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Page 1: PII: 0167-9317(93)90080-Ochouweb/publications/46 Fischer_RIE High... · P.B. Fischer and S.Y. Chou trenches in silicon and silicon-germanium 0167-9317/9 The Si wafers are p-type with

Page 2: PII: 0167-9317(93)90080-Ochouweb/publications/46 Fischer_RIE High... · P.B. Fischer and S.Y. Chou trenches in silicon and silicon-germanium 0167-9317/9 The Si wafers are p-type with

Page 3: PII: 0167-9317(93)90080-Ochouweb/publications/46 Fischer_RIE High... · P.B. Fischer and S.Y. Chou trenches in silicon and silicon-germanium 0167-9317/9 The Si wafers are p-type with

Page 4: PII: 0167-9317(93)90080-Ochouweb/publications/46 Fischer_RIE High... · P.B. Fischer and S.Y. Chou trenches in silicon and silicon-germanium 0167-9317/9 The Si wafers are p-type with

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