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Silicon Spinning. The Beginning of Microprocessors. By: Mahmoud Hayat and Will Farrell Mentor: Kwame Owusu-Adom. Introduction. We tested contact angles of different fluids on different surfaces. We spin coated silicone fluids of different viscosity on a silicon wafer. - PowerPoint PPT Presentation
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SiliconSilicon SpinningSpinningThe Beginning of The Beginning of MicroprocessorsMicroprocessors
By: Mahmoud Hayat and Will Farrell Mentor: Kwame Owusu-Adom
IntroductionIntroduction
•We tested contact angles of We tested contact angles of different fluids on different different fluids on different
surfaces.surfaces.
•We spin coated silicone fluids We spin coated silicone fluids of different viscosity on a of different viscosity on a
silicon wafer.silicon wafer.
The Engineers @ WorkThe Engineers @ Work
FTA Contact Angle FTA Contact Angle AnalyzerAnalyzer
Spin Coating MachineSpin Coating Machine
Picture of Droplet on Contact Angle Picture of Droplet on Contact Angle MachineMachine
Drop of Fluid
Contact Angles
Contact Angle GraphContact Angle Graph
0
20
40
60
80
100
Wat
er
DIW
Soapw
ater
Silicon
e 10
0
Silicon
e 50
0
Silicon
e 10
00
Fluid
Co
nta
ct
An
gle
s Silicon wafer
UHMWPE
Glass
Polycarbonate
Spin Coating @ 1000 RPMSpin Coating @ 1000 RPM
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
0.04
20 30 40 50 60 70
Time (sec)
Fil
m t
hic
kn
es
s (
cm
)
100 Viscosity
500 Viscosity
1000 Vicosity
Soapw ater
Spin Coating @ 2000 RPMSpin Coating @ 2000 RPM
0
0.004
0.008
0.012
0.016
0.02
20 30 40 50 60 70
Time (sec)
Film
th
ick
ne
ss
(c
m)
100 Viscosity
500 Viscosity
1000 Viscosity
Soapwater
Spin Coating @ 3000 RPMSpin Coating @ 3000 RPM3000 rpm
0
0.004
0.008
0.012
0.016
20 30 40 50 60 70
Time (sec)
Film
th
ick
ne
ss
(c
m)
100 Viscosity
500 Viscosity
1000 Viscosity
Conclusion Of Contact Conclusion Of Contact AnglesAngles• Surfactant reduces contact angle of DIW on all Surfactant reduces contact angle of DIW on all
four surfaces. four surfaces. • Each silicone with the same viscosity has almost Each silicone with the same viscosity has almost
the same contact angle on all four surfaces. the same contact angle on all four surfaces. • All Water based liquids (Water, DIW, and Soap All Water based liquids (Water, DIW, and Soap
Water) have a bigger contact angle on all Water) have a bigger contact angle on all surfaces than any of the three silicone fluids. surfaces than any of the three silicone fluids.
• A large Contact angle = Less DeformationA large Contact angle = Less Deformation• A smaller Contact angle = More DeformationA smaller Contact angle = More Deformation• The silicone fluids had more deformation than The silicone fluids had more deformation than
the water based fluids. the water based fluids. • Water has more surface energy so water forms a Water has more surface energy so water forms a
bigger contact angle on all four surfaces. bigger contact angle on all four surfaces.
Conclusion Of Spin Conclusion Of Spin CoatingCoating
• All four fluids, soap water, silicone All four fluids, soap water, silicone with 100, 500 and 1000 viscosity, with 100, 500 and 1000 viscosity, when spun at 1000, 2000 or 3000 when spun at 1000, 2000 or 3000 RPM for a longer period of time, RPM for a longer period of time,
produces a thinner film on the wafer.produces a thinner film on the wafer.
• The opposite happens when the The opposite happens when the wafer is spun for a shorter period of wafer is spun for a shorter period of
time. time.
Thank YouThank You
• SESEY programSESEY program
• Skip RochefortSkip Rochefort
• Kwame Owusu-AdomKwame Owusu-Adom
• The rest of SESEY students for being The rest of SESEY students for being cool.cool.
