HB LEDs & OLEDsComplete thin film process solutions

Get off to a fl ying start for all your LED thin fi lm deposition and etch processes

› From 2 inch to 8 inch

› Manual or fully automated substrate handling

› Sapphire and GaN processing

› Damage free deposition and etch

Choose a partner with staying power

Choose a partner with proven LED production know how. Evatec and CoriaL are working together to deliver complete thin film process solutions you can rely on. With over 100 LED systems in production, our platforms are designed with the operator in mind - simple, safe substrate handling, simple operation, and easy to maintain.

From low temperature processes for oLEDs to the most demanding HB LED optical stacks, our deposition and etch systems are delivered with robust processes and proven hardware for production 24/7.

But delivering the equipment today is just the start: our LED support team helps with new process developments and extensions to machine capability to give our platforms the longest lifetimes in the industry.

LED Thin Film Powerhouse

Processes that fit togetherChoose from a portfolio of high rate deposition processes that fit

together perfectly. From DBrs with wide angular range to pinhole

free, stress free mask layers, our applications specialists are

here to help you choose the best deposition technology and film

designs for your production line and package design.

Masks Sio2 and Si3N4 by PECVD without pinholes

& particles, temperatures <80°C for

organics processing

Current spreading iTo and other TCos with customised

optical and electrical performance.

Choose from evaporation or low

temperature sputter without GaN plasma

damage

Contacts p & n metal stack contact electrodes by

evaporation or sputter. Deposition at high

rates and without GaN damage

Reflectors (DBRs) Metals, metal / dielectric or DBr stacks

by evaporation or sputter, customised for

LED chip package design

LED Deposition Processes

Hit the target every timeHighly repeatable processes, wafer to wafer, run to run are the

key to the highest yields on 2, 4 and even 6 inch substrates. our

sapphire substrate patterning processes (PSS) are the industry

standard. For additional etch processes in your thin film stack,

optimise conditions for vertical or sloped walls according to LED

package design.

PSS Substrate patterning for increased extraction

efficiency with optimised recipes to match your

exact cone angles and height requirements

Patterning GaN etch by inductively Coupled Plasma (iCP)

etch with selectivity >1 and etch rates up to

200nm/min

LED Etch Processes

Gold Medal performance our production platforms already run at the world’s largest LED

manufacturers. Evatec and CoriaL custom solutions include

automated handling, direct wafer processing or carriers and

integration of upstream or downstream process modules.

LED Production Platforms

Hardware | Processes | Advanced Control Systems

Platform Technology LED Processes

Capacity Loading

EvatecBaK 761

� Evaporation � PiaD

� Contacts � Curr. Spreading reflectors

2 inch 141 4 inch 426 inch 208 inch 9

� Manual � Cassette to cassette (as option)

Evatecradiance Platform

� Sputter � iCP etch � PECVD

� Contacts � Curr. Spreading reflectors

2 inch 1924 inch 486 inch 218 inch 16

� Cassette to cassette

Corial 300iL

� iCP-riE � PSS Process � GaN etch

2 inch 21 (PSS)2 inch 27 (GaN)4 inch 76 inch 1

� Manual, load lock, preloaded shuttle

CorialPS600

� iCP-riE � PSS Process � GaN etch

4 inch 246 inch 16

� automatic, cassette to cassette

CorialD500

� PECVD @ 300°C

� Low temp PECVD <80°C

� Mask layers (SiN or Sio

2)2 inch 1054 inch 256 inch 9

� Manual, preloaded carriers

About EvatecEvatec offers complete machine and process solutions, for thin film

deposition and etch in the optical and semiconductor markets. Evatec

engineers are able to offer practical production advice from R&D to

prototyping and mass production. We recognize that no single technique

offers the answer to all problems. With a technology portfolio including

standard and enhanced evaporation as well as sputter, we are ready to

offer sampling services and custom engineering to meet our customers

individual needs.

We provide sales and service through our global network of local offices.

Evatec Ltd.

Lochrietstrasse 14

CH-8890 Flums

Switzerland

T:: + 41 81 720 1080

E: info@evatecnet.com

www.evatecnet.com

About CORIALWith more than 30 years experience in delivering custom plasma

deposition and etch systems, our LED systems already process

more than 1,000,000 two inch wafers a month at the worlds major

manufacturers. With over 300 square metres of clean room area for

development, assembly and test we offer sampling, customised

process development, and full production solutions for a wide range of

applications including LED production, MEMS and failure analysis.

CORIAL

60 chemin des Fontaines

38190 Bernin

France

T: +33 (0)4 76 01 10 10

E: corial@corial.net

www.corial.net

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by

any data contained within quotations, manuals or specifications from either Evatec, CoRiaL or their representatives.