INESC Microsystems and Nanotechnologies
INESC MN
Microsistemas & Nanotecnologias
www.inesc-mn.pt
Our environment
INESCHoldingPrivate,nonprofit
transfer oftechnology
TecnicoLisboa
engineering school
INLA
INESC-MNPrivate, nonprofitresearch institute
Universidadede Lisboa
INESC-MN - People
photo taken September 2012
Senior PIs: 5 Master’s students: 17Junior PIs (Ciência): 2 Research Interns: 4Post-Docs: 7 Cleanroom engineers: 3PhD students: 11 Administrative Assist. 1.5
INESC Microssistemas e Nanotecnologias – INESC-MN the infrastructure
• Class 100/10 cleanroom (~100 m2) constructed in 1992/1993
• Micro and nanofabrication for feature sizes down to 1.2 µm (optical) and 20 nm (e-beam)
• Chemical wetbench for biological processing in Class 100 cleanroom
• Class 10,000 area for support equipment and film deposition laboratory (~150 m2 )
• Laboratories for film and device characterization (electronic, optical, micromechanical and biological)
• Laboratory for soft-lithography
www.inesc-mn.pt
INESC MN
Microsistemas & Nanotecnologias
Spintronics: (Paulo Freitas, Susana Cardoso)• Sensors• Spin Electronics
Thin Film electronics and MEMS: (João Pedro Conde and Virginia Chu)• Thin film amorphous and nanocrystalline silicon MEMS and polymer MEMS• Large Area Electronics on glass and polymer substrates
Biological Applications*: (P. Freitas, J.P. Conde, V. Chu)• DNA, Protein and Cell Manipulation, Arraying• Magnetic Biodetection (Spintronic sensors)• Electronic, Optical and Micromechanical Biodetection• Microfluidics and Lab-on-Chip• Microelectrodes for neuroelectronics*collaboration IBB/BERG, IMM
Materials Simulations: (José Luís Martins)• Simulations of semiconductors • Development of methods and codes
Ciência researchers: • Carbon nanotubes (Sara Vieira)• Organic nanoelectronics (Helena Alves)
INESC-MN - main research areas
INESC MN
Microsistemas & Nanotecnologias
Role in DEMOTOX
• Transfer technology developed in OTASENSE to the production of the prototype in DEMOTOX
• Design and fabrication of thin film photosensor integrated to microfludics for DEMOTOX-BIO
• Training and support in detection, fluid handling and immunoassay