Rigaku Innovative Technologies Europe

(RITE)

Presented by:

Dr.Peter Oberta

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Introducing Rigaku

Since its inception in Japan in 1951, Rigaku has been at

the forefront of analytical and industrial instrumentation

technology. In fact, Rigaku means physical science in

Japanese, the core of instrumentation.

Rigaku Facts:

• Over 1600 employees worldwide

• Consolidated worldwide sales 270M€

• Presence in 57 countries

• Explicitly focused on X-ray technologies

• Our expertise allows us to provide

complete X-ray analysis solutions – we

make everything from X-ray sources, to

optics and detectors.

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- Wholly Owned Subsidiaries

RIT NSI RAI

RRT ART RAC

RUK RESE

RITE

RBC

RAP

Japan

RLA

Yamanashi Plant

Osaka Factory

Rigaku Headquarters

Rigaku Americas Corp.

The Woodlands, Texas

Rigaku Beijing Corporation

Beijing, China

Rigaku Innovative Technologies Auburn Hills, MI

Rigaku Europe SE Ettlingen, Germany

Rigaku Global Operations

Copyright © 2014 — Rigaku Corporation and its Global Subsidiaries. All Rights Reserved.

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XRD XRF SMX SAXS Sources

Stress Analysers Optics

Rigaku product line

Detectors Raman

Despite Rigaku corporate nature, our strongest product are custom made solutions

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Short history of before RITE

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The founding members of the company were employees of the Academy of Sciences and the Czech Technical University. Involved in many Czechoslovak space projects:

• First replication optics, 1969 • First X-ray mirror (Wolter I, 50 mm), 1970 • Salyut 7 orbital station (Wolter I, 240 mm nested), 1981 • Applications for plasma physics, 1985 • First Micromirror (aperture less than 1 mm, Bede) , 1991 • Collaboration with SAO (Cambridge, USA), WF X-ray optics, 1993

Reflex s.r.o

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• Reflex s.r.o. company was founded, 1996 • First Lobster Eye optics • Soller Slit manufacturing, 2000 • Multi-Foil optics, 2001 • Multilayer micromirrors, 2002 • X-ray CCD cameras, 2003 • X-ray tube production, 2004 • KB collimators for soft X-rays, 2006

RITE s.r.o • Rigaku established Rigaku Innovative Technologies Europe s.r.o. (RITE), 2008 • RITE will move nearby the new HiLASE facility in 2017

RITE s.r.o.

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• Established in 1996 as Reflex company • Established in 2008 as Rigaku company • 13 full time employees (6x PhD in physics a chcemistry), 4x MSc degree and administrativ workpower • Rigaku X-ray instrumentation distributor for Czech Republic and Slovakia • European X-ray microscopy application lab for Rigaku (Nano3DX in Brno) • Very close collaboration with thin film deposition company TTS and surface processing lab of the Academy of Sciences

Surface processing (currently outsourced): RÖDERS RXP 500 DSC - a high-speed, 5-axis machining centre with the accuracy better than 5 µm. NANOTECH 350FG - an ultra-precision, 4-axis machine with the Single Point Diamond Turning technology. STX-1202 - a wire saw with 12" diameter cutting capability and wire diameter of 0.28 mm, designed to cut or slice all kinds of material such as sapphire, YAG, YAP, CaF2, LiNbO3, GaP, ZnSe and others.

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Product portfolio

Optics Detectors

Accessible for non-Rigaku companies Confidential R&D for Rigaku

RITE Detectors portfolio

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xPIN: • Precise metrology pA resolution nA meter • X-ray (air/vacuum) and EUV (continues/pulsed)

Xsight FC camera: • Fiber coupled (FC) CCD • FOV: 18 × 13.5 mm @ 16 m resolution • FOV: 7.2 × 5.4 mm @ 8 m resolution

FC technology: • Fiber optics coupling on 3rd party cameras • Magnification 1:1 or 2:1

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RITE Detectors portfolio

Xsight LC camera: • Lens coupled (LC) CCD • FOV: 0.9 × 0.7 mm @ 0.27 m resolution • FOV: 14.4 × 10.8 mm @ 4.32 m resolution • 3 keV – 30 keV

Xsight LC camera - sCMOS: • Lens coupled (LC) sCMOS • FOV: 13.3 × 13.3 mm @ 20 m resolution • 100 fps

RITE optics portfolio

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EUV optics: • Wavelength: 13.5 nm, 6.xx nm, 2.8 nm, ... • Shapes: elliptical, parabolic, collector, Schwarzschild objectives, illuminator • Coating: Au, Ru, Ni, Mo/Si, ... Replicated optics: • Metallic surface (Au, Ru, Ni, Mo, ...) • R 50% • Grazing angles: 0.2 - 20 • Surface roughness:Ra 0.2 – 2 nm • Dimensions: D = 5 – 250 mm L = 10 – 150 mm • Optical shapes: elliptical, parabolic, aspherical shapes upon request • Spectral range: EUV (60 – 200 eV) Soft X-ray (200 – 2000 eV) X-ray (2 - 20 keV)

FOM, Netherlands

Bede Ltd., UK

Stratchclyde University, UK

CYMER, USA

Laser Laboratorium Gottingen, Germany

Gottingen University, Germany

WAT Military University, Warsaw, Poland

Naval Research Labs, USA

NIST, Washington DC, USA

University of California, San Diego, USA

NTT Res. Labs, Japan

NSTR, Japan

Toyota Res. Labs., Japan

LG, Korea

BESSY II synchrotron, Germany, and others …

Customer references

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Multi-foil optics Wide FOV • Glass or silicon substrates • Planar or ellipsoidal mirrors • Foils 33 mm to 300300 mm • Thickness from 30 m – 1 mm • Wavelength: EUV – soft X-ray • Surface: Au, Ni, Mo, Pt, W, ...

Lobster Eye • 5 – 10 keV • Focal length: 1000 – 1200 mm • Imaging: 1:1 • Spot size: 0.5 mm • FOV: 2° MFO KB system • 80 – 120 eV • FOV: 20° • Spot size: 0.5 – 1.0 mm

University Göttingen, 19.03.2015

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Domo arigato!

Rigaku Innovative Technologies Europe s.r.o.