Embed Size (px)
Citation preview
1
11
1
11
1
11
Inst
alla
tion
man
ual M
FM 2
220
/ 224
0 / 2
250,
Art
. No
603.
291Headquarters:
Axetris AG, Switzerland Schwarzenbergstrasse 10CH-6056 KaegiswilSwitzerlandphone: +41 41 662 76 76fax: +41 41 662 75 [email protected]
USA:Leister Technologies LLC1275 Hamilton ParkwayItasca, IL 60143USAphone: +1 630 760 1000fax: +1 630 760 [email protected]
Contact
Swiss Made Quality. Axetris is an ISO 9001 certified enterprise. Specifications are subject to change without prior notice.
China:Leister Technologies Ltd.Building 11, 155 Yuanke RoadXinzhuang Industry ParkShanghai 201 109Chinaphone: +86 21 6442 2398fax: +86 21 6442 [email protected]
Japan:Leister Technologies KKShinyokohama Bousei Bldg 1F3-20-12, Shinyokohama, Kohoku-ku Yokohama 222-0033 / Japan phone: +81 45 477 36 37 fax: +81 45 477 36 38 [email protected]
www.axetris.com
13
4
1
2
Particle
Gas flow direction
Installation vertical or horizontialStorage
IN
OUT
external inlet filter (5-200 μm) is recommended
Non dewing conditions only
Specifications
Installation manual MFM 2220 / MFM 2240 / MFM 2250Mass Flow Meter module
external inlet filter (5–200 μm) is recommended
Non dewing conditions only
Air, N2, O2, Ar, CO2, He, H2
corrosivepoisonous Gases
Type Max. tolerated flowMFM 2220-A < 1000 sccmMFM 2240-B < 2000 sccmMFM 2250-C < 10000 sccm
Handling of ESD Sensitive Devices (ESD: Electrostatic Discharge)
1 MΩ
Earth
90°
< ESD >
ACHTUNGNur geschultes Personaldarf die Verpackung öffnen
Elektrostatisch gefährdeteBauelemente (EGB)
ATTENTIONObserve Precautions for Handling
Elektrostatic SensitiveDevices
1
11
1
1
1
1
1
1
11
1
1
1
1
1
Step 1: Assembly instruction (typical example only)
1xDowel pin Ø 2m6 x 6 [mm] DIN 6325
2xO-Ring Normatec FKM Ød1 3.5 x Ød2 1.5 [mm] DIN 3771/ISO 3601/1
1xScrew M3 x 20 [mm] – ISO 14583
1xModule
1xFlow connection block
5
6
Dimensions and tolerances see data sheet
Reverse toconnect
1
11
1
11
Step 3: Cable installation detail Step 2: Cable assembly instruction
1xKlick cable
19
10
7
8
> 2 kΩ < 100 nF
Analog load
R C
Pin 6
Pin 5
Pin Typ MFM 2240 RS 485 Half Duplex1 Power Supply + 24 Volt2 Power Supply GND3 Digital Non Inverting Input-Output / D+4 Digital Inverting Input-Output / D- 5 nc6 nc7 nc 8 nc
Pin Typ MFM 2250 RS 485 Full Duplex1 Power Supply + 24 Volt2 Power Supply GND3 Digital In Non Inverting Receiver Input / R+4 Digital In Inverting Receiver Input / R- 5 nc6 Digitalg Out Inverting Transmitter Output / T-7 Digitalg Out Non Inverting Transmitter Output / T+8 nc
Pin Typ MFM 2220 RS 232 EIA Level1 Power Supply + 24 Volt2 Power Supply GND3 Digital In RxD4 Digital Out TxD5 Analog GND6 Analog Out Flow value 7 nc 8 nc
nc = not connected
MFM 2220 / 2240 / 2250Connector type: Micromatch 8-pole
12
34
56
78
Reverse angle
11
12
Analog topology – Best practices
Recommendations:
1. Separate analog ground line from power supply ground line.
2. Separate power supply from the command signals.
3. Use power supply galvanically insulated from its power source to avoid ground loops.
For more information please visit: www.axetris.com
Notes
D
D
A
A
DA
Power Supply
Power GND
Flow value
Flow Set-point
Valve Override
Analog GND
AC line
MFx 3rd party host system
Galv. Insulated
AnalogI/O
![ON Semiconductor · 2013. 7. 19. · C Mfr]. , -ADT peak sw sw in peak out out out vos= out out in 25 sense vo(s) (9) out out I(s) (10) 2T D2R sw dc (11) 2 out sw out (12) peak DT](https://img.pdfslide.net/doc/110x75/609ab8bfcd78911ab94e7791/on-semiconductor-2013-7-19-c-mfr-adt-peak-sw-sw-in-peak-out-out-out-vos.jpg)
