MEMS final review

8/8/2019 MEMS final review

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MEMSMEMS

MicroelectromechanicalMicroelectromechanical

SystemsSystems


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PREPARED BY:

HARSHIT KATHURIA(07BEE055)

PRAKHAR SHARMA(07BEE056)SEMESTER VI(ELECTRICAL)

FACULTY GUIDE: P.N. KAPIL


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Points to be covered

Introduction to MEMS

History

Scope

Materials

Basic Processes

Manufacturing

Applications

-Picosat

-Accelerometer-Bio-mems

-Pressure sensors


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INTRODUCTIONINTRODUCTIONMicro-Electro-Mechanical Systems (MEMS) is the

integration of mechanical elements, sensors,

actuators, and electronics on a common substrate

through the utilization of microfabrication

technology or microtechnology.

IN A NUT SHELL

Electronics merged with mechanical components

such as gears, actuators etc. .


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CLOSE UPOF SINGLE ACTUATOR

MATRIX OFACTUATORS


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HISTORYHISTORYTRANSISTORS

INTEGRATED CIRCUITS

ICs with Germanium

ICs with Silicon

EMBEDDEDSYSTEMS

MICROMACHINING

MEMS


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SCOPESCOPE

MEMS promises to revolutionize nearly every productcategory by bringing together silicon-basedmicroelectronics with micromachining technology, makingpossible the realization of complete systems-on-a-chip.

Fields in which MEMS has large potentials include-Space Exploration

-Biomedical Research

-Stealth Ops

-Automation

-Display Devices

-Wireless Computing

-Smart Dust


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BASIC PROCESSESBASIC PROCESSES

DEPOSITION PATTERNING ETCHING

Physical Chemical Lithography Wet Dry

Physical vapour

deposition

1. Sputterring

2. Evaporation

1. LPCVD

2. PECVD

Photolithography

Electron Beam Lithography

Ion Beam Lithography

X-ray Lithography

Etchant type

Isotropic

Anisotropic

Electro

chemical type

Vapour type

Plasma type


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Manufacturing Technologies

MEMS manufacturing technologies include the

following:

BULK MICROMACHING

SURFACE MICROMACHING

LIGA


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Applications

MEMS applications include a vast variety of fieldswhich include

Space applications

Accelerometer Bio-MEMS

Pressure Sensor

Inkjet printers

Displays Interferometric modulator display (IMOD)

Actuator based load systems


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MEMS based Space Applications

Space applications include the following

Sun Sensor Ion Thrusters

Picosats

Space Radars


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SUN SENSOR

The sun sensor is an analog slit sensor with triangular photodiodes.


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ION THRUSTER

Electric propulsion (EP) has been considered and utilised since the early

days of space light as an alternative to on-board chemical propulsion. The

commonly used notation divides EP in three main categories based on the

method of accelerating the propellant - electrothermal, electromagnetic, and

electrostatic.


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Pressure Sensor

A pressure sensor measures pressure, typically

of gases or liquids.Pressure is an expression of

the force required to stop a fluid from

expanding, and is usually stated in terms of

force per unit area.A pressure sensor usually

acts as a transducer; it generates a signal as

a function of the pressure imposed.For thepurposes of this article, such a signal is

electrical.


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ACCELEROMETER

An accelerometer measures proper

acceleration, which is the acceleration it

experiences relative to freefall, and is the

acceleration that is felt by people and objects .


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Bio-MEMS

Bio-MEMS combines biological component

with physio-chemical detector. The specific

applications include:

Glucose Monitoring

Detection ofPesticides

Drug Discovery Repairing of Damaged Tissues


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Micromechanics and Mems : Classic and Seminal Papers to

1990; by W. Trimmer (Editor)

Fundamentals of Microfabrication; Marc J. Madou

An Introduction to MEMS Engineering; by Nadim Maluf

Silicon Micromachining; by Elwenspoek and Jansen

DARPAhttp://www.darpa.mil.mto

IEEE EXPLORE http://ieeeexplore.ieee.org/Xplore/DynWel.jsp

REFRENCESREFRENCES


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Documents

MEMS final review