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FPA (focal plane array) Optical Sectioning
Optical sectioning was performed on FPA to extract the topography of FPA side walls
using Acto-S confocal microscope
FPA
FPA side wall image FPA side wall profile achieved through optical sectioning
FPA Optical Sectioning Details
• FPA (focal plane array; real sample) optical sectioning
was achieved through confocal reflection imaging using
Acto-S confocal microscope
• Images were taken with blue laser 405nm, single mode
fiber P-1-405A-FC-5 on laser side and P-1-460A-FC-5
on detection side with 100x objective
• Images were take over the valley between 4 pixels at
every 250nm slice from top to bottom of the pixel over
8 to 10um range in Z (Z is the depth along sectioning
was performed)
• Images were 18X18um and 512X512px
FPA Optical Sectioning Experiment Setup
Acto-S Confocal Microscope
Acto-S
FPA Optical Sectioning Experiment Location
Pixel top .25µm
Data
.75µm.5µm
1.75µm1.5µm1.25µm1µm
2.5µm2.25µm
3µm
2.75µm2µm
3.5µm3.25µm
4µm
3.75µm
4.75µm4.5µm4.25µm
5µm
6µm
5.75µm5.5µm5.25µm
6µm
7.25µm
6.75µm6.25µm
7µm
6.5µm
7.75µm7.5µm
8.75µm8.5µm8.25µm8µm
The data was acquired using CP research system piezo scanner. Scanner performed raster scan from one corner to the other (diagonal corner) of the image and then came back to the startingposition in next scan. During this scanner had shifted so the two consecutive images wereslightly displaced (same features have different pixel numbers). Every odd and even numberimages have same pixel positions. To construct 3D image the features had to be crosscorrelatedwith pixel numbers in all the images.
Pixel top (1) .5µm (3) 1.5µm (7)1µm (5)
.25µm (2) .75µm (4) 1.75µm (8)1.25µm (6)
Images with similar shift (odd and even number)
FPA 3D image produced by the slices
Intersection: Line profiles along X-axis
Line profile (I vs X) at every micron (odd number data set)
Line profile (I vs X) at every .5 micron (odd number data sets)
Line profile (I vs X) at every micron detailed view
Intensity I(X,Z) vs X every data set corresponds to different Z slice, each slice is
half micron apart in Z
Pixel topPixel top.5um
1um
1.5um
2um
2.5um
3.5um
3um
4um
5um4.5um
5.5um
FPA pixel side wall I(Z) vs X (correspond the data points to slide 10)
X
Intersection: Line profiles along Y-axis
Line profile (I vs Y) at every 1 micron (odd number data set)
Line profile (I vs Y) at every .5 micron (odd number data sets)
Line profile (I vs Y) at every 1 micron detailed view
Intensity I(X,Z) vs Y every data set corresponds to different Z slice, each slice is
half micron apart in Z
Pixel top
Pixel top
.5um
1um
1.5um
2um
2.5um 3um 5.5um
Y
Pixel top
Pixel top
.5um
1um
1.5um
2um
2.5um 3um 5.5um
(correspond the intensities in slide 24)
Pixel Pixel
~1µm
~4.5µm
Wall
FPA pixel side wall I(Z) vs Y
(correspond the data points to slide 35)
Pixel Pixel
~1µm
~4.5µm
Wall
FPA pixel side wall I(Z) vs Y
Making of FPA pixel side wall I(Z) vs Y (slide 37)
Steps
1. Select the slope change point on the first line
profile2. Note down the pixel
number3. Put down the slope on
the next line profile and note down the pixel number of the endpoint of slope
4. Do the same for the next consecutive line profiles
5. Do this for all lines on both sides of the profiles
6. Plot pixel numbers with line profile depths (depth at which the profile was acquired)
7. Plot depth vs pixel number
Slope
FPA Multimedia files
Software used: Lab VIEW V 2009 and 2011
Confocal Image Confocal Image processing softwareVI
FPA line profile (I vs X) extraction softwareVI
FPA side wall (I(X,Z) vs X) profile softwareVI