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Radio frequency analog electronics based on carbon nanotube transistors Coskun Kocabas*, Hoon-sik Kim , Tony Banks , John A. Rogers †§¶**, Aaron A. Pesetski †† , James E. Baumgardner †† , S. V. Krishnaswamy †† , and Hong Zhang** †† Departments of *Physics, Materials Science and Engineering, § Electrical and Computer Engineering, and Chemistry, Beckman Institute for Advanced Science and Technology, and Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana–Champaign, IL 61801; and †† Northrop Grumman Electronics Systems, MS-3B10, 1212 Winterson Road, Linthicum, MD 21090 Edited by George M. Whitesides, Harvard University, Cambridge, MA, and approved December 10, 2007 (received for review October 12, 2007) The potential to exploit single-walled carbon nanotubes (SWNTs) in advanced electronics represents a continuing, major source of interest in these materials. However, scalable integration of SWNTs into circuits is challenging because of difficulties in controlling the geometries, spatial positions, and electronic properties of individ- ual tubes. We have implemented solutions to some of these challenges to yield radio frequency (RF) SWNT analog electronic devices, such as narrow band amplifiers operating in the VHF frequency band with power gains as high as 14 dB. As a demon- stration, we fabricated nanotube transistor radios, in which SWNT devices provide all of the key functions, including resonant anten- nas, fixed RF amplifiers, RF mixers, and audio amplifiers. These results represent important first steps to practical implementation of SWNTs in high-speed analog circuits. Comparison studies indi- cate certain performance advantages over silicon and capabilities that complement those in existing compound semiconductor technologies. T he invention of the transistor in 1947 represents the birth of the solid state electronics age (1). The full scope of appli- cation possibilities began to emerge to the general public a few years later when researchers developed approaches to overcome the many scientific and technical challenges to implementing transistors in low-cost, handheld radios (2, 3). More advanced analog circuit systems and, ultimately, digital logic applications followed, thereby expanding the reach of transistors to virtually every form of modern technology. Although single-walled car- bon nanotubes (SWNTs) have many remarkable properties, transistors based on them must go through a similar development sequence if they are to achieve important roles in advanced electronics. The high level of difficulty associated with this development is empirically clear from the history of the field. More than 15 years of worldwide research, beginning with the discovery of nanotubes, has failed, for example, to yield realistic demonstrations of even basic systems that provide power gain in the radio frequency (RF) range. Here, we describe some progress in the area of SWNT based RF analog electronics, including carbon nanotube power amplifiers that operate in the VHF frequency band. These results, together with integration of this technology in transistor radios that use nanotube devices for resonant antennas, fixed RF amplifiers, RF mixers and audio amplifiers, might represent important first steps in the develop- ment of SWNTs for RF electronics and other related applications. The promise of SWNTs for electronics derives from their high mobilities and current carrying capacities (4, 5), together with their low intrinsic capacitances (6). Transistors and small-scale, simple digital logic devices that rely on individual SWNTs confirm this promise (7–9), through benchmarking studies con- ducted at low frequencies against single-crystal silicon (10). Scalable integration of SWNTs into digital circuits is challenging, although recent work with assembled individual tubes as active elements, or relatively dense, horizontally aligned arrays of tubes as thin film type semiconductors both show some promise (11–18). Nevertheless, the development of SWNTs for a digital electronics technology that could compete with silicon is daunt- ing. Analog electronics (19–21), by contrast, represents a dif- ferent and less well explored area of application of SWNTs. Analog devices share many of the same challenges associated with their digital counterparts, but they can be implemented at comparatively lower levels of integration density and in layouts that can better exploit the exceptional electronic and thermal properties of the SWNTs. Furthermore, analog devices require linearity, and it has been demonstrated that SWNTs have the potential to provide linearity well beyond what is possible with silicon or III–V semiconductors (22). Recent reports show some measurements of intrinsic high speed operation in transistors that use individual tubes or unaligned collections of tubes, and in a very recent case the use of a single tube device as a mixer in a radio (23), but without the sorts of layouts or performance that would be needed for realistic applications (20, 23–25). In particular, a critical part of an analog electronic circuit is the power amplifier, which converts small input signals to relatively high power outputs suitable for further processing. The ability to achieve power gain at high frequencies with 50 termination is essential for applications in RF communication devices, global positioning systems (GPS), radar modules, and others. This paper presents direct measurements of RF power gain for narrow band amplifiers based on transistors that use horizontally aligned arrays of SWNTs as semiconductor thin films. The ability of these devices to drive standard 50 termination systems leads to their straightforward use in analog electronics. Nanotube transistor radios in which nanotube devices provide all of the key functions demonstrate an important example of this capability. Results and Discussion For these systems, we developed advanced versions of basic layouts that we reported recently (11). In particular, horizontally aligned arrays of SWNTs with extremely linear configurations and high levels of alignment occupy the channel regions of transistor devices, where they act collectively as an effective thin film type semiconductor. Each of the several thousand SWNTs in a device provides an electrically continuous and independent pathway for charge transport. To achieve RF performance, we developed device designs that provide both high capacitance gate dielectrics (C g ) and low parasitic overlap capacitances (C gd ), Author contributions: C.K., H.-s.K., T.B., J.A.R., A.A.P., S.V.K., J.E.B., and H.Z. designed research; C.K., H.-s.K., T.B., A.A.P., S.V.K., and J.E.B. performed research; C.K., H.-s.K., J.A.R., A.A.P., S.V.K., J.E.B., and H.Z. analyzed data; and C.K., J.A.R., A.A.P., J.E.B., and H.Z. wrote the paper. The authors declare no conflict of interest. This article is a PNAS Direct Submission. **To whom correspondence may be addressed. E-mail: [email protected] or [email protected]. This article contains supporting information online at www.pnas.org/cgi/content/full/ 0709734105/DC1. © 2008 by The National Academy of Sciences of the USA www.pnas.orgcgidoi10.1073pnas.0709734105 PNAS February 5, 2008 vol. 105 no. 5 1405–1409 APPLIED PHYSICAL SCIENCES

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Radio frequency analog electronics based on carbonnanotube transistorsCoskun Kocabas*, Hoon-sik Kim†, Tony Banks‡, John A. Rogers†§¶‡**, Aaron A. Pesetski††, James E. Baumgardner††,S. V. Krishnaswamy††, and Hong Zhang**††

Departments of *Physics, †Materials Science and Engineering, §Electrical and Computer Engineering, and ¶Chemistry, Beckman Institute for AdvancedScience and Technology, and ‡Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana–Champaign, IL 61801; and ††Northrop GrummanElectronics Systems, MS-3B10, 1212 Winterson Road, Linthicum, MD 21090

Edited by George M. Whitesides, Harvard University, Cambridge, MA, and approved December 10, 2007 (received for review October 12, 2007)

The potential to exploit single-walled carbon nanotubes (SWNTs)in advanced electronics represents a continuing, major source ofinterest in these materials. However, scalable integration of SWNTsinto circuits is challenging because of difficulties in controlling thegeometries, spatial positions, and electronic properties of individ-ual tubes. We have implemented solutions to some of thesechallenges to yield radio frequency (RF) SWNT analog electronicdevices, such as narrow band amplifiers operating in the VHFfrequency band with power gains as high as 14 dB. As a demon-stration, we fabricated nanotube transistor radios, in which SWNTdevices provide all of the key functions, including resonant anten-nas, fixed RF amplifiers, RF mixers, and audio amplifiers. Theseresults represent important first steps to practical implementationof SWNTs in high-speed analog circuits. Comparison studies indi-cate certain performance advantages over silicon and capabilitiesthat complement those in existing compound semiconductortechnologies.

The invention of the transistor in 1947 represents the birth ofthe solid state electronics age (1). The full scope of appli-

cation possibilities began to emerge to the general public a fewyears later when researchers developed approaches to overcomethe many scientific and technical challenges to implementingtransistors in low-cost, handheld radios (2, 3). More advancedanalog circuit systems and, ultimately, digital logic applicationsfollowed, thereby expanding the reach of transistors to virtuallyevery form of modern technology. Although single-walled car-bon nanotubes (SWNTs) have many remarkable properties,transistors based on them must go through a similar developmentsequence if they are to achieve important roles in advancedelectronics. The high level of difficulty associated with thisdevelopment is empirically clear from the history of the field.More than 15 years of worldwide research, beginning with thediscovery of nanotubes, has failed, for example, to yield realisticdemonstrations of even basic systems that provide power gain inthe radio frequency (RF) range. Here, we describe someprogress in the area of SWNT based RF analog electronics,including carbon nanotube power amplifiers that operate in theVHF frequency band. These results, together with integration ofthis technology in transistor radios that use nanotube devices forresonant antennas, fixed RF amplifiers, RF mixers and audioamplifiers, might represent important first steps in the develop-ment of SWNTs for RF electronics and other relatedapplications.

The promise of SWNTs for electronics derives from their highmobilities and current carrying capacities (4, 5), together withtheir low intrinsic capacitances (6). Transistors and small-scale,simple digital logic devices that rely on individual SWNTsconfirm this promise (7–9), through benchmarking studies con-ducted at low frequencies against single-crystal silicon (10).Scalable integration of SWNTs into digital circuits is challenging,although recent work with assembled individual tubes as activeelements, or relatively dense, horizontally aligned arrays of tubesas thin film type semiconductors both show some promise

(11–18). Nevertheless, the development of SWNTs for a digitalelectronics technology that could compete with silicon is daunt-ing. Analog electronics (19–21), by contrast, represents a dif-ferent and less well explored area of application of SWNTs.Analog devices share many of the same challenges associatedwith their digital counterparts, but they can be implemented atcomparatively lower levels of integration density and in layoutsthat can better exploit the exceptional electronic and thermalproperties of the SWNTs. Furthermore, analog devices requirelinearity, and it has been demonstrated that SWNTs have thepotential to provide linearity well beyond what is possible withsilicon or III–V semiconductors (22). Recent reports show somemeasurements of intrinsic high speed operation in transistorsthat use individual tubes or unaligned collections of tubes, andin a very recent case the use of a single tube device as a mixerin a radio (23), but without the sorts of layouts or performancethat would be needed for realistic applications (20, 23–25). Inparticular, a critical part of an analog electronic circuit is thepower amplifier, which converts small input signals to relativelyhigh power outputs suitable for further processing. The ability toachieve power gain at high frequencies with 50 termination isessential for applications in RF communication devices, globalpositioning systems (GPS), radar modules, and others. Thispaper presents direct measurements of RF power gain fornarrow band amplifiers based on transistors that use horizontallyaligned arrays of SWNTs as semiconductor thin films. The abilityof these devices to drive standard 50 termination systems leadsto their straightforward use in analog electronics. Nanotubetransistor radios in which nanotube devices provide all of the keyfunctions demonstrate an important example of this capability.

Results and DiscussionFor these systems, we developed advanced versions of basiclayouts that we reported recently (11). In particular, horizontallyaligned arrays of SWNTs with extremely linear configurationsand high levels of alignment occupy the channel regions oftransistor devices, where they act collectively as an effective thinfilm type semiconductor. Each of the several thousand SWNTsin a device provides an electrically continuous and independentpathway for charge transport. To achieve RF performance, wedeveloped device designs that provide both high capacitancegate dielectrics (Cg) and low parasitic overlap capacitances (Cgd),

Author contributions: C.K., H.-s.K., T.B., J.A.R., A.A.P., S.V.K., J.E.B., and H.Z. designedresearch; C.K., H.-s.K., T.B., A.A.P., S.V.K., and J.E.B. performed research; C.K., H.-s.K., J.A.R.,A.A.P., S.V.K., J.E.B., and H.Z. analyzed data; and C.K., J.A.R., A.A.P., J.E.B., and H.Z. wrotethe paper.

The authors declare no conflict of interest.

This article is a PNAS Direct Submission.

**To whom correspondence may be addressed. E-mail: [email protected] [email protected].

This article contains supporting information online at www.pnas.org/cgi/content/full/0709734105/DC1.

© 2008 by The National Academy of Sciences of the USA

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with low resistance electrodes and probing pads. The electrodesdefine short gate lengths (Lg, down to 750 nm), precisely alignedto the source, drain (Ti, 1 nm; Pd, 10 nm; Au, 300 nm for sourceand drain; Ti, 10 nm; Au, 300 nm for gate), created either byelectron beam (ebeam) lithography (Raith, eLine) or by contactmode photolithography (MJB8, Karl Suss). The alignment pro-cedures provided an accuracy of 50 and 500 nm for theformer and latter processes, respectively, as determined by themeasured layouts of the electrodes. The lengths of the gateelectrodes fabricated by ebeam lithography were somewhatsmaller (100 nm) than the lengths of the channels (i.e., theseparations between the source and drain electrodes). The gatedielectrics consisted either of a bilayer of HfO2 (10 nm)deposited by atomic layer deposition, on top of a layer ofbenzocyclobutene (BCB, 20 nm Dow Chemical) spin cast onthe SWNTs or a single layer of a HfO2 (50 nm) deposited byelectron beam evaporation (3 105 Torr; Temescal CV-8)directly onto the SWNTs. The thin film capacitance of theformer and latter types of dielectrics were 160 nF/cm2 and210 nF/cm2, respectively. Fig. 1A shows schematic illustrationsof the device layouts, together with scanning electron (Fig. 1B)and optical (Fig. 1C) micrographs. The arrays of SWNTs hadaverage densities of 5 SWNT/m, with peak values as high as25 SWNT/m, in nearly ideal parallel, linear layouts, where95% of the tubes span the source and drain electrodes andthere are no tube/tube crossings or overlapping tubes. Thesedevices and the performance enabled by them are major tech-nical advances over previous results (11). Fig. 1D shows direct-current (DC) measurements of a representative device fabri-cated by ebeam lithography with an HfO2 dielectric, Lg 0.75m and a channel width (W) of 600 m. This device and otherslike it show predominately p channel behavior; design andprocessing modifications can yield either n channel or ambipolaroperation. In this example, gm is as high as 17 mS at a drain biasof 1 V and gate bias of 0.5 V. The device is capable of currentoutputs up to tens of mA. The estimated average on-current pernanotube in these devices is 5 A. The relatively low ratio ofthe currents in the on and off states results from the sizablepopulations (1/3) of metallic SWNTs in the channel. Althoughsuch low on/off ratios would preclude applications in digitallogic, they can be acceptable in analog RF systems where thedevices operate in a narrow range of voltages around a fixed biaspoint.

The large values of gm together with small Cg, Cgd, lead todevices with good performance in the RF range. Fig. 2 A and Bshow two port S-parameter data (symbols) for a device with W 300 m and Lg 8 m and an HfO2/BCB dielectric, forfrequencies between 10 MHz and 10 GHz. Modeling results(solid lines) using a small signal equivalent circuit (Fig. 2B inset)with transconductance of gm 9.7 mS a small signal shuntresistance of R0 220 , a gate-drain capacitance of Cgd 1.9pF, and a drain resistance of Rd 120 , yields S parameters thatmatch experimental results to within 1 dB over the 10 MHz to1 GHz frequency range. This simple four-parameter modelworks well because Rd is large, allowing us to ignore Cgs, Cds, andRs. The values of Rd and Cgd are close to expectations based onthe device geometry and materials. The product of gm and R0 is2, consistent with a device that has 68% semiconductingnanotubes, if we assume that the conductance per tube of themetallic nanotubes is equal to the maximum transconductanceper tube of the semiconducting nanotubes, a result that we findto be true empirically in our measurements of single SWNTdevices (11, 20). Fig. 2C shows a plot of current gain (H212) andmaximum available gain (Gmax) as a function of frequency for adevice with W 100 m and Lg 4 m and an HfO2/BCBdielectric. The maximum available power gain (Gmax) for atransistor is (26)

Gmax S21

S12 , K 1 or S21

S12K K2 1 , K 1,

[1]

where the stability factor, K, is given by

K 1 S11S22 S12S212 S112 S222

2S12S21 . [2]

Fig. 1. Schematic illustrations, images, and electrical properties of RF carbonnanotube array transistors. (A) Schematic exploded view of a RF transistor thatuses parallel, aligned arrays of SWNTs for the semiconductor. The criticaldesign aspects include: (i) aligned source, drain, and gate electrodes to elim-inate parasitic capacitance, (ii) short gate lengths and high capacitance gatedielectrics to maximize the transconductance, and (iii) low-resistance leadsand contact pads. (B) Scanning electron micrograph of source/drain electrodepairs with bridging arrays of SWNTs. The average density of SWNTs is 5 SWNTper m. (Insets) Magnified views. The devices used split gate layouts withprobing pads in a ground–signal–ground configuration suitable for directprobing with a vector network analyzer. (C) Optical micrograph of an array ofdevices on a quartz wafer. (Inset) Magnified view. (D) Transfer characteristicsof a representative device with channel length and width of 0.75 m, and600 m, respectively, formed by electron beam lithography. The red and bluecurves show the dependence of the transconductance (gm) and drain currenton gate voltage, both measured at a source/drain bias of 1 V.

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The extracted cutoff frequencies for current gain and powergain are fT 2.5 GHz and fmax 1.1 GHz, respectively.

The scaling of these quantities with Lg, shown in Fig. 2D,provides additional insights. For diffusive transport, the intrinsictransconductance should be proportional to Lg

1, whereas mea-surements show a weaker dependence on Lg. This differencearises from an effective transconductance, as extracted from thecurrent-voltage curves, that is a function not only of the intrinsictransconductance, but also of the shunt resistance, R0, associatedwith the metallic nanotubes, which is directly proportional to Lg.Fig. 2D shows the variation of fT and fmax with Lg for photo-lithographically defined devices with bilayer dielectric, W 300m and Lg between 2 m to 32 m. We find empirically, that fTscales as Lg

1, whereas fmax scales as approximately Lg0.5. The

former scaling is relatively easy to understand, because fT isproportional to gm/Cgd, gm is proportional to Lg

1 and Cgd isdominated by parasitic capacitance resulting from fringing fields,making this quantity essentially independent of Lg. (At frequen-cies near fT, the capacitive reactance is much smaller than R0 anddominates the device behavior.) The behavior of fmax is substan-tially more complicated. Simulations based on the small signalmodel in which gm scales as Lg

1 and R0 is proportional to Lgpredict a nontrivial behavior for fmax that is consistent with, butnot exactly the same as, a proportionality to Lg

0.5.We note that the peak mobilities (i.e., up to 2,500 cm2/Vs for

Lg 32 m), the intrinsic speeds (i.e., CV/I 16 ps for Lg 4m), and the intrinsic cutoff frequencies (i.e., up to 15 GHz forLg 4 m) all show significant advantages compared withsimilarly scaled silicon MOSFETs (10). Conventional III–Vtechnologies offer higher performance, but in n-channel oper-ation. [For additional discussion, see supporting information(SI) Text and SI Table 1.]

SWNT Power Amplifiers. These devices are capable of producingpower gain when the input and output are properly impedancematched, thereby providing the opportunity to build amplifiersthat operate in the VHF range. Fig. 3A shows a schematicillustration of the measurement system for a narrowband am-plifier, where a series inductor enables impedance matching. Theinductor combines with the Cgd to form a resonator, stepping upthe voltage on the input to a SWNT transistor that has a bilayerdielectric, W 300 m and Lg 4 m. These amplifiersprovided power gains of 1–14 dB into a standard 50 load forfrequencies up to 125 MHz. Fig. 3B shows the power gain as afunction of frequency for four different amplifiers. Modelingresults (line in Fig. 3B), using the same values that reproduce theS parameters as discussed for Fig. 2 A and B, indicate that anadditional 5 dB of gain could be obtained by properly imped-ance matching the output.

SWNT Transistor Radios. We fabricated a nanotube radio usingthese types of amplifiers and other SWNT transistor componentsto demonstrate several of the most important elements of analogelectronics (Fig. 4A). Substrates with devices were diced intochips, each containing three SWNT transistors, and then wirebonded into a conventional ceramic DIP package. Fig. 4B showsthe constructed circuit and packaged devices. The radio uses aheterodyne receiver design consisting of four capacitively cou-pled stages: an active resonant antenna, two fixed RF amplifiers,and an audio amplifier, all based on SWNT devices. The activeresonant antenna uses a magnetic dipole antenna formed from33 loops of wire on a 6-inch diameter form that has an inductanceof 92.4 H. The antenna is combined in parallel with a variablecapacitor and the gate-drain capacitance of a SWNT transistorto from an LC tank circuit that steps up the voltage of the RF

Fig. 2. Frequency response of RF carbon nanotube array transistors. (A and B) Smith chart and amplitude plot of measured (symbols) and modeled (lines)two-port S parameters for a device with channel length of 8 m and width of 300 m. (Inset) The four-parameter model used to simulate the device. (C) Currentgain (H212) and maximum available power gain (Gmax) as a function of frequency for a device with channel length of 4 m and width of 100 m, showing fT 2.5 GHz and fmax 1.1 GHz. (D) Plot of fT and fmax as a function of gate-length devices with channel widths of 300 m.

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signal by a factor of 30 by stepping up the impedance. A SWNTtransistor serves as a buffer to convert this high-impedancesignal back to 460 , resulting in a net power gain of 30 dB atthe resonant frequency. For the purpose of testing, the antennawas designed to resonate at 1,090 kHz, corresponding to a localradio station in the Baltimore, MD, area. The two RF amplifierswere constructed using the same basic design shown in Fig. 3. Aseries inductor and shunt capacitor are used as an impedancetransformer to step up the voltage to the gate of the FET. In thiscase, a 440-H inductor was used and the gate-drain capacitanceof the FET was supplemented with an external capacitor toprovide a total capacitance of 48 pF. The first RF amplifier stageprovides a signal gain of 20 dB at the resonant frequency. Thesecond RF amplifier performed the dual function of providinggain and demodulating the signal. Biasing the gate voltage of thesecond amplifier slightly above the maximum gain point createda large second harmonic in the amplifier output. Applying theamplitude modulated input signal to this nonlinear amplifierproduced a demodulated audio frequency signal with a conver-sion (mixer) gain of 8 dB. The audio amplifier design wassimilar to that of the RF amplifiers except the input was coupledwith a transformer to produce audio frequency gain. ThreeSWNT transistors were connected in parallel to produce aneffective transconductance of 20 mS. This was sufficient toprovide 20 dB of power gain into a standard 16- speaker at 1kHz. An audio recording of a traffic report picked up by thenanotube radio is given in the SI Movie 1; a power spectrum ofthis output, which is dominated by frequencies in the range of thehuman voice, appears in Fig. 4C.

ConclusionsThe results described here represent important first steps towardthe implementation of SWNT materials in high speed analogelectronics, in a manner that appears to have favorable scalingcharacteristics. Hundreds of devices, interconnected into desiredplanar layouts on quartz or even transferred to silicon arepossible, thereby opening up the possibility of achieving systemswith significantly more complex functionality. Straightforwarddownscaling of the dimensions of the types of devices introducedhere should enable further improvements in performance.Benchmarking studies suggest that this class of device has thepotential to provide a high performance p channel RF technol-ogy capable of complementing silicon and III–Vs in heteroge-neously integrated systems. Keys to realizing the full potential ofthis technology include increasing the density of the tubes,eliminating the metallic tubes, and reducing the device dimen-sions in a way that retains high performance. These possibilities,as well as strategies to improve the density of the SWNTs in thearrays, are promising directions for future research.

Fig. 3. Circuit schematics and frequency response of RF, amplifiers based oncarbon nanotube array transistors. (A) Circuit schematic for an SWNT-based RFamplifier, with an illustration of the measurement system. (B) Plot of theo-retical maximum stable gain calculated from S parameter data (line) andmeasured S21 data for narrow band amplifiers (symbols) with different match-ing inductors.

Fig. 4. Circuit schematics, images, and frequency response of a radio thatuses carbon nanotube array transistors for all of the active components. (A)Block and circuit diagrams of a radio that uses SWNT transistors for theresonant antenna, two fixed RF amplifiers, an RF mixer, and an audio ampli-fier. (B) Image of the radio, with magnified views of SWNT transistors wirebonded into DIP packages. (C) Power spectrum of the radio output measuredacross a 16 load, recorded during a commercial broadcast of a traffic report.

1408 www.pnas.orgcgidoi10.1073pnas.0709734105 Kocabas et al.

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Materials and MethodsChemical Vapor Deposition of the Arrays of SWNTs. The growth of the arraysof SWNTs was accomplished by chemical vapor deposition growth on quartz.The process starts with cleaning of an ST-cut single crystal quartz wafers andthen annealing them in air at 900°C for 8 h. 0.1–0.2 nm thick Fe film wasdeposited by electron beam evaporation (Temescal BJD1800, evaporationrate of 0.1 A/s) onto a photolithographically (standard UV photolithography)patterned layer of photoresist (AZ5214) on the quartz. Photoresist and pho-toresist residue were cleaned by acetone and stripper (AZ Kwik), respectively.To form isolated iron oxide nanoparticles, the samples were then annealed at900°C for 1.5 h. The SWNT growth process began with flushing the chamberwith a flow of Ar (3,000 sccm) for 2 min and then heating the furnace to 925°Cwhile flowing H2 (300 sccm). Ethanol vapor is used as a carbon source bypassing gases (8 sccm H2 and 8 sccm Ar) through an ethanol bubbler held a 0°Cin a water bath chiller. Growth was terminated after 20 min, and the chamberwas then cooled in H2 and Ar flow. After the growth scanning electronmicrograph (Raith e-LiNE) of the SWNTs were taken with 1kV accelerationvoltage (SI Fig. 5).

Transistor Fabrication. Long channel-length devices. We have used standard UVphotolithography to fabricate devices for long channel (2–32 m) length. Thefabrication process for long channel length devices began with fabrication ofsource/drain electrodes on SWNT array by UV photolithography (MJB8, KarlSuss) using AZ5214 photoresist. Metal for the source and drain electrodes (Ti:1nm, Pd:30 nm) was deposited by e-beam evaporation (Temescal BJD1800; basepressure of 2e-6 torr). Liftoff was accomplished by rinsing in acetone for 10min, and followed by rinsing with isopropanol and deionized water. Oxygenreactive ion etching (200 mT, 20 sccm O2 flow, 100W RF power) removedSWNTs outside of the channel region, which was protected by a patternedlayer of photoresist (AZ5214). Spin casting 2% BCB (20 nm) and atomic layerdeposition of HfO2 (10 nm) defined high capacitance bilayer dielectrics. Gatemetal (Ti, 2 nm; Au, 30 nm ebeam evaporation Temescal BJD1800; basepressure of 2e-6 torr) is defined top of the dielectric by UV photolithography.

After defining the gate metal, dielectric on the source/drain contact pads wasremoved by etching with concentrated HF acid.Short channel-length devices. The fabrication of short channel-length devices(0.75 nm-2 m) with these arrays of SWNT began with spin coating of a layer(400 nm) of electron beam (e-beam) resist (495PMMA-A6, Microchem) at 2,000rpm for 30 s on the SWNT/quartz. The samples were then baked on a hot plateat 220°C for 2 min. To avoid charging during electron beam (e-beam) writingprocess, a uniform layer of Al (12 nm) was deposited by e-beam evaporation(Temescal BJD1800; base pressure of 2e-6 torr) onto the resist. The source-drain pattern was the defined with an e-beam lithography tool (Raith e-LiNE)using an accelerating voltage of 10 KV and a current dose of 140 C/cm2. Afterwriting, the Al was removed with a KOH etching solution; the PMMA wasdeveloped by immersion in a solution of a 1:3 part solution of MIBK and IPA,for 45 s. Metal for the source and drain electrodes (Ti, 1 nm; Pd, 10 nm; Au, 300nm) was deposited by e-beam evaporation (Temescal BJD1800; base pressureof 2e-6 torr). Liftoff was accomplished by rinsing in acetone for 10 min, andfollowed by rinsing with isopropanol and deionized water. Oxygen reactiveion etching (200 mT, 20 sccm O2 flow, 100W RF power) removed SWNTs outsideof the channel region which was protected by a patterned layer of photoresist(AZ5214). The gate dielectric (50 nm HfO2) was deposited by e-beam evapo-ration (Temescal BJD1800, base pressure is 2e-5 Torr). After dielectric deposi-tion, the gate pattern was defined by a second e-beam lithography step, usingprocess conditions similar to those used for the source-drain layer. The gateelectrode was aligned (50 nm precision) to source and drain using previouslypatterned alignment markers. After defining the gate metal, the HfO2 on thesource/drain contact pads was removed by etching with concentrated HF acid.

Transistor Radio. For additional details, see SI Text.

ACKNOWLEDGEMENTS. This material is based on work supported by NationalScience Foundation Grant NIRT-0403489 and U.S. Department of Energy,Division of Materials Sciences Award DEFG02-91ER45439, through the Fred-erick Seitz MRL and Center for Microanalysis of Materials at the University ofIllinois at Urbana–Champaign.

1. Bardeen J, Brattain WH (1948) Phys Rev 74:230–231.2. Burke WE (1955) PF Reporter 13–14.3. Queen I (1956) Radio Electron 39–40.4. Zhou X, Park JY, Huang S, Liu J, McEuen PL (2005) Phys Rev Lett 95:1468051–

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APP

LIED

PHYS

ICA

LSC

IEN

CES

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Supporting Text for

“Radio Frequency Analog Electronics Based on Carbon Nanotube Transistors”

Coskun Kocabas 1, Hoon-sik Kim 2, Tony Banks6 and John A. Rogers 2-6,†

1Departments of Physics, 2Department of Materials Science and Engineering, 3Department of Electrical and Computer Engineering and 4Department of Chemistry 5Beckman Institute for Advanced Science and Technology 6Frederick Seitz Materials Research Laboratory

at the University of Illinois, Urbana-Champaign, Illinois

Aaron A. Pesetski, James E. Baumgardner, S. V. Krishnaswami and Hong Zhang†

Northrop Grumman Electronics Systems,

MS-3B10, 1212 Winterson Road, Linthicum, MD 21090

†e-mail: [email protected] and [email protected]

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Chemical vapor deposition of the arrays of SWNTs.

Figure S1 shows a scanning electron micrograph of SWNTs grown using the procedures

described in the main text.

Benchmarking Studies.

We performed benchmarking studies of our devices against existing Si and III-V

technologies, following data and procedures described by the Intel group (1). They key

device metrics for RF applications are intrinsic gate delay, intrinsic cutoff frequency

and field effect mobility. As outlined below, the devices presented in this manuscript

have superior performance, relative to Si, for these three parameters. Direct

comparisons to conventional III-V technologies are impossible because such devices

involve transport of electrons, rather than holes. In this sense, our devices offer

capabilities (i.e. p-channel operation) that complement those of III-Vs.

Intrinsic gate delay: The intrinsic gate delay is given by CgV/I where Cg is the intrinsic

capacitance, V is the bias voltage in the on state (where Vdrain = Vgate) and I is the drain

current. The capacitance of the SWNT array can be calculated using analytical models

(2). The intrinsic capacitance of a device (e.g. Fig. 2A and 2B) with Lg = 4 μm and W =

600 μm (i.e. ~2000 SWNTs in the device) is ~0.1 pF. The drain current, I, is ~24 mA at

V = Vdrain = Vgate = -2 V. Gate delay is, therefore, CgV/I = 16 ps. The corresponding

value for similarly scaled p-channel, Si MOSFET technology is 400 ps (1), and that for

n channel III-V technology is ~10 ps (1).

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Intrinsic cutoff frequency: The intrinsic cutoff frequency is given by g

m

Cgπ2

, where gm

is the transconductance and Cg is the intrinsic capacitance. The intrinsic cutoff

frequencies are ~15 GHz, for the devices with highest gm. The corresponding value for

similarly scaled p-channel, Si MOSFET technology is ~1 GHz (1) and that for n-

channel III-V technology is ~30 GHz (1).

Field effect mobility: Using standard models for the linear regime mobility(3,4), and

the computed the intrinsic capacitance, we find that the device with Lg = 32 μm (i.e. Fig.

2d) is ~2500 cm2/Vs. The corresponding value for similarly scaled p-channel, Si

MOSFET technology is ~150 cm2/Vs (1) and that for n-channel III-V technology (e.g.

GaAs) is ~5000 cm2/Vs (1).

Table 1 Device metrics for p-channel SWNT, p-channel Si MOSFET and n-channel III-V MESFET technologies, at design rules comparable to those demonstrated in the SWNT devices of the present manuscript.

p-channel Si MOSFET

p-channelSWNT-arrayRF device

quantity

μ

intrinsicspeed ~16 ps ~400 ps

~2500 cm2/Vs ~150 cm2/Vs

~15 GHz ~1 GHz

n-channelIII-V MESFET(e.g. GaAs)

~5000 cm2/Vs

~10 ps

~30 GHzintrinsicfrequency

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Nanotube transistor radios.

Circuit diagrams and descriptions of the different components of the radio are presented

in Figs. S2-S6.

References

1. R. Chau, et al., IEEE Trans. Nanotechn. 4, 153 (2005).

2. Q. Cao, et al., Appl. Phys. Lett. 90, 023516 (2007).

3. Sze, Physics of Semiconductor Devices , Wiley, New York (1981).

4. Streetman, Solid State Electronic Devices, Pearson, New Jersey (2006).

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Fig. S1. Scanning electron micrograph of an array of SWNTs on quartz. The average

tube density is ~5 SWNT/μm; peak values can reach ~25 SWNT/μm.

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single voltagesupply (6V battery)

DC gate biasfor gain

adjustment DC drain bias

AC coupledinput

AC coupledoutput

D

S

G

ground

RD ~ 3RDS

>100 kΩ

0-5k

22k

Z

Fig. S2. Basic configuration for a transistor in the radio circuit. The four sections of

the SWNT FET radio are based on this simple block. The block consists of three basic

elements, an impedance matching element, a FET configured as a common source

amplifier, and two DC bias lines. The input impedance of the FET is essentially 2 –

3 pF of capacitance in series with 100 – 300 Ω resistance. The impedance transformer

serves to step up the input voltage (at some frequency) by increasing the impedance to

match that of the FET. The impedance transformer provides 10 – 20 dB of voltage gain,

but no power gain. The FET is configured as a common source amplifier with a load

impedance given by the parallel combination of small signal shunt resistance of the FET

(R0), the 1 kΩ DC bias resistor, and input impedance of the next stage. Typically, this

combination is dominated by the R0 of the FET which is 200 – 500 Ω. The voltage gain

of the FET is thus the gmR0 product of the device, which is typically gmR0 = 2.5 (8 dB)

for these devices. If the input and output impedances of the stage are roughly equal, the

net power gain is 8 dB greater than the voltage gain of the impedance transformer. The

DC biases are provided by a -6 V supply. The variable resistor on the gate supply

allows the gate voltage to be tuned from 0 to -1.1 V.

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Fig. S3. Circuit diagram for the active resonant antenna. The active resonant antenna

uses the building block described in Fig. S2, with the impedance transformer given by a

resonant antenna that couples the broadcast radio waves to the gate of the FET. The

antenna is formed from 33 loops of wire on a 6” diameter form and has an inductance of

92.4 μH. It is resonated with a variable capacitor that can be varied between 130 and

240 pF. The resonator has a quality factor of Q = 50 and increases the voltage of the RF

signal by a factor of 30. For this radio, the antenna was tuned to 1090 kHz.

The SWNT FET used in the resonant antenna has a transconductance of gm = 2.9 mS.

The small signal shunt resistance of device is R0 = 860 Ω, making the output impedance

of this stage 460 Ω. The gate bias is tuned to maximize the output signal resulting in a

net gain of about 30 dB for this stage.

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Fig. S4. Circuit diagram for the narrow band amplifier. The amplifier stage is again

based on the circuit of Fig. S2 with the impedance transformer formed from an LC

resonator. The resonator has a series inductance of 440 μH and a shunt capacitance of

48 pF yielding a center frequency of 1090 kHz. The total capacitance of the resonator

has three components: 2 pF from the transistor (Cgd), 13 pF of parasitic capacitance

from the package and 33 pF provided by an external ceramic capacitor. The resonator

has a bandwidth of 10 kHz and provides about 20 dB of voltage gain.

The SWNT FET used in the amplifier has a transconductance of gm = 5.4 mS.

The small signal shunt resistance of device is R0 = 460 Ω, making the output impedance

of this stage 320 Ω. The gate bias was once again chosen to maximize the signal gain.

The net gain for this stage was about 20 dB. If desired, additional amplifier stages

could be inserted into the radio to increase the total receiver gain and allow detection of

smaller signals.

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Fig. S5. Circuit diagram for the active mixer. The circuit for the active mixer is

identical to that of the narrow band amplifier except that the FET used has a maximum

transconductance of gm = 8.9 mS. It can be operated identically to the amplifier to yield

a signal gain of about 20 dB. However, under normal operation the gate voltage of this

stage is biased slightly above the point of maximum transconductance to a highly non-

linear region where a large second harmonic appears in the output. In this bias regime,

the FET behaves as a mixer. The carrier signal mixes with the side-band signal to

produce a demodulated audio frequency signal. The mixer gain for the FET is

about -12 dB, which, when combined with the 20 dB voltage gain of the impedance

transformer, results in an overall power gain of 8 dB for the demodulated signal.

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Fig. S6. Circuit diagram for the audio amplifier. The audio amplifier again uses the

amplifier circuit shown in Fig. S2, but with the impedance transformation performed by

an audio frequency transformer of the type used in older model telephones. The

transformer steps up the voltage by about a factor of 10 over the 300 Hz to 20 kHz

bandwidth. The FET used is actually 3 SWNT FETs wired in parallel to yield a net

transconductance of 20 mS, sufficient to directly drive a 16 Ω speaker. The audio

amplifier has a net power gain of about 20 dB at 1 kHz.

The audio file accompanying the online information was recorded by simply

attaching the microphone input of a standard PC sound card in parallel with the 16 Ω

speaker.