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22 Bd Benoni Goulin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr IRay Technology 12μm and 17μm Thermal Sensors Multi-Comparison of iRay LWIR Microbolometers SP20560 - MEMS report by Sylvain HALLEREAU Laboratory analysis by Youssef EL GMILI August 2020 – Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

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Page 1: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 1

22 Bd Benoni Goulin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

IRay Technology 12µm and 17µm Thermal Sensors

Multi-Comparison of iRay LWIR MicrobolometersSP20560 - MEMS report by Sylvain HALLEREAU

Laboratory analysis by Youssef EL GMILIAugust 2020 – Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 2

Table of Contents

Overview / Introduction 4

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Raytron Technology

o IRay Technology

o Market Analysis

Physical Analysis 16

o Summary of the Physical Analysis

o 17 µm Microbolometer, first generation

✓ Package Views

✓ Die Overview & Dimensions

✓ Die Process

✓ Die Cross-Section

✓ Die Process Characteristics

o 17µm Microbolometer, second generation

✓ Package Views

✓ Package Cross-Section

✓ Die Overview & Dimensions

✓ Die Process

✓ Die Cross-Section

✓ Die Process Characteristics

o 12µm Microbolometer

✓ Package Views

✓ Package Cross-Section

✓ Die Overview & Dimensions

✓ Die Process

✓ Die Cross-Section

✓ Die Process Characteristics

Manufacturing Process 177

o RTD611

o Global Overview

o ROIC Wafer

o Microbolometer Wafer

o Process Flow

o RTD3172

o RTD6122

Cost Analysis 199

o Yields Explanation & Hypotheses

o RTD611

✓ ROIC Front-End Cost

✓ Microbolometer Wafer & Die Cost

✓ IR Window Cost

✓ Package Cost

✓ Component Cost

o RTD3172

o RTD6122

Price Estimation 234

Technical and Cost Comparison 238

o TRD611vs. RTD3172 vs. RTD6122

Feedbacks 244

System Plus Consulting Services 246

Page 3: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 3

Overview / Introductiono Executive Summaryo Reverse Costing Methodologyo Glossary

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

Executive Summary

Founded in 2009, Yantai is now a leader of the infrared technology in China and in the world. During the last 6 years, IRay Technology had

upgraded their technologies from 17µm up to 12µm. This report highlights the quick evolution of the microbolometer technology in China.

IRay Technology has a broad range of products from thermal camera plug-ins for smartphones to FPA detector, cores and thermal cameras

for military IRay Technology already has the camera for today's high growth market, health security, and tomorrow's high growth market,

automotive and ADAS. All the products integrate the Raytron Technology microbolometer die. Today, the 17µm and 12µm microbolometer

are the most used sensors in IRay Technology products.

This full reverse costing study has been conducted to provide insight into technology data, the manufacturing cost and selling price of three

IRay Technology / Raytron Technology microbolometers, the RTD611 and RTD3172, two different generations of 17 µm microbolometers, as

well as the RTD6122, a 12µm microbolometer.

Metallic and ceramic package technologies are studied in this report followed by the choice of material for the windows.

The three microbolometers use all Vanadium Oxide technology but the newest generation in 17µm and the 12µm dies have an umbrella

structure above the VOx that increases the sensitivity of the components.

With a definition between 640x512 and 384x288 pixels the 3 microbolometer are designed for large markets, including consumer, industrial,

automotive, security, etc..

Along with the complete technical analysis of the three microbolometer components, this report analyses their cost and estimates their price.

Finally a technical and cost comparison between the three microbolometers is included.

Page 4: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 4

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD611 17µm Microbolometer - Package View & Dimensions

34.6mm

31

.7m

m

• Package: Metallic package

• Dimensions: 34.6 x 31.7 x 7.7 mm

• Pins: 40

Metallic package

Package top view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Window

Page 5: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 5

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD3172C 17µm Microbolometer - Package View & Dimensions

22mm

22

mm

• Package: Ceramic package

• Dimensions: 22 x 22 x 7.1 mm

Ceramic package

Package top view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Frame

Page 6: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 6

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD6122 12µm Microbolometer - Package View & Dimensions

22mm

22

mm

• Package: Ceramic package

• Dimensions: 22 x 22 x 8.2 mm

Window with the filters

Ceramic package

Package top view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Package bottom view©2020 by System Plus Consulting

Frame

Page 7: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 7

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTC611 17µm Microbolometer - Window

Page 8: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 8

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTC611 17µm Microbolometer - Die

Microbolometer©2020 by System Plus Consulting

Page 9: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 9

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTC611 17µm Microbolometer - Pixel

Page 10: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 10

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTC611 17µm Microbolometer – Cross-Section

Page 11: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 11

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso 17µm First Generation

o Packageo Windowo Microbolometer

o 17µm Second Generationo Packageo Windowo Microbolometer

o 12µm Generationo Packageo Windowo Microbolometer

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD6122 12µm Microbolometer - Cross-Section

Page 12: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 12

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso RTD611 17µm

o Supply Chain - Yieldso ROIC Wafer & Die

Costo Microbolometer

Wafer & Die Costo IR Window Costo Package Costo Component Cost

o RTD3162o RTD6122

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD3172 - Main Steps of Economic Analysis

Page 13: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 13

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso RTD611 17µm

o Supply Chain - Yieldso ROIC Wafer & Die

Costo Microbolometer

Wafer & Die Costo IR Window Costo Package Costo Component Cost

o RTD3162o RTD6122

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

RTD611 – Microbolometer Front-End Cost

Page 14: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 14

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

IRay Technology 17µm and 12µm Microbolometer Comparison - Package

RTD611 microbolometer RTD3172 microbolometer RTD6122 microbolometer

Page 15: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 15

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

IRay Technology 17µm and 12µm Microbolometer Comparison - Microbolometer

Page 16: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 16

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

Related Reports

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

IMAGING• FLIR Boson – a small, innovative, low power, smart

thermal camera core• Thermal Expert Infrared Camera for Smartphones• Opgal Therm-App Infrared Camera & Ulis IR

Microbolometer

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

IMAGING• Thermal Imagers and Detectors 2020 – COVID-19 Outbreak

Impact – Preliminary Report• Status of the MEMS Industry 2020• Sensing and Computing for ADAS Vehicle 2020

Page 17: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 17

COMPANYSERVICES

Page 18: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 18

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Technical & Cost Comparison

Feedbacks

Related Report

About System Pluso Company Serviceso Contact

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

Page 19: REVERSE COSTING® STRUCTURAL, PROCESS & COST REPORT

©2020 System Plus Consulting | SP20560 - IRay Technology 12µm and 17µm Thermal Sensors | Sample 19

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Technical & Cost Comparison

Feedbacks

Related Report

About System Pluso Company Serviceso Contact

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

www.systemplus.fr

NANTESHeadquarter

FRANKFURT/MAINEurope Sales Office

LYONYOLE HQ

TOKYOYOLE KK

GREATER CHINAYOLE

CORNELIUSYOLE Inc.

KOREAYOLE

Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 [email protected]

Mavis WANGTAIWANT :+886 979 336 809CN: [email protected]

America Sales OfficeSteve LAFERRIEREWESTERN UST : +1 310 600 [email protected]

Chris YOUMANEASTERN US & CANADAT : +1 919 607 9839 [email protected]