MEMS Introduction

MICRO SYSTEMS POTENTIAL & HISTORY

Mohamed A. Elsheikh Assistant Professor

Electronics and Communications Department Ain Shames University

[email protected]

mailto:[email protected]

Let ‘s set the stage … Why are we here?

Why Electronics ?

What are MEMS ?

MEMS World wide

MEMS History

Microelectronics & MEMS in Egypt

MEMS Potential & History 2 M. A. Elsheikh

Why Electronics ?!

Electronic systems worth more than 1.4 T$

Bigger than steel and auto combined in US

Accounts for 1/3 GDP of Asian tigers

Enabling engine for the world economy

M. A. Elsheikh MEMS Potential & History 3

The Electronics Industry Enabling Engine for the World Economy !

World GWP 54 T€ in 2011

Components enable electronic systems and modules

Electronic systems and modules enable auto, defense, medical, ICT Systems

Medical, defense, ICT, auto, enable transport, health, ICT, security services

M. A. Elsheikh

Microelectronics has occupied a central position for many decades as the

enabling engine of the world economy

MEMS Potential & History 4

Business Patterns in the Electronics Industry

Systems Companies – Nokia, Sony, Cisco

Integrated Device Manufacturers (IDMs) – ST microelectronics, NEC

Pure-Play Silicon Foundries – TSMC, Global foundries, UMC, SMIC

Fabless Integrated Circuits Companies – Qualcom, Broadcom, etc

IP Providers – ARM, Artisan, Rambus, MIPS

Design Service Companies – Wipro, Faraday

EDA Companies – Synopsys, Cadence, Mentor Graphics

Electronic Manufacturing Service (EMS) Companies (Contract Manufacturing) – Foxconn (50 B), Flextronics (35 B, 2% Profit),


Industrial Phases in Electronics Industry

– Product/System definition and design

– Silicon Wafers

– IC design

– IC manufacturing

– IC packaging/testing

– PCB design

– EMS

• PCB manufacturing

• System assembly

M. A. Elsheikh

High added value

Labor intensive


Semiconductor Industry Makeup

Microprocessors, dominated by US companies account for 24% of the whole semi industry

Memory, dominated by Pac Rim companies account for 19% of the whole semi industry

O-S-D markets are growing much faster than IC markets. In the period 2012-2017 the CAGR

for ICs was 1.7% whereas for the O-S-D markets it was 7.4%


What are MEMS ?

MEMS acronym which stands for “Micro-Electro-Mechanical-Systems” was adopted in 1989 in an IEEE workshop on Micro Robotics.

MEMS are more commonly referred to as Microsystems in Europe or Micro-machines in Japan.

MEMS is a miniature system or subsystem involving one or more micro-machined components and often integrating other functions on the same chip or in the same package such as electronics, optics, RF, etc.


Packaged MEMS- Human eye scale

“A grain of sand” ! MEMS motor

M. A. Elsheikh

MEMS Applications MEMS are everywhere


Why MEMS ?


Mass Production

Better Cheaper

New function

More robust

More precise

More Reliable

Smaller Integration of functions

M. A. Elsheikh

What size are MEMS ?


MEMS

M. A. Elsheikh

MEMS Market


Top Companies 2011



Why Electronics ?

What is MEMS ?

MEMS World wide

MEMS History



1947 Invention of the Point Contact Transistor

A transistor uses electrical current or a small amount of voltage to control a larger change in current or voltage.

Transistors are the building blocks of computers, cellular phones, and all other modern electronics.

First Point Contact Transistor and Testing Apparatus (1947) [Photo Courtesy of The Porticus Centre]


In 1947, William Shockley, John Bardeen, and Walter Brattain of Bell Laboratories built the first point-contact transistor.

The first transistor used germanium, a semiconductor chemical .

It demonstrated the capability of building transistors with semiconductor materials.

M. A. Elsheikh

1954 Discovery of the Piezoresistive Effect in Silicon and Germanium

Discovered in 1954 by C.S. Smith.

The piezoresistive effect of semiconductor can be several magnitudes larger than that in metals.

This discovery showed that silicon and germanium could sense air or water pressure better than metal

Many MEMS devices such as strain gauges, pressure

sensors, and accelerometers utilize the piezoresistive effect in silicon.

Strain gauges began to be developed commercially in 1958.

Kulite was founded in 1959 as the first commercial source of silicon strain gages . An Example of a Piezoresistive Pressure

Sensor [MTTC Pressure Sensor]


1958 Invention - First Integrated Circuit (IC)

Prior to the invention of the IC there were limits on the size of transistors. They had to be connected to wires and other electronics.

An IC includes the transistors, resistors, capacitors, and wires.

In 1958, Jack Kilby from Texas Instruments built a "Solid Circuit“ on one germanium chip: 1 transistor, 3 resistors, and 1 capacitor.

Shortly after Robert Noyce from Fairchild Semiconductor made the first "Unitary Circuit“ on a silicon chip.

The first patent was awarded in 1961 to Robert Noyce.

Texas Instrument's First Integrated Circuit [Photos Courtesy of Texas Instruments]


1959 "There's Plenty of Room at the Bottom"

Richard Feynman’s “There’s Plenty of Room at the Bottom” was presented at a meeting of the American Physical Society in 1959.

The talk popularized the growth of micro and nano technology.

He was interested in denser computer circuitry, and microscopes which could see things much smaller than is possible with scanning electron microscopes.

He challenged his audience to design and build a tiny motor or to write the information from a page of a book on a surface 1/25,000.

For each challenge, he offered prizes of $1000.

Foresight Nanotech Institute has been issuing the Feynman Prize in Nanotechnology each year since 1997.

Richard Feynman on his bongos Photo credit: Tom Harvey


1968 The Resonant Gate Transistor Patented

In 1964, Harvey Nathanson from Westinghouse produced the first batch fabricated MEMS device.

This device joined a mechanical component with electronic elements and was called a resonant gate transistor (RGT).

The RGT was a gold resonating MOS gate structure.

Resonant Gate Transistor


It was approximately one millimeter long and it responded to a very narrow range of electrical input signals.

It served as a frequency filter for ICs.

The RGT was the earliest demonstration of micro electrostatic actuators.

It was also the first demonstration of surface micromaching techniques.

M. A. Elsheikh

1971 The Invention of the Microprocessor

In 1971, Intel publicly introduced the world's first single chip microprocessor -

The Intel 4004

It powered the Busicom calculator

This invention paved the way for the personal computer

The Intel 4004 Microprocessor [Photo Courtesy of Intel Corporation]

Busicom calculator [Photo Courtesy of Intel Corporation]


1960's and 1970’s Bulk-Etched Silicon Wafers as Pressure Sensors

"Electrochemically Controlled Thinning of Silicon" by H. A. Waggener illustrated

anisotropic etching of silicon (removes silicon selectivity).

This technique is the basis of the bulk micromachining process.

Bulk micromachining etches away the bulk of the silicon substrate leaving behind

the desired geometries.

In the 1970's, a micromachined pressure sensor using a silicon diaphragm was

developed by Kurt Peterson from IBM research laboratory.

Thin diaphragm pressure sensors were proliferated in blood pressure monitoring

devices .

Considered to be one of the earliest commercial successes of microsystems devices.


Early MEMS Devices


HP Inkjet Nozzle (1979) Rotary Electrostatic Motor (1988)

Lateral Comb Drive Actuator (1989)

M. A. Elsheikh

1993 Multi-User MEMS Processes (MUMPs) Emerges

In 1993 Microelectronics Center of North Carolina (MCNC) created MUMPs:

A foundry meant to make microsystems processing highly accessible and cost effective for a large variety of users

For a nominal cost, MUMPs participants are given a 1 cm2 area for their own design.

In 1998, Sandia National Labs developed SUMMiT IV (Sandia Ultra-planar, Multi-level MEMS Technology 5)

This process later evolved into the SUMMiT V, a five-layer polycrystalline silicon surface micromachining process

Two simple structures using the MUMPs process [MCNC] A MEMS device built using SUMMiT IV [Sandia National Laboratories]


1993 First Manufactured Accelerometer

In 1993 Analog Devices were the first to produce a surface micromachined accelerometer in high volume.

The automotive industry used this accelerometer in automobiles for airbag deployment sensing.

It was sold for $5 (previously, TRW macro sensors were being sold for about $20).

It was highly reliable, very small, and very inexpensive.

It was sold in record breaking numbers which increased the availability of airbags in automobiles.


Late 1990's, Early 2000's BioMEMS

Scientists are combining sensors and actuators with emerging biotechnology.

Applications include

drug delivery systems

insulin pumps (see picture)

DNA arrays

lab-on-a-chip (LOC)

Glucometers

neural probe arrays

microfluidics Insulin pump [Debiotech, Switzerland]


Historical Summary Highlights

Since the invention of the transistor, scientists have been trying to improve and develop new micro electro mechanical systems.

MEMS technology inherits from ICs technology the planar and batch production techniques.

Building MEMS involve either deposition of multiple layers (Surface micromachining) or engraving the structure within the substrate (Bulk micromachining)

The first MEMS devices are pressure monitoring and inertial sensors.

Multi-Project Wafer (MPW) processes like MUMPs and SUMMIT allow small players to penetrate to the MEMS market.



Why Electronics ?

What is MEMS ?

MEMS World wide

MEMS History



2003 2011

MIPEX

2007

ICs Companies in Egypt


Non Profit Organizations and Activities: EITESAL إتصال

• EITESAL stands for The Egyptian Information Telecommunications, Electronics & Software Alliance.

• NGO (Non-Governmental Organization) founded in 2004 representing the entire Egyptian ICTE industry.

• Eitesal has over 360 ICTE companies in Egypt working in the areas :

– Electronics - Telecommunications

– Software - Training

– System Integration - Content

– Consultancy - Outsourcing

– Call Center Services.


Non Profit Organizations and Activities: VLSI Egypt

Vision – Establishing a dynamic environment for the electronic engineers and interested entities in

order – to help the advancement of the VLSI field in Egypt

Mission

1. Develop methods to share technical knowledge between members of this society

2. Attract young engineers/scientists to do Electronics design/research

3. Link Electronics designers/researchers with local and international Electronics companies

4. Attract more Industry/Governmental funding for Electronics research projects

5. Identify relevant Electronics projects that serves the region's development needs

6. Propose and hold symposia/forums/competitions relevant to the electronics field

7. Organize training sessions/events locally and abroad

8. Help support necessary facilities to conduct Electronics research in the MENA region


EITESAL and VLSI Egypt have agreed to join forces starting October 2013

M. A. Elsheikh

Students were divided into two groups, each group was

given a specific design project of a MEMS device

(Accelerometer & Gyroscope) and they were required to

give project presentations at the end of the program

A student working on the

network analyzer to

obtain a response curve

Students working on their

projects in the Cleanroom

A student working on his

Finite Element model

MEMS Summer School

31

Ain Shams University: ICL Lab: Members


Mohamed Elsheikh Assistant Professor

Ph.D. U Waterloo (2010)

Si-ware

1 journal, 15 conf

Ayman Ismail Assistant Professor


Si-ware, Gennum

1 book, 2 journal, 10 conf

3 patents

Hany Ragai Professor

Ph.D. Grenoble U & INPG (1980)

FUE, MEMScAP, Mentor, KSU

8 Ph.D. & 40 M.Sc. supervision


DiaaEldin Khalil Assistant Professor

Ph.D. Northwestern U (2008)

Intel

3 journal, 10 conf

4 patents

Sameh Ibrahim Assistant Professor

Ph.D. UCLA (2009)

Marvell

1 journal, 3 conf

Mohamed Dessouky Professor

Ph.D. U Paris VI (2001)

Mentor, MEMScAP, U Paris VI

31 M.Sc. supervision

1 book ch, 5 journal, 52 conf

2 patents

Khaled Sharaf Professor


Mentor, MEMScAP


1 book, 1 art, 7 journal, 37 conf

3 patents

Emad Hegazi Professor

Ph.D. UCLA (2002)

Intel, SysDsoft, Ericsson



1 patent

Hisham Haddara Professor

Ph.D. INPG (1988)

Si-ware, MEMScAP, Mentor

4 Ph.D. & 33 M.Sc. supervision


4 patents

(ON LEAVE)

Mohamed Elnozahi Assistant Professor

Ph.D. Texas A&M U (2010)

Marvell

8 journal, 8 conf

1 patents

M. A. Elsheikh

ICL Research Interests


f

Power

Management

Circuits

Energy

Scavenging

Circuits

Solar Cells

Applications

RF &

mm-Wave

Circuits

Biomedical

Circuits & Systems

Sensor

Interface

Circuits

Design Automation

Analog/Mixed-Signal

Circuits & Systems

PHY

Design

Serial Links

Design

WSN

Applications

ADC

Design

MEMS

Sensors UWB

Circuits

M. A. Elsheikh

QUESTIONS & DISCUSSIONS

Email: [email protected]


mailto:[email protected]

Documents

MEMS Introduction