ENTEGRIS PROPRIETARY AND CONFIDENTIAL

10/04/15

Chris Newman Global Product Manager – Lithography Products – ME Div

Entegris Pellicle Capable EUV Pod

CONFIDENTIAL | 2

EUV Pods (Top Side Of EIP Base Plate)

Standard “A” Type EIP Base Plate Pellicle Capable EIP Base Plate

Base plate top side differences: 1. Pellicle pocket depth 2. Height of RPAS/2DBC

windows

CONFIDENTIAL | 3

Pellicle Pocket (Top Side Of Inner Pod)

Pellicle pocket is the same depth

as reticle access pockets (3.3mm)

CONFIDENTIAL | 4

Pellicle Pocket (Bottom Side Of Inner Pod)

2D Bar Code pocket is larger and uses

the same glass as the RPAS window.

New glass retainer

clip is required due

to depth of pellicle

pocket

Clip is retained in an

undercut feature

CONFIDENTIAL | 5

Pellicle Capable Pod Test Summary

All tests passed the ASML specifications for pellicle capable pods

Test Test Result

Inspection Mechanical measurement Pass

Visual inspection Pass

Functional Sensor target reflectivity Pass

Full system cycle test Pass

Particle Adder Measurements

RH transfer path test Pass

In-system habitat test (venting) Pass

Outgassing EIP outgas test Pass

Shipping 8-leg shipping test Pass

CONFIDENTIAL | 6

Summary

The Entegris pellicle capable EUV pod is qualified for use with pelliclized reticles in the ASML NXE-3100 and 3300 scanners

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