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Nanotechnology-Enabled Wireless Sensor Networks: From a Device Perspective
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Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-Based wafer bonding process
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[IEEE 2005 IEEE International Conference on Mechatronics and Automation - Niagara Falls, Ont., Canada (29 July-1 Aug. 2005)] IEEE International Conference Mechatronics and Automation,
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[IEEE 2005 IEEE International Conference on Mechatronics and Automation - Niagara Falls, Ont., Canada (29 July-1 Aug. 2005)] IEEE International Conference Mechatronics and Automation,
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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Modeling of
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