HEATER JACKETFeature: HEATER surrounding temperature is about250 ~ 400 , so it is available to install where general HEATER JACKET cannot be used. VACUUM GATE VALVE HEATER JACKET :

Technical Solution Company

HEATER JACKET

TPOH - Series

ECO friendly

Light weight

15. Business Market Expansion (US) & UL Certification

14. Business Market Expansion (China, ASIA,JAPAN)

13. Contract of Industrial-Educational Collaboration

12. Transferred to Incorporated Company

11. Office Building Expansion and Move-in (Hwaseong)

11. Vendor List from Samsung Semiconductor, Co. Ltd

09. Established new manufacturing lines for heater jacket

08. Venture Capital Company Certification

07 Innobiz Certification / Vendor List from SK Hynix

06. Venture Capital Company Registration / ISO9001 Certification

06. Patent Acquisition for CMP PAD CONDITIONER

05.04 Start Repair Service Business (System Built & Overhaul)

05.04 Company Move-in (Suwon)

04.10 Established TSC (Technical Solution Company)

2

CEO Os. Kim

Our executives and staff members have been making steady progress toward our

goal, which is to achieve the world best component business based on creative,

challenge and cooperation.

We promise to provide the best product that is founded on accumulated technology.

Also, we will do our best in order to develop new products as well as create

customer value.

Company VisionThe world best part maker

Business philosophyChallenge constantly andSet a goal

3

SERIES TPOH TPH TPCH TSH

MATERIAL POLY-IMIDE

PTFESHEET

PTFEFABRIC

SILICONCOATED

PTFECOATED

SILICONRUBBER

App

licab

le s

erie

s pe

r pip

e si

ze

1/4" О О О О О О

3/8” О О О О О О

1/2" О О О О О О

NW16 О О О О О О








OVERNW150 О О О О О О

Max

imum

serv

ice

tem

pera

ture 150 ℃ - - - О - -

200 ℃ - - - - О -

220 ℃ - - - - - О

250 ℃ О О О - -

Pro

cess

equi

pmen

t su

gges

tion

serie

s

CVD О О О О - -

DIFF О О О О - -

METAL О О О О - О

ETCH О О О О - О

SU

BFA

Bsu

gges

tion

serie

s

VACUUMLINE О - - О О -

SCRU-BBER О - - О О -

GAS LINE TTH Series : TAPE HEATER (reference 11 page )

SPECIFICFEATURE

* light* eco-friendly* pricecompetitiveness

* Strong chemicalresistance

* Excellent thermaluniformity

-

* Chemicalresistance

* Pricecompetitiveness

* Excellentthermaluniformity

MATERIAL POLY-IMIDE

PTFESHEET

PTFEFABRIC

SILICONCOATED

PTFECOATED

SILICONRUBBER

SERIES TPOH TPH TPCH TSH

4

INSULATORCOMPARISION TSC Conventional Type

Material Polyimide Foam Fiber Glass

Power Consumption 0.9 (reduce 10%) 1

External Temp 46 ℃ (reduce 7 ℃) 53 ℃

Photo

Particle No Particle

Body/Skin Problem Harmless

PARTICLE

Price Competitiveness

100% Polyimide Material : Harmless

No particle elements such as harmful substances,

powder and fragments from materials.

Ultra-light (existing H/J contrast 40%) & Easy Installation

Wide Use Temperature Range (40 ℃ ~ 250 ℃)

Application : Fore-lines, Scrubber Lines

Semiconductor, LCD, Solar Equipment

Location : Sub Clean Fab Lines

Main Fab Lines

[ Insulator Comparison Table ]

Application & Location

5

COMPARISION TSC Conventional Type

Temperature

Uniformity

Electromagnetic

Waves Breaking

(Optional)

0 mG 50 mG

100% PTFE Material : Strong chemical resistance


The Best Temperature Uniformity

Options

- ECO Friendly Material : harmless

- Electromagnetic Waves Breaking


Application

Semiconductor, LCD, Solar Equipments

Location : Main Fabrication Lines

[ Comparison Table ]

6

100% PTFE Material : Strong chemical resistance



Options


- Electromagnetic Waves Breaking (Refer to the pge5.)


Application



[ For Semiconductor DIFF-process ]

7

Silicon Coated Material : Strong chemicalresistance

Use Temperature Range (40 ℃ ~ 150 ℃)

Low Price

Options





Location : Sub Clean Fabrication Lines

[ For SCRUBBER LINE HEATER JACKET ]

[ PUMP VACUUM LINE ]

8

PTFE Coated Material : Chemical resistance



Price Competitiveness

Options




Location : Sub Clean Fabrication Lines


[ For Semiconductor DIFF-process Fore-lines ]

9

Jelly Type Rubber

Chipping 0% (Good Durability)

STS Film Patten Element

Good Thermal conductivity & Efficiency

The Best Temperature Uniformity & Thermal Conductivity

Use Temperature Range (40 ℃ ~ 220 ℃)

- Ultra High Temperature : 180 ℃ ~ 220 ℃


Application



TECHNOLOGYCOMPARISION

TSC(Exclusive 3 Layers)

Conventional Type(4 Layers)

Different Structure

[ Technology Comparison Table ]

- High Temperature (Under 150 ℃)

10

Basic Function RemarkT/C OFF T/C disconnection check

• Fuse by channel

• Leakage Breaker

• Excess Current

• Over Voltage

• EMO S/W

Note) Spec is different depend on product

Low Limit Monitor low temperature (Alarm sound when it’s lower than set temperature)

High Limit Monitor low temperature (Alarm sound when it’s higher than set temperature)

Alarm Logging Record all data (date, time, alarm)

Power Display (%)

Administration Access control by level

Communication Monitor & Control through RS232/RS485 communication protocol

11[ VACUUM GATE VALVE HEATER JACKET ] [ BSGS HEATER JACKET ]

Use : GAS LINE HEATING

Material : PTFE FABRIC

Maximum service temperature : 200 ℃

Feature : 1” wide, available to produce various length

as customers requested (MAX. 150”)

Use : DIFF CHAMBER MANIFOLD HEATING

Material : MICA & STS SHEET

Maximum service temperature : 250 ℃

Feature : HEATER surrounding temperature

is about 250℃ ~ 400 ℃, so it is available to install

where general HEATER JACKET cannot be used.

VACUUM GATE VALVE HEATER JACKET : TPOH, TPH, TPCH, TSH All of themcan be produced

- Use : VALVE HEATING that is installed in vacuum line

BSGS HEATER JACKET : TPH-SILICON COATED

- Use : BULK GAS (Y-CYLINDER ) BOTTLE HEATING

ADDR : 362-17 Toseong-Ro, Hyangnam-Eup, Hwaseong-Si Gyeonggi-Do, Korea

TEL : +82-31-213-8962, FAX : +82-31-213-8964

Email : [email protected], Homepage : www.newtsc.com

Documents

HEATER JACKETFeature: HEATER surrounding temperature is about250 ~ 400 , so it is available to install where general HEATER JACKET cannot be used. VACUUM GATE VALVE HEATER JACKET :