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© 2015 IBM Corporation
Zurich Research Laboratory
Fundamental graphene interface studies
motivated by nano-electromechanical
switchesUrs Duerig, Elad Koren (cQOM fellow 2013 – 2014), IBM Research Zurich
cQOM ITN Diavolezza Workshop, 31 January - 4 February 2016
© 2015 IBM Corporation
Mechanical relay
High on/off ratio
Leakage-free switching
Low on-resistance
Large adhesion (hysteresis)
Variable contact parameters
Low reliability
ITN Project: Physics and materials of nanoscale electrical
contact for NEM switches
Original Motivation
Graphene based nanopillar switch for energy efficient
(low adhesion, high conductance) NEMS logic
Graphite nanopillar switch
HOPG
Au top electrode
Easy to implement
HOPG easily shears
along a 0001 plane
preferredconductorpoor
masseffective
densityelectronFc
Challenge: Quantitative data on adhesion,sliding friction, and conductance in Graphite is lacking
Switching energy determined
by electrical contact forces
- nm size Au contact:
Ron ~ 2 kΩ Fc ~ 5 nN Es 150 eV
- Graphite could provide 10x improvement
of overall switching energy required to
substantially surpass CMOS scaling
predictions
© 2015 IBM Corporation
Fabrication process
2.5 mm
1 mm
2.5 mm
250 nm
0.5 mm
250 nm
© 2015 IBM Corporation
Electrical transport in graphite is a complex subject
Stacking faults are abundant because of the
low energy difference ~ 0.25 meV/atom with
respect to AB stacking
They acts as high resistance barriers for
c-axis electrical transport
ρc ~ 4.1 x 10-7 Ωm
stacking fault density 1/10 nm
ideal graphite
ρc ~ 4.1 x 10-5 Ωm
>> in-plane resistivity
ρa ~ 4.1 x 10-3 Ωm
Shusuke Ono, J. Phys. Soc. Jpn 40, 498 – 504 (1976)
Accurately predicts
the measured resistance
in meso-scale graphite
structures (our work)
© 2015 IBM Corporation
Electrical transport measurements in graphite (HOPG) pillars
Pillar height: h = 20 – 90 nm, Pillar radius: r = 100 – 500 nm
Huge resistance scatter decreasing
with pillar height
Highly non-linear I/V characteristics
at high field > 5mV/nm
Statistical analysis
stacking fault density 0.25 nm-1
Hopping across stacking fault barriers
stacking fault density 0.25 nm-1
stacking fault resistance
107 Ωnm2 as predicted by Ono
~ 300 Ω for r=100 nm
barrier height ~ 0.3 eV
consistent with energy of
localized Tamm states at the
interface
Koren et al. Nat. Commun. 5:5837 (2014)
© 2015 IBM Corporation
Sliding Graphite “Potentiometer”
Measured quantities:
- Shear force F
- Pillar current I
Electric field effect of
adhesion energy
30% of the voltage drop across the
sheared interface!
Current not proportional to overlap area
as naively expected
Sheared interface disturbs
current transport by more
than one order of magnitude
compared to a stacking fault !
0 1
0 20 3
0 40 50
Interface potential (V)
© 2015 IBM Corporation
Electrical transport across twisted graphene interface
Koren et al., under review Nature Nanotechnol.
rotation axis stabilized
by adhesive forces
Better than 0.1 deg control of the
rotation angle
Moiré superstructure
in general incommensurate with
graphene lattice
“Magic” angles, e.g. 21.768o, Moiré superstructure is
commensurate with graphene lattice
Two flavors: SE-odd SE-even
© 2015 IBM Corporation
Electrical transport across twisted graphene interface
incommensurate Moiré superstructure commensurate Moiré superstructure
Momentum conservation
via Umklapp scattering:
2D electronic state confined
to the twisted interface
with the symmetry of the
Moiré superstructure
enables current transport
across the interface
Momentum mismatch
quenches current transport
dramatically (basically tunneling
between pz-orbitals)
hard to be handled by standard k-space
methods
phonon scattering could provide
a sidestep for momentum conservation
© 2015 IBM Corporation
Electrical transport across twisted graphene interface: Experiments
Observed peak splitting
consistent with interface
band structure
Overall dependence of interface conductivity
accurately modelled by phonon scattering
process including Fermi-velocity renormalization
at low twist angles. Tunneling contribution is negligible
First experimental confirmation of 2D interface
state settling a long standing theoretical debate.
Incommensurate transport cannot be
addressed using commensurate supercells
© 2015 IBM Corporation
Adhesion and friction: Lateral force measurements
Self-
retracting
structure0
25
50
75
-75
-50
-25
-100 -50 0 50 100
Lateral cantilever motion (nm)x
La
tera
l fo
rce
(n
N)
F
25
50
75
R
L
L LL L L L
R R R R R R
Koren et al., Science 348, 679 – 683 (2015)
All mechanical surface
energy measurement
avoiding calibration ambiguities
Hysteresis: Energy dissipation
© 2015 IBM Corporation
Overlap area
2212 )2/(2/
2/cos 2 xrx
r
xrA
dx
dAF
Restoring force
σ: surface energy of 0001 planes
2
2)2/(12
r
xrF
Conservative adhesion force measurements
Why important:
- Benchmark for theoretical models
- Determines energetics of nano-actuation
- Enables engineering of arbitrary potential
landscapes for realizing e.g. bi-stable structures
© 2015 IBM Corporation
Mesoscale friction in HOPG
0
25
50
75
-75
-50
-25
-100 -50 0 50 100
Lateral cantilever motion (nm)x
La
tera
l fo
rce
(n
N)
F
25
50
75
I
II
III
Measured shear force
Trace / Re-tracePillar radius:
100 nm
Friction = Energy dissipation
dxFFdsFE
l
tracetrace
pathclosed
sfr 0
frF
Friction force = blue - green
© 2015 IBM Corporation
Statistical analysis
for Δx > 20 nm
Gaussian distribution
+ Central limit theorem
Random statistically
independent events
with finite correlation
length
Variance >> mean value
Friction force can be
negative over some range
Energy is recovered
Correlation length ~ 20 nm
co
rre
lati
on
sta
t. i
nd
ep
en
den
t
nmxfr 20/1 Random walk characteristics
Signature of
lattice structure
in the PSD
© 2015 IBM Corporation
Friction Scaling
Amonton’s law
PFfr
m
Nra
P m 242
0
(for r = 100nm)
5107 xm
AreaFfr
Experiment
NFFfr
0
Small force oscillations i.e. <F> from 1.5 - 4.5 nN,
expected > mN.
Clear sign for structural superlubricity of
non-commensurate lattices.
Cancelation of lateral forces except at
periphery sites.
Fractional scaling factor = 0.35.
(m ≈ 0.1…0.3 typical for dry conditions)
Binding force per atomApplied load
Number of interface atoms
Genuine superlubricity due to incommensurate lattice interaction
© 2015 IBM Corporation
Adding fluctuations: Compliant sliding
- Experimental set-up is compliant allowing for
off-axis movements Δy and rotations ΔΦ of the mobile pillar section
- Complex adhesion energy E(x,y,Φ) landscape randomness due to bifurcations
- Pillar trajectory maps a minimum energy path:
Δy(x) and ΔΦ(x) evolve such that
- Thermal fluctuations included by allowing paths to locally violate the minimum energy
condition with a probability given by the Botzmann statistics enhanced randomness
.min)(),(, xxyxE
X [Å]
Y [Å]
Example of x-y adhesion energy
landscape
Minimum energy path indicated
by dashed line
Note that each saddle point in the
energy landscape is a potential
bifurcation point
© 2015 IBM Corporation
Compliant sliding simulation at room temperature
Pillar radius: 5nm
Initial conditions: y0 = 0, Φ0 = 10o
Adhesion energy landscape probed on a mesh with Δx=0.002 nm, Δy=0.01 nm, ΔΦ=0.3o
Energy map
Atomic positions
© 2015 IBM Corporation
y- path - path resulting force
Adding fluctuations: Compliant sliding
Pseudo random walk in the y-Φ plane
Excellent agreement with experimental data
© 2015 IBM Corporation
Outlook
Understanding of the current flow
enhanced at the edge due to symmetry breaking in
incomplete Moiré tiles?
In-plane transport in few layer systems
Devices can be fabricated
Low temperature studies quenching phonon
mediated transport
Magnetic fields
© 2015 IBM Corporation
Acknowledgements
Elad Koren,
Armin Knoll,
Colin Rawlings,
Emanuel Loertscher,
(IBM Research Zurich)
Michel Despont (CSEM)
Daniel Grogg (Tyco electronics)
Funding
Fabrication: Meinrad Tschudy, Ute Drechsler
(IBM Research Zurich)
© 2015 IBM Corporation
Thank you !