7641 N. Business Park Dr., Tucson, AZ 85743 U.S.A., 1.888.290.6060

Certificate of CalibrationSerial No. 111097 - 09-Oct-2017

Device Under TestCustomer: Alicat Scientific, Inc.Return Number: R26494Serial Number: 111097Model Number: MC-5SLPM-TFTRDSoftware Version: 7v08.0-R22 (2v01)P/D/I Values: 7600 / 10 / 1001Adder Codes: 5M, LIN, 5IN, GAS: Air, DS, CLPProcess Gas: SelectableRange: 5.000 SLPMGas Temperature: 26°C

Calibration Procedure/Rev. #: DOC-AUTOCAL-GASFLOW/Rev. 86Calibrated By: Brian KalasinskyCalibration Date: 09-Oct-2017Certification Number: 174877Full Scale Pressure: 160.00 PSIAPressure Accuracy: +/-0.5% of Full ScaleTemperature Accuracy: +/-1.5°CStandard Temp. & Pressure: 25°C, 14.6959 PSIANormal Temp. & Pressure: 0°C, 14.6959 PSIACalibration due 1 yr. after receipt:

Equipment UsedFlow: TOOL-FLOW18Tool Due Date: 19-Jun-2018Manufacturer/Model: Alicat / MCM-5SLPM-DDevice Uncertainty: +/- (0.3% Reading + 0.2%

F.S.)

Voltage: TOOL-CMTR19Tool Due Date: 15-Jan-2019Manufacturer/Model: Fluke 87VDevice Uncertainty: +/- (0.1% + 1 digit)

All test equipment used for calibration is NIST traceable.

CalibrationUncertainty: +/- (0.8% of Reading + 0.2% of Full Scale) Calibration Pressure: Inlet: 110 PSIGUnits of measure: SLPM Outlet: 0 PSIG

Output 1 Configuration Output 2 Configurationmini-DIN Pin #6 mini-DIN Pin #2

As Found As LeftD.U.T. Actual In Tolerance0.000 0.000 Yes1.251 1.250 Yes2.503 2.500 Yes3.756 3.750 Yes5.010 5.000 Yes

D.U.T. Actual In Tolerance Output 1 Output 20.000 0.000 Yes 0.000 Vdc 5.12 Vdc1.250 1.250 Yes 1.250 Vdc 5.12 Vdc2.497 2.500 Yes 2.497 Vdc 5.12 Vdc3.745 3.750 Yes 3.745 Vdc 5.12 Vdc4.995 5.000 Yes 5.00 Vdc 5.12 Vdc

Notes: Local set-point controls pressure. Analog set-point configured for 0-5V. Tarebutton zeroes flow.

Tech Signature:

QC Signature:

Alicat Scientific, Inc. is an ISO 9001 certified company. CS1 Rev 17 Last Modified 15-May-2017SAMPLE