JEOL 7000F Basic Operation

JEOL-7000FJEOL-7000F

Basic OperationalBasic OperationalInstructionsInstructions

GoalsGoals

Quick Tour of JEOL-7000Quick Tour of JEOL-7000

Basic OperationBasic Operation StartupStartup Sample ExchangeSample Exchange Column ControlColumn Control Stage ControlStage Control Basic ImagingBasic Imaging Shut DownShut Down

JEOL 7000FJEOL 7000F

Field Emission GunField Emission Gun Schottky TypeSchottky Type

High ResolutionHigh Resolution 1 nm at 15 kV1 nm at 15 kV 3 nm at 1 kV3 nm at 1 kV

0 – 30 kV0 – 30 kVFully Motorized Stage Fully Motorized Stage (X,Y,Z,R,T)(X,Y,Z,R,T)Diffusion Pumped Diffusion Pumped SystemSystem

JEOL 7000FJEOL 7000F

SED, BED, TEDSED, BED, TED

EBSD CameraEBSD Camera

EDSEDS

WDSWDS

Fast Beam BlankerFast Beam Blanker

Right Hand ViewRight Hand View

AperturesApertures Gun & Objective LensGun & Objective Lens

Ion PumpsIon Pumps

SED & EBSDSED & EBSD

MotorsMotors

Sample ExchangeSample Exchange

EDS & WDSEDS & WDS

Left Hand ViewLeft Hand View

Beam blankerBeam blanker

WDSWDS

BEDBED

Rear ViewRear View

Ion pumpsIon pumps

WDSWDS WDS valveWDS valve

TEDTED BF – DF ApertureBF – DF Aperture

EBSDEBSD

Vacuum GaugeVacuum Gauge

Computer ControlComputer Control

Other Controls – Operator InterfaceOther Controls – Operator Interface

Start Up - CheckStart Up - Check

Exchange Rod Should be in UP positionExchange Rod Should be in UP position

Gun Valve Closed Button should be illuminatedGun Valve Closed Button should be illuminated

Load Lock LightsLoad Lock Lights VENT & EXCH POSN – illuminatedVENT & EXCH POSN – illuminated

JEOL Program StartJEOL Program Start

Make sure the JEOL Make sure the JEOL Monitor is ONMonitor is ON

Move the mouse back Move the mouse back and right to left across the and right to left across the mouse pad several times.mouse pad several times.

If the monitor does not If the monitor does not come on, press come on, press Ctrl + Alt + 2 Ctrl + Alt + 2 on the key pad.on the key pad.

If there is no response, get If there is no response, get assistance.assistance.

JEOL Program Start - 2JEOL Program Start - 2

You should now be at You should now be at the WINDOWS the WINDOWS Log In Screen.Log In Screen.You will be assigned You will be assigned a User Name and a User Name and Password.Password.Log – InLog – InAlso Sign In on theAlso Sign In on theSign In / Sign OutSign In / Sign OutSheets (folder)Sheets (folder)


You should now be at You should now be at YOUR Desktop.YOUR Desktop.

Double-click the Double-click the ir-camera short-cut to ir-camera short-cut to view the sample chamber view the sample chamber

Double-click the Double-click the JEOL PC-SEM 7000JEOL PC-SEM 7000icon to start the programicon to start the program

The JEOL Program should The JEOL Program should now boot.now boot.


When you click the ir-When you click the ir-camera icon. The camera icon. The Camera Window Camera Window opens. Here it is on opens. Here it is on the desktop.the desktop.The Camera Window The Camera Window is always on top, so is always on top, so clicking the JEOL-PC clicking the JEOL-PC icon opens the JEOL icon opens the JEOL program but the ir-program but the ir-camera view remains.camera view remains.


If the JEOL computer was If the JEOL computer was shut down or restarted shut down or restarted then you will first be then you will first be asked to let the program asked to let the program recalibrate the stage recalibrate the stage positions. ANSWER positions. ANSWER YES.YES.

You will then be asked to You will then be asked to check whether there is check whether there is any holder attachment. any holder attachment. Click YES.Click YES.


Click the holder you Click the holder you will be usingwill be using

Sample Exchange - 1Sample Exchange - 1

First make sure your sample is ready.First make sure your sample is ready.Always use gloves when handling the sample holders.Always use gloves when handling the sample holders.Mount the sample on the proper sample mount. There Mount the sample on the proper sample mount. There are a number of these.are a number of these.Many of the sample mounts can be interchanged on a Many of the sample mounts can be interchanged on a single base.single base.


Check again to see that the load-lock is vented. Check again to see that the load-lock is vented. VENT light illuminated.VENT light illuminated.

Unhook the latch to the load-lock.Unhook the latch to the load-lock.

Open the load lockOpen the load lock


There are dove-tail There are dove-tail groves on the base of groves on the base of the sample holder. the sample holder. These dove-tails These dove-tails slide onto their slide onto their complement on the complement on the stage.stage.


The holder is placed on the specimen holder The holder is placed on the specimen holder chuck devise. The groves must be positioned chuck devise. The groves must be positioned properly so as to slide onto the stage. properly so as to slide onto the stage.


Close the load-lock Close the load-lock door and latchdoor and latchThen press EVAC Then press EVAC and hold until light and hold until light blinks. When the blinks. When the EVAC button light EVAC button light quits blinking and quits blinking and remains illuminated remains illuminated the sample is ready to the sample is ready to be inserted into the be inserted into the chamber.chamber.


Lift the exchange rod slightly. The rod is spring Lift the exchange rod slightly. The rod is spring loaded onto the clamploaded onto the clamp

Bring it to the horizontal position;Bring it to the horizontal position;

Let the air pressure take the rod into the stop.Let the air pressure take the rod into the stop.


Gently push the rod into the chamber. You must move Gently push the rod into the chamber. You must move the rod past the O-rings. When the rod is in the correct the rod past the O-rings. When the rod is in the correct position it will insert fairly easily.position it will insert fairly easily.Make sure you are NOT putting downward pressure on Make sure you are NOT putting downward pressure on the rod.the rod.When fully inserted the sample is on the stage.When fully inserted the sample is on the stage.Then fully retract and place the rod in vertical position.Then fully retract and place the rod in vertical position.


Press the VENT button to close the sample Press the VENT button to close the sample chamber valve and vent the load lock.chamber valve and vent the load lock.Open the Penning gauge readout on the JEOL Open the Penning gauge readout on the JEOL screen. Pressure should be less than 2 x 10screen. Pressure should be less than 2 x 10 -5-5 before beginning session.before beginning session.

Desktop ControlsDesktop Controls

Wireless Keyboard & MouseWireless Keyboard & Mouse

Ctrl + Alt + 1 Keyboard/Mouse to OxfordCtrl + Alt + 1 Keyboard/Mouse to Oxford

Ctrl + Alt + 2 Keyboard/Mouse to JEOLCtrl + Alt + 2 Keyboard/Mouse to JEOL

Should switch smoothly between screens when Should switch smoothly between screens when LOGGED INTO BOTH systemsLOGGED INTO BOTH systems

JEOL OPERATION PANEL - 1JEOL OPERATION PANEL - 1 KnobsKnobs

MagnificationMagnification

Focus (objective lens)Focus (objective lens) Can be converted to Can be converted to

actual Z-stage controlactual Z-stage control

X – Y for adjustments, X – Y for adjustments, but mainly stigmators.but mainly stigmators.

Work in conjunction Work in conjunction with alignment with alignment operationsoperations

Manual Contrast and Manual Contrast and BrightnessBrightness

Live imageLive image

JEOL OPERATION PANEL – 2JEOL OPERATION PANEL – 2 ButtonsButtons

Scan ModesScan Modes Quick View & Fine ViewQuick View & Fine View

Two speeds on both buttons Two speeds on both buttons per mode (full or reduced per mode (full or reduced image)image)

RDC Image (reduced)RDC Image (reduced)

AdjustmentsAdjustments Wobbles the objective lens currentWobbles the objective lens current ALIGN – brings up column ALIGN – brings up column

alignmentalignment STIG – stigmators – use X-Y knobs STIG – stigmators – use X-Y knobs

ImagingImaging Freeze – Freeze frameFreeze – Freeze frame ACB – Auto Contrast / BrightnessACB – Auto Contrast / Brightness PHOTO – Very slow scanPHOTO – Very slow scan

OtherOther AutoAuto LOW MAGLOW MAG

JEOL JoystickJEOL Joystick

Stage movementStage movement Speed proportional to Speed proportional to

extent of joystick extent of joystick movement in X,Y, Zmovement in X,Y, Z

Twist can be changed Twist can be changed to Tilt or Rotate in to Tilt or Rotate in softwaresoftware

Patience – easy Patience – easy movementsmovementsButtons Buttons Jog and InputJog and Input

HV WobHV Wob

For adjusting beam in For adjusting beam in Adjustment mode.Adjustment mode.

Make sure button is Make sure button is not illuminated when not illuminated when working on your working on your sample.sample.

Knob adjusts strength Knob adjusts strength of HV variation.of HV variation.

JEOL TED – SED SwitchJEOL TED – SED Switch

Switches between normal Switches between normal secondary electron secondary electron detection and transmitted detection and transmitted electron detection.electron detection.

Button in TEButton in TE Button out SEButton out SE

Button illumination does not Button illumination does not workwork

If you are not getting an If you are not getting an image when you think you image when you think you should, check this button. should, check this button.

(GS) Getting Started - User Login(GS) Getting Started - User Login

File MenuFile Menu User Login …User Login …

You will setup a user You will setup a user name. (see Setup name. (see Setup Menu)Menu)

Login with your user Login with your user name. This should name. This should bring up your bring up your personal settings.personal settings.

GS – Instrument ControlGS – Instrument Control

Set Accelerating VoltageSet Accelerating VoltageOL should be at 4 OL should be at 4 SEI should be ON (green) and Mode should be 3SEI should be ON (green) and Mode should be 3Column Mode to SEM (green)Column Mode to SEM (green)Probe Size – 7 is a good startProbe Size – 7 is a good startFocus – 40 (green)Focus – 40 (green)Scan Rotation and DFC – OFFScan Rotation and DFC – OFF

GS – Electron to the SampleGS – Electron to the Sample

Make sure FREEZE Make sure FREEZE button on Instrument button on Instrument Control Pad is NOT Control Pad is NOT illuminatedilluminated

Click the HT buttonClick the HT button Listen for valve to openListen for valve to open HT button turns light greenHT button turns light green

Press ACB on Instrument Press ACB on Instrument Control PadControl Pad

Image should be on Image should be on screenscreen

GS – Move to intermediate heightGS – Move to intermediate heightBring up the IR camera Bring up the IR camera imageimage A good Z distance to get A good Z distance to get things initially adjusted is things initially adjusted is 25 mm.25 mm.Click WD 25 in the Click WD 25 in the Instrument ControlInstrument ControlIn the Z box (lower right) In the Z box (lower right) type in the 25, and press type in the 25, and press enter. The stage should enter. The stage should move.move.Adjust the focus first Adjust the focus first using the stage Z control using the stage Z control (joystick) then the (joystick) then the Objective lens.Objective lens.Adjust stigmatorsAdjust stigmators

Move around on your sampleMove around on your sample

Use the joystick X – Y Use the joystick X – Y controlscontrolsUse the mouseUse the mouse

Position the mouse pointer Position the mouse pointer on the spot you want to be on the spot you want to be in the center of the screen.in the center of the screen.

Right click the mouseRight click the mouse This works best at lower This works best at lower

magnificationsmagnifications At higher mag’s (2000x or At higher mag’s (2000x or

more), the image can be more), the image can be electronically shifted by electronically shifted by holding the left mouse holding the left mouse button and moving the button and moving the mouse. mouse.

GS – Move to Working Distance GS – Move to Working Distance (WD) - 1(WD) - 1

In the Instrument Control In the Instrument Control click the desired working click the desired working distance, e.g. 10.distance, e.g. 10.

In the Z box (lower right) In the Z box (lower right) type in the Z to match the type in the Z to match the WD (or slightly larger for WD (or slightly larger for safety, e.g., 11.)safety, e.g., 11.)

Watch sample move in IR Watch sample move in IR camera window.camera window.

ESC on the keypad ESC on the keypad STOPS all stage STOPS all stage movementmovement

GS – Move to Working Distance GS – Move to Working Distance (WD) - 2(WD) - 2

Continue to adjust the Z Continue to adjust the Z distance until the image is distance until the image is in focus (at a low in focus (at a low magnification). Make the magnification). Make the focus knob on the focus knob on the Instrument Control Pad Instrument Control Pad the Z motor adjustment.the Z motor adjustment.

Go slow, have patience, Go slow, have patience, this is not instantaneous.this is not instantaneous.

Click Z-control icon again Click Z-control icon again to make the Focus knob to make the Focus knob the objective lens the objective lens adjustment.adjustment.

GS – Reduced Image ModeGS – Reduced Image Mode

Focusing and most Focusing and most other adjustments are other adjustments are easier using the easier using the reduced image mode.reduced image mode. Press the RDC IMAGE Press the RDC IMAGE

button on the Control button on the Control Pad.Pad.

Adjust focus and stigamtismAdjust focus and stigamtism

Capture imageCapture image Photo and/or Freeze buttonPhoto and/or Freeze button

Saving your imageSaving your imageClick Image File Handler Icon to Click Image File Handler Icon to open the window.open the window.

Move to your directory (folder). Move to your directory (folder). Then click OK – Then click SAVEThen click OK – Then click SAVE

SAVE opens a new window.SAVE opens a new window.Fill in the appropriate information, Fill in the appropriate information, e.g., file name, etc.e.g., file name, etc.

Then click SAVEThen click SAVE

Shut Down - 1Shut Down - 1

Click the HT button Click the HT button (turns dark green)(turns dark green)

Stage to exchange Stage to exchange positionposition

Use STAGE MENUUse STAGE MENU

Click the appropriate Click the appropriate sample holder.sample holder.

Then “Exchange”Then “Exchange”

Shut Down - 2Shut Down - 2

Evacuate the Load-lock.Evacuate the Load-lock.

Remove the sample from the sample chamber.Remove the sample from the sample chamber.

Vent the Load-lock and remove your sample.Vent the Load-lock and remove your sample.

Close the load-lock.Close the load-lock.

EXIT the JEOL control program.EXIT the JEOL control program.

Log-offLog-off

SIGN OUT SIGN OUT

CLEAN UPCLEAN UP

Make sure all materials are put away.Make sure all materials are put away.

Any small instrument you have been using Any small instrument you have been using is put back in its proper place.is put back in its proper place.

Any trash is taken with you or put in the Any trash is taken with you or put in the trash bin.trash bin.

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JEOL 7000F Basic Operation