Sputter deposition is a technology for the surface treatment of substrates. The technique is based on ion bombardment of a target, resulting in a vapor. One of the most common approaches for growing thin films by sputter deposition is the use of a magnetron source, in which positive ions present in the plasma. Well known as direct current (DC sputtering) for conductive targets and radio frequency (RF sputtering) for nonconductive targets. Magnetron sputtering in diverse modes like DC, pulsed DC, bipolar and RF is available on the market.

Sputtering competence at a glance

Due to its versatility and the possibility to apply it on a large scale at low costs, sputter deposition or sputtering is widely used in research and industry. Different sputter variations are used in application fields like high-end multilayer systems for thermal insulation, hard coatings and self cleaning windows, transparent electrodes for

photovoltaics and display industry, or functional films in microelectronics.

SINGULUS TECHNOLOGIES and sputtering

SINGULUS TECHNOLOGIES has delivered in excess of 8,000 vacuum sputtering machines worldwide over the past 20 years. The machines range from standard sputtering

systems to ultra-high vacuum deposition machines, applying extremely thin layers. Importantly they have capabilities down to 0.2 nm for the semiconductor industry as well as data storage, decorative coatings and solar cell production. Based on this experience, these systems offer high throughput and a high uptime of

Sputtering plasma

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the machines. In-house cathode design, including magnetron development and the simulation of the different sputtering processes, are done with sputtering in-house lab equipment. A close cooperation with scientific institutes such as Fraunhofer, Inplas, Centre Suisse d’Electronique et de Microtechnique (CSEM), University of Konstanz as well as organizations in USA, China and Singapore assure access to the latest R&D results.

The range of products include systems for vertical and horizontal substrate orientation starting from small 3-dimensional parts to large glass surfaces. SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for these applications.

The company operates as a driver of innovation in technology areas with high growth potential.

SINGULUS TECHNOLOGIES is a recognized supplier for new photovoltaic machine concepts and production processes for crystalline and thin-film solar cells, which increase the efficiency of solar cells and reduce their production costs. Also, in the semiconductor market it is a renowned manufacturer of advanced thin-film deposition equipment for magnetics, MRAM, thin-film head, and other semiconductor applications.

The systems offer a reliable deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below, as well as stacks of such films with very precise material thickness and high

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uniformity specifications.

The application areas for the finishing of surfaces through vacuum coating technology are e.g. automobile, health or lifestyle industries. For medical technology, SINGULUS TECHNOLOGIES offers machine technology for wet-chemical processes, coating technology processes as well as injection-molding of small plastic parts where high precision and extremely high quality are required.

Inline sputtering systems of multiple applications

The POLYCOATER from SINGULUS TECHNOLOGIES is one example for a sputtering production system for the fully automatic coating of flat and 3-dimensional parts. The sputtering module can be interlinked with different innovative handling concepts, which also provide the possibility of incorporating additional production modules: e.g. lacquering module and robot handling systems. The system can be integrated into an existing production flow.

An integrated exchange handling system loads new parts and unloads the metallized parts to an interface position.

The POLYCOATER offers a reproducible layer uniformity and high deposition rates with highest quality coating and a high uptime through to permanent sputtering process control. The cycle time per metallized substrate is less than 0.4 seconds.

Inline sputtering system for heterojunction solar cells

One main focus during the solar cell production is the efficiency. Heterojunction cell technology (HJT) achieves conversion efficiencies of more than 22% as well as reduced manufacturing costs.

The new GENERIS PVD machine from SINGULUS TECHNOLOGIES is a horizontal inline sputter tool designed for the special requirements of Heterojunction cell production with coatings on both sides simultaneously. The GENERIS PVD is ideally suited for challenging layer stacks i.e. TCO layers like ITO and AZO providing maximum optical transmittance, matched refractive index, optimum electrical conductivity as well as charge carrier mobility, which are key-parameters in heterojunction cell technology. Sputter damage to the amorphous silicon layer stack does not occur. A full substrate temperature control during the whole process enables optimum layer performance at temperatures ≤ 200 °C.

Rotatable sputtering magnetrons

With the GENERIS PVD sputtering system, contact layers can be deposited on the front and rear of the Si-wafers without the need to turn the wafers between coating processes and without vacuum interruption. The annealing of sputtered layers is integrated optionally. Also, full area metal coatings, e.g. Al, Ag as well as CU can be deposited within the same system. By using rotatable sputtering magnetrons, highest target utilization is achieved and offers the lowest production costs.

Other typical applications include anti-reflection layers, barrier layers and precursor layers but also different metallic layers such

as Al, Cu, NiV, etc. The GENERIS PVD uses an inline process in which the substrates are transported on specially designed carriers, providing edge isolation simultaneously. The carrier return system is located below the machine under clean environmental conditions. Different automation options for loading and unloading are available.

Typical setup of a large inline sputtering system

Typical Performance Characteristics:

For transparent conductive oxide layers like ITO e.g. for HJT

Parallel processing of several substrates

Low cost of ownership and high uptime

Top down and bottom up sputtering configurations available

Sputter sequence configurable

Full temperature control throughout the whole process

Rotatable cylindrical magnetrons for highest utilization of target material

Target utilization about 80% for rotatable cathodes compared with only 30% for planar cathodes

Sputtering materials: ITO, AZO and metals like Ag, NiV, Cu, Al etc.

Single end and double end automation version selectable

The new machine utilizes an inline coating process, in which the substrates are transported on specially designed carriers, providing edge isolation simultaneously. The carrier return system is located below the machine under constant clean environmental conditions. Various automation options for loading and unloading are available from different industrial sources.

Sputtering systems for large substrates

Inline sputtering systems for large substrates have been developed for the requirements in the photovoltaic industry but also for applications in large area sputtering like architectural glazing, fuel cells

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Sputtering cathodes

Example of system configuration

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Large inline sputtering system with vertical substrate transport for thin film solar, glass & display.

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and display industry.

Inline sputtering systems with vertical transport orientation are important in today’s CIGS & CdTe thin-film solar cell production. The VISTARIS system from SINGULUS TECHNOLOGIES was designed to enhance the efficiency of thin-film solar cells, while cutting production costs by using the state-of-the-art technologies. For photovoltaic technology, SINGULUS TECHNOLOGIES develops and manufactures coating systems which can apply special layers and layer systems on different substrates.

Examples are transparent front, or metallic back contact layers, as well as multilayered precursors with a broad range of different materials. The main advantage of the system is that it can be used for vertical vacuum-based coating of glass substrates in the solar and display industry. The modular design includes process chambers equipped with rotatable magnetrons for the sputter deposition of high-performance TCO layers or several other materials, such as metals and metal oxides.

Pre-treating modules for cleaning or etching can be added. With its unique modular design, the HISTARIS system is ideally suited for challenging layer stacks and flexible product mixes.

SINGULUS TECHNOLOGIES also offers systems with horizontal transport orientation designed to enhance the efficiency and cutting production costs by using the state-of-the-art technologies. These systems use an inline process in which the substrates are transported on specially designed carriers or directly on a customized roller drive system. Different automation options for loading and unloading are available.

Typical Performance Characteristics

Modular configuration

Parallel processing of several substrates

Possibility of carrier as well as carrier free transport system

Low cost of ownership

Temperature processing before and during deposition available

Vacuum base pressure: < 1 x 10-6 mbar

Typical process pressure: 2 - 10 x10-3 mbar

Temperature range for deposition: up to 200°C

Usage of rotatable cylindrical magnetron highest utilization of target material

Sputtering material: ITO, AZO and metallic layers like Mo, Al, Cu, Ag, NiV etc.

Summary: SINGULUS TECHNOLOGIES’ sputtering technology at a glance

Technology developed for economic and resource-efficient production processes. The applications include vacuum sputtering and surface engineering, wet-chemical as well as thermal process technologies.

SINGULUS TECHNOLOGIES utilizes its know-how in the areas of automation and process technology in order to develop new attractive work areas with innovative products next to the application areas of costumer goods, energy, entertainment, medical technology and semiconductor.

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