MICROCONTAMINATION CONTROL

retention ratings down to 5 nm, removes difficult contaminants

from specific resists more efficiently than a single membrane.

Utilizing two times the nylon membrane thickness, the nylon

design improves gel retention performance at a 10 nm retention

rating for market-leading contamination control. Each membrane

technology is characterized for optimal performance in the most

common photochemicals and blends in use.

Innovative Design Solutions

Entegris offers innovative design solutions. Impact 8G’s unique

core-fill design increases flow rate and reduces filter priming

time, resulting in a more stable and repeatable production

environment with lower defectivity performance. Impact filters

use Connectology® to quickly and securely connect to the

Impact manifold and IntelliGen® dispense systems. Impact 8G

flushing shell offers a cleaner, more efficient transitional flow-

through solution for photochemical filtration and dispense.

Impact® Point-of-Use Photochemical FiltersRapid changeout filters featuring superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents

Representing a lineage of in-fab production expertise and

customer collaboration, Impact® point-of-use (POU) photo-

chemical filters deliver superior filtration solutions to critical

photolithography processes.

Ultra Cleanliness with the Latest Impact Filter

Designed to meet sub-2× nm technology node requirements,

Impact 8G UCP’s cleaning process optimizes organic levels with

lower particle shedding, metal extractables, and non-volatile

residue (NVR). Conversely, process start-up time is shortened,

and device yields are greatly improved. Impact filters enable fast

filter changeouts, while high surface area and low hold-up

volume reduce chemical usage and exposure to hazardous

chemicals during filter installation and disposal.

Array of Membrane Technologies Maximizing Retention Performance and Chemical Compatibility

Impact filters utilize various membrane technologies to maximize

retention performance. The asymmetric UPE membrane enables

tighter retention performance (down to 3 nm with Impact 8G

series filters) and lower pressure drop than a standard symmetri-

cal UPE membrane. The Impact Duo technology, which com-

bines the UPE membrane with a polyamide or nylon layer at

2

APPLICATIONS—

Filter Series FILTER TYPE APPLICATIONS*

Impact 8G Impact 8G, 8G UCP POU photoresist, ancillary photochemicals and solvent filtration

Impact 8G UCP Impact 8G-L, 8G-L UCP POU photoresist, ancillary photochemicals and solvent filtration

Impact 2 V2 Impact Asymmetric Nylon POU photoresist, ancillary photochemicals and solvent filtration

Impact 2 UPE POU photoresist, ancillary photochemicals and solvent filtration

Impact 2-Duo POU photoresist, ancillary photochemicals and solvent filtration

Impact plus V2 Impact Plus V2 UPE POU photoresist, ancillary photochemicals and solvent filtration

Impact Plus-Duo POU photoresist, ancillary photochemicals and solvent filtration

Impact Plus Nylon POU photoresist, ancillary photochemicals and solvent filtration

Impact SR-LHVD (all Teflon®) Aggressive solvents

Impact Mini Impact Asymmetric Mini POU photoresist, ancillary photochemicals and solvent filtration

Impact HV Impact high viscosity Polyimide process; wafer level packaging; 3-D lithography

*Please contact your Regional Customer Service Center for specific recommendations.

3

FEATURES & BENEFITS—

Ultra cleanliness Impact 8G UCP filters

Designed with an advanced cleaning process for ultra cleanliness

Enhanced cleanliness with lower particle shedding, metal and organic extractables

Impact filters

Superior cleanliness maintained in critical chemical processes

High surface area and low hold-up volume help to reduce chemical usage and limit exposure to hazardous chemicals during installation and disposal

Array of membrane technologies maximizing retention performance

Asymmetric UPE membrane

Tighter retention (down to 3 nm with Impact 8G series filters) and lower pressure drop than a standard symmetrical UPE membrane

Impact Duo membrane

Combines UPE membrane with a polyamide or nylon layer at retention ratings down to 5 nm to remove difficult contaminants from specific resists

Nylon membrane

Optimized gel retention performance at a 10 nm retention rating for market-leading contamination control

Innovative design solutions Impact 8G’s core-fill design

Increases flow rate with low defectivity performance

Reduces filter priming time

Advanced Connectology

Quickly and securely connects Impact filters to Impact manifold and IntelliGen dispense systems

Impact 8G flushing shell

Offers a clean, efficient transitional flow-through solution or photochemical filtration and dispense

4

Impact 8G and 8G UCP Series Filters

SPECIFICATIONS—

Materials Membrane 8G, 8G-L:

Asymmetric UPE, Nylon 6, Duo (UPE/nylon, PCM*)

8G UCP, 8G-L UCP:

UPE (clean resin), DUO (UPE/nylon)

Surface area 8G, 8G UCP:

UPE: 1200 cm2 (1.29 ft2)

Nylon/Duo: 800 cm2 (0.86 ft2)

PCM: 1300 cm2 (1.40 ft2)

8G-L, 8G-L UCP:

UPE: 2400 cm2 (2.58 ft2)

Nylon/Duo: 1600 cm2 (1.72 ft2)

PCM: 2600 cm2 (2.80 ft2)

Supports, core shell HDPE

O-ring Kalrez® perfluoroelastomer (OF)

Retention rating 8G and 8G UCP series 3, 5, 10, 20 nm*

Nylon 6 10, 20 nm

Duo 5, 10 nm

PCM** 10 nm

Maximum operating conditions

Maximum inlet pressure:

0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward/reverse differential pressure:

0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)

Maximum operating temperature:

40°C (104°F)

Hold up volume Impact 8G: 55 cc

Impact 8G-L: 110 cc

Compatibility*** PGMEA, PGME, NMP, ethyl lactate, MMP, cyclohexanone and other photochemical solvents

Wettability*** Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA and other photochemical solvents.

Fittings (use Impact 2 manifold****)

4 mm/3 mm Flowell™ 60 Type for OF filters

5 mm/3 mm Flowell 60 Type for OF filters

6 mm/4 mm Flowell 60 Type for OF filters

6.35 mm/3.95 mm Flowell 60 Type for OF filters

6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters

6.35 mm/3.95 mm Super Type Pillar® for OF filters

6.35 mm/4.35 mm Super Type Pillar for OF/OM filters

* UPE 20 nm: Standard UPE only ** PCM: Surface-modified hydrophilic UPE *** Please contact your Regional Customer Service Center for specific recommendations. **** See the Impact 2 V2 Filters section for information about the Impact 2 manifold.

5

PERFORMANCE DATA—

DIMENSIONS—

200

150

100

50

0

25

20

15

10

5

0

Impact 8G UPE

Typical Flow Rate (L/min) 1 cP @ 25°C (77°F)

Di�

eren

tial

Pre

ssu

re (k

Pa)

Di�

eren

tial

Pre

ssu

re (p

sid

)3 nm

5 nm8G-L 3 nm

10 nm8G-L 5 nm

8G-L 10 nm

0 4 8 12 16 20Typical Flow Rate (L/min) 1 cP @ 25°C (77°F)

0 4 8 12 16 20

200

150

100

50

0

25

20

15

10

5

0

Impact 8G Nylon and Duo

Di�

eren

tial

Pre

ssu

re (k

Pa)

Di�

eren

tial

Pre

ssu

re (p

sid

)

8G-L 10 nm Duo

8G-L 10 nm Nylon

8G 10 nm Nylon

8G 5 nm Duo

8G 10 nm Duo

35.0 mm(1.38")

10 mm(0.39")

127.0 mm (5.0")

172 mm(6.77")

138 mm(5.43")

45.0 mm(1.77")

94 mm(3.70")

79.0 mm(3.11")

59.5 mm(2.34")

122 mm(4.80")

65 mm (2.56")

Top View − 8G, 8G-L Side View − 8G-L Side View − 8G

82.5 mm (3.25")

49 mm(1.93")

73 mm (2.87")

136 mm(5.35")

88 mm(3.46")

Impact 8G/8G-L, 8G UCP/8G-L UCP

Front View Side View

Impact 8G and Impact 8G UCP with Manifold

6

ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers..

Impact 8G and 8G UCP Series Filters: part number

A2 C 1

*Cleaning only applies to Impact 8G UCP series filters.

Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm

MembraneS = AsymmetricC = UPED = DuoN = NylonM = PCM

Cleaning*UCP = Ultraclean

Quantity1 = 1/pack

O-ring0 = OMK = Kalrez

Pleating style0 = StandardM = M-pleat

Configuration0 = StandardL = Long

7

Impact 8G and Impact 2 Flushing Shell

SPECIFICATIONS—

IMPACT 8G FLUSHING SHELL IMPACT 2 FLUSHING SHELL

Hold-up volume 1 mL 9 mL

Resin Ultraclean Standard

Internal surface area 1.4 cm2 (0.22 in2) 33 cm2 (5.12 in2)

Internal Test Results

Durability air pulse test (0-0.6 MPa) >6.0 million cycles 1.5 ~ 2.0 million cycles

Burst pressure 4.6 ~ 5.5 MPa 3.5 ~ 4.2 MPa

Particle shedding ≤20 particles /1 mL (≥0.05 µm H2O after 5 min flush)

—

Metal (10% HCl extract) <2.0 µg/unit (23 metals) —

Organics (reference data) (GC-FID test) 0.01 ~ 0.03 mg/unit 2.7 ~ 3.4 mg/unit

Note: The flushing shell is recommended for short-term use flushing tools and fluid lines; it is NOT recommended for long-term use especially after applying pressure or exposure to solvents.

DIMENSIONS—

ORDERING INFORMATION—

Part Number Description

A2AMC00K1 Impact 8G flushing shell with Kalrez O-ring

A2AMC0001 Impact 8G flushing shell with no O-ring

28 mm(1.10")

8

Impact 2 V2 Filters

SPECIFICATIONS—

Materials Membrane UPE, nylon, Duo (UPE/nylon), PCM

Surface area Asymmetric nylon:

800 cm2 (0.86 ft2)

Asymmetric PCM:

1350 cm2 (1.45 ft2)

Duo, nylon:

800 cm2 (0.86 ft2)

850 cm2 (0.92 ft2)

Supports (upstream, downstream, mold)

HDPE

O-ring Kalrez perfluoroelastomer

Retention rating Nylon 6 10 nm, 20 nm, 0.05 µm

UPE 3 nm – 1 µm

Duo 5, 10, 30 nm

PCM (surface-modified UPE) 20 nm, 0.05 µm

Maximum operating conditions

Maximum inlet pressure:

0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward/reverse differential pressure:

0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)

Maximum operating temperature:

40°C (104°F)

Hold up volume ≤55 cc

Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.

Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.

Fittings (use Impact 2 manifold)

4 mm/3 mm Flowell 60 Type for OF filters

5 mm/3 mm Flowell 60 Type for OF filters

6 mm/4 mm Flowell 60 Type for OF filters

6.35 mm/3.95 mm Flowell 60 Type for OF filters

6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters

6.35 mm/3.95 mm Super Type Pillar for OF filters

6.35 mm/4.35 mm Super Type Pillar for OF/OM filters

*Please contact your Regional Customer Service Center for specific recommendations.

9

PERFORMANCE DATA—

1009080706050403020100

0 1 765432 8 9 10

0 1 765432 8 9 10

Impact 2 V2 Asymmetric UPE FiltersD

i�er

enti

al P

ress

ure

(kP

a)

Typical Flow Rate (mL/sec)

35

30

25

20

15

10

5

0

Impact 2 V2 Asymmetric Nylon Filters

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (mL/sec)

160

140

120

100

80

60

40

20

0

Impact 2-Duo

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (mL/sec)

0 1 765432 8 9 10

50454035302520151050

0 1 2 3 4 5 6 7 8 9 10

20 nm

10 nm

50 nm

Impact 2 V2 PCM Filters

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (mL/sec)

20 nm

10 nm

50 nm

5 nm

10 nm

30 nm

5 nm3 nm

10 nm

10

DIMENSIONS—

94 mm(3.70")

79.0 mm(3.11")

35.0 mm(1.38")

10 mm(0.39")

59.5 mm(2.34")

82.5 mm (3.25")

Side View

127.0 mm (5.0")

122 mm(4.80")

172 mm (6.77")

138 mm (5.43")

45.0 mm(1.77")

Impact 2 V2 Filter with Impact 2 Manifold – 6.35 mm Flowell 60 Type

Front View

4

65 mm (2.56")

Top View Side View

49 mm(1.93")

73 mm (2.87")

88 mm(3.46")

Impact 2 V2 Filter with Impact 2 Manifold

11

ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.

Impact 2 V2 Filters: part number

A2 2 1

* The M-pleat style only applies to Impact filters with a UPE membrane of up to 30 nm.

Impact 2 manifolds (for Impact 8G, Impact 8G UCP and Impact 2 V2)

Part number Description

A2MX222K1 Impact 2 manifold, Flowell 60, 6.35 mm OD and 3.95 mm ID, Kalrez O-ring (for OM filters)

A2MX22201 Impact 2 manifold, Flowell 60, 6.35 mm OD and 3.95 mm ID, no O-ring (for OF filters)

A2MX222KT Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, Kalrez O-ring (for OM filters)

A2MX222ET Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, EPDM O-ring (for OM filters)

A2MX2220T Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, no O-ring (for OF filters)

A2MX44401A Impact 2 manifold, Flowell 60, 4 mm OD and 3 mm ID, no O-ring (for OF filters)

A2MX55501A Impact 2 manifold, Flowell 60, 5 mm OD and 3 mm ID, no O-ring (for OF filters)

A2MX66601A Impact 2 manifold, Flowell 60, 6 mm OD and 4 mm ID, no O-ring (for OF filters)

A2MP222K1 Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 3.95 mm ID, Kalrez O-ring (for OM filters)

A2MP222KT Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 4.35 mm ID, Kalrez O-ring (for OM filters)

A2MP22201 Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 3.95 mm ID, no O-ring (for OF filters)

A2MP2220T Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 4.35 mm ID, no O-ring (for OF filters)

Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm

Y = 30 nmZ = 0.05 µmV = 0.1 µm G = 0.2 µm

MembraneA = Thin UPE

(Symmetric)S = AsymmetricD = DuoM = PCMN = Nylon

O-ringO = OMK = KalrezPleating style

0 = StandardM = M-pleat*Open

0 = StandardL = Long

Quantity1 = 1/pack

12

Impact Plus V2, Plus Duo, and Impact SR LHVD Filters

SPECIFICATIONS—

IMPACT PLUS V2 IMPACT PLUS DUO IMPACT SR LHVD

Materials Membrane UPE, nylon, PCM UPE/nylon PTFE

Surface area 10 nm asymmetric 1300 cm2 (1.46 ft2)

850 cm2 (0.92 ft2) 600 cm2 (0.65 ft2)

10 nm, 20 nm 1400 cm2 (1.51 ft2)

20 nm PCM 1400 cm2 (1.51 ft2)

All others 1200 cm2 (1.29 ft2)

Supports and molded components

HDPE —

Supports, core, sleeve, shell

— PFA

O-ring Kalrez perfluoroelastomer

Retention rating Nylon 6 10 nm, 20 nm, 0.05 µm

UPE 3 nm –1 µm

Duo 10, 30 nm

PCM (surface-modified UPE)

20 nm – 0.05 µm

PTFE 20 nm –1 µm

Maximum operating conditions

Maximum inlet pressure

0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) 0.39 MPa (3.9 bar, 56.6 psi) @ 25°C (77°F)

Maximum forward/reverse differential pressure

0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) 0.29 MPa (2.9 bar, 42 psi) @ 25°C (77°F)

Maximum operating temperature

40°C (104°F) 30°C (86°F)

Hold up volume ≤55 cc ≤45 cc

13

IMPACT PLUS V2 IMPACT PLUS DUO IMPACT SR LHVD

Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.

All photochemical solvents

Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA, NMP and other photochemical solvents.

Prewetting should be considered with higher surface tension solvents such as NMP, cyclohexa-none, GBL, EGMEA ethyl lactate and MMP.

Fittings (uses Impact 2 Manifold)

1⁄4" Flaretek®

*Please contact your Regional Customer Service Center for specific recommendations.

PERFORMANCE DATA—

200

150

100

50

0

25

20

15

10

5

0

Di�

eren

tial

Pre

ssu

re (k

Pa)

Di�

eren

tial

Pre

ssu

re (p

sid

)

50

40

30

20

10

00 4 8 12 16 20

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)

Di�

eren

tial

Pre

ssu

re (p

sid

)GPM

60

40

20

10

0

8

7

6

5

4

3

2

1

0

7

6

5

4

3

2

1

00 168 24 32 40

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)

Di�

eren

tial P

ress

ure

(psi

d)

0.100 0.20 0.30 0.40 0.50 0.60

20 nm

Impact Plus Duo

Impact Plus V2 UPE

Impact SR LHVD

0.2 µm

0.05 µm

0.1 µm

200

150

100

50

0

25

20

15

10

5

0

0 4 8 12 16 20

Di�

eren

tial

Pre

ssu

re (k

Pa)

Di�

eren

tial

Pre

ssu

re (p

sid

)

Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)

Impact Plus V2 Asymmetric UPE

3 nm10 nm

30 nm

10 nm

0 4 8 12 16 20Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)

5 nm

SPECIFICATIONS (CONTINUED)—

14

DIMENSIONS—

21.0 mm(0.83")

21.0 mm(0.83")

Top View Side View

19.0 mm(0.75")

95.5 mm(3.76")

71.9 mm (2.83")

35.8 mm(1.41")

82.5 mm(3.25")

90.0 mm(3.54")

71.0 mm(2.80")

Impact Plus V2, Impact Plus Duo, Impact SR LHVD Filters

190.0 mm (7.48")

140.0 mm(5.51")

190.0 mm(7.48")

52.4 mm(2.06")

40.0 mm(1.57")

76.0 mm(2.99")

6.0 mm (0.24")

115.0 mm (4.53")

Side View with required filter changeout space for filtersSide View

Impact Plus V2, Impact Plus Duo, Impact SR LHVD Filters with Impact ST Manifold

15

Impact ST manifolds

Part Number Description

DZUM 044 C1 Impact ST manifold

DZUM 044 E1 Impact ST manifold, no O-ring

Impact Plus SR LHVD Filters: part number

AT 000

**Flushing shell and 0.05 µm only.

ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.

Impact Plus V2 Filters: part number

AP 20 1

* The M-pleat style only applies to Impact filters with a UPE membrane of up to 30 nm.

Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm

Z = 0.05 µmV = 0.1 µm G = 0.2 µm

MembraneA = Symmetric UPES = Asymmetric UPED = DuoM = PCMN = Nylon

O-ringO = OMK = KalrezPleating style

M = M-pleat*0 = All others

Quantity1 = 1/pack

Pore sizeF0 = Flushing shellTX = 20 nmFZ = 0.05 µmFV = 0.1 µmFG = 0.2 µm

O-ringK1 = Kalrez**01 = No O-ring

16

Impact Mini Filters

SPECIFICATIONS—

Materials Membrane UPE

Surface area 250 cm2 (0.27 ft2)

Supports (upstream, downstream, mold)

HDPE

O-ring Kalrez perfluoroelastomer (on filter)

Retention rating UPE 5 nm – 0.1 µm

Maximum operating conditions

Maximum inlet pressure:

0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward/reverse differential pressure:

0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)

Maximum operating temperature:

40°C (104°F)

Hold up volume ≤15 cc

Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.

Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.

Note: The Impact Asymmetric Mini uses a pump (Entegris IntelliGen Mini or IntelliGen ASF) instead of a manifold.*Please contact your Regional Customer Service Center for specific recommendations.

PERFORMANCE DATA—Impact Mini

20 nm

0.05 µm

0.1 µm

1.50

1.25

1.00

0.75

0.50

0.25

0

20

15

10

5

00 5 10

Di�

eren

tial

Pre

ssu

re (b

ar)

Typical Flow Rate (L/min) – 1 cP @ 25°C (77°F)

Di�

eren

tial

Pre

ssu

re (p

sid

)

GPM0 0.10 0.10 0.15

17

DIMENSIONS—

ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.

Impact Mini Filters: part number

AM 200K 1

Ø5.69 cm (2.24") 7.29 cm (2.87")

5.56 cm(2.19")

Front View Side View

Note: The top view dimensions of Impact Mini are the same as Impact 2 V2.

Retention ratingX = 20 nmZ = 0.05 µmV = 0.1 µmF = 5 nmT = 10 nm

MembraneA = Symmetric UPES = Asymmetric UPE

Quantity1 = 1/pak

18

Impact HV Filters

SPECIFICATIONS—

Materials Membrane UPE, PTFE

Surface area 3400 cm2 (3.66 ft2)

Supports, core, sleeve HDPE

O-ring Kalrez perfluoroelastomer

Retention rating UPE 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm

PTFE 0.2 µm, 1.0 µm

Maximum operating conditions

Maximum inlet pressure:

0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward/reverse differential pressure:

0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)

Maximum operating temperature:

40°C (104°F)

Available manifold connections

Dispense system — IntelliGen HV two-stage dispense system

Standalone (Optimizer ST2 manifold)

Inlet/outlet 1⁄4", 3⁄8", and 1⁄2" Flowell 60

1⁄4", 3⁄8", 1⁄2" and 6 mm tube stubs

Vent/drain 1⁄4" Flowell 60

1⁄4" and 4 mm tube stubs

PERFORMANCE DATA—

120

100

80

60

40

20

00 2 3 4 5 6 7 8 9 101

Di�

eren

tial

Pre

ssu

re (k

Pa)

Typical Flow Rate (L/min)

Impact HV Filters

0.1 µm UPE

0.2 µm PTFE

1.0 µm PTFE

0.2 µm UPE

0.5 µm UPE1.0 µm UPE

www.entegris.com

FOR MORE INFORMATION

Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you.

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©2013-2020 Entegris, Inc. | All rights reserved. | Printed in the USA | 4414-7372ENT-0720

DIMENSIONS—

ORDERING INFORMATION—Impact HV filters

Part Number Description

ATAG0LKM1 Impact HV PTFE 0.2 µm OF Kalrez O-ring

ATAA0LKM1 Impact HV PTFE 1.0 µm OF Kalrez O-ring

AWAV0LK1 Impact HV UPE 0.1 µm OF Kalrez O-ring

AWAG0LK1 Impact HV UPE 0.2 µm OF Kalrez O-ring

AWAA0LKM1 Impact HV UPE 1.0 µm OF Kalrez O-ring

AWAH0LKM1 Impact HV UPE 0.5 µm OF Kalrez O-ring

91.0 mm(3.6")

Vent

Outlet

Inlet

105.5 mm(4.2")

Ø159.9 mm(6.3")

Ø89.7 mm(3.5")

Top View

Side View