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Family of Brands – Corion ® • New Focus • Oriel ® Instruments • Richardson Gratings • Spectra-Physics ® Reflective Microscope Objectives Wide spectral band Long working distances High numerical apertures Zero chromatic aberration Negligible coma, spherical, and astigmatic aberrations APPLICATIONS UV Metrology and Microscopy Spatial Filtering • Photomicroscopy Laser Energy Delivery Systems FT-IR Spectroscopy Newport Reflective Microscope Objectives are reverse Cassegrains following the Schwardchild design. Accordingly, they have zero chromatic aberration, and negligible coma, spherical, and astigmatic aberrations. We offer 15X and 36X objectives, broadband coated with aluminum and over coated with magnesium fluoride (MgF 2 ). They are usable from 200nm to 20μm. Special coatings are available upon request including MgF 2 optimized for the 157 to 195nm region, and gold for the visible to IR region. CONSTRUCTION Newport's reflective microscope objectives are fabricated from a single material providing a uniform thermal coefficient of expansion. Each objective contains two highly polished electroless nickel spherical mirrors. The mirrors are coated with aluminum and magnesium fluoride. Average reflection per surface of each mirror is 85% in the UV-VIS, and 90% in the IR (with a dip to 76% at 820nm). The primary mirror has a spherical concave surface with a center hole. The secondary mirror is a small convex spherical mirror that is machined into the spider assembly. The objectives are hand assembled in interferometric alignment fixtures allowing each pair of mirrors to be optimized as a set to achieve maximum resolution. Spot sizes of 2 μm for the 15X objective and 1μm for the 36X objective are typical. HOW THEY WORK In a typical focusing application, collimated light passes through the aperture hole in the primary mirror to the secondary mirror. The secondary mirror reflects and diverges the beam to fill the primary mirror. The primary mirror focuses the beam to a small spot called the Object Plane or Focal Point. Model Magnification Numerical Aperture BFL (mm) Working Distance (mm) Field of View (mm) Focal Length (mm) Obscuration (%) Secondary Mirror Diameter (mm) 50105-01 15X 0.4 160 24.0 1.2 13.0 27 10.5 50105-02 15X 0.4 Infinite 24.0 1.2 13.0 27 10.5 50102-01 36X 0.52 160 10.4 0.5 5.4 17 5.6 50102-02 36X 0.52 Infinite 10.4 0.5 5.4 17 5.6 Specifications Features

Reflective Microscope Objectives · The primary mirror has a spherical concave surface with a center hole. The secondary mirror is a small convex spherical mirror that is machined

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Family of Brands – Corion® • New Focus™ • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics®

Reflective Microscope Objectives

• Wide spectral band

• Long working distances

• High numerical apertures

• Zero chromatic aberration

• Negligible coma, spherical, and astigmatic aberrations

A P P L I C A T I O N S

• UV Metrology and Microscopy

• Spatial Filtering

• Photomicroscopy

• Laser Energy Delivery Systems

• FT-IR Spectroscopy

Newport Reflective Microscope Objectives are reverse Cassegrains following theSchwardchild design. Accordingly, they have zero chromatic aberration, and negligiblecoma, spherical, and astigmatic aberrations. We offer 15X and 36X objectives, broadbandcoated with aluminum and over coated with magnesium fluoride (MgF2). They are usablefrom 200nm to 20µm. Special coatings are available upon request including MgF2

optimized for the 157 to 195nm region, and gold for the visible to IR region.

C O N S T R U C T I O N

Newport's reflective microscope objectives are fabricated from a single material providing auniform thermal coefficient of expansion. Each objective contains two highly polishedelectroless nickel spherical mirrors. The mirrors are coated with aluminum and magnesiumfluoride. Average reflection per surface of each mirror is 85% in the UV-VIS, and 90% in theIR (with a dip to 76% at 820nm).

The primary mirror has a spherical concave surface with a center hole. The secondary mirroris a small convex spherical mirror that is machined into the spider assembly. The objectivesare hand assembled in interferometric alignment fixtures allowing each pair of mirrors to beoptimized as a set to achieve maximum resolution. Spot sizes of 2 µm for the 15X objectiveand 1µm for the 36X objective are typical.

H O W T H E Y W O R K

In a typical focusing application, collimated light passes through the aperture hole in theprimary mirror to the secondary mirror. The secondary mirror reflects and diverges the beamto fill the primary mirror. The primary mirror focuses the beam to a small spot called theObject Plane or Focal Point.

Model Magnification Numerical ApertureBFL

(mm)Working Distance

(mm)Field of View

(mm)Focal Length

(mm)Obscuration

(%)

Secondary MirrorDiameter

(mm)50105-01 15X 0.4 160 24.0 1.2 13.0 27 10.5

50105-02 15X 0.4 Infinite 24.0 1.2 13.0 27 10.5

50102-01 36X 0.52 160 10.4 0.5 5.4 17 5.6

50102-02 36X 0.52 Infinite 10.4 0.5 5.4 17 5.6

Specifications

Features

Family of Brands – Corion® • New Focus™ • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics®

Replicated Mirrors Technical Sales: 508-528-4411 [email protected] www.newport.com/franklin

PHONE EMAILBelgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] +33-(0)1-60-91-68-68 [email protected] +81-3-3794-5511 [email protected] +886 -(0)2-2508-4977 [email protected]

PHONE EMAILSanta Clara, USA +1-800-775-5273 [email protected] +31-(0)30 6592111 [email protected] Kingdom +44-1235-432-710 [email protected] / Austria / Switzerland

+49-(0)6151-708-0 [email protected]

Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry andBeaune-La-Rolande, France and Wuxi, China have all been certified compliant withISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.

Complete listings for all global office locations are available online at www.newport.com/contact

www.newport.comNewport Corporation, Global Headquarters1791 Deere Avenue, Irvine, CA 92606, USA

PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: [email protected]

DS-09051 (3/10)

Reflective Microscope Objectives

Al(MgF )ALUMINUM

MAGNESIUMFLUORIDE

2

0.2 0.4 0.6 1.0 2.0 4.0 6.0 10.0

0.2

0

0.4

0.6

0.8

1.0

RE

FLE

CTA

NC

E

WAVELENGTH (µm)

AuGOLD

Typical reflectance curves of metallic reflective coatings

© 2010 Newport Corporation. All rights reserved. The Newport logo is a registeredtrademarks of Newport Corporation.

DimensionsDimensions [in. (mm)]

Model A B C D E F G

50105-01 1.94 (49.3) N/A 1.52 (38.6) 0.94 (24.0) 12.0° 23.6° 6.30 (160.0)

50105-02 1.94 (49.3) 0.383 (9.72) 1.52 (38.6) 0.94 (24.0) 12.0° 23.6° N/A

50102-01 1.94 (49.3) N/A 1.52 (38.6) 0.41 (10.4) 15.0° 30° 6.30 (160.0)

50102-02 1.94 (49.3) 0.212 (5.3) 1.52 (38.6) 0.41 (10.4) 15.0° 30° N/A

C

DE

F

A

G

Dimensional diagram of Newport 160 mm BFLReflective Microscope Objective

A

B

C

DE

F

Dimensional diagram of Newport InfiniteBFL Reflective Microscope Objective

Ordering InformationMounting threads are 0.800-36 RMS

A) B)COLLIMATED LIGHT

APERTUREHOLE

SECONDARYMIRROR

PRIMARYMIRROR

1

A) Diagram of a typical focusing application of a reflective microscope objectiveB) Illustration of the rear focal plane of a 160 mm back focal length objective

A) B)COLLIMATED LIGHT

APERTUREHOLE

SECONDARYMIRROR

PRIMARYMIRROR

160 mm BackFocal Length

Model Description50105-01 Reflective Microscope Objective, 15x, 160mm BFL

50105-02 Reflective Microscope Objective, 15x, Infinite BFL

50102-01 Reflective Microscope Objective, 36x, 160mm BFL

50102-02 Reflective Microscope Objective, 36x, Infinite BFL