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17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.Tu
rbo
Mol
ecul
ar P
umps Pum
ping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
28334
633
8
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.Turbo M
olecular Pumps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
utPerformance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.Tu
rbo
Mol
ecul
ar P
umps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu
rbo
Mol
ecul
ar P
umps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu
rbo
Mol
ecul
ar P
umps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu
rbo
Mol
ecul
ar P
umps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
utAr
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.Tu
rbo
Cont
rolle
r Turbo Molecular Pum
ps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
psOsaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
42.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
Compound Molecular Pumps
Specifications
Standard set
5
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
7
Compound Molecular Pumps Compound Molecular Pumps
Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps
1213 6
Compound Molecular Pumps
Compound Molecular Pumps
9 1011 8
Osaka Vacuum, Ltd.
Turb
o Co
ntro
ller Turbo M
olecular Pumps
Compound Molecular Pumps
4
Osaka Vacuum, Ltd.
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps
Turbo Molecular Pum
ps
Osaka Vacuum, Ltd.
Compound Molecular Pumps
Osaka Vacuum, Ltd.
Water cooling
Air cooling
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B200KF4014001300750
1×108
4.3×103
< 1×10-6(< 7.5×10-9)450
5.5-715-18
330(2.5)≧ 250
TC1103
VG200 CF200
29 30
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40inletoutletN2
N2 (with protective screen)H2
N2
H2
N2
空冷 / 水冷
Inlet pressure
Performance curve
100
101
102
103
[Pa・
L/s]
N2
H2
TG240F
Inlet pressure[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
10-110-1
100
101
102
[scc
m]
Thro
ughp
ut
Gas throughputVolume flow rate
[L/s
]
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf> 80L/min Sf : Volume flow rate of backing pump
TG240F
Inlet pressure
TG240F
ArN2
H2
Volu
me
flow
rate
Sf > 80L/min Sf : Volume flow rate of backing pump
[Torr]
[Pa]10-1 100 101 102
10-3 10-2 10-1
[Pa・
L/s]
104
103
102
101
TG2410F N2 Standard
High gas throughput
Ultra high gas throughput
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
StandardHigh gas throughput
[Pa・
L/s]
Volu
me
flow
rate
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG2410F N2
StandardHigh gas throughputUltra high gas throughput
*Backing vacuum pump speed:2,000L/min
Ultra high gas throughput
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[scc
m]
101
102
103
Thro
ughp
ut
Performance curve
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220F
Ar
N2H2
Volu
me
flow
rate [P
a・L/
s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 160L/min Sf : Volume flow rate of backing pump
TG220FN2
Ar[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
Performance curve
Ar
H2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar
N2
Sf = 500L/min Sf : Volume flow rate of backing pump
TG1400F
N2
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
100
101
102
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 160L/min Sf : Volume flow rate of backing pump
TG450F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2H2
TG450F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
N2
Sf = 160L/min Sf : Volume flow rate of backing pump
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
TG50F
[L/s
]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
Sf = 50-100L/min Sf : Volume flow rate of backing pump
TG50F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 50-100L/min Sf : Volume flow rate of backing pump
Ar
N2
Volu
me
flow
rate
Ar
N2H2
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve
[Pa・
L/s]
103
102
101
100
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
104
103
102
101
100
[L/s
]
TG350F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Sf = 160L/min Sf : Volume flow rate of backing pump
N2 Ar
TG350F
Ar
N2
H2
Volu
me
flow
rate
Sf = 160L/min Sf : Volume flow rate of backing pump
[scc
m]
100
101
102
Thro
ughp
ut
Performance curve Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
Sf = 1000L/min Sf : Volume flow rate of backing pump
TG2400F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
ArN2
H2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
Ar
Ar
N2
N2
TG2400F
Sf = 1000L/min Sf = 1000L/min
TG2400F TG2400F-40
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG800F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TG800F
Ar
Ar
N2
N2
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
Performance curve
[Pa・
L/s]
104
103
102
101
[Torr]
[Pa]10-2 10-1 100 101 102
10-4 10-3 10-2 10-1
[scc
m]
101
102
103
Thro
ughp
ut
Ar N2
N2
Volu
me
flow
rate
104
103
102
101
100
[L/s
]
TG1100F
[Torr]
10-3 10-2 10-1 100 101 102[Pa]
10-5 10-4 10-3 10-2 10-1
Ar
N2
Ar
N2
TG1100F
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
TC1104 Sf = 500L/min TC1103 Sf = 500L/min
Sf:Volume flow rate of backing pump
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
TG50F
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Drawing of Outside dimension
AB
C
D
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
CF63ISO-R63
VG65 14
1218
A B C147
168182
Dφ145φ114φ95
Water cooling
Air cooling
φ113
69.5
47.5
54
62
70
34.5
ISO-Rc1/8
22.5
15
Connector
4-M6 DP13 PCD78
KF16
32
φ11
3
Cooling water Inlet/Outlet
※1:In case of the backing vacuum pump of 100L/min.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)
■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
TG220F TG350F
TG450F TG800F TG1100FTG1400F
TG2400F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard setPump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL / SEMI-S2 / CE
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■Certificated safety standard NRTL/SEMI-S2/CE
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
CF160ISO-B160
VG150 12
1222
A B C312.5
312.5327.5
Dφ235φ203φ225
AB
C
D
136
PCD140
φ250
145
80
φ165
ISO-Rc1/4
68
KF40
4-M16 DP25
Connector Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ20
0
47.5
AB
C
D
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C200
200220
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
CF100ISO-R100
VG100 15
1221
A B C230
214230
Dφ185φ152φ130
AB
CF200ISO-B200
VG200 16
1625
A B C281
281306
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C281
281306
D
AB
C
D
φ300φ253φ285
□120
47.5
C
D
47.5
Air cooling fan
φ250
136
145
PCD140
~167
φ165
φ200
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4
KF40
CF200ISO-B200
VG200 16
1625
A B C272
300319
Dφ300φ253φ285
CF200ISO-B200
VG200 16
1625
A B C272
300319
D
B
C
D
φ300φ253φ285
AB
AB
TG2400F-40
136
PCD140~167
145□120
φ250
φ165
φ2004-M16 DP25
Connector
KF40
Vent portPurge gas
Air cooling fanInlet ISO-G1/4
ISO-G1/4
47.5
47.5
φ310
186
φ28
6
181
□12
0
35゚
PCD255202
95.5
47.5
6-M16 DP25
KF40
ConnectorAir cooling fan
Purge gasInlet ISO-G1/4
ISO-G1/4 Connector
φ310
186
181
47.5
95.5
35゚
PCD255
54
200 6-M16 DP25
KF40
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet Connector
ISO-Rc1/4
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
CF160ISO-B160
VG150 16
1622
190
190190
A B Cφ235φ203φ225
D
47.5
φ250
136
145PCD140
68
47.5
ISO-Rc1/4
80φ165
KF40
Connector
4-M16 DP25
Cooling water Inlet/Outlet
Vent portPurge gasInlet ISO-G1/4
ISO-G1/4
φ200
47.5
AB
C
D
136
145
~16
7
φ165
47.5
PCD140
φ200
φ280φ245.5 KF40
4-M16 DP25
ConnectorVent port
Purge gas
Air cooling fan
Inlet ISO-G1/4
ISO-G1/4
□120
47.5
136
145
φ165
PCD140
φ200
φ280
80 ISO-Rc1/4
68
47.5
φ245.5KF40
4-M16 DP25
Connector
Vent port
Purge gasInlet ISO-G1/4
ISO-G1/4Cooling water Inlet/Outlet
A
47.5
C
D
φ28
6
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
ISO-B250VG250
A Bφ350φ335
1616
340340
C D
C
D
250
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Water cooling
Air cooling
Specifications
Drawing of Outside dimensionPerformance curveDrawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
Specifications
Drawing of Outside dimension
※1:In case of the backing vacuum pump of 160L/min. ※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
※1:In case of the backing vacuum pump of 500L/min.
※1:In case of the backing vacuum pump of 1000L/min. ※2:Depends on the power supply model.
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
※1:In case of the backing vacuum pump of 500L/min. ※2:Depends on the power supply model. (standard:TC1104)※3:△◇ cf. p17
■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio
TG240FDrawing of Outside dimension
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
15
Pum
ping
Sys
tem
※1:In case of the backing vacuum pump of 80L/min. ※2:TC245 is a built-in controller,TC246 is rack controller.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
●The inlet flange bolt holes are symmetrical around the center line.
Power/Control
100
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ154
115
Vent Port
Purge Port
33
94
□60
34
194.
216
6.2
73.5
ConnectorController
φ1544×M8 DP12 PCD140
KF25
ISO-R100
Power/Control
100
21
70
138
45゚ISO-G1/8
ISO-G1/8
50.5
124
φ152
φ154
115
Vent Port
Purge Port
33
94
□60
34
233.
716
6.2
113Connector
Controller
φ1544×M8 DP12 PCD140
KF25
CF100
CF flange
ISO-R flange
14
Pumping System
Osaka Vacuum, Ltd.
● The TMP pumping system where a number of pieces of equipment※1 necessary for high vacuum are compactly arranged. It can pump up to high vacuum with a simple operation!
● Since it has casters, it can be easily moved to the desired place for use.
● Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance! (The pump can be moved while it is operating.)
◆ Line-up of basic sets (three models) in which a turbo molecular pump with pumping speed of 50 to 350 L/s is mounted.
※1: Turbo molecular pump, backing pump, vacuum piping, automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)
※2:Figures in parentheses show the pumping speed of pumps with a screen.
ModelTMP
Inlet Flange
Backing pump
ST
CRV
:TMP pumping system
:CF:ISO-R:VG
ST220FV0501
12
3
4
2 3 4
Standard Specifications
TMPVolume flow rate N2(L/s)Base pressureInlet FlangeCooling typeVoltage
Model ST050FTG50F 51(49)※2
<3×10-6Pa(<2.3×10-8Torr)VG65 / ISO-R63 / CF63
TG220F 220(210)※2
Air CoolingSingle-phase、AC100V
TG350F 350(330)※2
ST220F ST350F
<1×10-6Pa(<7.5×10-9Torr)VG100 / ISO-R100 / CF100
ST Series
ST Series
◆ Most compact type among the ST Series! Further space saving is achieved with its desktop size!ST-Compact
Introduction of the TMP pumping system
AB
C
D
φ113
95 69.5
34.5
□92
47.5
Connector
Air cooling fan
4-M6 DP13 PCD78
KF16
32
φ11
3
VG65 CF63
64.2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R63KF16
514912
1.4×107
5×102
< 3×10-6(< 2.3×10-8)80
1-1.51-1.5
1330(10)≧ 50
TC64
AB
C
D
33゚
76 57
ISO-G1/4
Inlet ISO-G1/4
φ130
Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
42.5
54.5
KF25
Air cooling fan
105
□92
AB
C
Dφ130
Inlet ISO-G1/4
5776
33゚
60
Connector
4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8
Vent portISO-G1/4
Purge gas
φ130
42.5
54.5
KF25
AB
C
D
33゚
φ168
76 57ISO-G1/4
Inlet ISO-G1/4
42.5
54.5Connector
Vent port
Purge gas
4-M8 DP12 PCD78
φ130
KF25
Air cooling fan
105
□92
AB
C
Dφ168
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
6042
.5
54.5
Connector
Vent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-R100KF25
2101×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG100
350330
6
CF100
9
330310
※1:In case of the backing vacuum pump of 160L/min
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
AB
C
D
33゚
φ168
76
□92
57ISO-G1/4
Inlet ISO-G1/4
KF25
42.5
54.5
Connector Vent port
Purge gas
4-M8 DP12 PCD78
φ130
Air cooling fan
76 57
33゚
ISO-G1/4
Inlet ISO-G1/4
ISO-Rc1/8
60
φ168
ConnectorVent port
Purge gas
4-M8 DP12 PCD78 φ130
Cooling water Inlet/Outlet
KF25
42.5
54.5
AB
C
D
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
ISO-B160KF25450430240
1×108
2×103
< 1×10-6(< 7.5×10-9)500
2-2.55-6.5
260(2)≧ 80
TC353
VG150 CF160Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
7 10
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG150、ISO-B160、CF160KF40820750650
1×108
1×104
330(2.5)≧ 250
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG800F TG800F
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup time※2
Shutdown time※2
Max. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
VG,ISO-B/CF kg
VG200、ISO-B200、CF200KF4011001000720
1×108
1×104
330(2.5)≧ 25028/27
3307-9
27-32
TC1104
8605.5-712-15
TC1103
TG1100F TG1100FInletOutletN2
N2 (with protective screen)H2
N2
H2
N2
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
< 1×10-6(< 7.5×10-9)
△A◇-60△W◇
27/26
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1※2
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
L/sL/sL/s
Pa(Torr)sccm
minmin
Pa(Torr)L/min
kg
VG250、ISO-B250KF40240023001100
1×108
1.4×103
< 1×10-6(< 7.5×10-9)
5-715-18
200(1.5)≧ 50045 / 47
900
TC2403
1500
TC2403-10
TG2400F TG2400F-40InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Air / Water
※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy
TC64 / TC223 / TC353 / TC1104(Panel cut:128H×104W)
TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415(Panel cut:124H×203W)
TC76 / TC246(Panel cut:128H×103.5W)
Power Supply
209
157.526
139
149
5
400
20
4-φ5
2.3
START
F2F1 F3
OSAKA VACUUM,LTD.
STOP/RESET
POWER SUPPLY
150Space for cable
connections
100
20
POWER SUPPLY
OSAKA VACUUM,LTD.
START
F2F1 F3
STOP/RESET
149
513
9
104.5 250
1.62-φ5Space for cable
connections
■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface
■High gas throughput
TG2410F
Standard set
●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10~23℃. The permissible ambient temperature is 10~32℃ for air cooling type and 10~40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10~35℃.
Pump+Power Supply+Motor Cable (3 meter)+Fan Cable (3 meter, only for air-cooling type)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings
●Corresponding gases Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on
corresponding gases.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
TG2410F
TG2410F-40
Drawing of Outside dimension
●The inlet flange bolt holes are symmetrical around the center line.
※1:Depends on the power supply model. Please contact us about the Air cooling type.※2:In case of the backing pump of 2000L/min.
ISO-B250VG250 16
16
A B C363363
Dφ350φ335
※This dimensional drawings corresrond to TG240F(built-in controller type). In the case of TG240F-20, its controller is separated out.
Specifications
※1:In case of the backing vacuum pump of 160L/min.
※Please contact us about the Air cooling type.
100-110/200-230(±10%)
2.7
750
220
800
TC64 TC223 TC353
Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2
TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246
50/60
Single
560 520
8.2 2.4
200-230(±10%) 100-230(±10%)
590 610 1200 1400 1200
450
160
1500
120
800
810
Power supply model
Input Voltage
Input Frequency
Input Phases
Input Power
Rated Output Frequency
Weight
Standard accessories
Applicable pump models
(ACV)
(Hz)
(VA)
(Hz)
(kg)
TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40
TG350FTG450F
TG800FTG1100F
TG1400FTG800FTG1100F
△A◇-60△W◇△A◇-60△W◇
※1
Applicable pump models
※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)
85.5
ISO-R100KF25220210100
1×108
4×102
< 1×10-6(< 7.5×10-9)400
1-1.22.5-3.5
260(2)≧ 80
TC223
VG100 CF100
T7.3TC245DC24V
75W
T10.5TC246
AC100-230V (±10%)120VA
OSAKA VACUUM,LTD.
POWER
ACCELERATION
NORMAL
FAILURE
START STOP/RESETREMOTE
LOCAL
TURBO CONTROLLER
104.5
149
139
20
250
2×φ5
100Space for cable
connections
Specifications
L/sL/sL/s
ISO-R/CF PaISO-R/CF Torr
sccmmin
Pa(Torr)L/min
kg
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
TG240F
7.3TC245DC24V
75W
TG240F-20
10.5TC246
AC100-230V (±10%)120VA
ISO-R100/CF100KF25240230160
1×108
4×104
< 1×10-6 / < 5×10-7
< 7.5×10-9 / < 3.8×10-9
705.5-7.5
700(5.3)≧ 80
Specifications
High gasthroughput
TC2414VG250/ISO-B250
KF40
<5×10-7
<3.8×10-9
25005-7
≧ 1000
220020001700
1×108
9000
350(2.6)
TG2410F
normal
TC2413
1800
51
TG2410F-40
52
Ultra high gasthroughput
TC2415
200018001250
9×107
2000
3500
270(2.0)
L/sL/sL/s
PaTorr
sccmmin
Pa(Torr)L/min
kg
N2
N2 (with protective screen)H2
N2
H2
N2
InletOutlet
Model※1
Power Supply
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1※2
Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight
Flange
Volume flow rate
Max. compression ratio
Base pressureMax. throughput※1
Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Base pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s, 4200L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Base pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s, 4200L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH
17
Osaka Vacuum, Ltd.
Specifications
3
Osaka Vacuum, Ltd.
Turb
o M
olec
ular
Pum
ps Pumping System
Osaka Vacuum, Ltd.
STC70FR005 STC70FR013
95
283
346
338
269
198
355
TG70FRABInput Connector Input Connector
TC76ISO-R63
Diaphragm Pump
39
52.5 ISO-G1/8
Vent port
5 [l/min]
95
283
346
338
373
269
198
161
TG70FRNB
TC76ISO-R63
Diaphragm PumpMain power switch
Main power switch
39
52
.5
〜145
Cooling fan
13 [l/min]
ISO-G1/8Vent port
CF63ISO-R63 12
18A B C
144.5170D
φ114φ95
CF63ISO-R63 12
18A B C
144.5170D
50.576E
50.576E
115.5141
F
115.5141
Fφ114φ95
30°54φ102 68.5
54
Power/Control
ISO-G1/8
ISO-G1/8
φ102
70
103
(54)
109.5 10
0
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
□40
54
~92
30°54φ102 68.5
54
Power/Control
(54)
ISO-G1/8
ISO-G1/8
φ102
70
103
109.5 10
0 Fan
4-M6 DP13 PCD92
(Purge Gas Inlet)
KF16
Purge Gas Inlet
Controller
Connector
Vent Port
AB
C
DF
EF
AB
C
D F FE
Performance curve
[Pa・
L/s]
102
101
100
10-1
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
[scc
m]
10-1
100
101
Thro
ughp
ut
[L/s
]
Volu
me
flow
rate
103
102
101
100
[Torr]
[Pa]10-3 10-2 10-1 100 101
10-5 10-4 10-3 10-2
Sf = 25-100L/min Sf : Volume flow rate of backing pump
TG70F
Ar
H2
N2
Inlet pressure
Gas throughputVolume flow rate
Inlet pressure
H2N2
N2
Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min
Sf : Volume flow rate of backing pump
TG70F
1 18
Osaka Vacuum, Ltd.
T u r b oMolecularP u m p s
OSAKA VACUUM
Any orientationEasy operation
Compact size Light weight
Turbo Molecular Pumps
Characteristics ofCompound Molecular Pumps
Oil free pumpingEnergy-saving
Maintenance free Serial communicationRS232C Serial interface
Certificatedsafety standard NRTL SEMI-S2 CE
02-TG-E-10
Compound Molecular Pumps
Products Line-up
Series of Turbo Molecular Pumps
◎ Corrosive Resistant Type in 200~1300L/s.
◎ Standard Type & Corrosive Resistant Type in 1800~5500L/s.
Compound Molecular Pumps(TG series)
◎ Standard Type & Corrosive Resistant Type in 300~3400L/s.
◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )
◎ Model coupling free.
◎ Rotational speed control.
◎ Thermal insulation structure is available. (Special version)
Magnetically Levitated Compound Molecular Pumps(TG-M series)
Recommended O/H cycle 20,000~30,000 hrs
Motor cable
Fan cable
MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-
1m3m5m7m
10m15m20m1m3m5m7m
10m15m20m
length modelCable model(Standard length:※33m)
…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
**
※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.
S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F
S2M2
2
● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life
Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.
Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.
e.g.) 1-1.2 min with TG220F
2017.04.PDF
■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)
TG70FDrawing of Outside dimension
Air cooling
Natural air cooling
16
● More compact ST series has come out!
● Mounted with high compression turbo molecular pump TG70F!
● One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
● Space saving design of A4 laptop size!
● Most suitable for use as easy operating and portable pumping units for R&D!
※1:A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).
※1
Specifications
Drawing of outside dimension
Power supply modelISO-R63
G1/8
Diaphragm pump
70 L/s10-6 Pa order
Instruction manual:1 copy/Input cable(5m):1
STC70FR013
TG70FRNB
13L/min
19kgAC100V(-10%~+6%)
210VA
STC70FR005
TG70FRAB
4.2L/min
14kgAC100V(±10%)
200VA
ST-Compact
STC70FR005
STC70FR013
TG70F Pumping System
●The inlet flange bolt holes are symmetrical around the center line.
※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.
Built-in controller type
Standard set
●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.
Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings
●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.
※1:In case of the backing vacuum pump of 25L/min.※2:TC75 is a built-in controller,TC76 is rack controller.
Flange
Volume flow rate
Max. compression ratio
Base pressure
Max. throughput※1
Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2
Input VoltageInput Power
InletOutletN2
N2 (with protective screen)H2
N2
H2
N2
ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s
ISO-R/CF PaISO-R/CF Torr
Free convection/Forced air cooling sccmmin
Pa(Torr)L/min
ISO-R/CF kg
ISO-R63、CF63KF16
70 / 7565 / 7040 / 451×108
1×105
< 5×10-7/< 1×10-7
< 3.8×10-9/< 7.5×10-10
10 / 202-2.5
1200(9)≧ 253 / 5
TG70F
TC75DC24V120W
TG70F-20
TC76AC100-230V(±10%)
160VA
Inlet FlangeOutlet FlangeTMP
Backing vacuum pump
Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories
TG220F※VAB1 2 3 4 5 6 7
※Please contact us for models other than the above.
※4
◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.
Compound Molecular Pumps
Osaka Head office
JQA-QMA1902NABARI FACTORY
JQA-EMA5143
TG50F
TG70F
TG220F
TG240F
TG350F
TG450F
TG800F
TG1100F
TG1400F
TG2400F
TG2410F
ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40
◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).
※1 Standard FlangeCF : JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B : ISO1609:1986 Vacuum technology - Flange dimensions (Bolted type)ISO-R : ISO1609:1986 Vacuum technology - Flange dimensions (Clamped or rotatable type)VG : JISB2290 :1998 Vacuum technology-Flange :dimensions (Vacuum flange with O-ring groove)KF : ISO2861/1:1974 Vacuum technology - Quick-release couplings - Dimensions - Part 1(Clamped type)
※2 Some models are not written
Model
Size
Bearingsystem
SpecialStructure
Inlet Flange※1
Coolingsystem
Specificationtype
Near Volume flow rate(N2)
FM
ILRUCBRVANWB※2
C
1
2
3
4
5
6
7
Notwritten( )
Notwritten( )
:Compound Molecular Pumps
:Ball bearing(oil lubrication):Ball bearing(grease lubrication):Magnetically levitated:Standard type:Corrosive resistant type:Reaction by-product prevention:Ultra low vibration type:Radiation hardened type:Ultra high vacuum type:CF:ISO-B:ISO-R:VG:Air cooling:Natural air cooling:Water cooling:Standard type:Corrosive resistant type
TGTGkine
Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit(TG kine 2200M)
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645
Korea/Seoul Office Shin Won Tech. Co., Ltd.
Taiwan/Cutes Corporation
China/Shanghai Osaka Vacuum, Ltd.
■ TMP service support center
UK/EBARA Precision Machinery Europe GmBH
France/Paris Liaison Office
U.S.A.
Korea
Tel:+82-32-814-6331 Fax:+82-32-814-7301
■Shin Won Tech. Co., Ltd.(maintenance)
Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.
Tel:+886-3-452-6161 Fax:+886-3-451-1347
■Cutes Corporation
ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China
Tel:+86-21-5031-1522 Fax:+86-21-5031-1523
Tel support Field support Maintenance Local stock
#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea
■Shanghai Osaka Vacuum, Ltd.
48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel:+1-510-770-0100 Fax:+1-510-770-0104
■Osaka Vacuum U.S.A., Inc.
Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel:+82-31-707-0002 Fax:+82-31-707-3339
■Seoul office(sales)
51 Main Avenue, Sacramento, CA 95838 USATel:+1-916-920-5451 Fax:+1-916-830-1900
■Ebara Technologies Inc.
U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.
Japan/Nabari FactoryTMP Service Group
JapanTel:+81-595-64-1162 Fax:+81-595-64-1163
■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan
Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK
Tel:+44(0)1506 460232 Fax:+44(0)1506 460222
■EBARA Precision Machinery Europe GmBH