UB/TIB Hannover \

1996El . n

Material, ces anSymposia

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Symposium C

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Plenary SessionDec. 18, Wednesday

Chairs : L.J. Chen, Natl. Tsing Hua Univ., ROCH.L. Hwang, Natl. Tsing Hua Univ., ROC

0-1-P.l 09:30 Trends in CMOS Technology and Application Development

Tak H. Ning, IBM Thomas J. Watson Research Center, USA

10:20 Break

0-2-P.7 10:40 An Approach for Migrating to GIGA-Scale IntegrationEiji Takeda. Hitachi Ltd., Japan

0-3-P. 15 11:30 Application of Micro-Electro-Mechanical Systems toOptoelectronicsJames S. Harris, Stanford Univ., USA

Symposium C : Processes and Characterization of ElectronicMaterials

Dec. 18, Wednesday

Session C1 : IC on Silicon

Chairs : L.J. Chen, Natl. Tsing Hua Univ., ROCK.N. Tu, UCLA, USAY.F. Hsieh, UMC, ROC

C1-1-P.23 13:30 (Invited) Electromigration in Metal Contacts on SiliconK.N. Tu. UCLA, USA

C1-2-P.25 14:00 Characterization and Metrology of the Low PressureChemical Vapor Deposited (LPCVD) PolysiliconLeo Asinovsky. Rudolph Technologies, Inc., USA

C1-3-P.29 14:20 A Study on the Stress Variation and Material Reliabilityof Aluminum Alloy Thin Films Integrated with Low-Dielectric Constant Fluorinated Silicon DioxidesW.T. Tseng, L.W. Chen, Y.T. Hsieh. G.C. TuNatl. Nano Device Lab., ROC

C1-4-P.33 14:40 Wafer Loading Dependence of Pt Diffusion in FurnaceH.C. Lu. K. Spring. R. FrancisInternational Rectifiers Corp., USA

15:00 Break

C1-5-P.37 15:20 (Invited) Effects of N+ Implantation on TiSi2and CoSi,Contacts on Shallow JunctionsL.J. Chen, S.L. Cheng, K.M. Chen, B.Y. Tsui*

Natl. Tsing Hua Univ., *ITRI ROC

C1-6-P.45 15:50 The Characterization of Polysilicon Oxide Nitrided in N2OC.S. Lai. G.Y. Chen. T.F. Lei, C.L. LeeNatl. Chiao Tung Univ., ROC

C1 -7-P.49 16:10 Study on the Reliability of Ultra-Thin Oxide Grown inLarge Diameter Silicon Wafers by Microwave PlasmaAfterglow OxidationC.R. Chen, S.F. Hou. L.C. Hsia*, H.L. HwangNatl. Tsing Hua Univ., *Mosel Vitelic Inc., ROC

C1-8-P.53 16:30 Electron Effective Mass Measurements of Strained Si andSi094Ge006 on Relaxed Si062Ge038 Buffers Grown by RTCVDC.W. Liu, V. Venkataraman*, Natl. Taiwan Univ., ROC

* India Inst. of Science, India

C1-9-P.57 16:50 Influence of Hydrogen Annealing on Gate Oxide Quality andJunction Leakage for Deep Submicrometer DeviceManufacturingL.C. Hsia, S.J. Chang, Scott Chen, H.Y. Wei, Thomas ChangM.L. Chen. Nasa Tsai, Mosel Vitelic Inc., ROC

C1-10-P.61 17:10 Profiling Sub-lOOnm Shallow Junctions by Secondary IonMass Spectrometry (SIMS)Paul K. Chu, Victor K.F. Chia \ Stephen P. Smith*,Charles W. Magee* *City Univ. of Hong Kong, Hong Kong* Charles Evans & Associates, * * Evans East, USA

Cl-11-P.65 17:30 Infrared Photoelasticity Study of Stress Distribution inSilicon Under Patterned StructuresS.P. Wong, W.Y. Cheung, N. Ke, M.R. Sajan, W.S. Guo,L. Huang, Shounan ZhaoThe Chinese Univ. of Hong Kong, Hong Kong

Dec. 18, Wednesday

Session C2 : Electronic Ceramics and Recording Media ( I )

Chairs : Haydn Chen, Univ. of Illinois, USAC M . Wang, ITRI, ROCT.B. Wu, Natl Tsing Hua Univ., ROC

C2-1-P.69 9:00 (Invited) Electroceramic Thin Films: A Short ReviewC.H. Lin. Haydn Chen. Univ. of Illinois, USA

C2-2-P.77 930 Mechanism of the Anodic Bonding of PZT Ceramics toSilicon WaferGen Sasaki. Hideharu Fukunaga*. Tadatomo Suga \Katuhiko Tanaka**, Hiroshima Univ., 'The Univ. of Tokyo,* *Murata Manufacturing Company Ltd., Japan

C2-3-P.81 9:50 Comparative Study of Electrical Properties in [100] and[1 Ill-Oriented PZT FilmsS.Y. Chen. Natl. Chiao Tung Univ., ROC

C2-4-P.85 10:10 Phase Transformation and Pertinent Microstructures ofLead Titanate Single CrystalsC.S. Chen, C.C. ChouNatl. Taiwan Institute of Technology, ROC

10:30 Break

C2-5-P.89 10:50 (Invited) Fabrication and Characterization of ElectroceramicThin Films for Semiconductor Memory ApplicationsT.Y. Tseng, Natl. Chiao Tung Univ., ROC

C2-6-P.97 11 20 Dielectric Characteristics of Doped BalxSrxTiO3 at theParaelectric StateJ.W. Liou, B.S. Chiou, Natl. Chiao Tung Univ., ROC

C2-7-P. 101 11 40 The Role of La Dopant on the Dielectric Properties of LeadScandium Niobate CeramicsH.C. Wang, T.W. Chen, Y.H. Wang, ITRI, ROC

C2-8-P.105 12:00 La3+ Doping on the Ordering Behavior of Ba (ZnI/3Ta2/3) O3

C.C. Lee. C.C. Chou, D.S. TsaiNatl. Taiwan Institute of Technology, ROC

Dec. 19, Thursday

Session C3 : Electronic Ceramics and Recording Media (Tl)

Chairs : H.P. Shieh, Natl Chiao Tung Univ., ROCJeny Lee, Trace Storage Tech. Corp., ROCJeoffrey W. Shuy, ITRI, ROC

C3-1 -P. 109 13:30 (Invited) The Characterization of Magnetic and OpticalDisc MaterialsE.W. Williams, Keele Univ., UK

C3-2-P. 113 14:00 (Invited) Control of Microstructure and MagneticProperties in Thin Film Disk by Ultra-Clean SputteringProcessMigaku Takahashi, Tohoku Univ., Japan

C3-3-P. 121 14:30 Magnetic Properties and Giant Magnetoresistance in theGranular SystemH.C. Lai. Q.S. Huang, CM. Chang. Jeoffrey W. ShuyITRI. ROC

C3-4-P.123 14:50 Surface Analysis of Boron-Doped Polycrystalline DiamondFilms Deposited by Microwave Plasma Chemical VaporDepositionB.R. Huang, W.S. Peng, T.J. HoNatl. Yun Lin Institute of Technology, ROC

C3-5-P.127 15:10 Magnetotransport Phenomena in Epitaxial La-Nd-Ca-Mn-OFilmsL.H. Chen, T.A. HuangKaohsiung Polytechnic Institute, ROC

C3-6-P. 131 15:30 Microstructure of Al2O3-ZnO Colloid Films from theVarious of Sol-Gel ProcessZhao Dachun, Qu Zhongkai*, Cheng JijianEast China Univ., * Shanghai Petrochem. Institute, China

C3-7-P.135 15:50 Spectroscopy of Cerium Ion in Lithium-Alumino-BorateGlassGourkrishna DasMohapatraCentral Glass & Ceramic Research Institute, India

15:30-17:30 (Poster Preview)

Dec. 20, Friday

Session C4 : Batteries

Chairs : T.K. Fey, Natl. Central Univ., ROCD.H. Shen, NEXcell Battery Co., Ltd., ROCH. S. Chang, Loochow Univ., ROC

C4-1-P.139 9:00 (Invited) Importance of the Surface Treatment forObtaining High Performance Anode Materials forRechargeable Lithium-Ion BatteriesTsutomu Takamura, Petoca Ltd., Japan

C4-2-P.147 9:30 Electronic Behaviors of Li-GIC in the Lithium SecondaryBatteryY.H. Lee, W.K. Chang, C.H. Fang, Y.F. Huang*

Andy A Wang* *, Natl. Taiwan Univ.. * Chung-Yuan Univ.. * *Nan Ya-Junior College, ROC

C4-3-P 151 9:50 Performance Study of LiCo02/ Graphite SystemC.Y. Yang, C.H. Cheng, S.M. Ho, J.C. Chen, W.M. HurngIndustrial Technology Research Institute, ROC

C4-4-P.155 10:10 Synthesis and Properties of LiNi05Co05VO4 as CathodeMaterial for Secondary Lithium BatteriesGeorge T.K. Fey, K.S. Wang, S.M. YangNatl. Central Univ., ROC

10:30 Break

C4-5-P. 157 10:50 Applications and Development of NEXcell's High PowerNi-MH BatteryT.J. Lee, David H. Shen, NEXcell Battery Co., Ltd., ROC

C4-6-P. 163 11:10 Studies of Cycle Stability of Lithium Cobalt OxideC.Y. Yao, S.P. Sheu, J.M. Chen*ITRI, *Natl. Tsing Hua Univ., ROC

C4-7-P. 167 11:30 Characterization of Real-time Poling Prepared NonlinearOptical Thin FilmsH.S. Wu, J.H. Jou, Y.C. Li, J.Y. Huang*Natl. Tsing Hua Univ., *Natl. Chiao Tung Univ., ROC

C4-8-P.171 11:50 Synthesis and Characterization of Li1+xMn2O4Prepared via aSol-Gel MethodH.S.W. Chang, Y.W. Chen, Y.S. Fuh, Y.L. JuoSoochow Univ., ROC

Dec. 19, Thursday

Poster Session

Chairs : CM. Wang, ITRI, ROC

CP- 1-P.175 Chemical Vapor Deposition of TiN Films Using A SolidTitanium Chloride-Ammonia Complex PrecursorK.S. Chou, J.F. Yan, R.J. Shieh, CM. Yang*, Jenn Tsao*Natl. Tsing Hua Univ., *TSMC, ROC

CP-2-P. 179 Growth and Characterization of CuInxGa,.xS2 andCuInSvSe2y Thin FilmsJ.W. Pei, J.S. Yu, B.H. Tseng*, H.L. HwangNatl. Tsing Hua Univ., *Natl. Sun Yat Sen Univ., ROC

CP-3-P. 183 Measurement of Index-Versus-Temperature Coefficients ofSiOx and Ta2O5 Thin FilmsA.K. Chu, H.C. Lin, W.H. Cheng, Natl. Sun Yat Sen Univ., ROC

CP-4-P.187 Relaxation Time Studies on Nin7Zn03AIxFe2.xO4 andNi07Zn03 CrIFe2.xO4 SystemsA.M. Sankpal, S.V. Kakatkar, R.S. Patil, N.D. ChaudhariR.K. Kamat, S.M. Kabbur, S.S. Suryavanshi, S.R. SawantShivaji Univ., India

CP-5-P. 191 The Effects of Bi2O3 on the Characteristics of LowTemperature Sintered Forsterite-Base Dielectric MaterialH.C. Lin, J.Y. Hsu, C.J. Chen. ITRI, ROC

CP-6-P. 195 Effects of Sintering Temperature on the Properties ofMultilayer Chip InductorsH.M. Sung, C.J. Chen, L.J. Wang, W.S. Ko, Y.T. HuangITRI, ROC

CP-7-P. 199 Thermal Resistance Predicting Using TransientTemperature ResponseK.F. Tseng, T.H. Chang. J.H. Tsai, Bob Cheng", W.L. Lu",C.H. Kao, B.J. Lwo, Chung Cheng Institute of Technology,'Caesar Technology Inc., "Chinese Naval Academy, ROC

CP-8-P.203 Fabrication of Single Layer Organic ElectroluminescentDevicesW.K. Wen, J.H. Jou, W.P. Chang*, W.T. Whang*Natl. Tsing Hua Univ., 'Natl. Chiao Tung Univ., ROC

CP-9-P.207 Experimental Design Method Applied to Li/ LiCoO,Rechargeable CellsJ.M. Chen, C.L. Tsai, C.Y. Yao\ S.P. Sheu', H.C. ShihNatl. Tsing Hua Univ., 'ITRI, ROC

Symposium E : Display and Sensing TechnologyDec. 18, Wednesday

Session E1 : Flat Panel Display and TFT/LCD

Chairs : F.C. Su, Unipac Opto Elec. Crop., ROCD.C. Hu, Prime View International Corp., ROC

El-l-P.211 13:30 (Invited) CRTs are Forever as Video Display DevicesLyuji Ozawa, L. L. Technology Consultant, USA

E1-2-P.219 14:00 (Invited) Current Status of AMLCD TechnologiesF.C. Luo, Unipac Opto Elec. Corp., ROC

E1 -3-P.225 14:30 The Characteristics of a-Si:H Films Prepared byECRPCVDM.S. Kang, J.Y. Kim, T.H. Lim*, I.H. Oh*, B.J. Jeon**,

I.H.Jung**,Y.S. Koo***,C. AnSogangUniv., institute of Science and Technology, Korea**Dankook Univ., ***Seokyeong Univ., Korea

E1 -4-P.229 14:50 The Mechanism of Initial Silicon Oxide Growth by LiquidPhase DepositionJ.H. Wei, S.C. Lee, Natl. Taiwan Univ., ROC

15:10 Break

L1-5-P.233 15:20 (Invited) High Performance Low Temperature Poly-a-SiThin Film Transistors for Active Matrix Liquid CrystalDisplayC.Y. Chang, H.Y. Lin, C.W. Lin, Natl. Chiao Tung Univ., ROC

E1-6-P.237 15:50 (Invited) Poly-Si TFT Technology for AM-LCDs and theFuture Prospects of High Information-Content DisplaysI.W. Wu, Xerox, USA

E1-7-P 245 16:20 A Novel Water-Resistant Coating of PECVD a-Si:H uponthe Low-Temperature a-SiNx:H Passivation Layer inHydrogenated Amorphous Silicon Thin Film TransistorsW.S. Liao, S.C. Lee, Natl. Taiwan Univ., ROC

E1 -8-P.249 16:40 The Electrical Properties of In-Situ Doped PolycrystallineSilicon Thin Films Grown by Electron Cyclotron ResonanceChemical Vapor Deposition at 250°CR.Y. Wang, H.L. Huang, T.R. Yew*Natl. Tsing Hua Univ., ROC

E1-9-P.253 17:00 Novel Polycrystalline Silicon Thin Film TransistorsPrepared by Si2H6 Deposited and Subsequent Annealingby NH3 PlasmaC.J. Chang, H.Y. Lin, T.F. Lei, C.Y. ChangNatl. Chiao Tung Univ., ROC

E1-10-P.257 17:20 Plasma Passivation Effects on Polycrystalline Silicon Thin-Film Transistors using NH3 and N2OF.S. Wang, C.Y. Huang, H.C. ChengNatl Chiao Tung Univ., ROC

El-11-P.261 17:40 Comparison of NH3 and N2 Passivation Mechanisms betweenLow-Temperature and High-Temperature Polysilicon ThinFilm TransistorsF.M. Liu, W.L. Yang, H.Y. Lin*, T.F. Lei*Feng Chia Univ., *Natl. Chiao Tung Univ., ROC

Dec. 19, Thursday

Session E2 : FED, CRT, LED, EL and Others

Chairs : H.C. Cheng, Natl. Chiao Tung Univ., ROCM. Yokoyama, Natl. Cheng Kung Univ., ROC

E2-1-P.265 9:00 (Invited) Device Reliability and Materials ScienceYasuo Nannichi, Univ. ofTsukuba. Japan

E2-2-P.269 9:30 Enhanced Electric Field in Emission Tip with An AmazingStructure of Modified Volcano-Shaped Field EmitterS.H.Yang. M. Yokoyama. Natl. Cheng Kung Univ., ROC

E2-3-P.273 9:50 Fabrication and Characterization of Chimney-Shaped N+-Poly-Si Field Emitter ArraysF.G. Tarntair, T.K. Ku, CD. Yang, W.K. Hong. C.C. Wang,I.J. Hsieh*. H.C. Cheng, Natl. Chiao Tung Univ.,Natl. Nano Device Lab.. 'Chung-Hua Polytechnic Institute. ROC

10:10 Break

E2-4-P.277 10:30 (Invited) The Challenge of Color CRT Electron Gun DesignH.Y. Chen, Chunghwa Picture Tubes, ROC

E2-5-P.283 11:00 (Invited) Processing and Fabrication of GaN BasedMESFET'sJ.D. Guo. C.I. Lin, C.F. Lin*, R.J. Guo*. M.S. Feng*Natl. Nano Device Lab.. *Natl. Chiao Tung Univ.. ROC

E2-6-P.291 11:30 Etching of ZnS Thin Film by Reactive Ion Etching for ThinFilm Electroluminescent DevicesS.H. Su, M. Yokoyama, Y.K. Su, Natl. Cheng Kung Univ.. ROC

E2-7-P.295 11 50 Visible Luminescence from Porous Silicon Fabricated byAcid H2SiF6 Stain EtchesK.C. Lee, J.G. Hwu, Natl. Taiwan Univ., ROC

Dec. 19, Thursday

Session E3 : Sensing Technology (I)

Chairs : J.S. Shie, Natl. Chiao Tung Univ., ROCY.J. Chan, Natl. Central Univ., ROC

E3-1-P.299 13:30 (Invited)A CMOS Compatible Micromachined Thermo-Capacitive Flow SensorR.S. Huang, K.M. Lin*, C.Y. Kwok*, Natl. Tsing Hua Univ.,ROC, 'The Univ. of New South Wales, Australia

E3-2-P.307 14:00 A Piezoresistive Pressure Sensor Fabricated by aCommercial DPDM CMOS ProcessC.C. Lai, L.J. Yang, P.Z. Chang, C.L. Dai, D.J. Wei, S.I. Liu.Natl. Taiwan Univ. ROC

E3-3-P.311 14:20 Studies on Implantation Defects of Large Area SiliconMicrostrip SensorsW.C. Tsay. Y.A. Chen. L.H. Laih, J.W. Hong,Augustine E. Chen*. Willis T. Lin*, Y.H. Chang*,Suen R. Hou*, C.R. Li* *, H.J. Ting* *, S.T. Chiang* *Natl. Central Univ., **Suntek Elec. Inc. ROC

E3-4-P.315 14:40 An Integrated Capacitive Micro Accelerometer UsingStandard CMOS ProcessC.L. Dai, P.Z. Chang. S.S. Lu. D.J. Wei, S.I. LiuNatl. Taiwan Univ., ROC

15:00 Break

15:20 (Poster Preview)

Dec. 20, Friday

Session E4 : Sensing Technology (II)

Chairs : S.K. Hsiung, Chung Yuan Christian Univ., ROCP.Z. Chang, Natl. Taiwan Univ., ROC

E4-1-P.319 9:30 Development of Micromachined Force Sensors and OpticalMicromirror Actuators Based on Sol-gel DerivedFerroelectric Thin FilmsRyutaro Maeda*, Chengkuo Lee** *, Andreas Schroth,Toshihiro Itoh* *, Tadatomo Suga* *'Mechanical Eng. Lab., *"'Tokyo Univ., Japan

E4-2-P.323 9:50 Microfabricated Piezoelectric Force Sensing PZT CantileverArray for Multiprobe Scanning Force MicroscopeChengkuo Lee, Toshihiro Itoh, Jiaru Chu, Tadatomo Suga,Ryutaro Maeda*,Tokyo Univ., Mechanical Eng. Lab., Japan

E4-3-P.327 10:10 Si-Based Metal-Semiconductor-Metal Photodetectors(MSM-PD's) with Amorphous Barrier LayersL.H. Laih, J.C. Wang, Y.A. Chen, T.S. Jen, W.C. Tsay,J.W. Hong, Natl. Central Univ., ROC

10:30 Break

E4-4-P.331 10:50 pH Sensitivity of the a-WO3 Thin Film Obtained by ThermalVacuum EvaporationH.K. Liao, J.C. Chou*, W.Y. Chung, S.K. HsiungChung Yuan Christian Univ., *Natl. Yunlin Institute ofTechnology, ROC

E4-5-P.335 11:10 High Performance of Infrared Focal Plane ArraysFabricated with PtSi SBDG.J. Horng, C.T. Chang, W.S. Wang*, Chia Ho*, T.M. Chuang*.M.F. Huang*, Natl. Chiao Tung Univ., "Micro Elec. DevicesLab., ROC

Dec. 19, Thursday

Poster Session

Chair : J. G. Hwu, Natl. Taiwan Univ., ROC

EP-1-P.339 The Role of SiO2 Insulator Thickness in ZnS:Tb of Thin-Film Electroluminescent Devices with Double-StackedStructureC.W. Wang, T.J. Sheu. C.Y. Liao. Y.K. Su*. M. Yokoyama*Kaohsiung Polytechnic Institute,*Na(l. Cheng Kung Univ., ROC

EP-2-P.343 A Silicon-Based Photon Detector ArrayC.L. Houng*, J.T. Sheu* *, S. Su* *, Natl. Chiao Tung Univ.,

* * Synchrotron Radiation Research Center, ROC

EP-3-P.347 Improvements in Electroluminescent Properties byIncorporating Multi-Barrier Y2O3 Layers into ZnS: MnPhosphor LayerR.H. Horng, D.S. Wuu, J.W. YuDa-Yeh Institute of Technology, ROC

EP-4-P.351 Improvements in SrS: Ce Electroluminescent Properties byRapid Thermal ProcessR.H. Horng, D.S. Wuu, G. J. LiauDa-Yeh Institute of Technology, ROC

EP-5-P.355 The Effect of Interface States on the Dynamic Behavior ofAmorphous Silicon Thin-Film TransistorsN.K. Cheng, J.S. Huang, C.C ChenKaohsiung Polytechnic Institute, ROC

EP-6-P.359 The Investigation of PtSi/ p-Si Schottky Barrier HeightUsing I-V-T MethodW.S. Wang, C. Ho, T.M. ChuangChung Shan Institute of Science and Technology, ROC

EP-7-P.363 Study on a-WO3 Films as Silicon Microstructure BolometerInfrared ArraysT.C. Wu, H.K. Liao, H.H. Chen, J.C. Chou,* W.Y. Chung,S.K. Hsiung, Chung Yuan Christian Univ.,*Natl. Yunlin Institute of Technology, ROC

EP-8-P.367 Study on a-WO3 / Si Heterojunction Structure forOptoelectronic Device ApplicationH.H. Chen, H.K. Liao, T.C. Wu, J.C. Chou*, W.Y. Chung,S.K. Hsiung, Chung Yuan Christian Univ.,*Natl. Yunlin Institute of Technology, ROC

EP-9-P.371 Capacitive Accelerometers and Pressure Sensors UsingNearly Identical Processing ProceduresL.J. Yang, P.Z. Chang, J.Y. Chen, S.Y PaoNatl. Taiwan Univ., ROC

EP-10-P.375 An Integrated Software Framework for Micro-Electro-Mechanical-System Design and AnalysisC.C. Huang, W.B. Shih, C.K. Chiu, J.D. Yang, P.Z. ChangNatl. Taiwan Univ., ROC

Symposium F : Electronic Packaging TechnologiesDec. 19, Thursday

Session F1: Electronic Packaging Technologies

Chair : S.L. Fu, Kaohsiung Polytechnic Institute, ROC

F1-1-P.379 9:00 (Invited) Electronics Packaging Technology UpdateJohn H. Lau. Express Packaging, USA

F1-2-P.385 9:30 Material Characterization, Flow Simulation and ProcessOptimization of TSOP Transfer Molding ProcessW.F. Hsu, T.Y. Chen, H.W. Tu, ITRI, ROC

F1-3-P.389 9:50 Camber Development During Cofiring Ag-BasedLow-Dielectric-Constant Ceramic PackageC.R. Chang, J.H. Jean, Natl. Tsing Hua Univ., ROC

F1-4-P.393 10:10 Finite-Element Analysis of Thermal Stresses inSemiconductor Laser PackagingW.H. Wang, I.D. Yang, J.H. Kuang, W.H. ChengNatl. Sun Yat-Sen Univ., ROC

10:30 Break

Session F2: Electronic Packaging Technologies

Chair : B.S. Chiou, Natl. Chiao Tung Univ., ROC

F2-1-P.397 10:50 (Invited) Microelectronic Packaging Technology inTaiwanS.L. Fu, Kaohsiung Polytechnic Institute, ROC

F2-2-P.405 11:20 A Simple Packaging Technique for Polarization-Maintaining-Fiber in Silicon V-Groove to Waveguide withAngled InterfaceC.H. Hsia*, J.C. Lin*,H.M. Chen. S.L. Hwang**,W.H. Cheng**, ITRI*( 'hung-Shan Institute of Science and Technology**Natl. Sun Yat-Sen Univ., ROC

F2-3-P.409 11:40 Investigations of A Passive Heat Transfer Enhancement inElectronic Cooling SystemsT.C. Hung. S.K. Wang, F.P. Tsai*Kaohsiung Polytechnic Institute,*Pacific-Sierra Research Corp., ROC

Dec. 19, Thursday

Session F3: Electronic Packaging Technologies

Chair : K.L. Lin, Natl. Cheng Kung Univ., ROC

F3-1-P.413 13:30 (Invited) Market and Technology Trends in AdvancedPackagingE. Jan. Vardman, TechSearch International Inc., USA

F3-2 14:00 Progress of IC Packaging Industry in TaiwanJ.T.S. Yeh, C. Cheng, L.C. LeeSampo Semiconductor Corp., ROC

F3-3-P.417 14:20 A Study of Applicability of AM PI Composite Bumps to COGBonding ProcessJ.H. Jeng, T.E. Hsieh* ,Y.C. Lee, Y.C. Chen', T.H. LinS.M. Chang, ITRI, " Natl. Chiao Tung Univ., ROC

F3-4-P.421 14:40 Ultrathin Polyimide Films by Vapor DepositionPolymerizationC.L. Cheng, J.H. Jou, Natl. Tsing Hua Univ., ROC

15:00 Break

Session F4: Electronic Packaging Technologies

Chair : R.L. Lee, 777?/, ROC

F4-1 15:20 (Invited) Status and Development of Packaging Industry inTaiwanF.J. Wu, ITRI, ROC

F4-2-P.425 15:50 Reflow Effect on the Interfacial Behaviours of theElectroplated Solder BumpsK.L. Lin. S.Y. Chang, Natl. Cheng Kung Univ., ROC

F4 3-P429 16:10 Solder Joint Reliability of TAB/OLBC.T. Huang, ITRI, ROC