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August, 2006 1Sags Happen
Power QualitySoftSwitching Technologies
8155 Forsythia Street
Middleton, WI 53562
August, 2006 2Sags Happen
PQ Terms
Clean Power
Transient Sag
Swell Interruption
Dirty Power
August, 2006 3Sags Happen
Transients
Equipment effectsInsulation breakdown
Electrical damage Process lockups
PLC errors
August, 2006 4Sags Happen
Sag (1 phase)
Equipment effectsShutdowns
Ghosts errorsRandom lockups
Reduced life
August, 2006 5Sags Happen
Sag (2 phase)
Equipment effectsShutdowns
Ghosts errorsMotor stallsReduced life
August, 2006 6Sags Happen
Sag (3 phase)
Equipment effects Process Shutdowns
VFD failurePower supply damage
Reduced life
August, 2006 7Sags Happen
Swell
Equipment effectsMotors Overheating
Random Breaker tripsInsulation breakdown
Reduced life
August, 2006 8Sags Happen
Interruptions(1 Phase)
Equipment effectsRandom Shutdowns
Motor FailuresTripped breakersRandom lockups
August, 2006 9Sags Happen
Interruptions(2 Phase)
Equipment effects Process Shutdowns
VFD failurePower supply damage
Reduced life
August, 2006 10Sags Happen
Interruptions(3 Phase)
Equipment effects Process Shutdowns
VFD failurePower supply damage
Reduced life
August, 2006 11Sags Happen
IEEE Standard P-1159
August, 2006 12Sags Happen
Power Quality Variations
August, 2006 13Sags Happen
Semi F47-0606
August, 2006 14Sags Happen
Semi F47-0606
SemiconductorEquipment andMaterialsInternational
Facilities47- seq. number06- month06- year
F47-0606
August, 2006 15Sags Happen
Semi F47-0606
Primary focus of the specification is Process Equipment:Etch Equipment (Dry & Wet)
Film Deposition Equipment (CVD & PVD)Thermal Equipment
Surface prep and clean equipmentPhotolithography Equipment (Scanners, Stepper & tracks)
Ion Implant equipmentMetrology equipment
Automated Test equipmentChemical mechanical polishing/planarization equipment
Note: All process tools should be considered.
August, 2006 16Sags Happen
Semi F47-0606
Secondary focus of the specification is subsystems:Power SuppliesRF Generators
Ultrasonic GeneratorsComputers & communication systems
Robots & factory interfacesAC contactor & relay coilsChillers and cryo pumps
Pumps & blowersAdjustable speed drives
Note: subsystems can cause primary tools to shut off due to interlocks
August, 2006 17Sags Happen
Semi F47-0606
SEMI F47
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
Duration of Sag (seconds)
Pe
rce
nt
Vo
lta
ge
Re
ma
inin
g
recommended
required0.2 0.51 cycle 1 10
August, 2006 18Sags Happen
What does it mean to:
USERS OEM’S FACILITIES
Best practice for tool uptimeBalance of cost vs. protectionNo damaged toolsIncreased Wafer ProductionLess wafer reworkImproved quality
Mandated by userRide-thru, no BatteriesMarket advantageOption: up charge $$$Third Party Validation
No shutdowns on Chillers, compressors, Vacuum pumps, exhaust fansFewer internal complaints from Reduced maintenance battery freeExtended life on equipment: drives power supplies, motors, ect…
August, 2006 19Sags Happen
Equipment Sensitivity
August, 2006 20Sags Happen
August, 2006 21Sags Happen
I-Grid/I-Sense
August, 2006 22Sags Happen
Models:V3480A00V3120A00
Under: $1000.00
I-Sense voltage event recorder
August, 2006 23Sags Happen
What is the I-Grid?
• Independent Web based power grid monitoring network for Voltage Sags
• Over 2,500 monitors tracking voltage and frequency in real time around the world
• Synchronized to GMT for absolute “sequence of events” monitoring
• Linked to National Weather Service
August, 2006 24Sags Happen
Domestic I-Sense Monitoring Locations
August, 2006 25Sags Happen
0
10
20
30
40
50
60
70
<.1 sec <.25 sec <.5 sec <.75 sec < 1 sec < 1.5 sec < 2 sec < 5 sec < 15 sec
Power Quality is defined in Milliseconds
Significant power quality events (<80% nominal) from major I-Grid customers over the past 3 years (22,038 total events).
98% of events are less than 2 seconds
August, 2006 26Sags Happen
National Perspective
August, 2006 27Sags Happen
Phoenix Metro Area (69% sag)
8 monitors recorded an event on 12/08/2004 within one tenth of a second
August, 2006 28Sags Happen
Power Grid is Interconnected
August, 2006 29Sags Happen
Close-up on the Grid: Coors Brewing
August, 2006 30Sags Happen
February 12, 2006 Northeast Blizzard Radar ImageEvents occurred in Canada, New York, New Jersey, Delaware, Maryland and Virginia
Weather
During the recent Northeast Blizzard, 74 significant (< 80%) Voltage Sags were recorded by I-Sense monitors ranging from Canada to Virginia
August, 2006 31Sags Happen
Summary of Events:All Events
96%
2%
2%
22.6
24
18
0
5
10
15
20
25
80-88% 60% - 80% Below 60%
Average Disturbances Per Monitor Less than Two Seconds
Example PQ Report – Auburn, AL – 2005
Figure 1. Summary of Events: Multiple Monitor Average- During the calendar year 2005, 3 manufacturing locations in the Auburn, AL area recorded an average of 68 power disturbances per site. - Of all the events, 96% could have been protected by the DYSC technology. - Average disturbances per monitor are listed below:
Figure 2. Summary of Events: Less than Two Seconds-Of the average 64.6 disturbances per site that were below two seconds, it is likely that 22.6 events did not impact production, 24 events were probable production mishaps, and 18 events definitely caused production downtime.
OK: Typical automation equipment will not be affected by these events. Some very sensitive equipment may be affected, but in general, these events should not be counted as having an impact on a typical automation system.
Probable: Typical automation equipment such as relays, solenoids, contactors, PLCs, and HMI, screens will usually “error out” or trip off during these events and many times are blamed on faulty automation equipment.
Definite: Almost all automation equipment will be impacted by these events. Very few electrical devices live through an event in this range except possibly the lights
Average Disturbances per Monitor: 68
Events Less than Two Seconds 64.6
Events between 2 Seconds and 15 minutes 1.6
Events Greater than 15 minutes 1.6
Event Impact Definition
OK Probable Definite
3 MonitorsWithin GreaterAuburn Area
August, 2006 32Sags Happen
What Causes Voltage Sags?
Shouldn’t the Utilities Clean up their act?
August, 2006 33Sags Happen
Power Quality phenomena costs the continuous process and fabrication industries in this country over $100B annually.*
Today’s automated factory has more computing power than the average IT Department and factories don’t run well on “dirty power.”
Premium Power is not Clean Power
98% of all “dirty power anomalies” are voltage sags lasting less than 2 seconds
Voltage sags cause extensive unscheduled downtime
Did You Know…
August, 2006 34Sags Happen
Mother Nature
August, 2006 35Sags Happen
Drunk’n Utility Poles
August, 2006 36Sags Happen
Old Man Winter
August, 2006 37Sags Happen
Equipment Failures
August, 2006 38Sags Happen
Overgrown Trees
August, 2006 39Sags Happen
Equipment Operators
August, 2006 40Sags Happen
Fires