2017 ADVANCED LITHOGRAPHY - SPIE...ADVANCED LITHOGRAPHY 2017 THE PREMIER EVENT FOR THE SEMICONDUCTOR INDUSTRY Exhibition: 28 February–1 March 2017 Conferences & Courses: 26 February–2

MOVING TECHNOLOGY TO MARKET™

EXHIBITION GUIDE

www.spie.org/al

ADVANCEDLITHOGRAPHY

Exhibition: 28 February–1 March 2017

Conferences & Courses: 26 February–2 March 2017

San Jose Marriott and San Jose Convention Center San Jose, California, USA

CONNECTING MINDS. ADVANCING LIGHT.

2017

ADVANCED LITHOGRAPHY 2017THE PREMIER EVENT FOR THE SEMICONDUCTOR INDUSTRY

Exhibition: 28 February–1 March 2017

Conferences & Courses: 26 February–2 March 2017

San Jose Marriott and San Jose Convention Center San Jose, California, USA

Five Days Many Opportunities

CUTTING-EDGE RESEARCH AND COURSES

PLENARY PRESENTATIONS AND EXHIBITION

www.spie.org/al


Onsite News: www.spie.org/ALnews · #SPIElitho 1

For information about exhibiting, sponsorship, and advertising opportunities at future Advanced Lithography events, contact: SPIE Sales at [email protected]

CONTENTSSponsors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . X

Exhibitor Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . X

Exhibition Floor Plan. . . . . . . . . . . . . . . . . . . . . . . . . X

General Information . . . . . . . . . . . . . . . . . . . . . . . . . X

Course Daily Schedule . . . . . . . . . . . . . . . . . . . . . . . X

Exhibitor Directory . . . . . . . . . . . . . . . . . . . . . . . . . . X

Product Categories . . . . . . . . . . . . . . . . . . . . . . . . . . X

Policies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1X

Corporate Members . . . . . . . . . . . . . . . . . . . . . . . . . X

Sponsored by

SPIE would like to express its deepest appreciation to the symposium chairs, conference chairs, program committees, session chairs, and authors who have so generously given their time and advice to make this symposium possible.

The symposium, like our other conferences and activities, would not be possible without the dedicated contribution of our participants and members. This program is based on commitments received up to the time of publication and is subject to change without notice.

Welcome to the ExhibitionTuesday 28 February · 10:00 AM to 5:00 PMWednesday 1 March · 10:00 AM to 4:00 PM

2 SPIE Advanced Lithography 2017 · www.spie.org/al · +1 360 676 3290 · [email protected]

Thanks to the following sponsors for their generous support of SPIE Advanced Lithography

TM

General Sponsors:JSR Micro, Inc.

Hitachi High TechnologiesMicro Lithography Inc.

Qoniac GmbHSolar-Semi


SAN JOSE CONVENTION CENTER · EXHIBITION FLOOR

201 205 207

100 104 106

323 325 327 331

222 224 226 230

301 303 305 307

200 202 206

211 213

110

217 219 221

116 118

223 225 227 231

122 126 130

103 105 111 113 115 117 121 123

Entrance

Exhibitor Service Area and Lounge

Posters ReceptionTuesday 6:00 to 8:00 pm

Lunch/Seating Area

Coffee Area

300 302 304 306 322 324 326 328

Main

Entrance

308 310 312 314 316 318 320

EXHIBITOR INDEXBooth# Exhibitor

100 QoniacGmbH

103 SolidStateTechnology

104 HeidelbergInstrumentsInc.

105 MitsuiChemicalsAmerica,Inc.

106 JENOPTIKOpticalSystems,LLC

110 BrewerScience

115 DJDevCorp

116 PCAS

117 EnergetiqTechnology,Inc.

118 Shin-EtsuMicroSi

122 JSRMicro,Inc.

123 SeiwaOpticalAmericaInc.

126 J.A.Woollam

222 BenchmarkTechnologies

223 MicroChemCorp.

224 RaithAmerica,Inc.

225 microresisttechnologyGmbH

226 SAESPureGas

227 solar-semiGmbH

230 PallCorp.

231 AmunealManufacturingCorp.

300 IntegratedMicroMaterials

305 Entegris,Inc.

306 Coventor,Inc.

307 attocubesystemsInc.

130 TokyoElectron

200 SCREENSPEUSA,LLC

201 JEOLUSAInc.

202 RIResearchInstrumentsGmbH

205 GudengPrecision

206 Synopsys,Inc.

207 ZygoCorporation

211 TokyoOhkaKogyoAmerica,Inc.

213 VistecElectronBeamGmbH

217 CarlZeissSMTGmbH

219 AbeamTechnologies,Inc.

221 MentorGraphics

308 SageDesignAutomation,Inc.

318 INKOIndustrialCorp.

320 LouwersHanique

322 GenISysGmbH

323 Pozzetta,Inc.

324 CanonU.S.A.,Inc.

325 CadenceDesignSystems

326 Cyberoptics

327 MicroLithography,Inc.


GENERAL INFORMATION

Exhibition HoursTuesday 28 February · 10:00 am to 5:00 pmWednesday 1 March · 10:00 am to 4:00 pm

RegistrationSan Jose Convention Center

Sunday 26 February · 7:15 am to 5:00 pmMonday 27 February · 7:15 am to 4:00 pmTuesday 28 February · 7:30 am to 5:00 pmWednesday 1 March · 7:30 am to 4:00 pmThursday 2 March · 7:45 am to 4:00 pm (Thursday is conference registration only)

Coffee BreaksServed daily – 7:30 am, 10:00 am and 3:00 pm

Check individual conference listings for exact times and locations.Sponsors:

Breakfast BreadsConvention Center, Ballroom ConcourseMonday – Thursday, 7:30 am

Wednesday Sponsors:

Food and Refreshments for PurchaseConvention Center, Ballroom ConcourseMonday – Thursday, 7:30 am to 3:00 pm

Hot and cold snacks, hot entrees, deli sandwiches, salads, and pastries are available for purchase. Cash and credit cards accepted.

Exhibition Hall Concession StandTuesday – Wednesday, 11:00 am to 2:00 pm

Hot and cold snacks, hot entrees, deli sandwiches, salads, and pastries are available for purchase. Cash and credit cards accepted.

SPIE Hosted Lunches Exhibition HallTuesday – Wednesday, 11:30 am to 1:00 pm

Check individual conference listings for exact times. Complimentary tickets for these lunches will be included with full conference registrations. Exhibitors and students may purchase tickets at the Cashier Desk. Sponsors:

Desserts Exhibition Hall 1 Tuesday and Wednesday

Complimentary tickets for the dessert snacks will be included in conference attendee registration packets.

Internet OptionsWireless Access – Convention Center Upper Level ConcourseComplimentary wireless access is also available; instructions will be posted onsite.West end WiFi sponsored by

East end WiFi sponsored by

TM

SPIE Conference and Exhibition AppSearch and browse the program, special events, participants, exhibitors, courses, and more. Free Conference App available for iPhone and Android phones.

SPIE BookstoreConvention Center Lobby near Registration

Stop by the SPIE Bookstore to browse the latest SPIE Press Books, proceedings, and educational materials. While there, get a t-shirt or educational toy to bring home to the family.

Restaurant Reservations and Information Desk The San Jose Convention and Visitors Bureau operates a Restaurant Reservations and Information Desk on the street level of the Convention Center near the main entrance. The desk will be open Sunday through Thursday during core hours of the convention. For more information visit their website http://www.sanjose.org


MONEY-BACK GUARANTEEWe are confident that once you experience an SPIE course for yourself you will look to us for your future education needs. However, if for any reason you are dissatisfied, we will gladly refund your money. We just ask that you tell us what you did not like; suggestions for improvement are always welcome.

Get training.Stay competitive.Advance your career.· Direct instruction from

legends in the semi/litho industry, many of whom are pioneers in their fields

· Course topics are continually updated and aligned with current industry needs and trends

· Earn CEUs for professional continuing education requirements

· SPIE offers online courses and in-company training, www.spie.org/education

SUNDAY SC101Introduction to Microlithography: Theory, Materials, and Processing (Willson, Bowden) Sunday8:30amto5:30pm,$600/$710/$359

SC1099Chemistry and Lithography (Okoroanyanwu)Sunday8:30amto5:30pm,$700/$810/$399

SC1100Scatterometry in Profile, Overlay and Focus Process Control (Cramer, Turovets) Sunday1:30pmto5:30pm,$375/$430/$247

SC1132Computational Basis for Advanced Lithography Techniques (Lai) Sunday8:30amto12:30pm,$375/$430/$247

SC1133 Metrology Toolset Monitoring, Matching, Maintenance and Management (Solecky, Adan) Sunday8:30amto12:30pm$375/$430/$247

SC1158 Metrology of Image Placement (Starikov) Sunday1:30pmto5:30pm,$380/$435/$249

SC1172Spatial Coherence and Impact on Lithography Simulation and OPC (Kang) Sunday8:30amto12:30pm,$375/$430/$247

SC1173How and Why: The big ideas in semiconductor lithography (Mack, Petersen) Sunday8:30amto5:30pm,$685/$795/$393

NEWSC1209Data Analytics and Machine

Learning in Semiconductor Manufacturing: Applications for Physical Design, Process and Yield Optimization (Cain, Capodieci) Sunday1:30pmto5:30pm,$375/$430/$247

SC885Principles and Practical Implementation of Multiple Patterning (Dusa, Hsu) Sunday8:30amto5:30pm,$600/$710/$359

SC888EUV Lithography (Bakshi, Ahn, Naulleau) Sunday8:30amto5:30pm,$740/$850/$415

SC992 Lithography Integration for Semiconductor FEOL & BEOL Fabrication (Lin, Zhang) Sunday8:30amto5:30pm,$600/$710/$359

CONTINUING EDUCATION UNITSSPIE is accredited by the International Association for Continuing Education and Training (IACET) and is authorized to issue the IACET CEU.

WEDNESDAY SC1187Understanding Design-Patterning Interactions for EUV and DSA (Gupta, Torres, Mallik) Wednesday1:30pmto5:30pm,$375/$430/$247

THURSDAY SC616Practical Photoresist Processing (Dammel) Thursday8:30amto12:30pm,$375/$430/$247

COURSES

PRICE KEY: Member / Non Member / Student Member

· 14 · ONSITE

COURSES

SPIE STUDENT MEMBERS RECIEVE DISCOUNTED COURSE PRICES.

SEE FULL COURSE DESCRIPTIONS AND REGISTER FOR COURSES ONSITE.

Course descriptions also available online: www.spie.org/ALCourses


Abeam Technologies, Inc. #21922290FoothillBlvdSte2,Hayward,CA,94541UnitedStates+15104970222;[email protected];www.abeamtech.comContact:SergeyBabin,President

Amuneal Manufacturing Corp. #2314737DarrahSt,Philadelphia,PA,[email protected];www.amuneal.com

Featured Product: Magnetic Shielding Design and Fabrication

Since1965,Amunealhasbeenservinghighlytechnicalmarkets,workingwithleadersinaerospace,electronics,cryogenics,healthcare,andresearchtodevelopcost-effectivemagneticshieldingstrategiesandproductsthatoutperformthemostdemandingrequirements.Weofferanumberofstandardcomponentshieldstoourclients,however,ourcultureandcapabilitiesallowustomanufactureandinstalluniquecustomshieldsrangingfromprototypesandmodelstofull-scaleassemblies.Contact:MichaelAdolf,Director,TechnicalProducts,[email protected];StuartKoch,VP,TechnicalProducts,[email protected]

attocube systems Inc. #307

2020StuartSt,Berkeley,CA,[email protected];www.attocube.comattocubeisawell-establishedpremium-qualitymanufacturerforhighprecisionpiezopositioningdevices,opticaldisplacementsensorsandcryogenicmeasurementsystems.TheattoDRY800istheworld’sfirstcryo-opticaltableandtheperfectchoiceforlowtemperaturequantumopticsexperiments.attocube’srenownedpiezostagesenablenanometerprecisepositioningevenunderextremeenvironmentalconditionssuchascryogenictemperatures,highmagneticfieldsandhighorultra-highvacuum.

Benchmark Technologies #2227KimballLn,Lynnfield,MA,01940-2654UnitedStates+17812463303;[email protected];www.benchmarktech.comContact:AndrewZanzal,VicePresidentofSales

Exhibition Directory

EXHIBITOR DIRECTORY

Tuesday · 10:00 am to 5:00 pmWednesday · 10:00 am to 4:00 pm

ADVANCED LITHOGRAPHY

Exhibitorsarelistedinalphabeticalorderwithdetailsaboutproductsorserviceseachisexhibiting.Companiesareadditionallycross-indexedbytechnologyareas.Theaddressofeachexhibitorisalsolisted,makingthisExhibitionGuideanexcellentreferencetooltotakebacktoyourofficeandsharewithyourcolleagues.


EXHIBITOR DIRECTORY

SPONSOR

Brewer Science #110

2401BrewerDr,Rolla,MO,65401-7003UnitedStates+15733640300;[email protected];www.brewerscience.com

Featured Product: OptiStack® multilayer systems are designed for advanced high-volume manufacturing processes.

BrewerScienceisaglobaltechnologyleaderindevelopingandmanufacturinginnovativematerialsandprocesses,forthefabricationofsemiconductorsandmicroelectronicdevices.Today,wecontinuetoexpandourtechnologyportfoliotoincludeproductsthatenableadvancedlithography,3-Dintegration,chemicalandmechanicaldeviceprotection,nanotechnology,andthinwaferhandling.BrewerScienceispreparedforthenextgeneration.Areyou?Findoutathttp://www.brewerscience.com.Contact:AlexSmith,DirectorofSales,[email protected];BrentScott,SeniorAccountManager,[email protected]

Cadence Design Systems #3252655SeelyAve,SanJose,CA,95134-1931UnitedStates+14089431234www.cadence.com

Featured Product: Litho Physical Analyzer, Cadence CMP Predictor, Litho Electrical Analyzer, Cadence Pattern Analysis LDE

Cadenceenablesglobalelectronicdesigninnovationandplaysanessentialroleinthecreationoftoday’sintegratedcircuitsandelectronics.CustomersuseCadencesoftware,hardware,IP,andservicestodesignandverifyadvancedsemiconductors,consumerelectronics,networkingandtelecommunicationsequipment,andcomputersystems.Inparticular,Cadence®DFMsolutionsaddressbothdesignerandmanufacturerchallengesresultinginimproveddesignmanufacturabilityandreducedtimetoyield.Contact:PhilippeHurat,ProductMarketing,Director

SPONSOR

Canon U.S.A., Inc. #324

IndustrialProductsDivision,3300NFirstSt,SanJose,CA,[email protected];usa.canon.com/industrial

Featured Product: FPA-1200NZ2C

CanonUSAIndustrialProductsDivisionprovidesadvancedwafer&panelprocessequipmentforapplicationsincludingsemiconductor,AdvancedPackaging&display.Canonprovidescost-effectivewaferprocessingsolutionsincludingi-line&KrFopticallithography,nanoimprintlithography&CanonAnelvadepositionequipment.Canonalsohasavarietyofpanelbasedlithography&depositionsolutionsthatcanbeextendedtoavarietyofapplications.Contactsemi-info@cusa.canon.comformoreinfo.Contact:DougShelton,MarketingManager,[email protected]

SPONSOR

Carl Zeiss SMT GmbH #217CarlZeissPromenade10,Jena,07745Germany+493641642563;[email protected];www.zeiss.com/mask-solutions

Featured Product: ZEISS ForTune | High performance Wafer and Mask Tuning system

TheZEISSstrategicbusinessunitSemiconductorMetrologySystems(SMS)specializesinakeyprocessinsemiconductormanufacturing:thephotomask.Coreexpertiseinlightandelectronoptics,complementedbyapioneeringfemto-secondlasertechnologyformthefoundationofaproductportfoliocomprisingin-diemetrology,actinicqualification,repair,andtuningofphotomasks.Toincreaseautomationandenhancetoolcapabilities,SMSalsooffersadvancedsoftwareapplications.Contact:CarlZeissSMTGmbH,StrategicBusinessUnitSMS,[email protected]

Coventor, Inc. #3061000CentreGreenWaySte200,Cary,NC,27513UnitedStates+19198547500;[email protected];www.coventor.com

Featured Product: SEMulator3D, a process modeling platform used for fast and accurate ‘virtual fabrication”

Coventor®istheleaderinsolutionsfordevelopingsemiconductorprocesstechnology,aswellasMEMSdevices.CoventorservesaworldwidecustomerbaseofIDMs,memorysuppliers,fablessdesignhouses,independentfoundries,andR&Dorganizations.ItsSEMulator3Dmodelingplatformprovidesfastandaccurate‘virtualfabrication’ofadvancedmanufacturingprocesses,allowingengineerstounderstandmanufacturingeffectsearlyindevelopmentandreducetime-consumingandcostlywaferfabrication.Contact:CoventorSales,[email protected]

CyberOptics Corp. #3265900GoldenHillsDr,Minneapolis,MN,55416UnitedStates+17635425000;[email protected];www.cyberoptics.com

Featured Product: WaferSense and ReticleSense Auto Multi Sensor (AMS & AMSR)

CyberOptics’WaferSenseandReticleSenseAutoMultiSensors(AMS/AMSR)measureleveling,vibration,andrelativehumidity(RH)inanall-in-onewirelessreal-timedevice.ThethinandlightformfactorenablestheAMStotravelthroughvirtuallyanytool.TheAMSRcancapturemultiplemeasurementsinalllocationsofthereticleenvironment–providingyetanotherwaytoincreaseyieldandreducedowntimeinsemiconductorenvironments.Contact:AllynJackson,US&EuropeSalesLeader,[email protected]


EXHIBITOR DIRECTORY

DJ DevCorp #115490BostonPostRd,Sudbury,MA,[email protected];www.djdevcorp.com

Featured Product: Epoxy Dry Film Sheets

DJDevCorpdevelops,manufacturesandmarketsinnovativedryfilmresistmaterialsmultipleWLP,AdvancePassive,MultilayerMicrofluidicandMEMSapplications.Weprovideprecutsheetsorrollsofreadytouseepoxybaseddryfilmswithhighlyuniformthickness.Thesesheetsarequicklylaminatedandarereadyforexposureinminutes.Thefilmsexhibitexcellentresolution,highaspectratios,outstandingplanarizationortentingovertopography,andexcellentadhesion.Contact:DonJohnson,President/CTO,[email protected];SabinaTerrades,OfficeMgr,[email protected]

Energetiq Technology, Inc. #117

7ConstitutionWay,Woburn,MA,01801-1024UnitedStates+17819390763;[email protected];www.energetiq.com

Featured Product: 5th Generation Laser Driven Light Sources

EnergetiqTechnologyistheworld’sleadingdeveloperandmanufacturerofultra-brightbroadbandlightsourcesforawidevarietyofadvancedapplicationsinlifeandmaterialssciences,semiconductormanufacturing,andR&D.Energetiq’sLaser-DrivenLightSources(LDLS)arebasedonarevolutionarytechnologythatgenerateshighbrightnessacrossthespectrum,withhighreliabilityandlonglife.Contact:PaulBlackborow,Co-Chairman,[email protected];KarenScammell,VPofSales,[email protected]

Entegris, Inc. #305129ConcordRd,Billerica,MA,01821-4600UnitedStates+19784366500;[email protected];www.entegris.comFor50years,Entegrishasbeenaproviderofcriticalproductsandmaterialsusedinadvancedhigh-technologymanufacturing.Theseproductsandmaterialsareoftenusedtomakethebuildingblocksofmanyoftheworld’smostcomplexmicroelectronicproducts,suchascomputers,mobiledevicesandphones,datastoragecomponents,televisionsandmonitors,andautomobiles.

GenISys GmbH #322POBox410956,SanFrancisco,CA,[email protected];www.genisys-gmbh.comContact:RogerMcCay,SalesDirectorNorthAm.

Gudeng Precision #2059F.,No.2,Sec.4,ZhongyangRd.,TuchengDist.,NewTaipeiCity,23678Taiwan+886222689141;[email protected];www.gudeng.com

Featured Product: EUV POD, RSP150, RSP200, Photomask Compact, Reticle Case, MRSP, Reticle SMIF POD, TFT-LCD Case

GudengPrecisionisaglobalphotomaskhandlingsolutionprovider.ThecorecompetenceofGudengisourmaterial,manufacturingandserviceintegrationexperiencesintheSemiconductor,Solar,LCDandLEDindustry.GudenghascontributedtodevelopinginnovativetechnologyandhasbeenatechnologicalleaderofExtremeUltravioletLithography(EUV)maskhandling.Gudengmakescustomer’srequirementsitsfirstpriorityandaimstoprovidecustomerswithadvancedsolutionstoimprovetheiryields.Contact:DavidTai,SalesExecutive,[email protected];EllenWu,Sr.SalesExecutive,[email protected]

Heidelberg Instruments Inc. #104

2807OregonCtUnitE2,Torrance,CA,90503-2635UnitedStates+13102125071;[email protected];www.himt.us

Featured Product: MLA150 Maskless Aligner, VPG200 ULTRA Semiconductor Photomask Lithography System

HeidelbergInstrumentsMikrotechnikGmbHistheworldleaderintheproductionofhighprecisionphotolithographysystemsandMasklessAligners.HeidelbergInstrumentshasaninstallationbaseofover700systemsinmorethan50countries.Ouropticaldirectwritelithographysystemsareinstalledinacademicandindustrialsitesandareusedinresearch,developmentandproduction.ApplicationsIncludePhotomaskManufacturing,MEMS,MOEMS,Micro-fluidics,CMOS,LEDandDisplayTechnologies.

INKO Industrial Corp. #318695VaquerosAve,Sunnyvale,CA,94085-3524UnitedStates+14088301041;[email protected];www.pellicle-inko.com

Featured Product: Pellicle, ArF pellicle

INKO,aU.S.basedcompany,manufacturesacompletelineofpelliclesforapplicationsrangingfromASICproductiontohighvolumememoryproduction.From248nm/193nmDUVlithographytoI/Glinelithography,wehavetherightpelliclesforyourneeds.ContactJoeMac,salesandcustomerservice,[email protected],orFengYe,[email protected].

Integrated Micro Materials #3008141GatewayDrSte240,Argyle,TX,76226UnitedStates+19402282219;[email protected];www.imicromaterials.com

Featured Product: Lithography Materials and Process Chemicals

Provideroflithographymaterials,processchemicals,andmanufacturingconsultingservices.Contact:BradWilliams,GM,[email protected];RonEakin,BusinessDevelopmentManager,[email protected]


EXHIBITOR DIRECTORY

J.A. Woollam #126645MStSte102,Lincoln,NE,68508-2243UnitedStates+14024777501;[email protected];www.jawoollam.comForallyourellipsometryneeds,frommeasuringyourthinfilmsampletotheinstallationandtrainingofyourveryownellipsometer,theJ.A.WoollamCompanyishereforyoueverystepoftheway.Contactustodaytolearnmoreaboutthevarietyofspectroscopicellipsometersweprovidetohelpyoucharacterizeyourthinfilms.Emailustodayatsales@jawoollam.comorvisitusonthewebatwww.jawoollam.com

JENOPTIK Optical Systems, LLC #106

16490InnovationDr,Jupiter,FL,33478-6428UnitedStates+15618817400;[email protected];www.jenoptik-inc.comJENOPTIKOpticalSystemsdeliversauniquerangeofcustomopticalsolutionsrangingfromprecisionassembliestowaferscalemicroopticsandinmaterialsrangingfromglasses,tocrystalsandpolymers.Competenciesincludeopticaltest,opticalpolishing,diamondturningandlithographicetchingofmaterialsforapplicationscoveringDUVtoLWIR.WecombinedesignandengineeringwithhighvolumemanufactureatUSandGlobalmanufacturingsitesinGermanyandIsrael.Contact:RayMalcom,VPSales&Marketing,[email protected];KadeidraWard,InsideSales,[email protected]

JEOL USA Inc. #201

11DearbornRd,Peabody,MA,01960-3823UnitedStates+19785355900;[email protected];www.jeolusa.comJEOL’sportfolioofinnovativesolutionsforthesemiconductorindustryincludesthewidestrangeofe-beamlithographysystemsforavarietyofnextgenerationapplicationsidealforbothuniversityandR&Dlabs.Fromadvancedhigh-endproductionmaskwriterstohigh-precision,direct-writesystems.JEOL’s50yearsofe-beamexperienceprovidescustomerswithunsurpassedtechnicalreliabilityandserviceexpertise.Contact:ZaneMarek,SEProductMgr.,[email protected]

SPONSOR

JSR Micro, Inc. #122

1280NMathildaAve,Sunnyvale,CA,94089-1213UnitedStates+14085438800;fax+14085438996www.jsrmicro.com

Featured Product: Leading-edge photoresists, developers, packaging materials and specialty chemicals.

JSRMicro,Inc.isaninnovationpartnertoitscustomersmanufacturingtheindustry’smostinnovativefamilyofphotoresists,developers,andspecialtychemicals.JSRisalsoaleaderinAdvancedCleansTechnologyandmaterialsforpackaging.OuruniqueTHBseriesofnegativetoneresistsandWPRseriesofdielectricmaterialsareidealfornextgenerationpackagingtechnologiesthatfacilitatehigherperformance.Contact:RichRennels,[email protected];JoeRitter,[email protected]

LouwersHanique #320Energieweg3A,Hapert,5527AHNetherlands+31497339696;[email protected];www.louwershanique.com

Featured Product: 3D components in glass and fused silica using “Selective Laser-induced Etching” (SLE) Technologies

LouwersHaniquehasbeenaleadingspecialistinthemanufacturingoftechnicalglassandceramiccomponentsaswellasassemblytechnologiesforawidevarietyofhigh-techindustriesforover60years.Wearespecializedinthermalformingofglassandinthemechanicalandlaserprocessingoftechnicalglassandtechnicalceramics.Ourstateoftheartequipmentandcleanroomfacilitiesallowtheprecisionmanufacturingofpartsandassemblieswithtolerancesintothe(sub)micronregion.Contact:CarelvandeBeek,SalesManager,[email protected];PaulMeyer,SeniorApplicationsandSalesEngineer,[email protected]

SPONSOR

Mentor Graphics #221

8005SWBoeckmanRd,Wilsonville,OR,97070-7777UnitedStates+15036857000;[email protected];www.mentor.comThechallengesofdevelopingadvancedlithographyflowsrequireastrongpartner.Withacompletedesign-to-manufacturingplatformforImmersionLithography,EUVandDSA,MentorGraphicsistheidealpartnerforsemiconductormanufacturingsuccess.Weofferbest-in-classtechnology,comprehensivesolutions,developmentandproductionsupport,andcontinuousinnovation.Thatiswhymorethan30fabschooseMentorastheirpartner.Getmoreinfoatwww.mentor.com.

SPONSOR

Micro Lithography, Inc. #3271257ElkoDr,Sunnyvale,CA,94089-2211UnitedStates+14087471769;fax+14087471978www.mliusa.com

Featured Product: Pellicles and Mounting Tool

MLIisfeaturingpelliclesformulatedtoyieldhighratesoftransmissionandlonglifetimesforUVexposure.Ourcompletelineofpelliclefilmsrangesfromg-/i-linetoDUV(KrF-248nmandArF-193nm).MLI’sDUVpellicleshavethelowestoutgassingmaterialsavailableinthemarkettoday.Contact:KevinDuong,CustomerServiceManager,[email protected];DianaTjin,SalesAdministrativeManager,[email protected]

micro resist technology GmbH #225KöpenickerStr325,Berlin,12555Germany+4930641670100;[email protected];www.microresist.de

Featured Product: photoresist, photopolymers, nanoimprint resists, hybrid polymers, greyscale resists, inkjet resists

Formorethan20years,microresisttechnologyGmbHhasbeendeveloping,manufacturingandsellinginnovativephotoresists,specialpolymersandancillarymaterialsformicro-andnanolithographyapplications.Duetoourhighlyspecializedproducts,weareatrustedsupplierofglobalhigh-techmarketssuchassemiconductorindustry,MEMS,optoelectronics,nanotechnologyandotheremergingtechnologies.Contact:ArneSchleunitz,ChiefTechnologyOfficer,[email protected]


EXHIBITOR DIRECTORY

MicroChem Corp. #223200FlandersRd,Westborough,MA,01581UnitedStates+16179655511;[email protected];www.microchem.com

Featured Product: LOR C is the newest lift off resist showing improved coating over topography and reduced cobwebbing.

MicroChemCorp.isamanufacturerofphotoresistandancillaryproductssuchasPMGI,LORA,B&ournewLORCforliftoff,TVFilfortrenchandviafilling,SU-8productsforMEMSandPMMAfore-beamwriting.WealsodistributethecompletelineofDowSemiconductorTechnologyandAdvancedPackagingTechnologyproductsaswellasNILresistsfromMicroResistTechnology.Contact:RobertHardman,InsideSalesManager,[email protected];BobAndrews,DistributionManager,[email protected]

Mitsui Chemicals America, Inc. #10561MetroDr,SanJose,CA,95110UnitedStates+14084872891;fax+14084530684www.mitsuichemicals.comSince1986,Mitsuihasbeentheindustryleaderinprovidingpelliclestothesemiconductorindustry.Mitsui’sISO9001certifiedfullautomatedplantproducesMitsuiPellicle,whichtransmitsmorethan99%ofexposedlightwithexcellentuniformityandlongevity.MitsuiPellicle,manufacturedbyrigorousselectionofallmaterialsandwithmorethan30yearsaccumulatedexpertiseofnon-duststructure,contributestomaximumproductionyieldsbyeliminatingpelliclerelatedparticlegenerations.Contact:YurieMizuno,Asst.SalesManager,[email protected];HIromiTsuboi,SalesManager,[email protected]

Pall Corp. #23025HarborParkDr,PortWashington,NY,11050-4605UnitedStates+15164845400;[email protected];www.pall.com

Featured Product: 1nm PE-Kleen filter offers higher retention & cleanliness for advanced lithography applications

Palloffersacompletelineoffiltration,purificationandseparationtechnologiesforalllithographyprocesses.TheseincludeadvancedNylon6,6,HighdensitypolyethyleneandPTFEmedia.Pallhasdemonstratedthatourinnovativefiltertechnologiescansignificantlyreducedefectivity,decreasefilterstartuptimeandimproveoverallcostofownership.FindouthowPallcanhelpyouimproveyourlithographyprocess.Contact:MichaelMesawich,VPMarketing,[email protected];JoeBica,SnVPSales,[email protected]

PCAS #116725TrotterSt,St-Jean-sur-Richelieu,QC,[email protected];www.pcas.com

Featured Product: Our core expertise is the development and production of high quality materials for Electronic Market

PCASisatechnology-orientedfinechemicalgroupservingglobalindustrialcustomerssince1962.Ourcoreexpertiseisthedevelopmentandproductionofhighqualitymaterials(polymersandsmallmolecules)forLifeSciencesandSpecialtyChemicalsmarkets,suchasLubricant,CosmeticsandElectronics.OurcustomerswithintheElectronicindustryuseourproductsinPhotolithography/Microelectronics(Resist,ARC,Additives)andPrintedElectronics(OLED,OFET,OPV)applications.Contact:FrancisBelanger,GlobalElectronicMarketManager,[email protected];AnnedeVilleroche,SalesandMarketingManager,[email protected]

Pozzetta, Inc. #3233121SPlatteRiverDr,Englewood,CO,80110-2139UnitedStates+13037833172;[email protected];www.pozzetta.com

Featured Product: Photomask Boxes, Reticle Cassettes, SMIF Pods, Wafer CarriersWehelpourcustomersreducecostswithcustomizedin-processsolutionssuchasreticleboxesandreticlestoragesolutions,wafercarriers,andcriticaldeviceshippingsolutions.WehelpoptimizefabspacebypersonallyreviewingthestorageandprocessingofcriticaldevicesanddeliveringcompletesolutionsthatincludeRFIDtags,reticlepodsandcustomcleanroomracks.Wealsohelpourcustomersbymanagingcleaningandmaintenanceprogramsforcassettesandpods.Contact:ArtemisVasiliades,AccountExecutive,[email protected];ScottReese,AccountExecutive,[email protected]

SPONSOR

Qoniac GmbH #100

KönigsbrückerStr34,Dresden,01099Germany+4935141893340;[email protected];www.qoniac.com

Featured Product: OVALiS - new module Saphire - Enlarge your process capability using multidimensional process windows

Qoniacisarapidlygrowingcompanyanddevelopssmartsoftwaresolutionstosupportleadingedgesemiconductormanufacturingcompaniesaroundtheworld.TheworldleadingsoftwaresuiteOVALiSoffersunmatchedcapabilitiesforprocessoptimization.Troughsimulation,diagnostics,monitoringandprocesscontrolcustomersachieveanincreaseinproductionoutput.Whichmeanshigheryieldaswellassavingtimeandcost.OVALiSisusedinmanufacturingfacilitiesintheUSA,Asia,andEurope.Contact:BorisHabets,CTO,[email protected];SaveenKrishnamurthy,SeniorBusinessmanager,[email protected]


EXHIBITOR DIRECTORY

Raith America, Inc. #2241377MotorParkwaySte101,Islandia,NY,11749UnitedStates+16317389500;[email protected];www.raith.comRaithisaleadingprecisiontechnologymanufacturerforelectronbeamlithography(EBL),focusedionbeam(FIB)nanofabricationandprecise,largeareaSEMimaging.Withsub-10nmpatterningperformance,ourinstrumentsareenablingresearchersinbothacademicandindustryenvironmentstocontinuouslyadvancetheirapplicationsinappliednanotechnologicalresearchandareasofindustrythatusenanotechnologyforproductapplicationsorproducecomponentsfromcompoundsemiconductors.Contact:JasonSanabia,President&CEO,[email protected]

RI Research Instruments GmbH #202Friedrich-Ebert-Str75,BergischGladbach,51429Germany+49220470622500;[email protected];research-instruments.de

Featured Product: EUV sources and EUV metrology tools for e.g. actinic mask blank reflectometry, pellicle transmission

RIResearchInstrumentsprovidetechnologyandsolutionsforparticleaccelerators,photoninstrumentation,aswellasspecialmanufacturing.OurlongtermexperienceinEUV/XUVphotonapplicationsenablesustoprovidenewstand-aloneactinicsolutionslikee.g.EUVsources,componentsandtoolsformasks,opticsandresistcharacterizationormetrologyaroundEUVL.Wedesign,manufacture,testanddelivergloballytotheneedsofourcustomersatleadinglaboratoriesandinindustry.Contact:ArndBaurichter,Director,Sales&Marketing,[email protected];RainerLebert,SeniorExpert,[email protected]

SAES Pure Gas #2264175SantaFeRd,SanLuisObispo,CA,93401-8115UnitedStates+18055419299;[email protected];www.SaesPureGas.com

Featured Product: Gas Purifiers for CDA, N2, Ar, H2, and CO2

SAESPureGasmanufacturersgaspurificationequipmentforEUV,Immersion,Lithography,andMetrologyapplications.GasespurifiedincludeCDA,N2,Ar,H2,andCO2.Purifiersrangefromsmallpoint-of-usepurifierstobulkautomaticallyregenerablepurifiers.Contact:SteveWallace,Sales,[email protected]

Sage Design Automation, Inc. #308

2075DeLaCruzBlvdSte105,SantaClara,CA,95050UnitedStates+14087276294;[email protected];www.sage-da.com

Featured Product: iDRM: Software platform for design-process-technology co-development and co-optimization

iDRMfromSage-DAisauniquesoftwareplatformthatenablestechnologiststoquicklycapturedesignrules,analyzeinteractionsandexploretradeoffsbetweentechnologyanddesignconstraints.WithiDRMyoucandevelopacompletedesignrulemanualandautomaticallygenerateafullDRCrunset.iDRMalsoautomaticallygeneratesacorrect-by-constructionsetoftestlayoutsforsystematiccoverageofDRCrunsets.Theplatformalsoprovidespatternextraction,classificationandcharacterization.Contact:CobyZelnik,President,[email protected];KristenFrederick,OfficeManager,[email protected]

SPONSOR

SCREEN SPE USA, LLC #200820KiferRdSteB,Sunnyvale,CA,94086-5214UnitedStates+14085239140;[email protected];www.screen.co.jp/eng/spe/index.html

Featured Product: Lithospin DUO-S coat develop track system, DT-3000

SCREENSPEUSA,LLCisU.S.subsidiaryofSCREENSemiconductorSolutionsCo.,Ltd.,Kyoto,Japan.SCREENSemiconductorSolutionsisthesemiconductorequipmentbusinessfromitspredecessor,DainipponScreen(SOKUDO).Manufacturerofsemiconductorproductionequipmentinvariousareassuchaswafercleaningequipment,lithography/trackequipmentandanneals,andisoneoftheworld’stop10suppliers.Contact:CharlesPieczulewski,VP,[email protected]

Seiwa Optical America Inc. #123

3042ScottBlvd,SantaClara,CA,95054UnitedStates+14088448008;[email protected];www.seiwaamerica.com

Featured Product: Mask Aligner

Forover50years,SEIWAOPTICALhasbeenaproviderofbothstandardandcustomizableopticalsolutionsformachinevision,inspection,andindustrialprocessing.Contact:[email protected]

Shin-Etsu MicroSi #118

10028S51stSt,Phoenix,AZ,[email protected];www.microsi.comShin-Etsu,theworld’sNo.1supplierofsemiconductorsiliconwafersandaleadingsupplierofessentialelectronicmaterials.Shin-Etsu’sproductportfolioincludes,photomaskblanks,EBresists,pellicles,syntheticquartz,semiconductoradvancedresistsalongwithnumerousspecializedthermalinterfacematerials.Contact:EdwinNichols,MarketingManager,[email protected]

SPONSOR

solar-semi GmbH #227Robert-Gerwig-Str9,Radolfzell,78315Germany+497732978980;[email protected];www.solar-semi.comSolar-semiGmbHsystemsarebasedonstandardizedplatforms,whichallowawiderangeofindividualconfigurationsforprocessingandhandlingoffragilesubstratesusedinthesemiconductor-,MEMS,piezoMEMS,OLEDdisplayandsimilarindustriesaswellasinR&D.Ourlithographyprocessingequipmentissuitableforapplicationslikespincoating,spraycoating,baking,priming,developing,substratecleaning,lift-offandstrippingofvarioussubstratesizesandmaterials.


EXHIBITOR DIRECTORY

Solid State Technology #103178618thSt,SanFrancisco,CA,94107UnitedStates+14152550390;[email protected];www.solid-state.com

Featured Product: Solid State Technology Magazine

SolidStateTechnologyreachesthelargest,mostqualifiedcommunityofdecisionmakersforsemiconductorandelectronicsmanufacturingthroughthemagazine,emailnewsletters,website,webcastsandTheConFabConference&Networkingevent.TopicsincludeAdvancedPackaging,MEMS,LEDs,DisplaysandMaterialsaswellascurrenttrendsintheindustry.Visitusherewww.solid-state.com.Contact:KerryHoffman,AssociatePublisher,[email protected]

Synopsys, Inc. #206

690EMiddlefieldRd,MountainView,CA,94043UnitedStates+16505845000;[email protected];www.synopsys.com

Featured Product: Proteus ILT, Proteus LRC, CATS, Sentaurus Lithography

Synopsysprovidesindustry-provenEDAsolutionstomeetthedemandsoftoday’sadvancedICmanufacturingprocesseswhilesettingthestandardinplatformflexibilitytoenableinnovativesolutionsfornextgenerationtechnologynodes.Synopsys’comprehensiveMaskSynthesis,MaskDataPreparation,TCADandYieldManagementtoolsprovideleading-edgeperformance,accuracy,quality,andcostofownershipforallyourproductionanddevelopmentneeds.Contact:[email protected]

SPONSOR

Tokyo Electron #1302400GroveBlvd,Austin,TX,78741-6500UnitedStates+15127508219;fax+15124241001www.tel.com

Featured Product: Coaters / developers for 100 - 450mm substrates including masks

TokyoElectron(TEL)isaleadingglobalsupplierofinnovativesemiconductorandflatpaneldisplayproductionequipment.Productlinesincludecoater/developers,thermalprocessingsystems,plasmaetchers,singlewaferdepositionsystems,surfacepreparationsystemsandotherequipmentsupportingthemanufacturingandtestingofsemiconductors.Focusedonproductivityandcostofownership,TELoffersadvancedlithographicprocessandhardwaresolutionsfor7nmnodesandbeyond.Contact:RobCrowell,ProductMarketingManager,[email protected];KatyCrist,MarketingCommunicationsManager,[email protected]

SPONSOR

Tokyo Ohka Kogyo America, Inc. #211190TopazSt,Milpitas,CA,95035-5429UnitedStates+14089569901;[email protected];www.tokamerica.com

Featured Product: EUV, DSA, Arf Immersion, ArF, KrF, i-Line, g-Line photoresists and supporting chemistries.

TOKAmericamanufacturesandmarketsultrahighpurityphotoresistsandauxiliarychemicalsusedinthefabricationofintegratedcircuits.TOKAmericaisaUSsubsidiaryofTokyoOhkaKogyoCo.,Ltd.,inKawasaki,Japan,aworldleaderinthemanufactureofphotoresists,auxiliaryliquidchemicalproducts,andprocessequipmentforthesemiconductorcircuit,semiconductorpackaging,imagesensor/MEMS,3Dpackaginganddisplaytechnologymaterialsindustry.Contact:AaronVickery,SeniorAccountManagerBusinessDevelopment,[email protected]

Vistec Electron Beam GmbH #213Ilmstr4,Jena,07743Germany+49364179980;[email protected];www.vistec-semi.com

Featured Product: Vistec SB3050 series & Vistec SB250 series - variable shaped beam systems

VistecElectronBeamGmbHprovidesleadingtechnologysolutionsforadvancedelectron-beamlithography.BasedontheVariableShapedBeam(VSB)principle,theelectron-beamlithographysystemsaremainlyutilizedforsemiconductorapplicationsandadvancedresearchassilicondirectwrite,compoundsemiconductor,maskmakingaswellasintegratedopticsandseveralnewemergingmarkets.ThecompanyislocatedinJena,Germanyandmaintainsservice&supportcentersinEurope,Taiwan&intheUS.Contact:InesStolberg,ManagerProductManagement&Marketing,[email protected];KevinGrens,BusinessDevelopmentManager,[email protected]

Zygo Corporation #207

21LaurelBrookRd,Middlefield,CT,06455-1291UnitedStates+18603478506;[email protected];www.zygo.comZYGOisaworldwidesupplierofopticalmetrologyinstruments,precisionoptics,andelectro-opticaldesignandmanufacturingservices,providingproductivityandyieldimprovementsolutionsforavarietyofindustries.ZYGOprovidesawiderangeofinspection,surfaceanalysis,andprecisiondisplacementmeasurementsolutions,aswellasprecisionoptics,opticaldesign,andopto-mechanicalassembly.ZYGOwillbeexhibitingtheirnewestlinesofmetrologysystemsandopticalcapabilities.Contact:DavidMelton,DirectorSales&Support,[email protected];MarcTricard,DivisionVPOptics,mtricard2zygo.com


PRODUCT CATEGORIES

BASIC RESEARCH, SCIENCEattocube systems Inc.Brewer ScienceCoventor, Inc.Gudeng Precisionmicro resist technology GmbHPall Corp.PCASRaith America, Inc.RI Research Instruments GmbHSynopsys, Inc.Tokyo Ohka Kogyo America, Inc.

BIOMEDICAL, MEDICAL IMAGING, HEALTH CAREattocube systems Inc.micro resist technology GmbHRI Research Instruments GmbHSeiwa Optical America Inc.

CAMERAS AND IMAGING SYSTEMSSeiwa Optical America Inc.

CHEMICAL AND BIOLOGICAL ANALYSISBrewer ScienceTokyo Ohka Kogyo America, Inc.

COMPUTING SYSTEMS, DATA PROCESSINGattocube systems Inc.Raith America, Inc.

CONSULTING SERVICESCoventor, Inc.

DEFENSE, SECURITY, LAW ENFORCEMENTRaith America, Inc.

DISPLAYSGudeng Precision

DISPLAYS: CONSUMER, INFORMATION, ENTERTAINMENTRaith America, Inc.

ELECTRONIC COMPONENTSLouwersHanique

EMERGING PHOTONICS TECHNOLOGIESCoventor, Inc.

FIBER OPTICS AND ACCESSORIESLouwersHanique

INDUSTRIAL SENSING AND MEASUREMENTattocube systems Inc.RI Research Instruments GmbHZygo Corporation

LASER COMPONENTS AND ACCESSORIESZygo Corporation

LASER INDUSTRYLouwersHanique

LED, OLED, NON-LASER LIGHT SOURCESSeiwa Optical America Inc.

LITHOGRAPHIC EQUIPMENTCoventor, Inc.Gudeng PrecisionJEOL USA Inc.micro resist technology GmbHPall Corp.Raith America, Inc.SCREEN SPE USA, LLCTokyo Ohka Kogyo America, Inc.

MACHINE VISION, FACTORY AUTOMATIONGudeng PrecisionLouwersHanique

MATERIALS PROCESSING, LASERS IN MANUFACTURINGattocube systems Inc.LouwersHanique

MATERIALS, ABRASIVES, CHEMICALSBrewer ScienceDJ DevCorpGudeng PrecisionJSR Micro, Inc.LouwersHaniquemicro resist technology GmbHPCASShin-Etsu MicroSiTokyo Ohka Kogyo America, Inc.

MICROSCOPESattocube systems Inc.JEOL USA Inc.Raith America, Inc.RI Research Instruments GmbHSeiwa Optical America Inc.Zygo Corporation

MICROTECHNOLOGYBrewer ScienceCoventor, Inc.DJ DevCorpGudeng Precisionmicro resist technology GmbHTokyo Ohka Kogyo America, Inc.

MISC CONSUMABLES AND EQUIPMENTGudeng Precision

NANOTECHNOLOGY PRODUCTSBrewer Sciencemicro resist technology GmbHShin-Etsu MicroSiSynopsys, Inc.Tokyo Ohka Kogyo America, Inc.

OPTICAL COATINGS, THIN FILMSBrewer ScienceTokyo Ohka Kogyo America, Inc.Zygo Corporation

OPTICAL COMPONENTS - FILTERS, MIRRORS, OTHERLouwersHanique

OPTICAL COMPONENTS - LENSESSeiwa Optical America Inc.Zygo Corporation

OPTICAL DESIGN AND ENGINEERINGCoventor, Inc.RI Research Instruments GmbHZygo Corporation

OPTICS MANUFACTURINGLouwersHaniqueTokyo Ohka Kogyo America, Inc.Zygo Corporation

GET A

JOB•

Visit www.SPIECareerCenter.org

OPTOMECHANICAL COMPONENTS, DEVICESLouwersHaniqueRI Research Instruments GmbH

POSITIONING EQUIPMENT, MOTION CONTROL AND ACCESSORIESattocube systems Inc.Raith America, Inc.RI Research Instruments GmbH


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THE INTERNATIONAL SOCIETY FOR OPTICS AND PHOTONICS

Through collaboration, companies large and small steer the latest innovations toward practical relevance and revenue in the global marketplace.

SPIE Corporate Membership increases your visibility, adds individual benefits, and provides significant discounts on:

SPIE exhibitions* | SPIE Digital Library subscriptionsAdvertising rates | Mailing lists | Recruitment services

*SPIE Corporate Members receive a 15% discount on exhibit space.

3SAE Technologies, Inc.4D Technology Corp.5N Plus Semiconductors, LLCABB Analytical MeasurementAbet Technologies, Inc.Abrisa TechnologiesAccess Laser Co.AccuStrata Inc.Acktar Ltd.Adimec Electronic Imaging, Inc.AdlOptica Optical Systems GmbHAdmesy B.V.AdTech Ceramics Co.AdTech Optics, Inc.AdValue Photonics, Inc.Advance Reproductions Corp.Advanced Abrasives Corp.Advanced Energy Industries, Inc.Advanced Fiber Resources

(Zhuhai) Ltd.Advanced Microoptic Systems

GmbHAdvanced Optowave Corp.Advanced Power Group Corp.AdvR, Inc.AEMtec GmbHAerotech, Inc.AFLAKELA Laser Corp.Alazar Technologies, Inc.ALIO Industries Corp.Allied Vision Technologies Inc.AllMotion, Inc.AlluxaALPAO S.A.S.Alpine Research OpticsAltechna UABAltos Photonics, Inc.American Photonics Co.AMETEK HCC Industries, Inc.AMETEK Precitech, Inc.AMETEK Taylor Hobson Inc.AMETEK Vision Research®, Inc.AMETEK, Inc.Andover Corp.Aperture Optical Sciences Inc.Applied Image, Inc.Applied Optics Ctr., a Div. of Optex

Systems, Inc.

Applied Optics, Inc.Applied Photonics Inc.Applied Physics & Electronics, Inc.Applied Surface TechnologiesApplied Technology AssociatesÄpre Instruments, LLCApril Electro-Optics Co., Ltd.Archer OpTx, Inc.Arden Photonics Ltd.Arrow Thin Films, Inc.Arroyo Instruments, LLCASA Astrosysteme GmbHAsahi Spectra USA Inc.Ascentta, Inc.asphericon, Inc.ASTRODESIGN, Inc.attocube systems Inc.Avantes, Inc.Avo Photonics, Inc.Ayase America Inc.B&W Tek, Inc.Ball Aerospace & Technologies

Corp.BaySpec, Inc.Beamtech Optronics Co., Ltd.Beijing Scitlion Technology Co.,

Ltd.Berliner Glas KGaA Herbert Kubatz

GmbH & Co.BigC Dino-Lite Digital MicroscopeBiophotonic Solutions, Inc.Blue Ridge Optics, LLCBodkin Design & Engineering, LLCBoston Applied Technologies, Inc.Boston Electronics Corp.Boston Micromachines Corp.Boulder Nonlinear SystemsBoXin Photoelectric Co., Ltd.Brandywine Photonics, LLCBreault Research Organization, Inc.Brewer Science, Inc.Bristol Instruments, Inc.Brolis Semiconductors UABBühler Inc.BWT Beijing Ltd.Calmar LaserCambridge TechnologyCanon U.S.A., Inc.Carl Zeiss, Inc.Cascade Laser Corp.

Cascade Optical Corp.CASTON Inc.CEA-LETIChangchun New Industries

Optoelectronics Technology Co., Ltd.

Chenter Industries Group Ltd.Chiral Photonics, Inc.Chroma Technology Corp.Churchill NavigationCI Systems, Inc.Cirrus Logic, Inc.Clear AlignClemson Univ.Coastal ConnectionsCoherent, Inc.Collimated Holes, Inc.ContinuumContour Metrological &

Manufacturing, Inc.CorActive High-Tech Inc.Coresix Precision Glass, Inc.Covesion Ltd.CPG Optics, Inc.CREOL, The College of Optics

and Photonics, Univ. of Central Florida

Cristal Laser S.A.CryLight Photonics, Inc.Cryslaser Inc.Crystal IS, Inc.CRYSTECH Inc.Cybel LLCDaheng New Epoch Technology,

Inc.DataRay Inc.Daylight Solutions Inc.DCM Tech, Corp.Deltronic Crystal Industries, Inc.Deposition Sciences, Inc.Diamond USA Inc.DIAS Infrared Corp.DiCon Fiberoptics, Inc.DILAS Diode Laser, Inc.DILAS Diodenlaser GmbHDiverse Optics Inc.Docter Optics, Inc.Dominar, Inc.DRS Technologies, Inc.DST CONTROL AB

Dynamic Structures Ltd.DynaVacDZD Photonics Co., Ltd.E.R. Precision Optical Corp.e2v Aerospace and Defense, Inc.e2v technologies plcEdmund Optics Inc.Electro Optical Components, Inc.Electro Optical Industries, Inc.Electro-Optical Imaging, Inc.Electro-Optics Technology, Inc.Elite Optoelectronics Co., Ltd.Elliot Scientific Ltd.EMD Performance Materials Corp.EMF Corp.Eminess Technologies, Inc.Empire Precision PlasticsEmpire West, Inc.Energetiq Technology, Inc.Enplas Microtech, Inc.EPIR Technologies, Inc.EPIX, Inc.Esterline CMC Electronics, Inc.Evaporated Coatings, Inc.EVERIX, Inc.Exalos AGExcelitas QioptiqExcelitas Technologies Corp.Excell TechnologyExciton, Inc.Fantom Materials, Inc.Feinwerkoptik Zünd AGFiber Optic Valley ABFiberCryst S.A.S.Fiberguide Industries, Inc.Fibertech Optica Inc.ficonTEC Service GmbHFirst Light Imaging S.A.S.First Sensor, Inc.FISBA AGFJW Optical Systems, Inc.Flexible Optical B.V.FLIR Systems, Inc.FluxData, Inc.FOCtek Photonics, Inc.Foreal Spectrum, Inc.Fotofab, LLCFrankfurt Laser Co.Fraunhofer UK Research Ltd.


SPIE CORPORATE MEMBERS

Fraunhofer-Institut für Photonische Mikrosysteme

Fresnel Technologies Inc.Fuzhou Alpha Optics Co., Ltd.Fuzhou Intpho Technology Co., Ltd.GAMDAN OpticsGeneral Dynamics-Global Imaging

TechnologiesGeneral Ruby & Sapphire Co.GenISys IncGentec Electro-Optics Inc.Georgia Tech Research InstituteGlass Fab, Inc.Gooch & Housego PLCGPD Optoelectronics Corp.Greenlight Optics, LLCgreenTEG AGGrintech GmbHGS Plastic OpticsGuernsey Coating Labs., Inc.Gulf Fiberoptics, Inc.Haas Laser Technologies, Inc.Hamamatsu Corp.Hangzhou Techwin Precision

Instrument Co., Ltd.Haphit IncHardin Optical Co.HC Photonics Corp.Headwall Photonics Inc.Heidelberg Instruments Inc.

Hellma USA, Inc.heracle GmbHHeraeus Tenevo LLCHIGHYAG Lasertechnologie GmbHHinds Instruments, Inc.Hindsight Imaging, Inc.Hofstadter Analytical Services, LLCHOLO/OR Ltd.HOLOEYE Photonics AGHolographix LLCHong Kong Productivity CouncilHORIBA Instruments Inc.HOYA Corp. USAHTA PhotomaskHuanic Corp.Ibsen Photonics A/Sibss Group, Inc.IDEX Corp.IDEX Health & Science LLCIDEX Optical TechnologiesII-VI EpiWorks, Inc.II-VI Inc.II-VI InfraredII-VI Laser Enterprise GmbHII-VI MarlowII-VI Optical SystemsIMECIMPERX Inc.IMRA America, Inc.

Incom, Inc.Indian Hills Community CollegeInfinite Optics Inc.Infrared Materials, Inc.Infrared Systems Development

Corp.Infratec Infrared LLCINGENERIC GmbHInnolume GmbHInnovations in Optics, Inc.Innovative Photonic SolutionsINOInPhenix, Inc.Inrad OpticsInsight Photonic Solutions, Inc.Institute for Photonics and

Advanced SensingInternational Consortium for

Advanced Manufacturing Research (ICAMR)

International Optoelectronics, LLCIntlvac Thin FilmIO Industries, Inc.IPG Photonics Corp.IRCAM GmbHIRCameras, LLCIRD GlassIRflex CorporationIris AO, Inc.IRnova AB

IRsweep GmbHIRTronix, Inc.Isomet Corp.ISP Optics Corp.Isuzu Glass, Inc.ITF Technologies Inc.ITW Opto Diode Corp.Janos Technology, LLCJENOPTIK Optical Systems GmbHJENOPTIK Optical Systems, LLCJEOL USA Inc.JSR Micro, Inc.Kappa optronics, Inc.Kapteyn-Murnane Labs., Inc.Kaufman & Robinson, Inc.Kentek Corp.Kigre, Inc.Kiyohara Optics Inc.KrellTechKugler of America Ltd.L-3 Cincinnati Electronics Labsphere, Inc.LaCroix Precision OpticsLambda Research Corp.Lambda Research Optics, Inc.Lanmark Controls Inc.Laser Components USA, Inc.Laser Focus WorldLaser Institute of America


PHOTOMASK TECHNOLOGY + EXTREME ULTRAVIOLET LITHOGRAPHYA technical meeting for mask makers, EUVL, emerging technologies, and the future of mask buisness.

Call for Paperswww.spie.org/pm2017

Monterey, California, USA Conference: 11–14 September 2017 Exhibition: 12–13 September 2017



Laser Light Technologies Inc.Laser Quantum Inc.Laser Safety IndustriesLaser-compact Co. Ltd.Laser-FemtoLaserline Inc.Laservision USALASORBLASOS Lasertechnik GmbHLattice Electro Optics, Inc.Lein Applied Diagnostics Ltd.LEONI Fiber Optics, Inc.LightComm Technology Co., Ltd.LightMachinery Inc.LightPath Technologies, Inc.Litron Lasers Ltd.Lockheed Martin AculightLTI Optics, LLCLumencor, Inc.Luna OptoelectronicsLuvantix SSCPLuxel Corp.M Squared Lasers Ltd.M3 Measurement SolutionsMad City Labs., Inc.Mahr-ESDIMarina Photonics, Inc.Market Tech, Inc.Marktech OptoelectronicsMarubeni America Corp.Materion Barr Precision Optics &

Thin Film CoatingsMeadowlark Optics, Inc.MegaWatt Lasers, Inc.Mentor Graphics CorpMesa Photonics, LLCMH GoPower Company LimitedMichigan Photonics ClusterMicro Laser Systems, Inc.MicroCircuit Labs., LLCMicrofine Materials Technologies

Pte Ltd.MICRONIX USA, LLCMicronor Inc.Microtech Instruments, Inc.Mightex SystemsMikro-Tasarim Elektronik San. ve

Tic. A.Ş.Mildex, Inc.Mindrum Precision, Inc.Minus K Technology Inc.Mirrorcle Technologies, Inc.MKS Instruments, Inc.ML Optic Corp.MLD Technologies, LLCMontana Photonics Industry

AllianceMONTFORT Laser GmbHMOXTEK, Inc.MPA Crystal Corp.MPB Communications Inc.Multi IR Optoelectronics Co., Ltd.Multisorb TechnologiesMWTechnologies, LdaNaked Optics Corp.

NANEO Precision IBS Coatings GmbH

nanoplus GmbHnanosystec GmbHNanotronics ImagingNantong Ruisen Optical Element

Technology Co., Ltd.National Aperture, Inc.National Institute of Standards and

TechnologyNational Metrology Ctr.Natsume Optical Corp.Navitar Inc.Necsel IP, Inc.New England Optical SystemsNew England Photoconductor

Corp.New Scale Technologies, Inc.New Source Technology, LLCNewport Corp.Newport Thin Film Lab., Inc.NiCoForm, Inc.nLIGHT Corp.Norland Products Inc.Norlase ApSNorPix Inc.Northrop Grumman Cutting Edge

OptronicsNP Photonics, Inc.nPoint, Inc.NRD Advanced Static ControlNufernNuFlare Technology, Inc.Nutfield TechnologyNüvü Caméras Inc.Ocean Optics, Inc.OEwaves, Inc.OFSOhara Corp.Ondax, Inc.Onefive GmbHOPCO Lab., Inc.Open Photonics, Inc.Optec S.p.A.Optical Filter Source, LLCOptical Support, Inc.Optics BalzersOptics Technology, Inc.Optiforms, Inc.OptiGrate Corp.Optikos Corp.Optilab LLCOptimax Systems, Inc.OptiPro SystemsOptiSource, LLCOptiwave Systems Inc.Opto-Alignment Technology, Inc.Opto-Knowledge Systems, Inc.Opto-Line International, Inc.Optonetic LLCOptores GmbHOptoSigma Corp.Optotune Switzerland AGOptowaves, Inc.OSELA Inc.

OZ Optics Ltd.Pacific Laser EquipmentPangolin Laser Systems, Inc.Pavilion Integration Corp.PCO-TECH Inc.Perkins Precision Developments,

LLCPFG Precision Optics, Inc.PHASICS Corp.Photon DesignPhoton Engineering LLCPhoton etc.Photon Manufacturing, LLCPhotonic Cleaning TechnologiesPhotonics Industries International,

Inc.PHOTONIS USA, Inc.Photop Optics Co., Ltd.Photop Suwtech, Inc.PI (Physik Instrumente) L.P.PicoQuant Photonics North

America, Inc.Pie Photonics Ltd.PIEZOCONCEPTpiezosystem jena, Inc.PIKE TechnologiesPixelteq, Inc.Polaris MotionPovolzhskiy State Univ. of

Telecommunications and Informatics

Precision Glass & OpticsPrecision Glass BendingPrecision OpticalPrinceton InstrumentsPrinceton Lightwave, Inc.Prior Scientific Inc.Prizmatix Ltd.PROMET OpticsPure PhotonicsPVP Advanced EO Systems, Inc.QD Laser, Inc.QED Technologies, Inc.Qoniac GmbHQPC Lasers/Laser Operations LLCQuantel USAQuartus Engineering Inc.Radiant Light SLRaicol Crystals Ltd.Rainbow Research Optics, Inc.Raptor Photonics Ltd.Raytheon ELCAN Optical

TechnologiesRedondo Optics, Inc.RedWave Labs Ltd.Research Electro-Optics, Inc.Reynard Corp.RICOR USA, Inc.Rochester Precision Optics, LLCRocky Mountain Instrument Co.Ross Optical IndustriesRPC Photonics, Inc.RPMC Lasers, Inc.

RSP TechnologyRubicon Technology Inc.Ruda-Cardinal, Inc.Saber 1 TechnologiesSacher Lasertechnik GmbHSafran Optics 1Sage Design Automation, Inc.Salem Distributing Co., Inc.Santa Barbara Infrared, Inc.SantierSatisloh North America Inc.Savvy Optics Corp.SCANLAB America, Inc.ScannerMAXSCD SemiConductor DevicesSCD.USA, LLCSchneider Optical Machines Inc.Schneider Optics, Inc.SCHOTT AGSCHOTT DiamondView Armor

Products, LLCSCHOTT North America, Inc.Scientific Materials Corp.Seattle Photonics Associates LLCSeiwa Optical America Inc.SemiNex Corp.SensL Technologies Ltd.Sensofar-USASensors Unlimited, a United

Technologies Co.SensUpShanghai Jiaguang Optics GroupShanghai Optics Inc.Shasta CrystalsSheaumann Laser, Inc.Shin-Etsu MicroSi, Inc.Sierra Precision OpticsSierra-Olympic Technologies, Inc.Sigmadyne, Inc.Sill Optics GmbH & Co. KGSimera Technology Group Pty Ltd.Siskiyou CorporationSlicingTechSmarAct GmbHSpecim Spectral Imaging Ltd.Spectral Devices Inc.Spectral Instruments, Inc.Spectrogon ABSpectrogon UK Ltd.Spectrogon US, Inc.Spectrum Scientific, Inc.Spectrum Thin Films Corp.Spica Technologies, Inc.SRI International SarnoffStanford Computer Optics, Inc.StellarNet, Inc.Stemmerich, Inc.STFC Rutherford Appleton Lab.Sunny Opotech North America, Inc.Sunny TechnologySutter Instrument Corp.Swamp Optics, LLCSwissLitho AG



Sydor Optics, Inc.Synopsys, Inc.Syntec OpticsTAG Optics, Inc.tec5USA, Inc.Technical Manufacturing Corp.Technische Informationsbibliothek

(TIB)TecOptics, Inc.Tecport Optics, Inc.Teledyne Judson TechnologiesTelops Inc.Tempo Clean Room FoamTempotec Optics Co., Ltd.TeraDiode, Inc.Texas Instruments Inc.The Hong Kong Polytechnic Univ.The Univ. of AdelaideThe Univ. of ArizonaThermo Fisher Scientific Inc.Thorlabs, Inc.TJS, Inc.

TLC International World Headquarters

TOPTICA Photonics AGTOPTICA Photonics Inc.Tower Optical Corp.TRIOPTICS GmbHTRUMPF Inc.TydexULTRA TEC Mfg., Inc.Umicore Optical Materials USA, Inc.United Lens Co., Inc.Univ. of RochesterUniversal Photonics Inc.UpTek Solutions Corp.Valtech Corp.VariopticVermont Photonics Technologies

Corp.Viavi Solutions Inc.Video Scope International, Ltd.VisiMax Technologies, Inc.

Vision Components GmbHVital Materials Co., Ltd.Vixar Inc.VORTRAN Laser Technology, Inc.Wasatch Photonics, Inc.Wavelength Electronics, Inc.Wavelength Opto-Electronic (S)

Pte. Ltd.Webb Holdings LLCWINHO Optical Mfg. Co., Ltd.World Star TechWuhan National Lab. for

OptoelectronicsWZW-Optic AGXenicsXenics NVXIMEA Corp.Xonox Technology GmbH

XYALISYenista OpticsYenista Optics Inc.YSL PhotonicsZ & Z Optoelectronics Tech. Co.,

Ltd.Zemax, LLCZeta InstrumentsZeus Industrial Products, Inc.Z-LASER Optoelektronik GmbHZ-LASER-America Inc.Zurich Instruments AGZygo Corporation

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2017 ADVANCED LITHOGRAPHY - SPIE...ADVANCED LITHOGRAPHY 2017 THE PREMIER EVENT FOR THE SEMICONDUCTOR INDUSTRY Exhibition: 28 February–1 March 2017 Conferences & Courses: 26 February–2