Secondary Electron Yield Database

8/6/2019 Secondary Electron Yield Database

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A DATABASE OF

ELECTRON-SOLID INTERACTIONS

Compiled by

David C Joy

EM Facility, University of Tennessee, and

Oak Ridge National Laboratory

Revision # 08-1

For comments, errata, and suggestions please contact me [email protected]

This compilation is David C Joy April 2008
mailto:[email protected]:[email protected]:[email protected]


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Structure of the data base

The database presented here is an attempt to present as complete a survey as

possible of the published results on backscattering yields, secondary electron yields,

stopping powers, X-ray ionization cross-sections, and fluorescent yields. Computer-aided literature searches have been conducted to try and find all published references

in this general area for the period from 1898 to the present day. Clearly no claim can be

made as the completeness of any such search, and it is perhaps to be hoped that some

major body of work has been overlooked because, as discussed below, there are

otherwise major omissions in the materials available.

The rules for the data included in this collection are simple:

(a) only experimental results are included. Values that are not specifically indicated

by the author(s) as being experimental, or values that are clearly the result of

interpolation, extrapolation, or curve fitting, have been expunged.

(b) no attempt has been made to critically assess the accuracy or precision of

the data, nor to remove any results on the basis of their presumed quality.

(c) values have been tabulated primarily for the energy range up to 30keV,

although data points for incident energies up to 100keV have been included where theyare available.

The decision not to engage in any judgment of the quality of any of the sets of

results may seem to be a significant drawback to the utility of the database. However,

until so much data has been collated for each element or compound that rogue values can

infallibly be distinguished and eliminated, there is no criterion on which to reject any

particular result. Further it is conceivable that two tabulated values of a given

parameter may differ substantially and yet still both be of value. This is because of an

inherent contradiction in the nature of the measurements that are being made. A

measurement made in a UHV electron scattering machine with in situ sample cleaning

and baking facilities will naturally be more 'reliable' than a measurement made inside a

typical scanning electron microscope. But the values recorded in the microscope are

more 'representative' of the conditions usually employed on a day to day basis in an e-

beam tool than those obtained in the environment of a specialist instrument. All types


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of results are, therefore, reported so that users of the database can make their own

judgment as to the suitability, or otherwise, of any given piece of information.

The database currently contains several thousand individual values collected

from more than one hundred published papers and reports spanning the period from1898 to the present day. Since this is a 'work in progress' the compilation is

constantly being extended as additional values become available. As far as

possible a consistent style of presentation is used so that data for different elements and

compounds may readily be compared. All of the available data sets are grouped by

element or compound name for each of the major information groups (SE yields, BSE

yields, Stopping Powers, X-ray ionization cross-sections). The data is presented in a

simple two column format with the origin of each of the data sets (numbered #1 to #n)

indicated by a number in parenthesis referring back to the bibliography.

Backscattered Electrons

The data on the backscattered electron (BSE) yield as a function of the atomic

number of the target and of the incident beam energy is of particular importance in Monte

Carlo computations because it provides the best test of the scattering models that are

used in the simulation. This data is therefore both the starting point for the construction

of a Monte Carlo model, and the source of values against which the simulation can

be tested. The backscattered electron section contains data for forty or more elementsspread across the periodic table, as well as for a selection of compounds. If Castaings

rule can be assumed to be correct then the backscattering yield of a compound can be

found if the backscattering coefficients and the atomic fraction of the elements that form

it are known. Hence a desirable long term goal is to obtain a complete set of BSE yield

curves for elements. At present the BSE section contains information on more than 45

elements which is barely half of the solid elements in the periodic table, and of this

number perhaps only 25% of the data sets are of the highest quality, so much

experimental work remains to be done especially at the lower energies.

Secondary Yields

With the increasing interest in the simulation of secondary electron (SE) line

profiles and images there is a need to have detailed information on secondary electron

yields as a function of atomic number and incident beam energy. Secondary electron

emission was the subject of intense experimental study for a period of twenty years or


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Stopping Powers

The stopping power of an electron in a solid, i.e. the rate at which the electron

transfers its energy to the material through which it is passing, is a quantity of the highestimportance for all studies of electron-solid interactions since it determines among other

parameters the electron range (Bethe 1930), the rate of secondary electron production

(Bethe 1941), the lateral distribution and the distribution in depth of X-ray production,

and the generation and distribution of electron-hole pairs. Despite its importance

there is no body of experimental measurements of stopping power at those energies

of interest to electron microscopy and microanalysis. Instead stopping powers, and the

quantities which depend on them, have been deduced by analyzing measurements of

the transmission energy spectrum of MeV-energy -particles to yield a value for the

mean ionization potential I of the specimen (ICRU 1983), and then Bethe's (1930)

analytical expression for the stopping power has been invoked to compute the stopping

power at the energy of interest. While this procedure is of acceptable accuracy at high

energies (>10keV) it is not reliable at lower energies because some of the interactions

included in the value of I (e.g. inner shell ionizations) no longer contribute.

The database contains experimentally determined stopping power curves

for a collection of elements and compounds. The method for obtaining this information

from electron energy loss spectra has been described elsewhere (Luo et al 1991). Thedata is plotted in units of eV/ as a function of the incident energy in keV. At the high

energy end of the profiles the data corresponds closely to values deduced from Bethe's

(1930) law and using the I-values from the ICRU tables. At lower energies, however,

significant deviations occur as the Bethe model becomes physically unrealistic

although good agreement has been found with values computed from a dielectric

model of the solids (Ashley et al 1979).

The stopping power of a compound is the weighted sum of the stopping power of

its constituents, thus a key priority for future work should be to complete the set of

stopping power profiles for elements rather than to acquire more data on compounds.


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X-ray Ionization Cross-Sections

Measured values of the X-ray ionization cross-sections for various elements

and emission lines as a function of incident beam energy are also of great importancein microanalysis. Unfortunately, as a brief study of the graphs included here will show,

the amount of data available is small for K-shells, negligible for the L-shells, and all but

non-existent for the M- and higher shells. This is the result of pervasive experimental

difficulties, in particular the fact that any measurement couples together the ionization

cross-section and the fluorescent yield . Since, as can be seen from the plots in section

5 of the data-base, the value of the fluorescent yield is poorly known for the L- and

M-shells this causes a significant degree in uncertainty in the cross-section deduced from

this data. A more practically useful approach is, instead, to quote an X-ray generation

cross-section which is the product of the ionization cross-section and the fluorescent yield

term. Because the fluorescent term is never required separately in X-ray microanalysis

this result looses nothing of its generality but is much more robust. Future updates of this

database will include results in this format. For completeness section 5 tabulates all the

available fluorescent yield data for K,L, and M-shells.

Conclusions

This database is a first step towards the goal of providing a comprehensivecollection of the parameters which describe electron-solid interactions. In addition to

meeting the needs of those working in Monte Carlo modeling, it is hoped that a

systematic collection of data such as this may also be of value in experimental

electron microscopy. The quality and quantity of the data that has been amassed varies

widely from one material , and from one topic, to another so that while a few elements

can be considered as well characterized the overall situation is poor especially for

materials used in such areas as integrated circuit device fabrication .

Acknowledgments

The original version of the database was supported by the Semiconductor

Research Corporation (SRC) under contract 96-LJ-413.001, contract monitor is Dr. D

Herr, and by a grant from International SEMATECH.


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References

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INDEX

Introduction 2

Index 9

Master reference list 10

Section 1 Secondary electron yields - (a) for elements 16(b) for compounds 92

Section 2 Backscattered electron yields- (a) for elements 131

(b) for compounds 208

Section 3 Electron stopping powers (a) for elements 219

(b) for compounds 236

Section 4 X-ray ionization cross-sections 252

Section 5 X-ray fluorescent yields 299


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SECTION ONE

Secondary Electron Yield Data

(a) for elements, arranged in ascending atomic number

(b) for compounds, sorted in alpha-numeric order


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Hydrogen (solid) Z=1

Reference (48)E(keV) SE yield

0.5000 0.26400.8000 0.20801.0000 0.17201.2000 0.15601.5000 0.12002.0500 0.09602.9500 0.0720

Data Set #2 Reference (127) Sample is 75 monolayers of condensed H2 on copper

E(keV) SE yield

0.53 0.890.795 0.930.112 0.950.159 0.890.199 0.860.251 0.790.291 0.750.344 0.730.391 0.660.490 0.610.596 0.550.695 0.520.795 0.510.887 0.500.993 0.481.099 0.461.205 0.461.364 0.431.444 0.431.550 0.431.655 0.431.709 0.411.801 0.411.854 0.411.907 0.411.960 0.41

Data Set #3 Reference (133) Condensed H2 (normal incidence, see ref. for otherangles of incidence)


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E(keV) SE yield1.0 0.171.15 0.151.25 0.14

1.5 0.1251.8 0.10752.0 0.102.25 0.08752.5 0.082.75 0.0753.0 0.0675


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Beryllium Z=4

Reference (2)

E(keV) SE yield

1 1.6903 0.775 0.55110 0.24520 0.15230 0.079

Data Set #2 Reference (5)

E(keV) SE yield1 1.745

2 0.8633 0.5964 0.47065 0.3926 0.3347 0.2988 0.26669 0.23510 0.196

Data Set (3) Reference 21

E(keV) SE yield0.05 0.3860.1 0.4830.15 0.6170.2 0.5280.3 0.50.4 0.460.5 0.420.6 0.3860.7 0.3530.8 0.324

Data set #4 Reference (26)

E(keV) SE yield0.2 0.6



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E(keV) SE yield0.02 0.2040.04 0.8140.06 1.204

0.096 1.740.14 2.370.2 2.890.3 3.670.4 4.070.5 4.250.6 4.31


E(keV) SE yield

0.2 0.5


E(keV) SE yield0.10 0.440.15 0.4440.20 0.4470.30 0.4060.40 0.3480.50 0.3050.60 0.2630.80 0.2131.0 0.1752.0 0.1183.0 0.0984.0 0.085


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Boron Z=5

Reference (9)

E(keV) SE yield0.4000 1.00000.6000 1.0000




E(keV) SE yield0.05 1.000.15 1.20.60 1.00


E(keV) SE yield0.5 1.060.10 1.100.15 1.120.20 1.110.30 1.050.40 0.950.60 0.800.80 0.661.2 0.491.6 0.40


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0.30 0.90


E(keV) SE yield

5.0 0.1775.0 0.16430.0 0.06730.0 0.05


E(keV) SE yield0.20 0.920.30 1.100.40 0.98

0.50 1.020.60 0.970.70 0.950.80 0.950.90 0.901.00 0.721.5 0.392.0 0.363.0 0.334.0 0.25


E(keV) SE yield0.10 0.7090.20 0.820.30 0.850.40 0.8240.60 0.7450.80 0.6561.00 0.5432.0 0.3083.0 0.209

Data Set #9 Reference (135) (Graphite)

E(KeV) SE yield0.2 1.150.3 1.200.4 1.20


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0.5 1.130.6 1.050.8 0.931.0 0.811.3 0.71

1.65 0.621.8 0.62.0 0.572.43 0.482.75 0.433.00 0.40


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Sodium Z=11

Reference 70

E(keV) SE yield0.3000 0.8200


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Magnesium Z=12

Reference (21)

E(keV) SE yield0.0250 0.22400.05 0.58600.10 0.79300.20 0.93100.30 0.96600.40 0.92800.50 0.82800.60 0.8210






E(keV) SE yield0.039 0.1880.064 0.3540.132 0.8060.210 0.6270.303 0.630.40 0.6210.60 0.5540.80 0.5311.0 0.4272.0 0.2992.5 0.285


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0.4 2.170.5 2.100.6 1.98




E(keV) SE yield5.0 0.41930.0 0.075




E(keV) SE yield0.1 0.5710.2 0.6160.3 0.6420.41 0.640.6 0.580.808 0.51.0 0.452.0 0.3043.0 0.2284.0 0.18

Data set #13 Reference (127) 99.5% pure as received

E(keV) SE yield0.05 1,550.06 1.720.08 2.010.10 2.270.15 2.770.2 3.130.25 3.330.3 3.440.4 3.45


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Silicon Z=14

Reference (2)


3.0 0.7695.0 0.4910.0 0.343120.0 0.21630.0 0.138


E(keV) SE yield0.22 0.390.33 0.59

0.55 0.980.77 0.951.10 0.891.32 0.841.65 0.79


E(keV) SE yield10.0 0.21515.0 0.13620.0 0.10425.0 0.08130.0 0.07535.0 0.07240.0 0.0584


E(keV) SE yield0.05 0.6040.1 0.8540.15 1.010.2 1.1250.25 1.1460.3 1.1670.4 1.1670.5 1.1170.6 1.0830.7 1.04


35/333


36/333

3.8 0.254.0 0.254.5 0.265.0 0.24


E(keV) SE yield0.125 1.00.25 1.10.5 1.0



0.3 0.7400.4 0.7350.6 0.6070.8 0.5231.0 0.442.0 0.2733.0 0.1944.0 0.15




37/333


38/333

Phosphorus Z=15

Reference (70)

E(keV) SE yield

0.2000 0.7000


39/333


40/333

Calcium (Z=20)

Reference (106)

E(keV) SE yield

0.05 0.2140.1 0.320.15 0.3760.2 0.360.3 0.340.4 0.2570.6 0.2160.8 0.191.2 0.1542.0 0.132


41/333

Scandium Z=21

Reference (9)

E(keV) SE yield

0.3000 0.7510


E(keV) SE yield0.3000 0.7500



0.193 0.590.307 0.570.4 0.5520.5 0.540.6 0.5310.8 0.4751.0 0.4461.55 0.3962 0.3512.5 0.31


42/333

Titanium Z=22

Reference (68)

E(keV) SE yield

5.0000 0.34205.0000 0.279030.000 0.100030.0000 0.0870




E(keV) SE yield0.5 0.7680.8 0.7921.0 0.8201.5 0.7712.0 0.6453.0 0.5175.0 0.4107.0 0.3410.0 0.2925.0 0.130


E(keV) SE yield0.05 0.290.1 0.4480.21 0.5680.313 0.5720.41 0.5450.52 0.5150.6 0.4950.8 0.4411.0 0.4022.0 0.2513.0 0.1994.0 0.173

Data set #5 Reference (127) as received


43/333


44/333


45/333

Chromium Z=24

Reference (68)

E(keV) SE yield

5.0000 0.37605.0000 0.296030.0000 0.111030.0000 0.0960



7 0.46

6 0.52

5 0.59

4 0.683 0.82

2 1.06

1 1.56

0.5 1.78

0.3 1.5

0.2 1.2

0.1 0.6


46/333


47/333

Cobalt Z=27

Reference (70)

E(keV) SE yield

0.2000 1.00000.6000 1.2000


48/333


49/333


50/333

Copper Z=29

Reference (2)

E(keV) SE yield

1.0 1.595.0 0.6920.0 0.216


E(keV) SE yield2.5 0.755.0 0.47810.0 0.3115.0 0.224

20.0 0.17425.0 0.161


E(keV) SE yield0.5 2.110.8 1.8691.0 1.7231.2 1.4691.4 1.441.6 1.371.8 1.1942.0 1.1172.5 1.043.0 0.8933.5 0.8134.0 0.7525.0 0.641


E(keV) SE yield0.5 1.0091.0 0.89221.5 0.72552.0 0.58823.0 0.42164.0 0.32555.0 0.2745


51/333

6.0 0.2457.0 0.21578.0 0.19619.0 0.180410.0 0.1666


E(keV) SE yield0.05 0.3680.1 0.7010.2 1.000.4 1.230.6 1.260.8 1.2761.0 1.23


E(keV) SE yield0.5 1.411.0 1.3282.0 0.9923.0 0.8134.0 0.7245.0 0.6496.0 0.6047.0 0.5678.0 0.5379.0 0.52210.0 0.5




E(keV) SE yield5.0 0.395.0 0.29130.0 0.119


52/333


53/333


54/333

1.5 1.531.95 1.372.55 1.213.0 1.12


55/333

Zinc (Z=30)

Reference (106)

E(keV) SE yield

0.108 0.5910.131 0.6470.166 0.6700.2 0.6900.3 0.8540.4 0.9230.6 1.0030.8 1.0231.0 1.0011.462 0.9132.0 0.821

3.0 0.7434.0 0.52


56/333

Gallium Z=31

Reference (70)

E(keV) SE yield

0.0750 1.00000.5000 1.5500


E(keV) SE yield0.042 0.2690.075 0.3770.1 0.4790.2 0.6810.4 0.716

0.6 0.710.8 0.6831.0 0.6361.51 0.552.0 0.493.0 0.3834.0 0.308


57/333

Germanium Z=32

Reference (2)

E(keV) SE yield

1.0 1.625.0 0.64920.0 0.228


E(keV) SE yield0.1000 0.68000.2000 0.97000.3000 1.10000.4000 1.1200

0.5000 1.14200.6000 1.09001.0000 0.95601.2500 0.87001.5000 0.80001.7500 0.76002.0000 0.69602.5000 0.54003.0000 0.53003.5000 0.49004.0000 0.45004.5000 0.42005.0000 0.4200




E(keV) SE yield0.15 1.000.5 1.150.9 1.0




58/333

0.1 0.4730.15 0.6310.20 0.7150.4 0.7430.6 0.699

0.8 0.6681.0 0.6081.5 0.4712.0 0.3983.0 0.3124.0 0.264


59/333

Selenium (Z=34)

Reference (106)

E(keV) SE yield

0.048 0.590.073 0.6920.102 0.7980.159 0.8340.214 0.8620.316 0.8490.409 0.7980.611 0.7280.808 0.6861.0 0.6471.532 0.545

2.0 0.4893.0 0.4274.0 0.385


60/333

Rubidium (Z=37)

Reference #70

E(keV) SE yield0.3500 0.9000


61/333

Strontium (Z=38)

Reference (9)

E(keV) SE yield

0.2500 0.7500


E(keV) E yield0.2500 0.7500



0.07 0.380.15 0.4670.20 0.4820.3 0.4740.4 0.4340.6 0.4020.8 0.3511.0 0.3271.5 0.2642.0 0.213.0 0.1564.0 0.126


62/333

Yttrium (Z=39)

Reference (106)E(keV) SE yield0.2 0.594

0.282 0.6210.357 0.6570.404 0.6430.5 0.6130.6 0.5820.8 0.5251.0 0.4731.52 0.4132.0 0.363.0 0.278


63/333


64/333

Niobium (Z=41)

Reference (9)

E(keV) SE yield

0.5500 1.15101.0500 1.0000




E(keV) SE yield

0.15 1.000.375 1.30


E(keV) SE yield0.048 1.1530.068 1.2580.099 1.370.157 1.450.261 1.4360.35 1.360.443 1.310.535 1.2430.7 1.1421.0 1.0151.38 0.9411.864 0.902


E(keV) SE yield0.048 0.2940.057 0.3890.1 0.5910.172 0.790.237 0.870.425 0.8880.459 0.8450.684 0.785


65/333


66/333


67/333

2.0 0.7053.0 0.6014.0 0.474



7 0.52

6 0.56

5 0.63

4 0.71

3 0.84

2 1.04

1 1.41

0.5 1.54

0.3 1.24

0.2 1

0.1 0.55


68/333


69/333

Silver (Z=47)

Reference (2)

E(keV) SE yield

1.0 1.6153.0 0.905.0 0.62610.0 0.35820.0 0.26430.0 0.157



5.0 0.63610.0 0.4115.0 0.28520.0 0.23625.0 0.214


E(keV) SE yield0.5 1.21571.0 1.21181.5 1.03922.0 0.88243.0 0.68634.0 0.55885.0 0.46666.0 0.40127.0 0.3538.0 0.31379.0 0.294110.0 0.265




E(keV) SE yield


70/333


71/333

E(keV) SE yield0.02 0.480.1 0.7040.15 0.8610.2 0.958

0.3 1.1350.4 1.2390.6 1.3320.8 1.3461.0 1.3262.0 0.8753.0 0.6554.0 0.508


72/333


73/333

Indium (Z=49)

Reference (2)

E(keV) SE yield

1.0000 1.64003.0000 0.89205.0000 0.656010.0000 0.375020.0000 0.285030.0000 0.1740




E(keV) SE yield0.2 0.9440.28 1.110.4 1.1950.5 1.2390.6 1.2360.8 1.1620.9 1.1491.0 1.0821.1 1.0711.2 1.0471.3 0.9841.4 0.9771.5 0.960


E(keV) SE yield0.05 0.60.073 0.7040.1 0.7690.2 0.9890.3 1.0510.4 1.0560.5 1.0650.6 1.0410.8 0.991


74/333

1.0 0.9161.567 0.7942.0 0.6943.0 0.5434.0 0.445


75/333

Tin (Z=50)

Reference (2)

E(keV) SE yield

1.0000 1.65103.0000 0.89105.0000 0.642010.0000 0.377020.0000 0.307030.0000 0.1740








E(keV) SE yield0.056 0.470.086 0.5360.14 0.80.21 0.9560.3 1.0250.41 1.060.6 1.0630.8 1.0371.0 0.9991.5 0.8292.0 0.7133.0 0.574.0 0.459


76/333


77/333


E(keV) SE yield0.095 0.3410.146 0.484

0.197 0.60.3 0.7860.4 0.790.6 0.8250.8 0.821.0 0.762.0 0.663.0 0.584.0 0.5324.5 0.5


78/333


79/333

Cesium (Z=55)

Reference (21)

E(keV) SE yield

0.0500 0.39300.1000 0.49100.2000 0.62000.3000 0.69800.4000 0.72400.5000 0.71600.6000 0.71500.7000 0.71000.8000 0.7070






E(keV) SE yield0.03 0.2520.05 0.2990.075 0.3480.1 0.3970.2 0.4310.3 0.4370.4 0.430.6 0.3550.8 0.324


80/333


81/333

Lanthanum (Z=57)

Reference (9)

E(keV) SE yield

0.5000 0.8000


E(keV) SE yield0.3500 0.8000



0.3 0.6890.4 0.7280.5 0.720.6 0.7070.8 0.6451.0 0.6081.5 0.532.03 0.4553.0 0.374


82/333


83/333

Tantalum (Z=73)

Reference (9)

E(keV) SE yield

0.6000 1.2200


E(keV) SE yield0.6000 1.3000


E(keV) SE yield0.6000 1.3000


E(keV) SE yield0.1 0.450.14 0.580.16 0.660.2 0.7570.3 0.8490.4 0.9110.5 0.920.6 0.9240.8 0.8951.0 0.8341.6 0.792.0 0.752


E(keV) SE yield0.075 0.4840.113 0.7710.16 0.9920.25 1.1720.34 1.2570.4 1.2890.5 1.2990.6 1.2980.68 1.2910.8 1.268


84/333


85/333


86/333


87/333


88/333

Platinum (Z=78)

Reference (9)

E(keV) SE yield

0.7210 1.52100.7200 1.52000.6000 1.70500.8000 1.74101.2000 1.52901.6000 1.40001.9000 1.30602.5000 1.20003.0000 1.09403.6000 1.0300


E(keV) SE yield0.7 1.603.0 1.00


E(keV) SE yield0.075 0.7881.411 0.70


E(keV) SE yield0.35 1.00.7 1.8


E(keV) SE yield0.1 0.710.14 0.840.2 1.0330.4 1.2880.6 1.3680.8 1.3911.0 1.3541.564 1.2462.0 1.176


89/333

3.0 1.1364.0 0.926


E(keV) SE yield0.072 0.7850.08 0.9020.11 0.9960.132 1.1880.17 1.3350.24 1.490.327 1.6430.4 1.7330.5 1.7950.58 1.811

0.7 1.800.80 1.7511.0 1.6661.2 1.56


E(keV) SE Yield0.1 1.63

0.15 1.9

0.2 2

0.25 2.06

0.3 2.08

0.4 2.1

0.5 2.17

0.6 2.13

0.7 2.08

0.8 2.04

0.9 1.96

1 1.95

1.1 1.91

1.2 1.86

1.3 1.82

1.4 1.78

1.5 1.74

1.6 1.7

1.7 1.67

1.8 1.63

2 1.6

2.5 1.46

3 1.36

3.5 1.3


90/333

4 1.26

4.5 1.17

5 1.15

5.5 1.12


91/333


92/333


93/333

4.0 0.912


E(keV) SE yield

1.87 0.8092.2 0.7292.6 0.653.06 0.593.81 0.524.7 0.466.03 0.3897.6 0.31810.2 0.22819.7 0.11429.9 0.09



7 0.52

6 0.65

5 0.78

4 0.84

3 0.97

2 1.24

1 1.7

0.5 1.77

0.3 1.38

0.1 0.67




94/333

Mercury (Z=80)

Reference (9)

E(keV) SE yield

0.6000 1.0500


E(keV) SE yield0.6000 1.3000


E(keV) SE yield

0.6000 1.3000


E(keV) SE yield0.075 0.50.1 0.5980.2 0.8390.3 1.0420.4 1.1340.6 1.2320.8 1.2381.22 1.1071.61 1.0172.0 0.942.4 0.888


95/333

Thallium (Z=81)

Reference (9)

E(keV) SE yield

0.6500 1.4000


E(keV) SE yield0.6500 1.4000


E(keV) SE yield0.6500 1.7000


E(keV) SE yield0.044 0.4950.082 0.6390.13 0.7390.19 0.8690.29 0.9780.39 1.040.5 1.0680.6 1.0530.8 1.0091.0 0.9661.56 0.8542.0 0.7773.0 0.6494.0 0.554


96/333


97/333

Bismuth (Z=83)

Reference (2)

E(keV) SE yield

1.0000 1.66003.0000 0.89105.0000 0.795010.0000 0.437020.0000 0.376030.0000 0.3140






E(keV) SE yield5.0 0.4485.0 0.35530.0 0.165




E(keV) SE yield0.1 0.540.192 0.70.3 0.790.4 0.80.6 0.890.8 0.91.0 0.892.05 0.7293.0 0.59


98/333

4.0 0.57


99/333

Thorium (Z=90)

Reference (9)

E(keV) SE yield

0.7000 1.1010


E(keV) SE yield0.6000 1.3000


E(keV) SE yield0.8000 1.1000


100/333

SE Yield Data for compounds arranged by alpha


101/333

Aclar (polymer)

Reference (28)

E(keV) SE yield

0.1000 1.25000.2500 2.00000.5000 1.69000.7500 1.44001.0000 1.19001.2500 1.09001.5000 1.0300


102/333


103/333

Aluminum Beryllium AlBe

Reference (79)

E(keV) SE yield

0.200 2.2190.300 3.1550.400 3.9850.500 4.2680.600 4.4830.710 3.6910.810 2.8520.900 2.1001.000 2.0101.100 1.981


104/333

Ammonia Ice (frozen NH3)

Reference (115)

E(keV) SE yield

2.0 0.7172.5 0.6153.00 0.5383.5 0.4075.0 0.3536.1 0.2478.2 0.17910.1 0.14512.0 0.16514.2 0.14015.9 0.131

17.9 0.11120.4 0.10722.0 0.11123.2 0.11125.9 0.09227.7 0.09229.0 0.092


105/333


106/333

Boron Nitride BN

Reference (20)

E(keV) SE yield

0.050 1.0000.600 2.9003.000 1.700


107/333


108/333

Ceramics - various

OW133 Spinel aluminum fosterite

Reference (137)

E(keV) SE yield0.035 1.00.2 3.40.33 4.50.50 4.80.65 4.90.80 4.81.0 4.72.0 3.73.0 3.1

OW102 Fosterite

Reference (137)

E(keV) SE yield0.035 1.00.2 3.40.33 4.50.5 4.70.6 4.70.8 4.41.0 4.12.0 3.23.0 2.6

OW137 Fosterite

Reference (137)

E(keV) SE yield0.035 1.00.2 3.40.33 4.00.5 4.10.8 3.741.0 3.52.0 2.53.0 1.9


109/333

COAT725 (wafer coat)

Reference (86)

E(keV) SE yield

0.500 2.1500.700 1.6251.000 1.3501.500 1.0402.000 0.8953.000 0.7274.000 0.6105.000 0.5707.000 0.49710.000 0.405


110/333


111/333


112/333

Diamond (CVD diamond activated with CsI)

Reference (111)

E(keV) SE yield

0.09 5.370.138 4.680.18 8.390.25 18.480.35 25.50.45 30.20.59 35.20.73 39.950.95 46.61.14 53.31.34 59.4

1.55 64.371.76 69.01.96 73.02.17 76.72.37 80.72.54 83.727.3 86.32.93 89.03.0 90.3


113/333

Di-Phenyl

Reference (135)

E(Kev) SE yield

0.2 1.300.3 1.480.4 1.550.5 1.500.6 1.390.8 1.240.9 1.151.2 0.971.5 0.821.7 0.752.0 0.62


114/333

Fosterite - see also Ceramics (various)

Reference (20)

E(keV) SE yield

0.015 0.9000.020 1.0600.025 1.2500.030 1.4000.045 1.7000.050 2.0000.075 2.5300.100 3.1000.300 4.1000.400 4.5000.500 4.600

0.600 4.6000.700 4.4501.000 4.0501.400 3.6502.000 3.1002.400 2.9003.000 2.500


115/333

Ice (H2O)

Reference (115)

E(keV) SE yield

2.0 1.1543.0 0.804.0 0.9545.0 0.756.0 0.6138.0 0.55210.0 0.45412.0 0.35613.7 0.30617.7 0.22723.5 0.186

Liquid water

Reference (122)

E(keV) SE yield0.45 0.1030.64 0.490.88 1.131.08 1.521.26 1.581.45 1.561.67 1.471.85 1.402.07 1.312.25 1.262.5 1.213.6 1.114.06 1.045.1 0.9810.1 0.6715.1 0.4520.1 0.362

Liquid water (200 monolayers on copper)

Reference (127)



116/333

0.060 1.520.070 1.610.08 1.700.1 1.870.15 2.12

0.2 2.240.25 2.380.3 2.270.4 2.160.5 2.020.7 1.761.0 1.551.5 1.391.95 1.29


117/333

Indium tin oxide (ITO)

Reference: (131)

E(keV) SE yield

0.5 2.520.7 2.371.0 2.121.5 1.712 1.553 1.315 1.037 0.7210 0.72


118/333

Indium Zinc Oxide

Reference: (131)

E(keV) SE yield

0.5 2.670.7 2.51.0 2.21.5 1.782 1.613 1.315 1.027 0.8610 0.72


119/333

Interconnect line aluminum

Reference (86)

E(keV) SE yield10.000 0.2157.000 0.3205.000 0.3804.000 0.5503.000 0.6302.000 0.7901.500 0.8401.000 0.9100.700 1.0200.500 1.050


120/333

Kapton (polymer sheet)

Reference (27)

E(keV) SE yield1.45 0.501.9 0.42.5 0.373.0 0.313.8 0.284.5 0.235.2 0.14


E(keV) SE yield0.1 1.900.15 1.920.25 1.900.35 1.150.6 0.820.8 0.500.9 0.4251.0 0.251.25 0.191.5 0.092.0 0.0852.5 0.08


E(keV) SE yield9.0 0.1425 0.0645 0.0465 0.03380 0.025


E(keV) SE yield0.1 1.520.2 1.810.3 1.680.4 1.51


121/333

0.5 1.3550.6 1.230.7 1.130.8 1.060.95 1.0


E(keV) SE yield0.1 1

0.25 1.7

0.4 1.5

0.5 1.3

0.75 1

1 0.78

1.5 0.54

2 0.38

2.5 0.33 0.26

3.5 0.24

4 0.2

4.5 0.19

5 0.18


122/333


123/333

KBr (Potassium Bromide)

Reference (19)

E(keV) SE yield

0.2000 6.50000.3000 7.50000.4000 8.47000.6000 10.12000.9000 11.76001.2000 12.35001.5000 13.30001.8000 13.40002.4000 13.35003.0000 13.05004.2000 12.0000

5.1000 11.0000


124/333

KI (Potassium Iodide)

Reference (19)

E(keV) SE yield

0.0800 2.34000.1500 3.40000.2000 5.84000.4000 6.80000.6000 8.97000.7500 9.36001.0000 10.40001.2000 10.40001.5000 10.77001.8000 10.64002.1000 10.5000

2.5000 10.25003.0000 9.40003.5000 8.85004.0000 8.08004.5000 7.95005.0000 7.18005.5000 7.3100




125/333

KTCNQ (organic conductor)

Reference (29)

E(keV) SE yield

0.0500 1.06000.1000 1.40000.1500 1.48400.2000 1.57000.3000 1.49000.4000 1.35000.5000 1.23000.6000 1.12000.8000 0.94001.0000 0.83001.2000 0.7400

1.4000 0.69000.0200 0.53000.0100 0.2900


126/333

Lucite (polymer sheet)

Reference (30)

E(keV) SE yield

0.2200 2.40000.2600 2.50000.3500 2.50000.4000 2.20000.5000 2.00000.7000 1.50001.0000 1.10001.5000 0.80001.8000 0.70002.0000 0.60002.5000 0.5500


E(keV) SE yield8.0 0.2910.0 0.2015.0 0.1520.0 0.1225.0 0.09


127/333


128/333


E(keV) SE yield (MgO deposited by EBE on to a cold silicon substrate)0.5 3.150.75 3.35

1.0 3.451.25 3.61.5 3.41.75 3.02.0 2.852.5 2.53.0 2.253.5 2.054.0 1.75


E(keV) SE yield (MgO deposited by RF sputtering)0.5 2.00.75 2.01.0 1.81.25 1.61.50 1.51.75 1.252.0 1.12.5 0.83.0 0.73.5 0.554.0 0.5


129/333

Methanol ice (CH3OH)

Reference (115)

E(keV) SE yield

2.0 0.372.5 0.3393.0 0.3224.1 0.326.2 0.2578.4 0.21210.6 0.16612.4 0.16914.7 0.12317.4 0.10921.2 0.121

23.5 0.676


130/333

Mylar (polymer sheet)

Reference (32)

E(keV) SE yield

0.2 3.100.3 3.10.4 2.60.5 2.20.6 2.00.9 1.51.0 1.21.3 0.831.5 0.82.0 0.702.5 0.62


E(keV) SE yield9.0 0.17525.0 0.07545.0 0.05660.0 0.04480.0 0.04


E(keV) SE yield0.1 1.540.22 1.80.33 1.620.44 1.470.55 1.320.66 1.190.77 1.130.88 1.061.03 1.00


131/333

Napthalene (C10H8)

Reference (135)


1 0.98

1.33 0.92

2 0.87

2.67 0.83

3.33 0.81

4 0.79

5.33 0.75

6 0.74

6.67 0.72

7.33 0.70

8.33 0.67

9.33 0.64

10 0.62


132/333

Phenanthrene

Reference (135)

E(keV) SE yield

0.2 1.40.24 1.550.3 1.650.4 1.580.5 1.470.6 1.250.8 1.051.0 0.881.2 0.761.3 0.721.5 0.65

2.0 0.592.15 0.522.3 0.462.5 0.432.7 0.403.0 0.36


133/333

Sodium Bromide NaBr


0.2000 4.50000.4000 12.00000.6000 16.70000.8000 19.50001.0000 20.85001.2000 21.65001.5000 22.50001.8000 22.10002.1000 21.30002.4000 20.50002.7000 20.4000

3.0000 20.20004.0000 18.45004.5000 17.60005.0000 17.5000

Data set #2 Reference (70)E(keV) SE yield1.8 24.0


134/333


135/333

Nylon (polymer solid)

Reference (29)

E(keV) SE yield

0.1500 2.29000.2000 2.54000.3000 2.48000.4000 2.23000.5000 1.98000.6000 1.80000.8000 1.46001.0000 1.23001.2000 1.03001.4000 0.9500


136/333

Polyethylene (polymer solid)

Reference (3)

E(keV) SE yield

0.2000 2.80000.2500 2.90000.3000 2.90000.4500 2.50000.5000 2.50000.6000 2.40000.9000 1.90001.0000 1.50001.5000 1.05002.0000 0.8000


E(keV) SE yield8.0 0.325.0 0.1540.0 0.1060.0 0.0780.0 0.06


137/333


138/333

Polyeurethane (polymer solid)

Reference (29)

E(keV) SE yield

0.1500 2.30000.2000 2.43000.3000 2.45000.4000 2.28000.5000 2.06000.6000 1.81000.8000 1.46001.0000 1.23001.2000 1.03001.4000 0.9500


139/333

PETEOS (organic)

Reference (86)

E(keV) SE yield

10.000 0.2557.000 0.3405.000 0.4273.000 0.6622.000 0.7881.500 0.9751.000 1.2050.700 1.3450.500 1.613


140/333

Resist (electron beam PMMA)

Reference (86)

E(keV) SE yield

10.000 0.6007.000 0.6905.000 0.9154.000 0.9603.000 1.1452.000 1.4401.500 1.8501.000 2.1600.700 2.3300.500 2.315

Sapphire see Alumina (Al2O3)


141/333

Silicon dioxide SiO2 (steam formed)

Reference (25)

E(keV) SE yield

0.050 1.02000.1 1.31200.15 1.43800.20 1.50000.25 1.48300.30 1.45800.4 1.39600.5 1.31200.6 1.27100.70 1.18700.8 1.1040

0.9 1.08301.0 1.0200




E(keV) SE yield0.5 1.350.7 1.2741.0 1.181.5 1.02.0 0.853.0 0.7654.0 0.7105.0 0.5827.0 0.42710. 0.314


142/333

Stainless Steel

Reference 127

E(KeV) SE yield

0.05 1.150.08 1.400.1 1.550.15 1.80.2 1.940.25 1.990.3 2.020.4 1.990.5 1.920.7 1.751.0 1.53

1.5 1.281.95 1.13


143/333

Tantalum Carbide TaC


0.098 0.4040.109 0.5040.128 0.6720.156 0.8010.2 0.8650.29 0.8720.386 0.8230.507 0.7600.592 0.7030.701 0.6560.792 0.623

0.94 0.5951.03 0.5761.2 0.553


144/333

TCNQ (organic conductor)

Reference (29)

E(keV) SE yield

0.0500 0.69000.1000 0.84600.1500 1.00000.2000 1.03000.3000 1.03000.4000 1.00000.5000 0.95000.6000 0.90700.8000 0.83001.0000 0.78501.2000 0.7380

1.4000 0.6930


145/333

Teflon (polymer solid)

Reference (27)

E(keV) SE yield

0.5000 2.30000.7000 1.80001.4500 1.20001.5000 1.0001.9500 0.93002.0000 0.90002.1000 0.86002.2000 0.82002.7000 0.78003.0000 0.72003.8000 0.5600


E(keV) SE yield0.1 1.2170.25 1.940.5 1.620.75 1.251.0 1.01.25 1.041.5 1.015


E (keV) SE yield0.5 1.92

1 1.54

1.5 1.165

2 0.936

2.5 0.81

3 0.71

3.5 0.63

4 0.556

4.5 0.5065 0.48


146/333

Titanium Carbide TiC

Reference (112)

E(keV) SE yield

0.09 0.580.14 0.7240.2 0.8690.33 1.00.4 1.020.53 1.010.62 0.9970.73 0.9740.8 0.9440.92 0.8951.0 0.865

1.2 0.812


147/333

Titanium Nitride (TiN)

Reference 127

E(keV) SE yield

0.06 0.790.07 0.840.08 0.900.1 0.980.15 1.160.2 1.280.25 1.380.3 1.490.4 1.560.5 1.570.6 1.58

0.75 1.561.0 1.491.5 1.372.0 1.253.0 1.05


148/333

Vanadium Pentoxide V2O5

Reference (83)

E(keV) SE yield

0.087 0.8870.156 1.0000.200 1.1170.270 1.2100.404 1.2160.542 1.1350.653 1.0880.778 1.0270.889 1.0011.013 0.9471.210 0.894

1.433 0.8491.705 0.7762.010 0.7182.540 0.6693.044 0.5783.572 0.5304.034 0.4875.056 0.3895.571 0.347


149/333

Xylene (organic solid)

Reference (29)

E(keV) SE yield

0.0500 1.33000.1500 1.75000.2000 1.77000.2500 1.74000.3000 1.63000.4000 1.49000.5000 1.35000.6000 1.21000.8000 1.00001.0000 0.89001.2000 0.7700

1.4000 0.6700


150/333

Zirconium Carbide ZrC

Reference (112)

E(keV) SE yield

0.095 0.8170.14 1.010.21 1.1780.3 1.2520.4 1.2420.5 1.1990.64 1.1180.8 1.0440.93 0.9761.06 0.9211.2 0.873


151/333

SECTION TWO

Backscattered Electron Yield Data

(a) for elements, arranged in ascending atomic number

(b) for compounds, arranged in alpha-numeric order


152/333

Beryllium (Z=4)

Reference (2)

E(keV) BS yield

1.0 0.1273.0 0.08855.0 0.0710.0 0.055820 0.0525 0.046230 0.0460


E(keV) BS yield

1.0 0.2262.0 0.0863.0 0.06365.0 0.049610.0 0.0418


E(keV) BS yield4.5 0.06411.0 0.0428.0 0.023


E(keV) BS yield15.0 0.03920.0 0.03630 0.03340 0.03150 0.02960 0.028


E(keV) BS yield9.3 0.0517.3 0.0525.2 0.045


153/333

41.5 0.0462.1 0.0481.8 0.04102.2 0.035


E(keV) BS yield0.1 0.0950.2 0.1090.3 0.1120.4 0.1120.6 0.1030.8 0.0921.0 0.0812.0 0.065

3.0 0.0554.0 0.049


154/333

Boron (Z=5)

Reference (1)

E(keV) BS yield

3.93 0.04105.0 0.07407.50 0.057010.00 0.055015.20 0.053020.20 0.041031.00 0.043041.0 0.0440


155/333

Carbon (Z=6)

Reference (1)

E(keV) BS yield

3.9 0.0835.0 0.0827.5 0.07110.0 0.06615.2 0.05720.2 0.04931.0 0.05141.0 0.049


E(keV) BS yield5.0 0.08510.0 0.07220.0 0.06130.0 0.06


E(keV) BS yield4.5 0.08311.0 0.05928.0 0.052


E(keV) BS yield10.0 0.06920.0 0.0630.0 0.05240.0 0.05449.0 0.052


E(keV) BS yield15.0 0.06820.0 0.06430.0 0.0640.0 0.05650.0 0.055


156/333


E(keV) BS yield0.2 0.076

0.4 0.0810.8 0.0741.2 0.07141.4 0.0711.65 0.0662.05 0.0662.25 0.066


E(keV) BS yield

2.0 0.07713.0 0.08574.0 0.08865.0 0.08576.0 0.08348.0 0.0810.0 0.074312.0 0.07114.0 0.068516.0 0.0674


E(keV) BS yield5.0 0.08230.0 0.05


E(keV) BS yield0.288 0.1490.4 0.1530.5 0.150.6 0.1470.8 0.141.0 0.1332.0 0.1073.0 0.088



157/333

E(keV) BS yield1.0 0.0761.5 0.0712.0 0.071

2.5 0.0643.0 0.0633.5 0.0634.0 0.0584.5 0.0585.0 0.058


158/333

Magnesium (Z=12)

Reference (1)

E(keV) BS yield

3.93 0.17405.0 0.16407.50 0.156010.0 0.152015.2 0.143020.2 0.140031.0 0.135041.0 0.1260


E(keV) BS yield10.0 0.14520.0 0.1430.0 0.13640.0 0.13249.0 0.13


E(keV) BS yield0.20 0.2380.4 0.2410.6 0.2380.8 0.2211.0 0.2072.0 0.1843.0 0.156


159/333

Aluminum (Z=13)

Reference (2)

E(keV) BS yield

1.0 0.1923.0 0.1615.0 0.15310.0 0.1515.0 0.1520.0 0.14825.0 0.14830.0 0.144


E(keV) BS yield0.8 0.1981.0 0.1951.2 0.1891.4 0.1821.6 0.1791.8 0.1752.0 0.172.5 0.1683.0 0.1573.5 0.1524.0 0.1515.0 0.148


E(keV) BS yield1.0 0.23463.0 0.21325.0 0.2010.0 0.1875


E(keV) BS yield5.0 0.18610.0 0.17730.0 0.15



160/333

E(keV) BS yield4.5 0.18111.0 0.13328.0 0.130




E(keV) BS yield15.0 0.17120.0 0.164

30.0 0.15540.0 0.15150.0 0.14760.0 0.146


E(keV) BS yield2.0 0.142.5 0.1333.0 0.1324.0 0.1315.0 0.1356.0 0.1378.0 0.14210.0 0.1412.5 0.1415.0 0.13717.5 0.13920.0 0.139


E(keV) BS yield9.3 0.17517.3 0.15925.2 0.15141.5 0.15562.1 0.13781.8 0.135


161/333

102.2 0.133


E(keV) BS yield

20.0 0.1445.0 0.15


E(keV) BS yield1.0 0.1342.0 0.1463.0 0.1545.0 0.1587.5 0.153

10.0 0.14912.5 0.15115.0 0.14917.5 0.151


E(keV) BS yield5.0 0.16830.0 0.135


E(keV) BS yield0.1 0.190.2 0.2240.3 0.2350.4 0.2370.6 0.2340.8 0.2261.0 0.2172.0 0.203.0 0.1914.0 0.185


E(keV) BS yield0.5 0.2161.0 0.212


162/333


163/333

Silicon (Z=14)

Reference (1)

E(keV) BS yield

3.93 0.2045.0 0.1887.5 0.18210.0 0.17415.2 0.16320.0 0.15931.0 0.15241.0 0.144


E(keV) BS yield1.0 0.2353.0 0.2125.0 0.20610.0 0.215.0 0.19720.0 0.19425.0 0.19230.0 0.19


E(keV) BS yield5.0 0.19710.0 0.18620.0 0.16930.0 0.162


E(keV) BS yield10.0 0.17420.0 0.16430.0 0.15940.0 0.15349.0 0.15


E(keV) BS yield


164/333

9.3 0.18317.3 0.17825.2 0.16541.5 0.15562.1 0.149

81.8 0.145102.2 0.145


E(keV) BS yield5.0 0.18430.0 0.145


E(keV) BS yield0.2 0.2520.3 0.2630.4 0.2550.6 0.2410.8 0.2311.0 0.2282.0 0.2043.0 0.1924.0 0.189


E(keV) BS yield20 0.18


165/333

Silicon (Z=14) Amorphous

Reference (86)

E(keV) BS yield

10.000 0.1907.0000 0.2005.000 0.2004.00 0.2003.000 0.2002.000 0.2101.500 0.2101.000 0.2100.700 0.2100.500 0.210


166/333

Potassium (Z=19)

Reference (106)

E(keV) BS yield

0.1 0.2560.22 0.2550.4 0.2540.6 0.2490.8 0.2421.2 0.2321.6 0.2232.0 0.214


167/333

Calcium (Z=20)

Reference (35)

E(keV) BS yield

2.0 0.20303.0 0.21304.00 0.22606.0 0.22909.0 0.229011.0 0.229013.0 0.231015.0 0.2310


E(keV) BS yield0.15 0.1590.2 0.1870.4 0.2510.6 0.2550.8 0.2551.2 0.2481.6 0.2452.0 0.24


168/333

Scandium (Z=21)

Reference (106)

E(keV) BS yield

0.130 0.2180.200 0.2460.31 0.2710.4 0.270.6 0.2690.8 0.2681.0 0.2632.0 0.2634.0 0.262


169/333

Titanium (Z=22)

Reference (1)

E(keV) BS yield

3.93 0.2585.0 0.267.5 0.25710.0 0.25615.2 0.24920.2 0.24831.0 0.24641.0 0.238


E(keV) BS yield5.0 0.2710.0 0.26820.0 0.26630.0 0.254


E(keV) BS yield4.5 0.26211.0 0.23628.0 0.214


E(keV) BS yield10.0 0.26220.0 0.25330.0 0.24340.0 0.24549.0 0.243


E(keV) BS yield15.0 0.26820.0 0.26330.0 0.25840.0 0.25250.0 0.248


170/333

60.0 0.246


E(keV) BS yield

5.0 0.24630.0 0.23


E(keV) BS yield0.1 0.120.21 0.2340.31 0.270.41 0.2830.6 0.293

0.8 0.2991.0 0.2942.0 0.2913.0 0.2874.0 0.283


171/333


172/333

Chromium (Z=24)

Reference (1)

E(keV) BS yield

3.93 0.2735.0 0.2737.50 0.2710.0 0.26715.2 0.26420.2 0.25931.0 0.25741.0 0.248


E(keV) BS yield5.0 0.28510.0 0.28330.0 0.276


E(keV) BS yield10.0 0.27320.0 0.26830.0 0.26540.0 0.25949.0 0.256


E(keV) BS yield5.0 0.25530.0 0.245


173/333

Manganese (Z=25)

Reference (8)E(keV) BS yield10.0 0.2920

20.0 0.286030.0 0.284040.0 0.277049.0 0.2760


174/333

Iron (Z=26)

Reference (1)

E(keV) BS yield

3.93 0.2945.0 0.2847.5 0.28710.0 0.28515.2 0.27820.2 0.27631.0 0.27741.0 0.266


E(keV) BS yield5.0 0.310.0 0.29630.0 0.288


E(keV) BS yield4.5 0.30711.0 0.26628.0 0.251


E(keV) BS yield10.0 0.28920.0 0.28730.0 0.27540.0 0.27649.0 0.282


E(keV) BS yield15.0 0.29820.0 0.29430.0 0.28840.0 0.28450.0 0.28160.0 0.279


175/333



0.4 0.2190.65 0.230.825 0.221.05 0.221.225 0.221.65 0.2233.825 0.248


E(keV) BS yield

1.0 0.2371.5 0.2632.0 0.273.0 0.2774.0 0.2885.0 0.2856.0 0.2869.0 0.28910.0 0.28911.0 0.29112.0 0.29113.0 0.29114.0 0.29116.0 0.29


E(keV) BS yield5.0 0.27530.0 0.26


176/333


177/333


178/333


179/333


180/333


181/333

3.0 0.39895.0 0.384210.0 0.3566


E(keV) BS yield5.0 0.35210.0 0.33920.0 0.33930.0 0.319



20.0 0.30930.0 0.30640.0 0.30349.0 0.297


E(keV) BS yield15.00 0.33520.0 0.32830.0 0.31940.0 0.31650.0 0.31360.0 0.311


E(keV) BS yield9.3 0.31317.3 0.31025.2 0.30741.5 0.30162.1 0.29981.8 0.294102.2 0.291




182/333

20.0 0.2945.0 0.30


E(keV) BS yield0.5 0.401.0 0.432.0 0.4063.0 0.4065.0 0.3986.0 0.3817.0 0.3668.0 0.3689.0 0.35810.0 0.356


E(keV) BS yield0.4 0.2680.65 0.2690.825 0.2761.05 0.2761.45 0.2751.65 0.2811.92 0.281


E(keV) BS yield5.0 0.29830.0 0.291


E(keV) BS yield0.1 0.1460.2 0.2840.3 0.3390.4 0.3560.6 0.3750.8 0.3841.0 0.3811.5 0.3842.0 0.379


183/333


184/333

Zinc (Z=30)

Reference (1)

E(keV) BS yield

3.93 0.33405.0 0.33107.50 0.323010.0 0.325015.2 0.312020.2 0.316031.0 0.310041.0 0.3040


E(keV) BS yield5.00 0.35210.0 0.34230.0 0.33


E(keV) BS yield0.091 0.1390.106 0.1920.15 0.2480.2 0.2860.3 0.3380.4 0.3720.6 0.3860.8 0.3861.0 0.3821.5 0.3732.0 0.3763.0 0.3684.0 0.351


185/333

Gallium (Z=31)

Reference (106)

E(keV) BS yield

0.1 0.1460.2 0.2410.4 0.3340.6 0.3660.8 0.3711.0 0.3762.0 0.3693.0 0.3644.0 0.35


186/333


187/333


188/333

Arsenic (Z=33)

Reference (7)

E(keV) BS yield

4.50 0.380011.00 0.317028.0 0.3080


189/333

Selenium (Z=34)

Reference (106)

E(keV) BS yield

0.11 0.1080.164 0.2040.21 0.2420.3 0.3070.4 0.3370.6 0.3580.8 0.3551.0 0.3532.0 0.353.0 0.3444.0 0.337


190/333

Strontium (Z=38)

Reference (106)

E(keV) BS yield

0.116 0.090.16 0.1330.2 0.1730.3 0.2390.4 0.2820.5 0.2970.6 0.3070.8 0.3251.0 0.332.0 0.3443.0 0.348

4.0 0.352


191/333

Yttrium (Z=39)

Reference (106)

E(keV) BS yield

0.2 0.2530.3 0.2770.4 0.2960.5 0.3100.6 0.3230.8 0.3391.0 0.3492.0 0.3523.0 0.352


192/333

Zirconium (Z=40)

Reference (1)

E(keV) BS yield3.93 0.36905.0 0.36807.5 0.367010.0 0.366015.20 0.364020.2 0.364031.0 0.368041.0 0.3630


E(keV) BS yield10.0 0.37620.0 0.37930.0 0.37940.0 0.38149.0 0.376

Data set #3 reference (68)

E(keV) BS yield5.0 0.34630.0 0.355


193/333

Niobium (Z=41)

reference (13)

E(keV) BS yield

15.0 0.385020.0 0.387030.0 0.387040.0 0.387050.0 0.386060.0 0.3840



11.0 0.34728.0 0.333


194/333

Molybdenum (Z=42)

Reference (2)

E(keV) BS yield

3.0 0.3635.0 0.37910.0 0.38715.0 0.38720.0 0.38725.0 0.38730.0 0.387


E(keV) BS yield

5.0 0.36710.0 0.38130.0 0.385




E(keV) BS yield10.0 0.38420.0 0.38230.0 0.38640.0 0.38449.0 0.377


E(keV) BS yield0.15 0.1380.5 0.1790.75 0.2041.0 0.221.2 0.2361.5 0.2491.9 0.266



195/333


196/333

Palladium (Z=46)

Reference (8)

E(keV) BS yield

10.0 0.403020.0 0.405030.0 0.397040.0 0.402049.0 0.3980


197/333

Silver (Z=47)

Reference (1)

E(keV) BS yield

3.93 0.3945.0 0.3937.5 0.39510.0 0.39415.2 0.39420.2 0.39831.0 0.39641.0 0.395


E(keV) BS yield3.0 0.3715.0 0.39210.0 0.41115.0 0.41520.0 0.41530.0 0.415


E(keV) BS yield0.8 0.251.0 0.2971.2 0.2981.4 0.3181.6 0.3311.8 0.3392.0 0.352.5 0.3593.0 0.3593.5 0.374.0 0.3735.0 0.372


E(keV) BS yield1.0 0.473.0 0.4614


198/333


199/333

102.2 0.399


E(keV) BS yield

5.0 0.3820.0 0.4045.0 0.41


E(keV) BS yield3.0 0.3575.0 0.3836.0 0.3837.0 0.391

9.0 0.4111.0 0.40613.0 0.40715.0 0.409


E(keV) BS yield5.0 0.36130.0 0.388


E(keV) BS yield0.1 0.1340.2 0.2240.4 0.3140.6 0.3540.8 0.3721.0 0.3662.0 0.3963.0 0.4104.0 0.415


E(keV) BS yield0.6 0.3480.9 0.3741.0 0.378


200/333


201/333

Cadmium (Z=48)

Reference (1)

E(keV) BS yield

3.93 0.39705.00 0.40107.50 0.406010.0 0.403015.2 0.400020.20 0.399031.00 0.403041.00 0.4020


E(keV) BS yield0.1 0.1280.2 0.2190.3 0.2790.4 0.3210.5 0.3510.6 0.3660.8 0.3771.0 0.3772.0 0.3853.0 0.3934.0 0.393


202/333

Indium (Z=49)

Reference (2)

E(keV) BS yield

3.0 0.38405.0 0.408010.0 0.419015.0 0.419020.0 0.419030.0 0.4190



0.2 0.2350.4 0.3300.6 0.3650.8 0.3811.0 0.3922.0 0.43.0 0.4064.0 0.416


203/333

Tin (Z=50)

Reference (1)

E(keV) BS yield

3.93 0.3995.0 0.47.5 0.40610.0 0.40715.2 0.40420.2 0.4131.0 0.41141.0 0.409


E(keV) BS yield3.0 0.395.0 0.41710.0 0.42915.0 0.42920.0 0.42930.0 0.429


E(keV) BS yield20.0 0.39430.0 0.41640.0 0.41749.0 0.415


E(keV) BS yield4.5 0.42511.0 0.3728.0 0.38


E(keV) BS yield0.1 0.1350.2 0.2400.3 0.2930.4 0.338


204/333

0.6 0.3640.8 0.3711.0 0.3712.0 0.3943.0 0.401

4.0 0.405


205/333

Antimony (Z=51)

Reference (1)

E(keV) BS yield

3.93 0.3995.0 0.4077.5 0.40810.0 0.41320.2 0.41231.0 0.41341.0 0.408


E(keV) BS yield

3.0 0.3945.0 0.41710.0 0.43515.0 0.43620.0 0.43630.0 0.436


E(keV) BS yield10.0 0.4220.0 0.42330.0 0.42340.0 0.42649.0 0.427


206/333

Tellurium (Z=52)

Reference (1)

E(keV) BS yield

3.93 0.4085.0 0.4167.5 0.41610.0 0.41515.2 0.41320.2 0.41831.0 0.41841.0 0.416


E(keV) BS yield3.0 0.395.0 0.41910.0 0.44415.0 0.44720.0 0.44730.0 0.447




E(keV) BS yield10.0 0.42520.0 0.42730.0 0.42740.0 0.42649.0 0.431


E(keV) BS yield5.0 0.38930.0 0.408


207/333

Barium (Z=56)

Reference (106)

E(keV) BS yield

0.1 0.0950.2 0.190.4 0.2950.6 0.3450.8 0.3631.0 0.3732.0 0.3983.0 0.4054.0 0.405


208/333

Lanthanum (Z=57)

Reference (106)

E(keV) BS yield

0.2 0.2290.4 0.2820.6 0.3190.8 0.3421.0 0.3542.0 0.3683.0 0.376


209/333

Samarium (Z=62)

Reference (1)

E(keV) BS yield

3.93 0.42805.0 0.43807.5 0.431010.0 0.441015.2 0.441020.2 0.450031.0 0.454041.0 0.4570


210/333

Hafnium (Z=72)

Reference (1)

E(keV) BS yield

3.93 0.43905.0 0.45007.5 0.456010.0 0.463015.2 0.466020.2 0.473031.0 0.476041.0 0.4770


211/333

Tantalum (Z=73)

Reference (1)

E(keV) BS yield

3.93 0.4435.0 0.4517.5 0.45410.0 0.4615.2 0.46720.2 0.46831.0 0.47241.0 0.473




E(keV) BS yield10.0 0.48120.0 0.49130.0 0.48740.0 0.50149.0 0.503


E(keV) BS yield15.0 0.4920.0 0.49630.0 0.540.0 0.50350.0 0.50460.0 0.5


E(keV) BS yield2.0 0.5673.0 0.5715.0 0.5868.0 0.5810.0 0.563


212/333



0.8 0.1861.2 0.2551.65 0.32.0 0.3192.75 0.3713.2 0.3813.8 0.39


E(keV) BS yield

0.2 0.1440.3 0.2410.4 0.2890.5 0.3400.6 0.3730.8 0.4091.0 0.4212.0 0.4215.0 0.420


E(keV) BS yield0.078 0.2050.113 0.2930.21 0.4070.32 0.4570.4 0.4670.48 0.4870.57 0.5030.65 0.5180.73 0.5160.8 0.5190.93 0.5181.03 0.5111.123 0.511.20 0.513


213/333

Tungsten (Z=74)

Reference (1)

E(keV) BS yield

3.93 0.4385.0 0.4497.5 0.45710.0 0.4615.2 0.46720.2 0.46931.0 0.47841.0 0.477


E(keV) BS yield3.0 0.4135.0 0.43610.0 0.47115.0 0.48220.0 0.48230.0 0.482


E(keV) BS yield5.0 0.47210.0 0.48330.0 0.501


E(keV) BS yield10.0 0.48220.0 0.49430.0 0.48940.0 0.49949.0 0.506


E(keV) BS yield1.5 0.3362.0 0.3543.0 0.387


214/333

4.0 0.4066.0 0.4318.0 0.45110.0 0.45712.0 0.466

14.0 0.46916.0 0.459


E(keV) BS yield4.5 0.47311.0 0.43328.0 0.434


E(keV) BS yield0.2 0.1690.4 0.3110.6 0.3910.8 0.4361.0 0.4592.0 0.461


215/333

Iridium (Z=77)

Reference (8)

E(keV) BS yield

30.0 0.4987


216/333

Platinum (Z=78)

Reference (1)

E(keV) BS yield

3.93 0.4575.0 0.4637.5 0.46710.0 0.47515.2 0.47820.2 0.4931.0 0.49241.0 0.491


E(keV) BS yield5.0 0.48610.0 0.50320.0 0.51130.0 0.516


E(keV) BS yield10.0 0.48620.0 0.50430.0 0.49940.0 0.50349.0 0.51


E(keV) BS yield0.25 0.1760.6 0.2230.8 0.2471.2 0.2891.6 0.3171.9 0.3292.5 0.3763.0 0.3763.6 0.388



217/333

E(KeV) BS yield2.0 0.3653.0 0.4064.0 0.4175.0 0.431

6.0 0.448.0 0.46110.0 0.46712.0 0.47714.0 0.479


E(keV) BS yield0.2 0.1650.3 0.232

0.4 0.2780.6 0.3550.8 0.4021.0 0.4351.55 0.4612.0 0.463.0 0.4694.0 0.466


E(keV) BS yield0.08 0.1020.114 0.1560.16 0.2040.23 0.230.3 0.2690.4 0.3010.55 0.360.66 0.3940.8 0.4230.88 0.4381.0 0.4491.2 0.475


218/333

Gold (Z=79)

Reference (1)

E(keV) BS yield

3.93 0.455.0 0.4697.5 0.46510.0 0.47615.2 0.48420.2 0.48531.0 0.4941.0 0.494


E(keV) BS yield3.0 0.4155.0 0.44810.0 0.47115.0 0.48220.0 0.48230.0 0.482


E(keV) BS yield0.8 0.2451.0 0.2891.2 0.3251.4 0.3391.6 0.3491.8 0.3762.0 0.3732.5 0.3863.0 0.4143.5 0.4284.0 0.4435.0 0.459


E(keV) BS yield5.0 0.48910.0 0.50130.0 0.521


219/333



20.0 0.50630.0 0.51240.0 0.5149.0 0.511


E(keV) BS yield15.0 0.51420.0 0.51630.0 0.519

40.0 0.52150.0 0.52360.0 0.525


E(keV) BS yield9.3 0.47817.3 0.49225.2 0.50141.5 0.50762.1 0.51381.8 0.51102.2 0.513


E(keV) BS yield5.0 0.4310.0 0.4720.0 0.4845.0 0.5


E(keV) BS yield5.0 0.43230.0 0.481



220/333

E(keV) BS yield0.1 0.0820.2 0.140.3 0.20

0.4 0.2560.6 0.3570.8 0.4071.0 0.4192.0 0.453.0 0.4644.0 0.461


E(keV) BS yield

0.61 0.3670.9 0.3871.0 0.3951.51 0.4112.0 0.4282.5 0.4443.0 0.4513.5 0.4554.0 0.4594.5 0.4585.0 0.4616.0 0.471


E(keV) BS Yield20 0.51


221/333

Mercury (Z=80)

Reference (106)

E(keV) BS yield

0.21 0.1120.42 0.2460.6 0.320.8 0.3691.2 0.421.6 0.4382.0 0.4432.4 0.448


222/333

Thallium (Z=81)

Reference (106)

E(keV) BS yield

0.09 0.0570.15 0.1020.2 0.1310.3 0.1970.4 0.2480.6 0.3320.8 0.3971.0 0.4142.0 0.4453.0 0.4624.0 0.461


223/333

Lead (Z=82)

Reference (106)

E(keV) BS yield

0.2 0.1510.3 0.2080.4 0.2550.6 0.3340.8 0.3771.0 0.412.0 0.4413.0 0.4514.00 0.453


224/333

Bismuth (Z=83)

Reference (1)

E(keV) BS yield

3.93 0.4535.0 0.477.5 0.47510.0 0.48815.2 0.49220.2 0.49331.0 0.5041.0 0.493

Data set #2 Reference (2)E(keV) BS yield

3.0 0.435.0 0.47710.0 0.50915.0 0.51520.0 0.51730.0 0.521


E(keV) BS yield4.5 0.4811.0 0.44828.0 0.4442


E(keV) BS yield10.0 0.49820.0 0.51330.0 0.51640.0 0.51949.0 0.521


E(keV) BS yield5.0 0.44730.0 0.489


225/333


226/333

Uranium (Z=92)

Reference (1)

E(keV) BS yield

3.93 0.4685.0 0.4767.5 0.48110.0 0.48115.2 0.49620.2 0.50431.0 0.5141.0 0.511


E(keV) BS yield5.0 0.49510.0 0.51320.0 0.52630.0 0.534


E(keV) BS yield4.5 0.48311.0 0.45528.0 0.46


E(keV) BS yield10.0 0.49520.0 0.5230.0 0.52740.0 0.52749.0 0.53


E(keV) BS yield15.0 0.42620.0 0.53130.0 0.53740.0 0.54250.0 0.545


227/333

60.0 0.548


E(keV) BS yield

9.3 0.49817.3 0.51625.2 0.52741.5 0.52462.1 0.54181.8 0.542102.2 0.562


228/333

COAT725 (wafer coat)

Reference (86)

E(keV) BS yield

0.500 0.1300.700 0.1251.000 0.1301.500 0.1302.000 0.1253.000 0.1284.000 0.1255.000 0.1257.000 0.12310.000 0.125


229/333

Indium Tin Oxide (ITO)

Reference (131)

E(keV) BS yield

0.5 0.161 0.171.5 0.182 0.193 0.25 0.217 0.2510 0.26


230/333

Indium Zinc Oxide (IZO)

Reference (131)

E(keV) BS yield

0.15 0.161.5 0.215 0.217 0.2610 0.27


231/333

Interconnect line Aluminum

Reference (86)

E(keV) BS yield

10.000 0.1507.000 0.1555.000 0.1554.000 0.1603.000 0.1702.000 0.1751.500 0.1801.000 0.1800.700 0.1900.500 0.187


232/333


233/333

Resist (e-beam PMMA) )

Reference (86)

E(keV) BS yield

10.000 0.0607.000 0.0605.000 0.0654.000 0.0703.000 0.0652.000 0.0701.500 0.0701.000 0.0800.700 0.0900.500 0.105


234/333

Silicon (amorphous)

Reference (86)

E(keV) BS yield

0.5 0.210.7 0.211.0 0.211.5 0.212.0 0.213.0 0.24.0 0.25.0 0.27.0 0.210.0 0.19


235/333

Silicon Dioxide SiO2 (steam formed)

Reference (86)

E(keV) BS yield

10.000 0.2137.000 0.2335.000 0.2384.000 0.2353.000 0.2452.000 0.2551.000 0.2500.700 0.2460.500 0.246


236/333

Tantalum Carbide TaC

Reference (112)

E(keV) BS yield

0.096 0.070.13 0.1190.193 0.1630.295 0.1810.4 0.1980.5 0.2020.61 0.2050.8 0.2120.92 0.2181.06 0.2221.2 0.223


237/333

Titanium Carbide TiC

Reference (112)

E(keV) BS yield

0.137 0.0490.182 0.1350.25 0.1880.34 0.2230.4 0.2370.52 0.2460.63 0.2620.8 0.2590.93 0.2491.09 0.251.2 0.261


238/333

U-V Resist

Reference (86)

E(keV) BS yield

0.5 0.0820.7 0.0821.0 0.0821.5 0.082.0 0.0813.0 0.084.0 0.085.0 0.087.0 0.08210.0 0.08


239/333

Vanadium Pentoxide V2O5

Reference (83)

E(keV) BS yield

0.079 0.1180.137 0.1530.211 0.1260.320 0.1070.380 0.0950.488 0.1030.705 0.1060.981 0.1041.400 0.1101.800 0.1022.000 0.112

2.520 0.1133.000 0.1134.000 0.1075.000 0.109


240/333

Zirconium Carbide ZrC

Refe

Documents

Secondary Electron Yield Database