the emitter and base thickness to be 0.3 m and 0.4 m respectively.

    It may be noted that the base thickness is reduced compared to the original structure in [8] to

    make sure that the base region recombination does not overshadow the gain enhancement

    provided by the SALTran concept. All the device parameters of the conventional SiC power

    BJT and the power SALTran are kept the same except that in the case of the power SALTran,

    we have changed the emitter doping to 1x1014/cm3 and chosen an emitter metal with very low

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    workfunction (3.35eV) e.g magnesium, to obtain surface accumulation near the emitter contact.

    In the following sections we show the comparison of the power SiC SALTran with the power

    SiC BJT which differ only in their emitter doping and emitter contact properties.

    4 Simulation results

    We have taken the value of electron affinity and band gap for the 4H-SiC to be 3.9 eV and 3.2

    eV respectively. We have used the two-dimensional simulator ATLAS to understand the DC

    characteristics of the proposed structure. Drift-diffusion calculations are carried out using

    appropriate physical models given in ATLAS for 4H SiC. The field dependent mobility [9] and

    the Arora mobility [10] models are used and the bandgap narrowing effect is taken into

    account. For recombination we have incorporated SRH and Auger recombination mechanism.

    SRH minority carrier lifetime coefficient for electrons and holes are tuned to be 30 nS and 6 nS

    respectively, while the SRH equilibrium concentration is 5x1016

    cm-3

    for both electrons and

    holes. The incomplete ionization is also taken into account.

    We have first simulated the band diagrams of both the structures to examine if surface

    accumulation takes place. Fig. 2 shows the band diagram in the emitter-base region for both the

    SiC SALTran and the SiC BJT structures. Fig. 2(a) is for zero emitter-base bias and Fig. 2(b)

    is under normal biasing conditions corresponding to the peak current gain. We observe that at

    the metal-semiconductor interface, with or without the bias, there is a bending in the

    conduction band indicating that accumulation of electrons does take place. The accumulated

    electron profile near the emitter contact is shown in Fig. 3 and also the minority carrier profile

    is shown in Fig. 4. The presence of accumulated electrons results in a high electric field near

    the emitter contact as shown in Fig. 5 which causes the reflection of holes coming from the

    base. Because of the presence of this reflecting boundary in the emitter to the holes coming

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    from the base, the hole gradient in the emitter decreases reducing the base current. This is a

    clear indication that the SALTran effect works not only for lateral high speed bipolar

    transistors[6] but is also effective for vertical power bipolar transistors. However, when

    applying the SALTran concept to the power transistors, care should be taken to see that the

    base width is of some reasonable value so that the base recombination does not overshadow the

    potential benefits of the reflecting boundary in the emitter.

    Fig. 6 shows the output characteristics of power SiC SALTran and power SiC BJT. The

    comparison shows that the current driving capability of power SiC SALTran is higher as

    compared to the power SiC BJT. Our simulations indicate the power SiC SALTran device

    shows a high BVceo of around 1700 V. The current gain comparison in Fig. 4.4 shows that

    the power SiC SALTran exhibits almost double the current gain of the power SiC BJT. The

    Gummel plot in Fig. 7 clearly shows that the high current gain of the power SALTran is due to

    the reduced base current. The reduced base current in the case of the power SiC SALTran can

    be attributed to the reduction in number of holes reaching the emitter because of the SALTran

    effect.

    Fig.9 shows the current gain for different temperatures for the power SiC SALTran and

    the power SiC BJT. We observe that in both the cases the current gain decreases with

    increasing temperature. Further the effect of temperature on the normalized current gain i.e

    ()/300 is plotted in Fig. 10, where () is the peak current gain at a particular temperature

    and 300is the peak current gain at room temperature. Power SiC SALTran shows a higher

    negative temperature coefficient for the current gain due to the low emitter doping. The

    negative temperature coefficient for the current gain is due to the deep level acceptors in the

    base region [11]. At elevated temperatures, the minority carrier lifetime increases, resulting in

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    a significant increase in the current gain of the conventional silicon bipolar devices. However,

    in SiC npn BJTs, due to deep level of acceptors, holes that were frozen out at room temperature

    ionize at elevated temperatures, resulting in higher hole concentrations in the base at high

    temperatures. This effect reduces the emitter injection efficiency of the device at elevated

    temperatures, which cancels out the increasing minority carrier lifetime in the base region and

    keeps the current gain of the SiC npn BJTs almost stable. This negative temperature coefficient

    makes this device attractive for paralleling and for preventing thermal runaways [12]. In Fig. 11

    we have plotted peak current gain for different temperatures against 1/KBT of the power

    SALTran and the power SiC structure. The slope of the natural logarithm of peak current gain

    curve for different temperatures gives the activation energy which is nothing but the difference

    of the effective bandgap narrowing of the emitter and the base[13]. We see that the activation

    energy comes out to be -44.5 meV and -37.5 meV for power SiC SALTran and power SiC BJT

    respectively. This shows that in the case power SiC SALTran, the current gain decreases at a

    higher rate than the power SiC BJT making the SALTran structure more suitable for high

    temperature applications.

    5 Conclusions

    In this paper, for the first time, we have successfully implemented the SALTran

    concept to the power SiC BJT. The high current gain obtained for the proposed structure results

    in low driving losses making this device more useful for high voltage applications. Further the

    high current gain can be traded off by increasing the base doping to obtain better output

    characteristics in terms of increased early voltage. The power SiC SALTran is also more

    suitable in situations where thermal runaway due to an increase in temperature is a problem.

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    References

    1. J. B. Casady and R. W. Johnson, Status of silicon carbide (SiC) as a wide bandgap

    semiconductor for high temperature application: A review, Solid-state Electron., vol.

    39, no. 10, pp. 1409-1422, 1996

    2. P. G. Neudeck, Progress in silicon carbide semiconductor electronics technology,J.

    Electron. Mater., vol. 24, pp. 283-288, 1995.

    3. Y. Singh and M. J. Kumar, "A New 4H-SiC Lateral Merged Double Schottky

    (LMDS) Rectifier with Excellent Forward and Reverse Characteristics," IEEE Trans.

    on Electron Devices, Vol.48, pp.2695-2700, December2001.

    4. J. W. Palmour, R. Singh, L. A. Lipkin, and D.G. Waltz, 4H-SiC high temperature

    power devices, in Trans. 3rd

    Int. Conf. High-Temperature Electron. (HiTEC), vol. 2,

    Albuquerque, NM, June 1996, pp. XVI-9-14.

    5. S. S. Ang, A high-low emitter bipolar power transistor,Microelectronics Journal,

    vol.26, pp.1-7, 1995.

    6. M. J. Kumar and V. Parihar, "Surface Accumulation Layer Transistor (SALTran): A

    New Bipolar Transistor for Enhanced Current Gain and Reduced Hot-carrier

    Degradation," To appear in IEEE Trans. on Device and Materials Reliability, Vol.4,

    June 2004.A PDF file of this paper can be found in Accepted for future publication

    at (http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=7298 )

    7. ATLAS Users Manual, Silvaco Int., 2000.

    8. D. M. Caughey and R. E. Thomas, Carrier Mobilities in Silicon Empirically Related

    to Doping and Field, Proc. IEEE, Vol.55, pp. 2192-2193. 1967.

    9. N. D. Arora, J. R. Hauser, and D. J. Roulston, Electron and Hole Mobilities in Silicon

    as a function of concentration and temperature,IEEE Trans. on Electron Devices,

    vol.29, pp.292-295, 1982.

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    Figure Captions

    Fig. 1 Schematic cross section of the Power SiC SALTran and Power SiC BJT

    Fig. 2 Band diagram of emitter-base region (a) without bias and (b) with bias

    Fig. 3 Electron concentration in the emitter region of power SiC SALTran and power SiC BJT

    Fig. 4 Minority carrier profile in the emitter-base region (a) without bias (b) with bias

    Fig. 5 Electric field in the emitter region in power SiC SALTran and power SiC BJT

    Fig. 6 Output characteristics of the power SiC SALTran and power SiC BJT

    Fig. 7 Current gain of power SiC SALTran and power SiC BJT

    Fig. 8 Gummel plots of power SiC SALTran and power SiC BJT

    Fig. 9 Current gain versus collector current for different temperature for (a) power SiC

    SALTran and (b) power SiC BJT

    Fig. 10 Normalized peak current gain of power SiC SALTran and power SiC BJT

    Fig. 11 Peak current gain versus 1/KBT for power SiC SALTran and and power SiC BJT.

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    N+ 4H-SiC Substrate

    P, JTE P, JTE

    P, 2.5x1017 cm-3, 0.4 mP+

    P

    +

    N, 0.3 m

    Emitter

    Base

    Collector

    N-, 2.5 x 1015 cm-3, 20 m

    N+ 4H-SiC Substrate

    P, JTE P, JTE

    P, 2.5x1017 cm-3, 0.4 mP+

    P

    +

    N, 0.3 m

    Emitter

    Base

    Collector

    N-, 2.5 x 1015 cm-3, 20 m

    Fig.1

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    0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7

    -4

    -3

    -2

    -1

    01

    2

    3

    BaseEmitter

    Metal

    Fermi level

    Conduction band

    Valence band

    Power SiC SALTran

    Power SiC BJT

    Energy(eV)

    Distance from emitter contact (m)

    (a)

    0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7

    -5

    -4

    -3

    -2

    -1

    0

    1

    2

    3

    4

    5

    BaseEmitter

    Metal

    VBE

    =2.96 VHole quassi fermi level

    Valence band

    Conduction band

    Electron quassi fermi level

    Power SALTran

    Power SiC BJT

    Energy(eV)

    Distance from emitter contact (m)

    (b)

    Fig. 2

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    0.0 0.1 0.2 0.31010

    1014

    1018

    1022

    Power SiC SALTran

    Power SiC BJT

    E

    lectronconcentratio

    n(cm-3)

    Distance from emitter contact (m)

    0.0 0.1 0.2 0.31010

    1014

    1018

    1022

    Power SiC SALTran

    Power SiC BJT

    E

    lectronconcentratio

    n(cm-3)

    Distance from emitter contact (m)

    Fig. 3

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    0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.71010

    1012

    1014

    1016

    1018VBE=2.96 V Emitter base junction

    Power SALTran

    Power SiC BJTCarrierconcentratio

    n(/cm

    3)

    Distance from emitter contact (m)

    0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.71010

    1012

    1014

    1016

    1018VBE=2.96 V Emitter base junction

    Power SALTran

    Power SiC BJTCarrierconcentratio

    n(/cm

    3)

    Distance from emitter contact (m)

    Fig. 4

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    0.0 0.1 0.2 0.3

    0

    100

    200

    300

    400

    500

    Power SiC SALTran

    Power SiC BJT

    Electricfield(kV/cm)

    Distance from emitter contact (m)

    Fig. 5

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    0 20 40 60 80 1000.0

    0.1

    0.2

    0.3

    0.4

    0.5

    IB=0.5 A to 2 A

    Step 0.5 A

    Power SiC SALTran

    Power SiC BJT

    Collectorcurrent(mA)

    Collector emitter voltage (V)

    Fig. 6

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    10-9 10-8 10-7 10-6 10-5 10-4 10-30

    20

    40

    60

    80

    100

    120

    140 VCE

    = 10 V

    Power SiC SALTran

    Power SiC BJT

    Currentgain

    Collector current (A)

    Fig. 7

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    1.5 2.0 2.5 3.0 3.5

    10-15

    10-13

    10-11

    10-9

    10-7

    10-5

    10-3

    IB

    IC

    VCE

    =10 V

    Power SiC SALTran

    Power SiC BJT

    Collectorandbasecur

    rents(A)

    Base emitter voltage (V)

    Fig. 8

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    10-8 10-7 10-6 10-5 10-4 10-30

    20

    40

    60

    80

    100

    120

    140300 K

    450 K

    T= 300 K to 450 K

    Step 50 K

    Currentgain

    Collector current A (a)

    10-8

    10-7

    10-6

    10-5

    10-4

    10-30

    10

    20

    30

    40

    50

    60

    70

    80T=300 K to 450 K

    Step 50 K

    450 K

    300 K

    Currentgain

    Collector current (A)

    (b)

    Fig. 9

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    250 300 350 400 450 500

    0.6

    0.7

    0.8

    0.9

    1.0

    Power SiC SALTran

    (300

    =140)

    Power SiC BJT

    (300=70)

    (T)/300

    Temperature (K)

    Fig. 10

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    24 28 32 36 4010

    100E

    g

    =-37.5 meV

    Eg=-44.5 meV

    Power SiC SALTran

    Power SiC BJTPeakcurrentgain

    1/KBT(eV-1)

    24 28 32 36 4010

    100E

    g

    =-37.5 meV

    Eg=-44.5 meV

    Power SiC SALTran

    Power SiC BJTPeakcurrentgain

    1/KBT(eV-1)

    Fig. 11