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Design = Analysis + Synthesis An architecture inspired by a pretzel

MEMS Design Flow

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Page 1: MEMS Design Flow

Design = Analysis + SynthesisAn architecture inspired by a pretzel

Page 2: MEMS Design Flow

Top down flow: schematic based…

Fast but lower fidelity…

Process

Flow

ProcessDatabase

MaterialDatabase

ElementDatabase

Structural

Description

Netlist

iterative calculations

Design of experiments

Sensitivity Analysis

Monte Carlo Methods

Synthesis techniques

Synthesized Mask Layout

Design for Manufacture

Meshed model for 3D Verification

Page 3: MEMS Design Flow

Bottom up design flow: 3D based

High Fidelity but slower…

Process

Description

Process

Flow

Process

Database

Material

Database

3D Model Simulation

Results

Mask

Set

3D Multiphysics

Multiphysics“Black box”

System Model

Page 4: MEMS Design Flow

IntelliSuite: Best of both worlds

Accurate + Fast

Page 5: MEMS Design Flow

Seamless integration of design flow…

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StructuralBehavioral

Physical Process level

Schematic capture

ComponentLibrary

LayoutProcess

Modeling

PhysicalExtraction

Ab Initio&

Process modeling

Synthesis &

Optimization

System ModelExtraction

3D Multiphysics engineBehavioral Multiphysics engine

Layout engineVerification engine

DRC engine

Page 6: MEMS Design Flow

Design flow…

SynpleSchematic captureDesign Exploration

MEMS SynthLayout & 3D Synthesis

BlueprintPhysical Layout Floor planning

Tape OutDesign Rule Check

Clean RoomProcess PlanningProcess Simulation

HexpressoAutomated Meshing

System Model ExtractionCompact modeling

Fast field multiphysics3D FEA/BEA analysisDesign Verification

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Design Win

Page 7: MEMS Design Flow

IntelliSuite Tool Chain

BlueprintPhysical designLayout/DRCTape Out

Clean RoomProcess flow designProcess debugProcess visualization

Fast FieldMultiphysics solversCoupled field analysisSystem model extraction

SynpleSchematic captureComponent basedDesign explorationMask and 3D synthesis

EDA LinkerLink to EDA toolsCadence, Mentor,Synopsys, Ansoft,Mathworks etc…

Page 8: MEMS Design Flow

Open standards based exchange…

Physical layout GDS, DXF, CIF, GERBER, RS-247, EMK, HOLES

Structural and 3D IGES, SAT, VRML, GEOM, DXF, RAW (Voxel)

Process Sequence PowerPoint (PPT), PNG, JPEG, RAW

Analysis and mesh structureUNV, PAT, CDB, SAT (Ansoft, Ansys, ABAQUS, Patran, Nastran, Simulia), MATML (Material XML)

System and circuit levelVERILOG-A, VHDL-AMS, PSPICE, HSPICE, SIMETRIX, MATLAB/SIMULINK (MEX), TOUCHSTONE

Result files ASCII, CSV (Excel), Touchstone, PLT (Tecplot), ODB (Simulia)

Page 9: MEMS Design Flow

A living design environment…

Page 10: MEMS Design Flow

Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie

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