1
Classified Abstracts 344--349 Classified Abstracts Abstractmg Editor's Note. The label munedtately following the title oJ each item denotes country of origin of pubhcatton, and that at the end of each abstract mdwates country oJ origin of u ork (where known). General Vacuum Science and Engineering 10. Vacuum Science and Technology lO 21 344. The pumping speed of titanium sputter pumps in ultra-high vacuum. ( Get ma~t~ ) In the pre~sure ranges of lO ~and I0 ~t'torr thepumplngspeedol a titanium sputter pump is measured by comparr.,on v, lth the kno~n conductance of a dmphragm After s~mple bake-out an ultimate pressure ol 5 10 ~'' torr ts obtained The pumping speed, ho~,,e~er, m tile Io~er pressure range,, [s nouceabb reduced compared to that of a d~ffus~on pump The performance of a sputter pump ~s considerably improved b2, a short mject~on of argon After that treatment the ulumate pressure drop~ to 3-7 10 ~torrandthepumpmgspeedcharacter~tlct~quahta- tlvelythatola diffusion pump A ~trong ume dependence of the pumping speed is observed ~,~hen tile gas m.lectlon i,, kept con- stant In the range of l(I -~' torr, it takes about 24 hours for equlhbrlum to be reached The gas backstreammgol the~putter pump ~s--ln ~_ontrast to a diffusion pump~both pre.,,sure and time dependent The reduction ot the pumping speed of a pump before it has been argon treated is related to the observed reduction of the intensity, of the ga~, d~scharge belo~ ~ 10 " torr (S~tit_-erlalldl I ~uthorl E F~scher 2rid Furopean [a~ S3mp. 5-7 June. 1963. 261-265 Rudolph A Lang kerlag, Esch(Taunttsl 11. Production of Lo~ Pressure 11 21 25 345. Desorptmn experiments m an ultra-high ~acuum s~stem, pumped b) molecular s]ese trapped od diffusion pumps. ( Ge~ man~ ) In an ultra-h~gh ~acuum s~stem pumped by oil d~ffuslon pump~ with molecular siege traps the ~on current of a gauge gt~es no indication of the contamination of the s~sten't b} adsorbed od molecules and their crack product,-, At Io~ coverage the number of backstreamed od molecules Js measured alter a certain pnmplng time b~ isolating tile ~3stem lrom the pumps and b', a thermal desorpuon of the adsorbed molecule~ From a number of such desorptlon c~,cles a hnear increase of the coverage with oil molecules in the first ~eek,, ~s deduced ~htch gl~es a contamina- tion rate of 10" tool c cm-" da3 for a carefull.~ dega,,sed laborator.,, set-up IGe~man~l ( Author} S Garbe 2nd Emopean lac Slmp 5-7 June. 1963 295-304. Rudolph A Lang \erlag E~ch(Taunu~) 12. Measurement of Low Pressure 12 22 61 Problems in establishing standards for vacuum measurement and m calibrating ~acuum gauges. See Abstr No 449 12 14 16 346. The calculation of the pressure distribution in vacuum systems, taking into account adsorptmn and condensation. (Germany) in a high or ultra-high ~acuum system, the quantlt~ of gas adsor- bed b.~. or loosely attached to, the ~all~ generalb exceeds by far that remammg free in the enclosed volume The author investigates the influence of the adsorbed ga~ on the pressure distribution existing in long tubes, making use of a simplified form of the d~fferenttal equation for the diffusion process Specific solutions are g~ven ~hlch after generahzatton to other s2~stems ot different geometry can be u~ed t\,r the e',aluauon of the time constant of pressure equahzatlon, the calculation of flow impedance and cold trap effic~enc~ ( Germam l w J s J Neubert, I aAattt~l Techm~ 13 ( I ) Feb 1964, 19-23 12 61 347. Units in ~acuum measurement. (Great BtHam) The term pressure " begins to lose its con,.entlona[ meflnmg some~heremthe,.er} hJghxactlumreglon If ~e could construct an ~ontzatton gauge of absolutel,, known samphng el~c~ency it would be an absolute gauge ~hlch could be cahbrated to read molecules cc From the fact that at a pressure of 760 tort, there are 6 02 IO t-' molecules.mole 1 molecule. M ~ corresponds to a " pressure ol 2 83 10 --'~ torr The author suggests the use of a logarithmic dens[t~ scale ~th a zero at 1 molecule.'M" A pressure ol 1 10-" torr ~ould then correspond to 16 55 log denstt.,, umts Other ~alues are gt~en belo~ Pressure m tort 760 1 10 ~ 10 ~ 10 -~ 10 -~-' log dens[t'., st.ale 25 4~ 22 55 19 5", 16 55 13 55 10 55 For certain purposes (residual ga,, analys~ ere I a hnear densJt,, scale m~ght be prelerable But ~hate'.er the final choice, the author i%ol the opinion that the basic '.aCt.lum unit in high ".,aduunl ~ork should be one of molecular den~H3 rather than pressure ~A J S F T \~,orrel \atute. 199 (4~921 '~ Aug 1963 476 12 61 348. Units of ~acuum measurement. (G~eat &tram) The author refers to pre~lou,, proposals ol a logarithmic denslt~ ~cale (see Abstr No 347 abo~e) and proposes a logarithmic pressure scale ot his o~n defined by p.t = -log,. rpres~ure in atmo,,pheresl Thl~ leads to the follo,~ mg relatl~,e value,, Pressure mtorr 760 l 10 a l0 " l0 9 10-t_, p4 0 29 59 89 119 149 Th~ scale has the advantage of increasing ~ [th increasing vacuum and being restricted to small numbers Moreover it is related to the simple mercur~ manometer, the readmg~ ot ',~hlch unhke those of the ionization gauge or mass ~pectrometer are Independent of the gas they measure and in~anant from da} to da~ It must be emphasized hov, e~er. that logarithmic ,,tales. ho~e~er convenient and neat they ma~ be m describing the state of a vacuum s~stem are of httle use in vaLuum engineering, conductances, etc In these case.-, the customar2, hnear scale is still m,,aluable ~.~. J s J Cuthbert, Nature, 201(4914),4Jan 1964 61 349. Theory of linearity of hot cathode ,onizatton gauge. C Y H'.,.a, ActaPh~s Smtca, 19(2). 1963. 73-82 12 22 ( Clsma) 157

Units of vacuum measurement: J. Cuthbert, Nature, 201 (4914), 4 Jan. 1964, 61

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Page 1: Units of vacuum measurement: J. Cuthbert, Nature, 201 (4914), 4 Jan. 1964, 61

Classified Abstracts 344--349

Classified A b s t r a c t s

Abstractmg Editor's Note. The label munedtately following the title oJ each item denotes country o f origin o f pubhcatton, and that at the end o f each abstract mdwates country oJ origin o f u ork (where known).

Genera l V a c u u m Science and Engineer ing

10. V a c u u m Sc ience and Techno logy

lO 21 344. The pumping speed of titanium sputter pumps in ultra-high vacuum. ( Get ma~t~ ) In the pre~sure ranges of lO ~and I0 ~t'torr t h e p u m p l n g s p e e d o l a t i tanium sputter pump is measured by comparr.,on v, lth the k n o ~ n conductance of a dmphragm After s~mple bake-out an ultimate pressure ol 5 10 ~'' torr ts obtained The pumping speed, ho~,,e~er, m tile Io~er pressure range,, [s nouceabb reduced compared to that of a d~ffus~on pump The performance of a sputter pump ~s considerably improved b2, a short mject~on of argon After that t reatment the u lumate pressure drop~ to 3-7 10 ~ t o r r a n d t h e p u m p m g s p e e d c h a r a c t e r ~ t l c t ~ q u a h t a - t l v e l y t h a t o l a diffusion pump A ~trong ume dependence of the pumping speed is observed ~,~hen tile gas m.lectlon i,, kept con- stant In the range of l(I -~' torr, it takes about 24 hours for equlhbr lum to be reached The gas b a c k s t r e a m m g o l the~put te r pump ~s--ln ~_ontrast to a diffusion p u m p ~ b o t h pre.,,sure and time dependent The reduction ot the pumping speed of a pump before it has been argon treated is related to the observed reduction of the intensity, of the ga~, d~scharge belo~ ~ 10 " torr (S~tit_-erlalldl I ~uthor l

E F~scher 2rid Furopean [a~ S3mp. 5-7 June. 1963. 261-265 Rudolph A Lang kerlag, Esch(Taunt t s l

11. Product ion o f L o ~ Pressure

11 21 25 345. Desorptmn experiments m an ultra-high ~acuum s~stem, pumped b) molecular s]ese trapped od diffusion pumps. ( Ge~ m a n ~ ) In an ultra-h~gh ~acuum s~stem pumped by oil d~ffuslon pump~ with molecular siege traps the ~on current of a gauge gt~es no indication of the contaminat ion of the s~sten't b} adsorbed od molecules and their crack product,-, At Io~ coverage the number of backstreamed od molecules Js measured alter a certain pnmplng time b~ isolating tile ~3stem l rom the pumps and b', a thermal desorpuon of the adsorbed molecule~ From a number of such desorpt lon c~,cles a hnear increase of the coverage with oil molecules in the first ~eek,, ~s deduced ~htch gl~es a contamina- tion rate of 10" tool c cm-" da3 for a carefull.~ dega,,sed laborator.,, set-up IGe~man~l ( Author}

S Garbe 2nd Emopean lac Slmp 5-7 June. 1963 295-304. Rudolph A Lang \ e r l a g E~ch(Taunu~)

12. Measurement o f L o w Pressure

12 22 61 Problems in establishing standards for vacuum measurement and m calibrating ~acuum gauges. See Abstr No 449

12 14 16 346. The calculation of the pressure distribution in vacuum systems, taking into account adsorptmn and condensation. (Germany) in a high or ultra-high ~acuum system, the quantlt~ of gas adsor-

bed b.~. or loosely attached to, the ~all~ generalb exceeds by far that r emammg free in the enclosed volume The au thor investigates the influence of the adsorbed ga~ on the pressure distribution existing in long tubes, making use of a simplified form of the d~fferenttal equat ion for the diffusion process Specific solutions are g~ven ~hlch after generahzatton to other s2~stems ot different geometry can be u~ed t\,r the e ' ,a luauon of the time constant of pressure equahzatlon, the calculation of flow impedance and cold trap effic~enc~ ( Germam l w J s

J Neubert , I aAattt~l Techm~ 13 ( I ) Feb 1964, 19-23

12 61 347. Units in ~acuum measurement. (Great BtHam) The term pressure " begins to lose its con,.entlona[ meflnmg s o m e ~ h e r e m t h e , . e r } hJghxac t lumreg lon If ~e could construct an ~ontzatton gauge of absolutel,, known samphng el~c~ency it would be an absolute gauge ~hlch could be cahbrated to read molecules cc From the fact that at a pressure of 760 tort , there are 6 02 IO t-' molecules.mole 1 molecule. M ~ corresponds to a " pressure ol 2 83 10 --'~ torr The au thor suggests the use of a logarithmic dens[t~ scale ~ t h a zero at 1 molecule.'M" A pressure ol 1 10-" torr ~ould then correspond to 16 55 log denstt.,, umts Other ~alues are gt~en belo~

Pressure m tort 760 1 10 ~ 10 ~ 10 -~ 10 -~-' log dens[t'., st.ale 25 4~ 22 55 19 5", 16 55 13 55 10 55

For certain purposes (residual ga,, analys~ ere I a hnear densJt,, scale m~ght be prelerable But ~hate ' .er the final choice, the au thor i% ol the opinion that the basic '.aCt.lum unit in high ".,aduunl ~ork should be one of molecular den~H3 rather than pressure

~A J S F T \~,orrel \atute. 199 (4~921 '~ Aug 1963 476

12 61 348. Units of ~acuum measurement. ( G ~ e a t &tram) The author refers to pre~lou,, proposals ol a logarithmic denslt~ ~cale (see Abstr No 347 abo~e) and proposes a logarithmic pressure scale ot his o ~ n defined by p.t = - l o g , . rpres~ure in atmo,,pheresl Thl~ leads to the follo,~ mg relatl~,e value,,

Pressure m t o r r 760 l 10 a l0 " l0 9 10-t_, p4 0 2 9 59 8 9 119 149

T h ~ scale has the advantage of increasing ~ [th increasing vacuum and being restricted to small numbers Moreover it is related to the simple mercur~ manometer , the readmg~ ot ',~hlch unhke those of the ionization gauge or mass ~pectrometer are Independent of the gas they measure and in~anant from da} to da~ It must be emphasized hov, e~er. that logarithmic ,,tales. ho~e~er convenient and neat they ma~ be m describing the state of a vacuum s~stem are of httle use in vaLuum engineering, conductances, etc In these case.-, the customar2, hnear scale is still m,,aluable

~.~. J s J Cuthbert , Nature, 201(4914) ,4Jan 1964 61

349. Theory of linearity of hot cathode ,onizatton gauge. C Y H'.,.a, ActaPh~s Smtca, 19(2). 1963. 73-82

12 22 ( Clsma )

157