17
Chapter 1. Electrons and Holes in Semiconductors Modern Semiconductor Devices for Integrated Circuits Allowed values of energy can be plotted vs. the propagation constant, k. Since the periodicity of most lattices is different in various direction, the E-k diagram must be plotted for the various crystal directions (complex). Si, Ge, GaP, AlAs : indirect band gap semiconductor A transition must necessarily include and interaction with the crystal so that crystal momentum is conserved. GaAs : the minimum conduction band energy and maximum valence band energy occur at the same k-value. direct band gap semiconductor semiconductor lasers and other optical devices -Direct bandgap: a minimum in the conduction band and a maximum in the valence band for the same k value -Indirect bandgap: a minimum in the conduction band and a maximum in the valence band at a different k value Direct and Indirect Semiconductor 0 i f i f photon f photon E E hv k k k k where k 0 i f phonon i f photon phonon f phonon phonon E E E k k k k k k where k

Modern Semiconductor Devices for Integrated Circuits Chapter 1. …bkict-ocw.knu.ac.kr/include/download.html?fn=559E036F732... · Modern Semiconductor Devices for Integrated Circuits

  • Upload
    others

  • View
    5

  • Download
    0

Embed Size (px)

Citation preview

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Allowed values of energy can be plotted vs. the propagation constant, k.

    Since the periodicity of most lattices is different in various direction, the E-k diagram must be plotted for

    the various crystal directions (complex).

    Si, Ge, GaP, AlAs :

    indirect band gap semiconductor

    A transition must necessarily include and

    interaction with the crystal so that crystal

    momentum is conserved.

    GaAs :

    the minimum conduction band energy and

    maximum valence band energy occur at the same

    k-value.

    direct band gap semiconductor

    semiconductor lasers and other optical devices

    -Direct bandgap: a minimum in the conduction band and a maximum in the

    valence band for the same k value

    -Indirect bandgap: a minimum in the conduction band and a maximum in the

    valence band at a different k value

    Direct and Indirect Semiconductor

    0

    i f

    i f photon f

    photon

    E E hv

    k k k k

    where k

    0

    i f phonon

    i f photon phonon f phonon

    phonon

    E E E

    k k k k k k

    where k

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Extension to Three Dimensions

    Electrons traveling in different

    directions encounter different

    potential patterns and therefore

    different k-space boundaries.

    The (100) plane of a face-centered

    cubic crystal showing the [100] and

    [111] directions.

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    The k-Space Diagrams of GaAs and Si

    Plot the direction[100]

    [111]

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    • A perfect semiconductor crystal with no impurities or lattice defects

    • No charge carrier at 0 K

    • EHP generation at higher temperature

    For intrinsic material

    in p n

    • At a given temperature there is a certain concentration of electron-hole

    pairs ni

    • If a steady state carrier concentration is maintained, there must be

    recombination of EHPs at the same rate at which they are generated.

    i ir g

    Intrinsic Material

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    • Doping is the most common technique for varying the conductivity of

    semiconductors

    • By doping, a crystal can be altered so that it has a predominance of

    either electrons (N-type) or holes (P-type)

    • Extrinsic: the equilibrium carrier concentrations n0 and p0 are different

    from the intrinsic carrier concentration ni

    [N-type][P-type]

    Extrinsic Material

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    For the case of N-type doping

    The energy level of the 5th electron is inside the energy gap but very close to the bottom of the conduction band. At RT, it gets enough energy to jump into the conduction band, becoming a free electron. It leaves behind positively charged donor atoms, which is immobile.

    For the case of P-type doping

    The acceptor atom introduces a localized energy level into the energy gap which is

    close to the top of the valence band. As a consequence, an electron from the valence

    band jumps onto this level, leaving behind a mobile hole and creating a negatively

    charged immobile acceptor atom.

    Effects of (a) N-type and (b) P-type doping in energy-band model presentation

    (C.B., conduction band; V.B., valence band.)

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    donor level

    acceptor level

    column V impurities

    column III impurities

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Donors and Acceptors in the Band

    Model

    - Shallow levels: acceptor and donor levels with small ionization energies,

    such as As, P, Sb, and B

    - Deep levels: impurity levels with large ionization energies, such as Au, Cu, Pt..

    Energy levels of donors and acceptors

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Ionization Energy of Donor and Acceptor

    (Binding Energy)• Estimated by modifying the theory of the ionization energy of a hydrogen atom.

    • Energy required for electron in solid to make a transition from the donor level to the

    conduction band and become (quasi) free.

    r3e, m0

    r2n=1n=1

    n=2n=3

    0

    re, m*r3

    r1

    r1n=1

    n=3

    n=2

    Si

    = 11.7 for Sir

    Hydrogen atom

    in vacuum

    n = , E = 0

    n = 3, E3

    n = 2, E2n = 1, E1

    hydrogen atom

    Donor atom

    in Si atom

    n = , Ed=Ecn = 3, Ed3

    n = 2, Ed2n = 1, Ed1

    Donor atom

    2n

    EE ionn

    eVqm

    EEEion 6.1332 220

    4

    01

    , n=1, 2, 3,

    eVm

    m

    EEEEE

    n

    r

    dcion

    )()(6.130

    *2

    0

    0

    1

    Ec=Ed~6meVn=1, Ed1=Ed

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    No broken bond ↔ No electron in conduction band andno empty state in valence band

    Comparison between Bonding and Energy Band Model

    Eg: equal to the energy required to break a bond

    Electron – hole pair (EHP) generation

    Electrons and Holes

    +-

    Completely empty

    Completely filled

    Eg

    Ec

    Ev

    +- E

    At 0 K

    No current flow

    -

    +-

    broken bond

    Ec

    Ev

    Eg

    +

    empty states in valence band

    With excitation with thermal or optical energy

    electron in conduction band

    Broken bond ↔ Electron (in conduction band and)Hole (empty state in valence band)

    - Electrons in conduction band

    - Holes (empty state) in valence bandCarriers:

    E

    E

    E

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Water analogy

    originally missing bond

    +-

    newly missing bond

    +-

    Ec

    Ev

    movement of empty state (movement of missing bond)

    Movement of Hole

    water flow

    Ec

    Ev

    Ec

    +-

    e

    Ev

    Electrons in conduction band: moves like free

    electron

    partially

    filled water in tubeelectrons in conduction band

    electron flow

    completely

    filled water

    in tube

    Ec

    Ev

    Ev

    Ec

    +-

    electrons in valence band

    no water flowno electron flow

    filled water with some bubble

    bubble

    flow

    Ec

    Ev

    Ev

    Ec

    +-Holes (empty states) in valence band: moves like positively charged free

    particle

    empty state flow

    E

    E

    E

    E

    E

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    - The electrons and holes in a crystal interact with a periodic coulomb field in the crystal.

    - They surf over the periodic potential of the crystal, and therefore mn and mp are not the same as

    the free electron mass, m0.

    Effective Mass

    n

    p

    qAcceleration electrons

    m

    qAcceleration holes

    m

    The solution becomes the plane wave as;

    The electron wave function is the solution of the three-dimensional Schrödinger wave equation

    ErVm

    )(2

    2

    0

    2

    EmkwheretrkjA

    02)],(exp[

    2 0

    2

    20,

    mE

    , or constant0)( rV

    For free electron,

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    2 0

    2

    2[ ( ) ] 0,

    mV r E

    0)( rV

    0*2

    2

    2 Em

    by neglecting and introducing new mass m* called “effective mass”)(rV

    the periodic crystal potential

    EmkwheretrkjA

    *2)],(exp[

    The solution looks like plane wave with m* ! (mn for electron and mp for hole)

    By adopting effective mass concept, the carriers in solids can be treated as almost free carriers.

    The calculation of effective mass must take into account the shape of the energy bands

    in three-dimensional k-space.

    Assuming the E-k relationship has spherical symmetry, an electric field, ,

    would accelerate an electron wave packet with

    *2*2

    222

    m

    p

    m

    kE

    2

    2

    2

    *

    1

    dk

    Ed

    m

    kp

    2

    2

    2,

    dk

    Edq

    m

    qaonAccelerati

    n

    22

    2

    / dkEdmassEffective

    k

    E

    For electrons in the crystal,

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    For particles moving in a crystal, there are an internal force in addition to an externally applied force.

    particleofmassrestmdt

    vdmamFFF exttotal 000int ,

    for free particle,,0int F

    amFF totalext

    0

    m*: new directly related to the external force, assuming int 0F

    correspond to ( ) 0V r

    amFFF exttotal

    *int

    In a crystal,

    glass

    marble

    vacuum

    fast dropslow drop

    water

    : gravitational force

    : viscosity of the liquid

    e, m0e, m*

    solid

    in vacuum in semiconductor

    qamFF totalext 0 int int* ,total extF F F m a q neglecting F

    extF

    intF

    E E

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Electrons in valence band

    The mass calculated by will have a negative value

    Valence band e- with (-) charge & (-) mass moves in an electric

    field in the same direction as h+ with (+) charge & (+) mass

    Selecting holes as the valence-band carriers

    (the minimum kinetic-energy position of holes at the peak)

    2

    2 2*

    /m

    d E dk

    2

    2 2*

    /

    km

    d E d

    For parabolic energy band, the electron mass is inversely related to the curvature

    of the (E, k) relationship

    The curvature of the band determines the

    electron effective mass, m*.

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    Sharper large light mass 2 2/d E dkWider small heavy mass 2 2/d E dk

    For a band centered at k=0, the E-k relationship near the minimum is usually parabolic:

    22

    C*E = k E

    2m

    2

    2 2*

    /

    km

    d E d

    (a) E–k diagram and (b) spherical constant-energy surface for GaAs

    2 2/d E dk negative negative effective mass

    E-k relationship for parabolic band

    with isotropic effective mass in 3-D:

    mx* = my* = mz* = m*

    22 2 2

    22 2

    2 2 2

    2 2 2

    ( )2 *

    12 * 2 * 2 *

    x y z

    yx x

    E k k km

    kk k

    m E m E m E

    Equation for sphere in k space

    The radius of the sphere stands for

    energy and the surface of the

    sphere is same energy, which is

    called constant energy surface.

  • Chapter 1. Electrons and Holes in SemiconductorsModern Semiconductor Devices for Integrated Circuits

    The real E-k diagram of Si is more complicated (indirect semiconductor).

    The bottom of EC and top of EV appear for different values of k.

    (b) ellipsoidal constant-energy surfaces in

    the conduction band. There are 6

    equivalent minima along [100] direction

    Read subsection 1.5.2;How to measure

    the effective mass?

    (a) E–k diagram of Si

    large light hole2 2/d E dk

    small heavy hole2 2/d E dk

    E-k relationship for parabolic

    band with anisotropic effective

    mass in 3-D: mx* ≠ my* ≠ mz*.

    In Si, mx* = my* ≠ mz*.

    The constant energy surface is not

    sphere, but ellipsoid.

    22 22

    * * *

    22 2

    2 2 2* * *

    22 2

    ( )2

    12 2 2

    yx z

    x y z

    yx x

    x y z

    kk kE

    m m m

    kk k

    m E m E m E

    Equation for ellipsoid in k space