EH01-H32 Scale

Linear GageNewProducts

Separate Type Scale Unit for Absolute SystemsABS ST1300 seriesRefer to page H-27 for details.

Separate Type Scale Unit for Absolute SystemsABS ST700 Compact-type seriesRefer to page H-26 for details.

ABS ST700 Compact-type series

ABS ST1300 series

Digimatic Scale UnitsLinear ScalesH

INDEXABSOLUTE Digimatic Scale UnitsSD H-3

Linear scalesLinear Scale System Diagram H-7AT103 H-8AT116 H-9AT113 H-10AT112-F H-11AT402E H-12AT203 H-13AT216-T H-14AT217-TL, AT217-TL-B H-15AT211-A, AT211-B H-16ABS AT300 H-17ABS AT500 H-18ABS AT715 H-19Counter (KA-200, KLD-200) H-20ST36 H-22ST24 H-23ST422 H-24ST46-EZA H-25ABS ST700 Compact-type series H-26ABS ST1300 H-27PSU-200 H-28

2D Image Correlation EncoderMICSYS-SA1 H-29Quick Guide to Precision Measuring Instruments H-30

Digimatic Scale Units/Linear Scales

Linear Scales

2D Image Correlation Encoder

ABSOLUTE Digimatic Scale Units

Linear Scales

2D Image Correlation Encoder

ABSOLUTE Digimatic Scale UnitsDesigned to capture positional coordinates from slides on machine tools and precision instruments including semiconductor production equipment

Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefit of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specification without notice.

SD ABSOLUTE Digimatic Scale UnitsSERIES 572

Applications

Machine table position Drilling machine stroke position Focus setting on optical instruments

•SD series facilitates mounting on jigs, tools, and small machine tools to enable accurate positioning.

•Built-inabsolutescaleincludingtheABSpoint requires no zero-set every time the power is turned on.

In addition, reliability has improved thanks to elimination of overspeed errors.

•Horizontalorverticaldisplayaccordingto the scale mounting direction.

•Thedustresistanceandtheenvironmentalresistance of the display has improved. The SD-G series offers dust/water protection level IP66.

•Longbatterylifeforeasiermaintenance.•EC counters are available as external

display units.•Equippedwithanoutputporttotransfer

measurement data. This allows implementation in control systems and gaging systems.

Functions•ABS (Absolute) measurement function•INC (Incremental) measurement function•Zero-settingfunction•Presettingfunction(2presetvaluescanbeset.Not

available for SD-G, SD-D, SDV-D)　•Doublereadingfunction(AvailableonlyforSD-F or

SDV-F)•Directionswitchfunction NotavailableforSD-G, SD-D, SDV-D, SD-F, SDV-F)•Holdfunction*•Measurementvaluecompositionerroralarm•Lowbatteryalarm•Outputfunction*ToactivatetheholdfunctionwhenusingSD-D or

SDV-D, an optional hold unit is required. Simultaneous activation with the output function is not available.

SD-G are also available to special order.*Theseunitsuse1.5Vsilveroxidecellsforthepower

supply. Therefore, when the units are directly fixed to the frame of a machine tool that requires a high voltage, malfunction such as display digit fluctuations and errors may occur. The countermeasure examples are described in the user manuals provided.

Please contact Mitutoyo for other special orders.

Detector head mechanism

Special applications

RefertotheABSOLUTEDIGIMATICSCALEUNITS(CatalogNo.E4316)formoredetails.

Horizontal single-function type572-202-20 SD-20DX

Horizontal single-function type (Water-proof type)572-602 SD-20G

Horizontal multi-function type572-461 SD-15E

Verticalmulti-functiontype572-561 SDV-15E

Verticalsingle-functiontype572-303-10 SDV-30D

As a measurement jig for outdoor use (SD-G)

(Refer to page X for details.)

[Scale units] [Display units]

System Diagram

Single-function type with high dust/water resistance

Single-function type

Multi-function type

SD-D (Horizontal)

SDV-D (Vertical)

SD-G EC Counter*3

SD-E (Horizontal)

SDV-E (Vertical)

SD-F (Horizontal)

SDV-F (Vertical)

Digimatic mini-processorDP-1VRNo.264-504

MultiplexerMUX-10FNo.264-002

Input Tool (USB keyboard signal conversion model)

IT-016UNo.264-016

Tolerance judgment output*1

RS-232C output

USB keyboard signal conversion

* 1: Select the tolerance judgment output or digimatic output when setting the parameters.* 2: Connecting cable with the water-proof type output switch can be used only for SD-G or Water-proof Digital Caliper CD-15/20/30PM equipped with external output function.* 3: Connecting of SD series and DP-1VR/MUX-10F/IT-016U is also available without passing through the EC counter. In this case, connect these units and SD series with the cables used for the connection with the EC counter.

* Connection to an RS-232C conversion type (IT-007R) or a PS/2 keyboard signal conversion type (IT-005D) input tool is also available.

Connecting cable with the water-proof type output switch*2 1m : No.05CZA624 2m : No.05CZA625

Connecting cable with the output switch 1m : No.959149 2m : No.959150

Connecting cable with the output switch

Connecting cable 1m : No.936937 2m : No.965014

1m : No.905338 2m : No.905409 1m : No.905689 2m : No.905690

1m : No.905691 2m : No.905692 1m : No.905693 2m : No.905694

Refer to page G-21 for details.

Palm-sized printer for printing and statistical analysis

Interface unit for the RS-232C conversion and output RS-232C output

USB Interface unit that converts and transfers data into spreadsheets

ABSOLUTE Digimatic Scale UnitsDesigned to capture positional coordinates from slides on machine tools and precision instruments including semiconductor production equipment

ABSOLUTE Digimatic Scale UnitsSERIES 572 SPECIFICATIONS

Type Unit spec. OrderNo. Model Range Resolution Accuracy Repeatability Battery life

Horizontal single-function type (Water-proof type)

Metric572-600 SD-10G 0-100mm

0.01mm 0.03mm

0.01mm

Approx. 13000 hours

572-601 SD-15G 0-150mm572-602 SD-20G 0-200mm

Metric/Inch572-613 SD-4"/10G 0-100mm/0-4"

0.0005"/0.01mm 0.03mm/.001"572-614 SD-6"/15G 0-150mm/0-6"572-615 SD-8"/20G 0-200mm/0-8"

Horizontal single-function type

Metric

572-200-20 SD-10DX 0-100mm

0.01mm 0.03mm

Approx. 20000 hours

572-201-20 SD-15DX 0-150mm572-202-20 SD-20DX 0-200mm572-203-10 SD-30D 0-300mm 0.04mm

Metric/Inch

572-210-20 SD-4"DX 0-100mm/0-4"

0.0005"/0.01mm 0.03mm/.001"572-211-20 SD-6"DX 0-150mm/0-6"572-212-20 SD-8"DX 0-200mm/0-8"572-213-10 SD-12"D 0-300mm/0-12" 0.04mm/.002"

Horizontal multi-function type

Metric

572-460 SD-10E 0-100mm

0.01mm

0.03mm

Approx. 5000 hours

572-461 SD-15E 0-150mm572-462 SD-20E 0-200mm572-463 SD-30E 0-300mm 0.04mm572-464 SD-45E 0-450mm572-465 SD-60E 0-600mm 0.05mm572-466 SD-80E 0-800mm 0.06mm572-467 SD-100E 0-1000mm 0.07mm

Metric/Inch

572-470 SD-4"E 0-100mm/0-4"

0.0005"/0.01mm

0.03mm/.001"572-471 SD-6"E 0-150mm/0-6"572-472 SD-8"E 0-200mm/0-8"572-473 SD-12"E 0-300mm/0-12" 0.04mm/.002"572-474 SD-18"E 0-450mm/0-18"572-475 SD-24"E 0-600mm/0-24" 0.05mm/.002"572-476 SD-32"E 0-800mm/0-32" 0.06mm/.0025"572-477 SD-40"E 0-1000mm/0-40" 0.07mm/.0025"

Horizontal multi-function type (equipped with double reading function)

Metric

572-480-10* SD-10F 0-100mm

0.01mm

0.03mm

Approx. 5000 hours

572-481-10* SD-15F 0-150mm572-482-10* SD-20F 0-200mm572-483-10* SD-30F 0-300mm 0.04mm572-484-10* SD-45F 0-450mm572-485-10* SD-60F 0-600mm 0.05mm572-486-10* SD-80F 0-800mm 0.06mm572-487-10* SD-100F 0-1000mm 0.07mm

Metric/Inch

572-490-10* SD-4"F 0-100mm/0-4"

0.0005"/0.01mm

0.03mm/.001"572-491-10* SD-6"F 0-150mm/0-6"572-492-10* SD-8"F 0-200mm/0-8"572-493-10* SD-12"F 0-300mm/0-12" 0.04mm/.002"572-494-10* SD-18"F 0-450mm/0-18"572-495-10* SD-24"F 0-600mm/0-24" 0.05mm/.002"572-496-10* SD-32"F 0-800mm/0-32" 0.06mm/.0025"572-497-10* SD-40"F 0-1000mm/0-40" 0.07mm/.0025"

Verticalsingle-function type

Metric

572-300-10 SDV-10D 0-100mm

0.01mm 0.03mm

Approx.20000 hours

572-301-10 SDV-15D 0-150mm572-302-10 SDV-20D 0-200mm572-303-10 SDV-30D 0-300mm 0.04mm

Metric/Inch

572-310-10 SD-4"D 0-100mm/0-4"

0.0005"/0.01mm 0.03mm/.001"572-311-10 SD-6"D 0-150mm/0-6"572-312-10 SD-8"D 0-200mm/0-8"572-313-10 SD-12"D 0-300mm/0-12" 0.04mm/.002"

Verticalmulti-function type

Metric

572-560 SDV-10E 0-100mm

0.01mm

0.03mm

Approx.5000 hours

572-561 SDV-15E 0-150mm572-562 SDV-20E 0-200mm572-563 SDV-30E 0-300mm 0.04mm572-564 SDV-45E 0-450mm572-565 SDV-60E 0-600mm 0.05mm572-566 SDV-80E 0-800mm 0.06mm572-567 SDV-100E 0-1000mm 0.07mm

Metric/Inch

572-570 SDV-4"E 0-100mm/0-4"

0.0005"/0.01mm

0.03mm/.001"572-571 SDV-6"E 0-150mm/0-6"572-572 SDV-8"E 0-200mm/0-8"572-573 SDV-12"E 0-300mm/0-12" 0.04mm/.002"572-574 SDV-18"E 0-450mm/0-18"572-575 SDV-24"E 0-600mm/0-24" 0.05mm/.002"572-576 SDV-32"E 0-800mm/0-32" 0.06mm/.0025"572-577 SDV-40"E 0-1000mm/0-40" 0.07mm/.0025"

Verticalmulti-function type (equipped with double reading function)

Metric

572-580-10* SDV-10F 0-100mm

0.01mm

0.03mm

Approx.5000 hours

572-581-10* SDV-15F 0-150mm572-582-10* SDV-20F 0-200mm572-583-10* SDV-30F 0-300mm 0.04mm572-584-10* SDV-45F 0-450mm572-585-10* SDV-60F 0-600mm 0.05mm572-586-10* SDV-80F 0-800mm 0.06mm572-587-10* SDV-100F 0-1000mm 0.07mm

Metric/Inch

572-590-10* SDV-4"F 0-100mm/0-4"

0.0005"/0.01mm

0.03mm/.001"572-591-10* SDV-6"F 0-150mm/0-6"572-592-10* SDV-8"F 0-200mm/0-8"572-593-10* SDV-12"F 0-300mm/0-12" 0.04mm/.002"572-594-10* SDV-18"F 0-450mm/0-18"572-595-10* SDV-24"F 0-600mm/0-24" 0.05mm/.002"572-596-10* SDV-32"F 0-800mm/0-32" 0.06mm/.0025"572-597-10* SDV-40"F 0-1000mm/0-40" 0.07mm/.0025"

*AvailabletospecialorderNote:Responsespeedisunlimited

*1:Refertothedimensiontablefordetailsofthedepthincludingthescrewontherearofthedisplay.

Mounting screw hole*1

(Rear side)2×M3×0.5

13.53.5

2.3 15

SD-E ( to 300mm) / SD-F ( to 300mm) SD-E ( 450 to 1000mm) / SD-F ( 450 to 1000mm)

SDV-E ( to 300mm) / SDV-F ( to 300mm) SDV-E ( 450 to 1000mm) / SDV-F ( 450 to 1000mm)

DIMENSIONS Unit:mm

RefertotheABSOLUTEDIGIMATICSCALEUNITS(CatalogNo.E4316)formoredetails.

35 4.6

Mounting screw hole (Rear side)*1

2×M3×0.5

71.113.5 40

4×M3×0.5

20 41.3

9 9 204 tG

4×M3×0.522 40

72.74016.6

4×M3×0.5

20 36 3612

844022

4×M3×0.5

20 42 361.

20 40.7

4.6613.5 40

4×M3×0.5Mounting screw hole (Rear side)*1

16.3 40

20 35.4

4×M3×0.5Mounting screw hole (Rear side)*1

SPECIFICATIONS Model Range

(mm)Dimensions(mm) Depth including the screw

on the rear of the display Mass (g)L1 L2 t G H

SD-G100 209 185 — — —

Less than 2mm

390150 259 235 — — — 410200 311 287 — — — 430

SD-DX100 209 185 — — — 230150 259 235 — — — 250200 311 287 — — — 270

SD-30D 300 444 420 — — — 370

SD-ESD-F

100 244 220 — — — 250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370450 594 570

6 23.2 14.6Less than 3mm

760600 774 750 900800 974 950

　10 27.2 18.61710

1000 1174 1150 2040

100 244 220 — — —

Less than 2mm

250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370

SDV-ESDV-F

100 244 220 — — — 250150 294 270 — — — 280200 344 320 — — — 310300 444 420 — — — 370450 594 570

6 23.2 14.6Less than 3mm

760600 774 750 900800 974 950

10 27.2 18.6　1710

1000 1174 1150 2040

Linear ScalesDesigned to capture positional coordinates from slides on machine tools and precision instruments including semiconductor production equipment

*2: 1Vp-p differential sinusoidal signal output types also available. Please contact us for details

*1: 1Vp-p differential output type

Separate type

With square wave signal / sinusoidal signal simultaneous output

High accuracy type ST36*2

Standard type ST24Compact type ST422/ST46-EZA

AT216-T/AT217-TL/AT217-TL-B

Pulse signalunit

PSU-200

KA-200KLD-200 Counter

Assembly type

Incremental system

Absolute system

Separate type

Scale units

With square wave signal output

Slim and high speed type AT211*2

Standard type

Slim type

With sinusoidal signal output

Slim type AT113

Economy and slim type AT116

Super slim type AT112-FGeneral-purpose type AT402E*1

Standard type AT103

Pulse signalunit

PSU-200Assembly type

ABS AT715Slim type

ABS AT300seriesStandard type

ABS AT500seriesSlim type

ABS ST700 Compact-type series

General-purpose type

ABS ST1300seriesHigh-resolution type

Amplifiers supporting Mitutoyo ENSIS interface*3

Nikki Denso Co.,Ltd. VCII/VC/VPS series*3

Servoland corporation SVF Series*3

PMAC Japan Co., Ltd. UMAC-Turbo PMAC2*3

FANUC Ltd.NC control unit*3

Mitsubishi Electric CorporationMITSUBISHI CNC series*3

Mitsubishi Electric CorporationMELSERVO series*3

Panasonic Corporation, Motor Business Unit MINAS series*3

*3: Please contact each manufacturer for details.

YASKAWA Electric Corporation Σ-V/Σ-III Series*3

Various NC controllers

Linear Scale System Diagram

•A wide variety of measuring ranges are available in this standard type scale unit.

•Connectable to the KA-200 counter, KLD-200 counter, or PSU-200.

RefertotheLinearScaleDROSystems(CatalogNo.E13000)formoredetails.

An inspection certificate is supplied as standard. Refer to page X for details.

Linear Scales AT103SERIES 539 — Standard Type

SPECIFICATIONSModel AT103Effective range 100 to 6000mm (42 models)

Accuracy (20°C) Effective range 100to3000: (5+5L0/1000)μm Effectiverange3250to6000:(5+8L0/1000)μm

Outputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120m/min (50m/min when the effective measuring length is 3250 to 6000mm)Signal output pitch 20μmScale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0 to 45°C

* High precision model AT103F (JIS Class 0, (3+3L0/1000)μm) is also available to special order for the effective range of 100 to 2000mm.

* Ultrahigh precision model AT103S (2+2L0/1000)μm is also available to special order for the effective range of 100 to 500mm.* The indication accuracy does not include quantizing error. L0:Effectiverange(mm)

AT103 Effective rangeL0 (mm)

Signal cable length(m)OrderNo. Model

539-111-30 AT103-100 100 (4")

539-112-30 AT103-150 150 (6")539-113-30 AT103-200 200 (8")539-114-30 AT103-250 250 (10")539-115-30 AT103-300 300 (12")539-116-30 AT103-350 350 (14")539-117-30 AT103-400 400 (16")539-118-30 AT103-450 450 (18")539-119-30 AT103-500 500 (20")539-121-30 AT103-600 600 (24")539-123-30 AT103-700 700 (28")539-124-30 AT103-750 750 (30")539-125-30 AT103-800 800 (32")539-126-30 AT103-900 900 (36")539-127-30 AT103-1000 1000 (40")

539-128-30 AT103-1100 1100 (44")539-129-30 AT103-1200 1200 (48")539-130-30 AT103-1300 1300 (52")539-131-30 AT103-1400 1400 (56")539-132-30 AT103-1500 1500 (60")539-133-30 AT103-1600 1600 (64")539-134-30 AT103-1700 1700 (68")539-135-30 AT103-1800 1800 (72")539-136-30 AT103-2000 2000 (80")539-137-30 AT103-2200 2200 (88")539-138-30 AT103-2400 2400 (96")

7539-139-30 AT103-2500 2500 (100")539-140-30 AT103-2600 2600 (104")539-141-30 AT103-2800 2800 (112")539-142-30 AT103-3000 3000 (120")539-143-30 AT103-3250 3250 (130")

539-144-30 AT103-3500 3500 (140")539-145-30 AT103-3750 3750 (150")539-146-30 AT103-4000 4000 (160")539-147-30 AT103-4250 4250 (170")539-148-30 AT103-4500 4500 (180")539-149-30 AT103-4750 4750 (190")

539-150-30 AT103-5000 5000 (200")539-151-30 AT103-5250 5250 (210")539-152-30 AT103-5500 5500 (220")539-153-30 AT103-5750 5750 (230")539-154-30 AT103-6000 6000 (240")

*Modelsfortheeffectiverange3250mmormorearemade-to-order.

SPECIFICATIONSModel AT116Effective range 100 to 1500mm (20 models)Accuracy (20°C) (5+5L0/1000)μmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0 to 45°C

*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

539-271-30 AT116-100 100 (4")

539-288-30 AT116-1100 1100 (44")539-289-30 AT116-1200 1200 (48")539-290-30 AT116-1300 1300 (52")539-291-30 AT116-1400 1400 (56")539-292-30 AT116-1500 1500 (60")

•Suitableformillingmachines,XYtables,jigs,etc.•DimensionallycompatiblewithAT113 linear

scale units.

Linear Scales AT116SERIES 539 — Economy and Slim Type

Linear Scales AT113SERIES 539 — Slim Type

•Slimtypewithunitsectionaldimensionsof 22×35mmmm.

•ConnectabletotheKA-200 counter, KLD-200 counter, or PSU-200.

SPECIFICATIONSModel AT113Effective range 100 to 1500mm (20 models)Accuracy (20°C) (5+5L0/1000)μmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120m/minSignal output pitch 20μmScale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0 to 45°C

*HighprecisionmodelAT113F (JIS Class 0, 3+3L0/1000)μm is also available to special order.*UltrahighprecisionmodelAT113S (2+2L0/1000)μm is also available to special order for the effective range 100 to 500mm.*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

539-201-30 AT113-100 100 (4")

539-218-30 AT113-1100 1100 (44")539-219-30 AT113-1200 1200 (48")539-220-30 AT113-1300 1300 (52")539-221-30 AT113-1400 1400 (56")539-222-30 AT113-1500 1500 (60")

Linear Scales AT112-FSERIES 539 — Super Slim Type

•Superslimtypewithunitsectionaldimensions of 15.4×30mm.

•ConnectabletotheKA-200 counter, KLD-200 counter, or PSU-200.

SPECIFICATIONSModel AT112-FEffective range 50 to 1020mm (19 models)Accuracy (20°C) (3+3L0/1000)μmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Outputin50mmpitch*1

Protection Level IP53Operatingtemperature 0 to 45°C

*Ultra-highprecisionmodelAT112S (2+2L0/1000)μm is also available to special order for the effective range 50 to 320mm.*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)*1:Modelswhoseeffectiverangeis50mmor70mm:CenterpointModelswhoseeffectiverangeis120mmormore:50mmpitchstartingatapoint35mmfromthe" " mark on the left seen

from the front.

AT112-F Effective rangeL0 (mm)

539-251-10 AT112-50F 50 (1.5")

539-252-10 AT112-70F 70 (2.5")539-253-10 AT112-120F 120 (4.5")539-254-10 AT112-170F 170 (6.5")539-255-10 AT112-220F 220 (8.5")539-256-10 AT112-270F 270 (10.5")539-257-10 AT112-320F 320 (12.5")539-258-10 AT112-370F 370 (14.5")539-259-10 AT112-420F 420 (16.5")539-260-10 AT112-470F 470 (18.5")539-261-10 AT112-520F 520 (20")539-262-10 AT112-570F 570 (22")539-263-10 AT112-620F 620 (24")539-264-10 AT112-670F 670 (26")539-265-10 AT112-720F 720 (28")539-266-10 AT112-770F 770 (30")539-267-10 AT112-820F 820 (32")539-268-10 AT112-920F 920 (36")539-269-10 AT112-1020F 1020 (40")

RefertotheNCLinearScaleSystems(CatalogNo.E13005)formoredetails.

Linear Scales AT402ESERIES 539 — General-purpose Type

•Idealformachinetoolsforheavycuttingaswellaslinearmotors.•Hasmulti-pointelasticfixingforexcellentvibrationresistance(200m/s2), shock resistance

(400m/s2), and temperature characteristics.•TheAbsoluteIntervalCodeallowsforasimplified,low-costABSsystem.

SPECIFICATIONSModel AT402EEffective range 140 to 3040mm (24 models)

Accuracy (20°C)Effectiverange:140to540mm:±2μmEffectiverange:640to940mm:±3μmEffectiverange:1040to3040mm:±3μm/m

Outputsignal Signal:1Vp-pdifferentialsinusoidalsignalDifferentialreferencepointpulse:Absolute Interval Code compatible

Maximum response speed 120m/min (With sinusoidal signal amplitude of –3dB)Signal output pitch 20μmProtection Level IP53Operatingtemperature 0 to 45°C

Cable configurationTypeA:3mflyingleadcableType B:3mcablewithEuropeanCNCconnectorsType C:3mcablewithFANUCconnectors

AT402E Effective rangeL0 (mm)

539-371- AT402E-140 140 (5.6")

539-373- AT402E-240 240 (9.6")539-374- AT402E-340 340 (13.6")539-375- AT402E-440 440 (17.6")539-376- AT402E-540 540 (21.6")539-377- AT402E-640 640 (25.6")539-378- AT402E-740 740 (29.6")539-379- AT402E-840 840 (33.6")539-380- AT402E-940 940 (37.6")539-381- AT402E-1040 1040 (41.6")539-382- AT402E-1140 1140 (45.6")539-383- AT402E-1240 1240 (49.6")539-384- AT402E-1340 1340 (53.6")539-385- AT402E-1440 1440 (57.6")539-386- AT402E-1540 1540 (61.6")539-387- AT402E-1640 1640 (65.6")539-388- AT402E-1740 1740 (69.6")539-389- AT402E-1840 1840 (73.6")539-390- AT402E-2040 2040 (81.6")539-391- AT402E-2240 2240 (89.6")539-392- AT402E-2440 2440 (97.6")539-393- AT402E-2640 2640 (105.6")539-394- AT402E-2840 2840 (113.6")539-395- AT402E-3040 3040 (121.6")

*Theindicationof" " in the code numbers will be 01 for Type A, 02 for Type B, and 03 for Type C.

Linear Scales AT203SERIES 539 — Standard Type •Thetravellengthofthelinearscale

is output with 2-phase square wave signals, which can be used as a feedback signalforNCmachinetools.

•Thepulsesignalunit(PSU)isnolongerneeded, and the AT203 can be directly connectedtotheNCmachinetool.

SPECIFICATIONSModel AT203Effective range 100 to 6000mm (42 models)

Accuracy (20°C)Effective range:100to1500mm(3+3L0/1000)μmEffective range:1600to3000mm(5+5L0/1000)μmEffective range:3250to6000mm(5+8L0/1000)μm

Outputsignal Two 90° phase-shifted square wave signalsMaximum response speed 120m/min (50m/min when the effective range is 3250 to 6000mm)Resolution 0.1/0.5/1μm (Switchable by the DIP switches)Scale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0°C to 45°C*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

539-411-30 AT203-100 100 (4")

539-412-30 AT203-150 150 (6")539-413-30 AT203-200 200 (8")539-414-30 AT203-250 250 (10")539-415-30 AT203-300 300 (12")539-416-30 AT203-350 350 (14")539-417-30 AT203-400 400 (16")539-418-30 AT203-450 450 (18")539-419-30 AT203-500 500 (20")539-421-30 AT203-600 600 (24")539-423-30 AT203-700 700 (28")539-424-30 AT203-750 750 (30")539-425-30 AT203-800 800 (32")539-426-30 AT203-900 900 (36")539-427-30 AT203-1000 1000 (40")539-428-30 AT203-1100 1100 (44")539-429-30 AT203-1200 1200 (48")539-430-30 AT203-1300 1300 (52")539-431-30 AT203-1400 1400 (56")539-432-30 AT203-1500 1500 (60")539-433-30 AT203-1600 1600 (64")539-434-30 AT203-1700 1700 (68")539-435-30 AT203-1800 1800 (72")539-436-30 AT203-2000 2000 (80")539-437-30 AT203-2200 2200 (88")539-438-30 AT203-2400 2400 (96")539-439-30 AT203-2500 2500 (100")539-440-30 AT203-2600 2600 (104")539-441-30 AT203-2800 2800 (112")539-442-30 AT203-3000 3000 (120")539-443-30 AT203-3250 3250 (130")539-444-30 AT203-3500 3500 (140")539-445-30 AT203-3750 3750 (150")539-446-30 AT203-4000 4000 (160")539-447-30 AT203-4250 4250 (170")539-448-30 AT203-4500 4500 (180")539-449-30 AT203-4750 4750 (190")539-450-30 AT203-5000 5000 (200")539-451-30 AT203-5250 5250 (210")539-452-30 AT203-5500 5500 (220")539-453-30 AT203-5750 5750 (230")539-454-30 AT203-6000 6000 (240")

•Slim,sealedtypeincrementallinearscales suitable for feedback systems in NCmachinetools.

•DirectconnectionwithNCmachinetoolsis possible.

Linear Scales AT216-T SERIES 539 — Slim Sealed Type

SPECIFICATIONSModel AT216-TEffective range 100 to 1500mm (20 models)Resolution 5μmAccuracy (20°C) (5+5L0/1000)μmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 48m/minSignal output pitch 20μmScale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0 to 45°C

AT216-T Effective rangeL0 (mm)

529-431-3 AT216-100T 100 (4")

529-432-3 AT216-150T 150 (6")529-433-3 AT216-200T 200 (8")529-434-3 AT216-250T 250 (10")529-435-3 AT216-300T 300 (12")529-436-3 AT216-350T 350 (14")529-437-3 AT216-400T 400 (16")529-438-3 AT216-450T 450 (18")529-439-3 AT216-500T 500 (20")529-441-3 AT216-600T 600 (24")529-443-3 AT216-700T 700 (28")529-444-3 AT216-750T 750 (30")529-445-3 AT216-800T 800 (32")529-446-3 AT216-900T 900 (36")529-447-3 AT216-1000T 1000 (40")529-448-3 AT216-1100T 1100 (44")529-449-3 AT216-1200T 1200 (48")529-450-3 AT216-1300T 1300 (52")529-451-3 AT216-1400T 1400 (56")529-452-3 AT216-1500T 1500 (60")

AT217 - 0100 TL - B

Effective range: 100 to 1500mm

Signal cable Blank : Flexible metallic tube B : no Flexible metallic tube

AT217 - 0100 TL - BEffective range: 100 to 1500mm

Signal cable Blank : Flexible metallic tube B : no Flexible metallic tube

Meaning of Model No.

•0.5μmresolutionisnowavailableinaddition to 1.0μm.

•Improvedcurrentconsumptiondueto3.3Voperation.

Linear Scales AT217-TL / AT217-TL-BSERIES 539 — Slim Sealed Type

SPECIFICATIONSModel AT217-TL /AT217-TL-BEffective range 100 to 1500mm (20 models)Resolution 1μmAccuracy (20°C) (5+5L0/1000)μmOutputsignal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Outputin50mmpitchProtection Level IP53Operatingtemperature 0 to 45°C

AT217-TL Effective rangeL0 (mm)

529-461-5 AT217-100TL 100 (4")

529-462-5 AT217-150TL 150 (6")529-463-5 AT217-200TL 200 (8")529-464-5 AT217-250TL 250 (10")529-465-5 AT217-300TL 300 (12")529-466-5 AT217-350TL 350 (14")529-467-5 AT217-400TL 400 (16")529-468-5 AT217-450TL 450 (18")529-469-5 AT217-500TL 500 (20")529-471-5 AT217-600TL 600 (24")529-473-5 AT217-700TL 700 (28")529-474-5 AT217-750TL 750 (30")529-475-5 AT217-800TL 800 (32")529-476-5 AT217-900TL 900 (36")529-477-5 AT217-1000TL 1000 (40")529-478-5 AT217-1100TL 1100 (44")529-479-5 AT217-1200TL 1200 (48")529-480-5 AT217-1300TL 1300 (52")529-481-5 AT217-1400TL 1400 (56")529-482-5 AT217-1500TL 1500 (60")

AT217-TL-B Effective rangeL0 (mm)

529-461-7 AT217-100TL-B 100 (4")

529-462-7 AT217-150TL-B 150 (6")529-463-7 AT217-200TL-B 200 (8")529-464-7 AT217-250TL-B 250 (10")529-465-7 AT217-300TL-B 300 (12")529-466-7 AT217-350TL-B 350 (14")529-467-7 AT217-400TL-B 400 (16")529-468-7 AT217-450TL-B 450 (18")529-469-7 AT217-500TL-B 500 (20")529-471-7 AT217-600TL-B 600 (24")529-473-7 AT217-700TL-B 700 (28")529-474-7 AT217-750TL-B 750 (30")529-475-7 AT217-800TL-B 800 (32")529-476-7 AT217-900TL-B 900 (36")529-477-7 AT217-1000TL-B 1000 (40")529-478-7 AT217-1100TL-B 1100 (44")529-479-7 AT217-1200TL-B 1200 (48")529-480-7 AT217-1300TL-B 1300 (52")529-481-7 AT217-1400TL-B 1400 (56")529-482-7 AT217-1500TL-B 1500 (60")

•Thisisaslim,sealed,2-phase,squarewave scale that can be directly connected to a control unit.

•ScalealarmdisplayLEDallowsforeasymaintenance.

•Awiderangeofspecificationstobestsuit your application.

•SuitableforthecontrolofsemiconductormanufacturingsystemsandNCmachinetools.

Linear Scales AT211-A(Multipoint mounting) AT211-B(Double-end mounting)SERIES 539 — Slim and high speed Type

AT211-A

AT211-B

AT211 - 0100 A 1 S - P 1 - A BEffective range: 100 to 1500mm

Signal cable: 3 to 7m / None, 10 types

Mounting method: Multipoint mounting/ Double-end mountingScale reference point: 50mm/ Center point/ Left edge point/ Right edge point

Indication accuracy:(3+3L0/1000)µm / (2+2L0/1000)µm

Head cable: 0.3 to 9m, 9 types

Direction: PA/PB phase

Resolution/ Minimum edge-to-edge interval:0.1 to 5µm / 125 to 1000ns, 22 types

Common specificationModel AT211Effectiverange* 100 to 1500mm (20 models)

Accuracy(20°C)*(3+3L0/1000)μm L0:effectiverange(mm)

(2+2L0/1000)μm (L0≤500mm)Outputsignal Two 90° phase-shifted square wave signalsMaximumresponsespeed* 5.4 to 120m/min (varies depending on the resolution or minimum edge interval)Resolution* 0.1/ 0.2/ 0.5/ 1.0/ 2.5/ 5.0μmScalereferencepoint* 50mm/ Center point/ Left edge point/ Right edge pointProtection Level IP53Operatingtemperature 0 to 45°C*Desiredspecificationisselectable.

•ABSOLUTElinearencoderincorporatesboth our unique electrostatic capacity and photoelectric technology.

*RefertopageH-30"QuickGuidetoPrecisionMeasuring Instruments" for details of the principle of the absolute linear scale.

•Drasticallyreducedpowerconsumptionsince there are no backup batteries.

•Easyoperationbecausenorecalibrationis required at startup or after a power failure.

•Suitableforpositionfeedbackinmachinery requiring high-accuracy, high-speed control.

•Improvedenvironmentalresistanceagainst mechanical vibration and noise.

Linear Scales ABS AT300SERIES 539 — Standard Type

SPECIFICATIONSModel ABS AT353 ABS AT343 ABS AT343A ABS AT303 ABS AT303A

Applicable system FANUCLtd.NCControlunit

Mitsubishi Electric CorporationMITSUBISHICNCseries

Mitsubishi Electric CorporationMR-J3 AmplifierssupportingMitutoyoENSISinterface

Resolution 0.05μmMaximum response speed 120m/minEffective range 100 to 3000mmAccuracy(20°C)* (3+3L0/1000)μm, (5+5L0/1000)μm when the effective range is 1600mm or more*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)*Awidevarietyofspecialordersareavailable.

•Slimshapeissuitableforspace-savingdesigns.

•ThehighrigidityABS AT500-S series has vibration resistance, shock resistance and temperature control, the ABS AT500-H series offers excellent temperature control and high accuracy.

•ScalealarmdisplayLEDallowsforeasymaintenance.

•Supportstheinterfacesofvariousmanufacturers allowing a variety of system configurations.

ABS AT500-S

ABS AT500-H

Linear Scales ABS AT500SERIES 539 — Slim Type

ABS AT5Resolution/Applicablesystem

Transmission methodNothing: Full duplex communicationA: Half-duplex communication

*1: Please contact each manufacturer for details.

Effective range

Reference point of expansion on the scale unit influenced by temperature fluctuation*C: Center of the effective rangeL: "+" side of the absolute valueR: "–" side of the absolute value* "L" or "R" is marked only for the high accuracy type.

Type of the scale unitS: High rigidity typeH: High accuracy typeNote:"Reference point of expansion" The scale unit expands or contracts influenced by the temperature fluctuation. The mechanical reference point of expansion is defined as the reference point.

*ABS AT5

SPECIFICATIONSHigh rigidity type High accuracy type

Model ABS AT500-SC ABS AT500-HC ABS AT500-HL/HR

Resolution 0.005μm*1/0.05μm(0.01μm for AT524 and 0.001μm for AT527 )

Maximum response speed 150m/min (72m/min for the H series whose resolution is 0.005μm)Effective range 100 to 2200mm 100 to 1000mm 100 to 350mmAccuracy(20°C)*2 (3+3L0/1000)μm (2+2L0/1000)μmReference point of expansion influenced by the temperature fluctuation

Center of the effective measuring lengthEdge of the effective measuring length

HL:"+"sideoftheabsolutevalueHR:"–"sideoftheabsolutevalue

*1:Theexactvalueis0.0048828125μmsincethe20μmsignalisdividedby4096.*2:Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)

Model Resolution Applicable systemABS AT553 0.05μm FANUCLtd.

NCControlunitABS AT555 0.005μmABS AT543 0.05μm Mitsubishi Electric Corporation

MITSUBISHICNCseriesABS AT545 0.005μmABS AT543A 0.05μm Mitsubishi Electric Corporation

MELSERVOseriesABS AT545A 0.005μm

ABS AT573A 0.05μm Panasonic Corporation, Motor Business UnitMINASseries*1

ABS AT5030.05μm AmplifierssupportingMitutoyoENSIS

interface*1

(NikkiDensoCo.,Ltd.,Servolandcorporation, PMAC Japan Co., Ltd.)

ABS AT503AABS AT505

0.005μmABS AT505AABS AT524 0.01μm Siemens AG

SINAMICS/SINUMERIKseries(supportingDRIVE-CLiQ)ABS AT527 0.001μm

•Electromagneticinductionprinciplemeans scales are unaffected by contamination

•Absolutescaleshaveeliminatedtheneedfor origin restoration, also drastically reduces power consumption.

An inspection certificate is supplied as standard. Refer to page X for details.Linear Scales ABS AT715

SERIES 539 — Slim Type

SPECIFICATIONSModel ABS AT715Detection method Electromagnetic induction

Minimum resolution 0.001mm to 0.01mm(Changeable by parameter on the KA-200/KLD-200 counter)

Effective range 100 to 3000mm

Accuracy (20°C) ±5μm(L0:100to500mm),±7μm(L0:600to1800mm),±10μm(L0:2000to3000mm)L0:Effectiverange(mm)

Maximum response speed 50m/minProtection level IP67Sliding force 5Norless

Signal cable Standard AccessoriesRefer to the dimension table shown below for the length.

Extension cable (optional)

Length OrderNo.2m5m7m

09AAB674A09AAB674B09AAB674C

Connectable counter KA-200 Counter / KLD-200 Counter

539-801 ABS AT715-100 100 (4")

539-802 ABS AT715-150 150 (6")539-803 ABS AT715-200 200 (8")539-804 ABS AT715-250 250 (10")539-805 ABS AT715-300 300 (12")539-806 ABS AT715-350 350 (14")539-807 ABS AT715-400 400 (16")539-808 ABS AT715-450 450 (18")539-809 ABS AT715-500 500 (20")539-811 ABS AT715-600 600 (24")539-813 ABS AT715-700 700 (28")539-814 ABS AT715-750 750 (30")539-815 ABS AT715-800 800 (32")539-816 ABS AT715-900 900 (36")539-817 ABS AT715-1000 1000 (40")

539-818 ABS AT715-1100 1100 (44")539-819 ABS AT715-1200 1200 (48")539-820 ABS AT715-1300 1300 (52")539-821 ABS AT715-1400 1400 (56")539-822 ABS AT715-1500 1500 (60")539-823 ABS AT715-1600 1600 (64")539-824 ABS AT715-1700 1700 (68")539-825 ABS AT715-1800 1800 (72")539-860 ABS AT715-2000 2000 (80")539-861 ABS AT715-2200 2200 (88")539-862 ABS AT715-2400 2400 (96")

7*1539-863 ABS AT715-2500 2500 (100")539-864 ABS AT715-2600 2600 (104")539-865 ABS AT715-2800 2800 (112")539-866 ABS AT715-3000 3000 (120")

*1:Combinationofa5msignalcableanda2mextensioncable

Mitutoyo operates a policy of continuous improvement that aims to provide the customer with the benefi t of the latest technological advances.Therefore the company reserves the right to change any or all aspects of any product specifi cation without notice.

•TheKA-200Counterhasalathefunction, as well as standard functions (parameter selection).

•Compact,lightandmultifunctional.•Sub-displayenableseasysetting.•TheRS-232Cinterfaceenables

connection to a PC or printer.•TextdatacanbeoutputusingtheUSB

interface (optional).

Optional Accessories•Codeoutunit:No.06AET993•Extensioncable:No.06ACF941•FootswitchforUSB:No.937179T

174-185KA-213

174-147KLD-214

KA-200 CounterSERIES 174 — Standard Type

KLD-200 CounterSERIES 174 — Special Purpose Type with Limit Signal Output•Counterdesignedtosignalwhena

linear scale displacement value and a preset limit value coincide.

•Twotypesoflimitsettingsareavailable:2-step (KLD-212) and 4-step (KLD-214).

Optional Accessories•Externalzero-setbox(1axis): No.936551•Externalloadbox(1axis,fortheRS-232Coutput): No.937326

SPECIFICATIONSOrderNo. 174-183□ 174-185□Model KA-212 KA-213Numberofaxestobedisplayed 2 axes 3 axes

Resolution When AT100isconnected:0.05-0.0001mmWhen AT715isconnected:0.01-0.001mm

Display/digit Maindisplay:9digitsincludingsignSubdisplay:8digits

Power supply voltage 100V-240VAC,50/60HzPower consumption 20-25VA

Operatingtemperature/humidityrange 0 to 45°C/20to80%(Operationalenvironment)-10 to 60°C / 20 to 80% (Storage environment)

Dimensions 300(W)×70(D)×167(H)mmMass 1.25kg 1.3kg□:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:

AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixarerequiredforPSE.

SPECIFICATIONSOrderNo. 174-146□ 174-147□Model KLD-212 KLD-214Numberofaxestobedisplayed 1 axisNumberoflimitvaluestobeset 2 4

Resolution(Changeable according to the parameter)

When AT100seriesisconnected:0.05to0.0001mmWhen AT715isconnected:0.01to0.001mm

Output RS-232C (provided as standard)Display 7-segment LCD/7digit*1

Power supply voltage 100V-240VAC,50/60HzPower consumption 25VAOperatingtemperature/humidityrange 0 to 45°C / 20 to 80%Dimensions 332(W)×163(D)×204(H)mmMass 3.0kg 3.1kg*1:Countrangewhentheminimumreadingis0.001mm:99999.999to–9999.999Countrangewhentheminimumreadingis0.005mm:99999.995to–9999.995□:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:

AforUL/CSA,DforCEE,DCforCCC,EforBS,KforKC,CandNosuffixarerequiredforPSE.

Linear scale counter

FUNCTIONSType

Function

High performance

KA-200 Counter

Limit signal output

KLD-200 Counter

Zero-setting ● ●

Preset ● ●

Resolution setting ● ●

Measurement direction setting ● ●

mm/inch conversion ● ●

Diameter display ● ●

Scale reference point setting-1 ● ●

1/2 calculation ● ●

Coordinate system switching ● —

Bolt-hole circle machining ●-2 —

Pitch machining ● —

Zeroapproachmachining(INCmode) ● —

Addition of 2-scale data ●-3 —

Linearity error compensation ● ●

Pitch error compensation ●-1 —

Smoothing ● ●

Memory backup ● ●

Expansion/contraction coeffi cient setting — ●

Lower digit blanking out ● ●

External zero-setting ▲-4

RS-232C interface unit ▲-4

USB output ▲-5 —

Limit signal output — ●

Error message ● ●

●:Standardfunction,▲:Optionalfunction,—:Notavailable-1:OnlyavailablewhenconnectingwithAT100series.-2:Notavailableinsingle-axisuse-3:Onlyavailablefor3-axismodel-4:Codeoutunit(06AET993) is required. -5:Textcanbeoutputbyinterfaceunitandfootswitch

•Outputstwo-phasesinusoidalwavesignal,two-phasepulsesignal,and1Vp-pat 4μm pitch.

•Highaccuracytype,0.5μmclass(effectiverange up to 300mm)

•Hasathinnerdetectorhead(thickness11.5mm).

•Themaximumeffectivemeasurementrange of 3000mm enables use on large machines.

•4differenttypesavailableforeachsignaloutput specification.

•LEDdisplayfunctionforindicatingsignalerrors.

•Alongwiththeoutputspecificationsof2-phase sinusoidal wave and 2-phase square wave, the output specification of 1Vp-pwaveisalsoavailable.

Linear Scales ST36SERIES 579 — High Accuracy Type

SPECIFICATIONSModel ST36Detection method Reflective photoelectlic linear encoder

Outputsignal

ST36A:2-phasesinusoidalsignalsST36B :2-phasesquarewavesignals,AlarmresetinputST36C :2-phasesquarewavesignals,2-phasesinusoidalsignalsST36D:1Vp-pdifferentialsinusoidalsignals

Main scale grating pitch 8μmSignal output pitch 4μmEffective range 10 to 3000mmAccuracy(20°C)*1 ±0.5μm,±1μm,±2μm(/m)Maximumresponsespeed*2 1200mm/s

Scale reference point Center point (10 to 80mm) 50mm pitch (100 to 3000mm)

Power supply voltage DC5V±5%Operatingtemperature/ humidity range 0 to 40°C/ 20 to 80% (no condensation)Storage temperature/ humidity range –20 to 60°C/ 20 to 80% (no condensation)Head cable length 1m (high-flex connecting cable)

*1: Effective range Accuracy300mm or less ±0.5μm500mm or less ±1μm

1000mm or less ±2μm3000mm or less ±2μm/m

*2:Maximumresponsespeedwhenthesinusoidalsignalsareoutput

•Outputs2-phasesquareandsinusoidalwave signals at 10μm pitch.

•Hasathinnerdetectorhead(thickness11mm).

•Themaximumeffectivemeasurementrange of 3000mm enables use on large machines.

•2differenttypesavailableforeachsignaloutput specification

Linear Scales ST24SERIES 579 — Standard Type

SPECIFICATIONSModel ST24Detection method Reflective photoelectlic linear encoder

Outputsignal ST24B:2-phasesquarewavesignals,AlarmresetinputST24C:2-phasesquarewavesignals,2-phasesinusoidalsignals

Main scale grating pitch 20μmSignal output pitch 10μmEffective range 10 to 3000mmAccuracy(20°C)*1 ±1μm,±2μm,±3μm(/m)Maximumresponsespeed*2 1200mm/s

Scale reference point Center point (10 to 80mm) 50mm pitch (100 to 3000mm)

Power supply voltage DC5V±5%Operatingtemperature/ humidity range 0 to 40°C/ 20 to 80% (no condensation)Storage temperature/ humidity range –20 to 60°C/ 20 to 80% (no condensation)Head cable length 1m (high-flex connecting cable)

*1: Effective range Accuracy300mm or less ±1μm500mm or less ±2μm

*2:Maximumresponsespeedwhenthesinusoidalsignalsareoutput

•Themaximumresponsespeedis5000mm/s. (When resolution is 1μm and the minimum edge interval is 125ns)

•Ultra-compactdetectorcontrolunitallows use in applications where space-saving design is important.

•Themaximumeffectivemeasurementlength of 3000mm enables use on large machines.

•Simultaneousoutputof2-phasesquarewavesignals(maximumresolution:0.2μm) and 2-phase sinusoidal wave signals(mainsignal:40μm)isavailable.

•Equippedwithscalereferencepointoutput.

Linear Scales ST422SERIES 579 — Compact Type

SPECIFICATIONSModel ST422Detection method Reflective photoelectlic linear encoderOutputsignal 2-phase sinusoidal signals, 2-phase square wave signalsMain scale grating pitch 40μmSignal output pitch 40μmEffective range 10 to 3000mmAccuracy(20°C)*1 ±1μm,±2μm,±3μm(/m)Resolution 0.2μm/ 0.5μm/ 1μm/ 5μm (Selectable with internal switch)Scale reference point Center point (10 to 75mm)/ 50mm pitch (100mm or more)Maximum response speed 5000mm/s (varies depending on the setting)Minimum edge-to-edge interval 125ns/ 250ns/ 500ns/ 1μs (selectable with internal switch)Operatingtemperature/ humidity range 0 to 40°C, RH 20 to 80% (no condensation)Storage temperature/ humidity range –20 to 60°C, RH 20 to 80% (no condensation)Head cable length 1m

*1: Effective range Accuracy300mm or less ±1μm500mm or less ±2μm

•Includesanautomaticadjustingfunctionfor the signal (EZA function) at the push of a button.

•Detectorheadmountingandsignaladjustment possible without oscilloscope or PC.

•Asetupindicatorforcheckingsignalstrength is included.

•I/Fcircuitintegratedinconnectorshellreduces volume to 60% compared to conventional interface.

•Self-diagnosisfunctionwithUSBconnectivity facilitates signal strength checking and parameter setup.

•Glassandmetaltapescalesareavailable.•Thethicknessofthedetectorheadis

only 7.5 mm. The metal tape scale type has a mounting surface area of 12.5 by 9.325 mm, allowing use in applications where a space-saving design is important.

Linear Scales ST46-EZASERIES 579 — Compact Type

SPECIFICATIONS

RefertotheST46-EZASeries(CatalogNo.E13008)for more details.

Glass Scale Type

Metal Tape Scale Type

•Double-endmountingdesign

•Double-sidedtapemountingdesign

Model ST46-EZADetection method Reflective photoelectlic linear encoderScale type Glass Metal tapeMain scale grating pitch 20μm

Outputsignal Type B:2-phasesquarewavesignals,referencepointpulse,externalresetinput.Type C:2-phasesquarewavesignals,referencepointpulse,2-phasesinusoidalsignals.

Effective range 10 to 3000mm

Accuracy (20°C)

Effectiverange10to300mm:±1μmEffectiverange350to500mm:±2μmEffectiverange600to1000mm:±3μmEffectiverange1100to3000mm:±3μm/m

Effectiverange10to1000mm:±5μmEffectiverange1100to3000mm:±5μm/m(The above accuracy applies to individual scales. For double-end mounting designs, perform point-to-point correction after ensuring the metal tape is tensioned correctly.)

Maximum response speed 2.6m/s (With sinusoidal signal amplitude of -3dB)Scale reference point 50mmpitch,10to80mm:CenterpointPower supply voltage 5VDC±5%Operatingtemperature/ humidity range 0 to 40°C, RH 20 to 80% (no condensation)Storage temperature/ humidity range –20 to 60°C, RH 20 to 80% (no condensation)

An inspection certifi cate is supplied as standard. Refer to page X for details.

•Absolutemeasurementwithexposedscales

•Non-contactdetectionisoptimalforhigh speed and high acceleration devices such as linear motors.

•Electromagneticinductionprinciplemeans scales are unaffected by water and oil contamination

•Thedetectorheadisapproximately1/3thepreviousmodelsize:50mm(W)×28mm (D) × 11mm (H)

•Cableoutletscanbeinfourdirections,with mounting holes on the top and sides

•Accuracy(5+5L/1000)μm,glassscale:(3+3L/1000)μm(previousmodels:(8+5L/1000)μm)

L:Effectiverange(mm)•Compatiblewithservoamplifiersfrom

a range of companies (high-speed serial interfaces)

Absolute type

Series nameSeparateTypeABSOLUTELinearScaleABS ST700 Compact-type series (Effective range ≤ 3m)ABS ST700 Compact-type series (3.2m ≤ Effective range ≤ 6m)

Linear Scales ABS ST700SERIES 579 — General-purpose Type

Interface specification*1

0:SupportsMitutoyoENSIShigh-speedinterface ABS ST708A, ST708AL4:Supports Mitsubishi Electric Corporation high-speed serial interface ABS ST748, ST748AL, ABS ST748, ST748L5:SupportsFANUCLtd.high-speedserialinterface ABS ST758, ST758L7:Supports Panasonic Corporation, Motor Business Unit high-speed serial interface ABS ST778A, ST778AL8:SupportsYASKAWAElectricCorporationhigh-speedserialinterface ABS ST788A, ST788AL

ABS ST7 0 8 A L - 100 A - R

Effective range:100mmto6000mm

A:ScalebasetypeC:Glassscaletype

Head cable outlet directionR :RightsideL :LeftsideU :UppersideD :LowersideNothing:100mmto3000mm

L:3200mmto6000mm

Transmission methodA:2-wiresystemNothing:4-wiresystem

Detection head form and resolution8:Form:50mm(W)×28mm(D)×11mm(H)Resolution:0.1μm9:0.05μmresolution(tospecialorders)

Scale base type

Glass scale type

SPECIFICATIONSModel ABS ST700Scale type Scale base type Glass scale typeResolution 0.1μm (0.05μm to special order)Detection method Electromagnetic induction ABS linear encoderMax. effective range 6000mm 1100mmAccuracy (20°C) 5+(5L/1000)μmL:Effectiverange(mm) 3+(3L/1000)μmL:Effectiverange(mm)Maximum response speed 5m/s

Linear expansion coefficient (12.0±1.5)×10-6/ K(When the material of the mounting components is steel or equivalent)

Power supply voltage 5V±10%(atthedetectionhead)(Ripple+spikenoisecomponentshouldbelessthan100mV.)

Operatingtemperature/ humidity range 0 to 50°C, RH 20 to 80%Storage temperature/ humidity range –20 to 70°C, RH 20 to 80%

Available Interfaces*1

FANUCLtd.FS-iSeries,PowerMateiSeriesMitsubishiElectricCorporation,MELSERVOMR-J4/MR-J3SeriesMitsubishiElectricCorporation,CNCSeries,MDS-D/MDS-DHSeriesYASKAWA Electric Corporation, Σ-V,Σ-III Series PanasonicCorporation,MotorBusinessUnitMINAS-A5,A5L,A5N,A5NL,MINAS-A4,A4P,A4N,A4NLSeriesMitutoyoENSIS*2

NikkiDensoCo.,Ltd.VCII/VC/VPSseriesServolandCorporationSVFSeries PMAC Japan Co. Ltd. UMAC-Turbo PMAC2

*1Besuretocontacteachmanufacturerfordetailsoftheapplicablesystems(availabilityofconnection).*2ENSISisaregisteredtrademarkofMitutoyoCorporation.

•Effectivelength:12m,Maximumresponsespeed:8m/s,Resolution:1nm

•Variousinterfacesaresupported.•Anewdetectionmethodhasimproved

robustness in regards to contamination resistance and gap tolerance (in-house testing result).

•Thereisachoiceofmountingmethod:double-sided tape or double-end screw.

•Signalcheckprogramenablesintegritycheck and maintenance.

An inspection certificate is supplied as standard. Refer to page X for details.Linear Scales ABS ST1300

SERIES 579

SPECIFICATIONSModel ABS ST1300Scale type Double-end mounting Double-sided tape mountingMax. effective length 500 to 12000mm 10 to 3000mmResolution 0.001 μm/0.01 μm (switched at shipment)Detection method OpticalreflectiontypelinearencoderIndication accuracy (20ºC) ±5μm(1morless),±5μm/m(1.1mormore)Maximum response speed 8m/s or lessExpansion coefficient 10×10-6/KPower supply 5VDC±10%Maximum current consumption 270mA (250mA for Panasonic Corporation)Cable length 1m (standard)Maximum cable length 29m (including the head cable length)

Usable temperature/humidity range0 to 50 °C / RH 20 to 80% (no condensation)

Mountedtosteel:0to50°C/RH20to80%(nocondensation)Mountedtoanothermaterial:10to40°C/RH20to80%(nocondensation)

Storage temperature/humidity range –20 to 70 °C/RH 20 to 80% (no condensation)

*Fordetailsonspecification,mountingprocedure,andadjustments,refertothecorrespondingcatalogandoperationmanual.

Absolute type

Series nameSeparateTypeABSOLUTELinearScale

Interface specification*1

0:SupportsMitutoyoENSIShigh-speedinterface ABS ST130□A4:Supports Mitsubishi Electric Corporation high-speed serial interface ABS ST134□A5:SupportsFANUCLtd.high-speedserialinterface ABS ST135□7:Supports Panasonic Corporation, Motor Business Unit high-speed serial interface ABS ST137□A8:SupportsYASKAWAElectricCorporationhigh-speedserialinterface ABS ST138□A

ABS ST13 4 1 A - 1200 D

Effective range:10mmto12000mm

Scale mountD:Double-endmountingE :Double-sidedtapemounting

Transmission methodA:When0,4,7,or8isselectedintheinterface

specification listed on the leftNothing:When5isselectedintheinterface

specification listed on the left

Resolution1: Resolution 0.01μm2: Resolution 0.001μm

Double-end screw-mounting version

Double-sided tape mounting version

Available Interfaces*1

FANUCLtd.,upcomingproductMitsubishiElectricCorporation,MELSERVOMR-J4SeriesYASKAWA Electric Corporation, Σ-VIISeriesPanasonicCorporation,MotorBusinessUnitMINAS-A5SeriesMitutoyoENSIS*2, upcoming product*1Besuretocontacteachmanufacturerfordetailsoftheapplicablesystems(availabilityofconnection).*2ENSISisaregisteredtrademarkofMitutoyoCorporation.

Pulse signal interface unit PSU-200SERIES 539•ThePSU-200 splits the sinusoidal signal

output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions, and converts the signal toasquarewavesignalsothatNCfeedback systems, measurement control devices, etc., can be used with linear scales in order to achieve highly accurate positioning.

Serial signal interface unit PSU-200SERIES 539

•PSU251 series is a serial signal interface unit for incremental linear scales.

•Theinterfaceoutputsserialdataequivalent to 400 divisions from the signal (sinusoidal).

•ThePSU-251canbeconnectedtoMitsubishi Electric Corporation's MR-J4/MR-J3 series servo amplifier.

•ThePSU-252canbeconnectedtoPanasonic Corporation, Motor business unit'sMINASseriesservoamplifier.

•Sincethisunitisconnectedtoincremental linear scales, the reference point should be passed through to determine the absolute position.

SPECIFICATIONSOrderNo. 539-005Model PSU-200Numberofaxes 1 axis

Input InputconnectorDA-15S-N(JAE)orequivalentInputsignal:2-phasesinusoidalandthereferencevoltage,Referencepoint,Scalealarm

Output Outputconnector:MR-20RMA(HONDATSUSHINKOGYOCO.,LTD.)Outputsignal: 2-phase square wave signals (PA, PB), reference point (PZ), Alarm, Alarm reset, Photo-coupler

Numberofsplits 4, 8, 10, 20, 40, 80, 100, 200 (Selectable with the switch)

Function

Setting the number of slits, setting the minimum edge interval, and maximum response speed.Detection of broken wires or short circuits and abnormalities (alarm), detection of signal errors (alarm).Power supply voltage low alarm (warning light only), switching between high-impedance mode and alarm signal output mode. Reference position detection light, hysteresis width settings (directly linked toNo.ofdivisions),externalalarmresetinput(photocoupler),switchingdirections

Power supply voltage 5VDC±5%Current consumption 200mAStorage temperature range –20°C to 70°COperatingtemperaturerange 0°C to 40°CDimensions 160(W)×100(D)×28(H)mmMass Approx. 620g

SPECIFICATIONSOrderNo. 539-006 539-007Model PSU-251 PSU-252Numberofaxes 1 axis 1 axis

Input 2-phase sinusoidal signals and standard voltage, reference signal, scale alarm signal.Maximuminputfrequency:500kHz

OutputMitsubishi Electric Corporation

MR-J4/MR-J3 seriesHigh-speedserialdata*

Panasonic Corporation Motor Business UnitMINAS-A5,A5L,A5N,A5NLSeries*MINAS-A4,A4P,A4N,A4NLSeries*

Numberofsplits 400 splits

FunctionAlarmdetection:Brokenwires,shortcircuitsinthescaleandabnormalities.Alarmoutput:StatusdataisoutputthroughserialcommunicationandthePWRlightblinks.Also, the PWR light turns on.

Power supply voltage

Powersupplyfromtheservoamplifier:5VDC±5%Externalpowersupply:5VDC±5%Powersupplyisselectedwiththeshortinglinkfortheterminalblock used to supply external power. To choose a servo amplifier or external power supply, please refer to the servo amplifier power specifications (in particular, the maximum supplied current) and the power supply specifications of the scale that is used.

Current consumption 150mA (not including the scale)Operatingtemperaturerange 0°C to 40°CStorage temperature range –20°C to 70°CDimension 110(W)×60(D)×27.5(H)Mass Approx. 315g*Pleasecontacteachmanufacturerfordetailsoftheapplicablesystems.

•Appliestheimagecorrelationofaspeckle pattern.

•Simultaneous,non-contactmeasurementof X-Y position.

•Nano-resolutionmeasurement.•Suitableforapplicationssuchasstage

position repeatability.•Capableofmeasuringslight

deformations and flex of parts.

RefertotheMICSYS(CatalogNo.E13001)for more details.

2D Image Correlation EncoderSERIES 549

SPECIFICATIONSOrderNo. 549-701Model MICSYS-SA1Detection method Laser speckle image correlationEffective range ±100μm(2D)Resolution 1nmAccuracy (20°C) ±100nmData update frequency 20Hz

Linear ScalesQuick Guide to Precision Measuring Instruments

■ Absolute systemA measurement mode in which every point measurement is made relative to a fixed origin point.

■ Incremental systemA measurement mode in which every point measurement is made relative to a certain stored reference point.

■ Origin offsetA function that enables the origin point of a coordinate system to betranslated to another point offset from the fixed origin point. For this function to work, a system needs a permanently stored origin point.

■ Restoring the origin pointA function that stops each axis of a machine accurately in position specific to the machine while slowing it with the aid of integrated limit switches.

■ Sequence controlA type of control that sequentially performs control steps according to a prescribed order.

■ Numerical controlA way of controlling the movements of a machine by encoded commandscreatedandimplementedwiththeaidofacomputer(CNC).A sequence of commands typically forms a ‘part program’ that instructs a machine to perform a complete operation on a workpiece.

■ Binary outputRefers to output of data in binary form (ones and zeros) that represent numbers as integer powers of 2.

■ RS-232CAn interface standard that uses an asynchronous method of serial transmission of data over an unbalanced transmission line for data exchange between transmitters located relatively close to each other. It is a means of communication mainly used for connecting a personal computer with peripherals.

■ Line driver outputThis output features fast operating speeds of several tens to several hundreds of nanoseconds and a relatively long transmission distance of several hundreds of meters. A differential-voltmeter line driver (RS422A compatible)isusedasanI/FtotheNCcontrollerinthelinearscalesystem.

■ BCDA notation of expressing the numerals 0 through 9 for each digit of a decimal number by means of four-bit binary sequence. Data transmission is one-way output by means of TTL or open collector.

■ RS-422An interface standard that uses serial transmission of bits in differential form over a balanced transmission line. RS-422 is superior in its data transmission characteristics and in its capability of operating with only a singlepowersupplyof+5V.

■ AccuracyThe accuracy specification of a scale is given in terms of the maximum error to be expected between the indicated and true positions at any point, within the range of that scale, at a temperature of 20ºC. Since there is no international standard defined for scale units, each manufacturer has a specific way of specifying accuracy. The accuracy specifications given in our catalog have been determined using laser interferometry.

■ Narrow range accuracyScale gratings on a scale unit normally adopt 20μm pitch though it varies according to the kind of scale. The narrow range accuracy refers to the accuracy determined by measuring one pitch of each grating at the limit of resolution (1μm for example).

Glossary

Tests for Evaluating Linear Scales1. Testing within the service temperature rangeConfirms that there is no performance abnormality of a unit within the service temperature range and that data output is according to the standard.

2. Temperature cycle (dynamic characteristics) testConfirms that there is no performance abnormality of a unit during temperature cycling while operating and that data output is according to the standard.

3. Vibration test (Sweep test)Confirms that there is no performance abnormality of a unit while subject to vibrations of a frequency ranging from 30Hz to 300Hz with a maximum acceleration of 29.42m/s2.

4. Vibration test (Acceleration test)Confirms that there is no performance abnormality of a unit subject to vibrations at a specific, non-resonant frequency. (Approx. 98.07m/s2)

5. Noise testThenoisetestconformstoEMCDirectiveEN61326-1+A1:1998.

6. Package drop test This test conforms to JIS Z 0200 (Heavy duty material drop test)

Upon supply of power to a linear scale, position readings from threecapacitance-typesub-scales(COArse,MEDiumandFINe)andonefromaphotoelectricsub-scale(OPTical)aretaken.These sub-scales use such a combination of pitches, and are so positioned relative to each other, that the readings at any one position form a unique set and allow a microprocessor to calculate the position of the read head on the scale to a resolution of 0.05μm (0.005μm).

■ Principle of the Absolute Linear Scale (Example: ABS AT300, 500-S/H)

MADE IN JAPANAT500

3768mm

tic ca

3768mm

58.88mm

0.92mm

(400) (4096)

0.05µm0.005µm

7.36mm

0.115mm

(512) Approx. 1.8µm

ResolutionSignal cycle (interpolation)

Computer Digital counterLaser length measuring machine counter

Laser sourceInterferometer Optical axis of

laser beam

Cube corner

Fixture

Scale unit

Movable table

The accuracy of the scale at each point is defined in terms of an error valuethatiscalculatedusingthefollowingformula:

Error = Value indicated by laser inspection system − Corresponding value indicated by the linear scale

A graph in which the error at each point in the effective positioning range is plotted is called an accuracy diagram.There are two methods used to specify the accuracy of a scale, unbalanced or balanced, described below.

Positional Indication accuracyThe accuracy of a linear scale is determined by comparing the positional value indicated by the linear scale with the corresponding value from a laser length measuring machine at regular intervals using the accuracy inspection system as shown in the figure below. As the temperature of the inspection environment is 20˚C, the accuracy of the scale appliesonlyinanenvironmentatthistemperature.Otherinspectiontemperatures may be used to comply with internal standards.

(1) Unbalanced accuracy specification - maximum minus minimum error

This method simply specifies the maximum error minus the minimum errorfromtheaccuracygraph,asshownbelow.Itisoftheform: E = (α+ βL)μm. L is the effective range (mm), and α and β are factors specified for each model. For example, if a particular type of scale has an accuracy specification of (3 + 3L̶̶̶1000 )μm and an effective range of 1000mm, E is 6μm.

Scale error at any point in range relative to start of range

Effective range X Measuring point

Maximum difference in scale error: E(µm)

(2) Balanced accuracy specification - plus and minus about the mean error

This method specifies the maximum error relative to the mean error from theaccuracygraph.Itisoftheform:e= E ±̶ 2 (μm). This is mainly used in separate-type (retrofit) scale unit specifications.

0Error

Effective range X Measuring point

Maximum error about mean error E : ±— (µm) 2

Mean error

A linear scale detects displacement based on graduations of constant pitch. Two-phase sinusoidal signals with the same pitch as the graduations are obtained by detecting the graduations. Interpolating these signals in the electrical circuit makes it possible to read a value smaller than the graduations by generating pulse signals that correspond to the desired resolution. For example, if the graduation pitch is 20μm, interpolated values can generate a resolution of 1μm. The accuracy of this processing is not error-free and is called interpolation accuracy. The linear scale's overall positional accuracy specification depends both on the pitch error of the graduations and interpolation accuracy.

■ Specifying Linear Scale Accuracy

OverviewofAccuracyInspection System

Principle of measurementWhen an optically rough surface is irradiated with a laser beam, reflected coherent light scattering from the surface creates visible interference in the form of a speckle pattern. As the object moves in the XY plane, the speckle pattern also moves in response. Displacement of the object can be calculated by comparing, through image correlation, the speckle images obtained before and after movement, and this is the principle used in the highly accurate MICSYS measuring system.

■ Image correlation and the MICSYS two-dimensional encoder

Applications

1. Evaluation of stages used in manufacturing equipment and inspection systems

2. Highly accurate positioning of workpieces

3. Measurement of minute displacement

a) Evaluation of position repeatability b) Evaluation of standstill stability and drift

Measure displacement caused by temperature, humidity, voltage fluctuation or other factors

Actuator

Setting and removal

Actuator

Measure displacement caused by temperature or humidity fluctuations or other factors and displacement caused during a material attachment process, etc.

a) Measurement of minute displacement of a structure b) Measurement of minute displacement of a workpiece

Structure (beam)

EH01-H32 Scale

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