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I www.susungtech.co.kr I
STC→TCS Conversion Reactor SCR – 36R
STC → TCS Conversion Reactor SCR – 36R
Benefit of SST’s Conversion Reactor1. Customer can produce 2 times of TCS than market existing Converter 2. Customer can save the running cost to a half (electric cost, consumable material cost, man power etc.) 3. Customer can save the plant capital cost through reducing the equipment number. 4. Customer can adopt SST’s Converter to running plant 5. SST support the stabilized running Sequence. 6. SST supply the most up-to date heater design and other materials.
SST、s SCR-36R is used for converting the clean STC to TCS gas whatformed during Si deposition in Silicon deposition reactor(CVD).
In these days for converting STC to TCS gas two well known process areused. One is hydrogenation and the other is hydro-chlorination.among of them SST、s Conversion reactor is used at Hydrogenationprocess which known as clean process.
The main reaction mechanism is
SiCl4 + H2 → SiHCl3 + HCl
Normally this process is used at small capacity poly-silicon plantbecause of its economic competitiveness
But SST、s SCR-36R overcomes the process weakness throughremarkable up to date technology
Head Office. #139-13, Sandong-ri, Eumbong-myeon, Asan-si, Chungnam,336-863,KoreaHome page : http://www.susungtech.co.kr
Tel : 82-41-584-3955 Fax : 82-41-584-7465
China. Guancheng Science & Technology Park Shilong Road Guanlong Road’s Section Dongguan, Guangdong, China
Tel : 86-769-2266-7702 Fax : 86-769-2226-1659
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Basic SpecificationConversion Rate : 18% ~ 25%
STC Feed Rate : 7,600kg/hr
TCS Conversion Rate : Ave. 1,350kg/hr
Electric Power Consumption : 2.2kW/kg(TCS)
Shield & Heater Material : Graphite
Maintenance : once per 6 Month
Power Supply Unit - Main Transformer - Main Power Supply Unit
Basic Engineering PackageProcess Description
PFD & PNID for CVD System
Process Design Basic(Batch time, Civil Data etc.)
Operation Manual & Operation Sequence
Instrument Data sheet for CVD system
Piping Material Specification
Rod & Electric section Diagram
Heat _ Exchanger Data sheet
CVD Building Design Scheme
STC →TCS Conversion Reactor SCR – 36R
Equipment STC → TCS Conversion Reactor- Bell jar & Base Plate
Power Supply System
Power Transmitting Unit- Electrode - Insulation Parts
Temperature Control Unit- Pyrometer & Install Bracket
[ Ampere Characteristic ]
[ Voltage Characteristic ]