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8/9/2019 Bakir Chapter2 Final
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Chapter 2 Semiconductor
Device Physics Fundamentals
2.1 Semiconductor Materials
2.2 Crystal Structure
2.3 Semiconductor Models
2.4 Semiconductor Doping
2.5 Carrier Statistic
2.6 Carrier Transport
2.7 Carrier Generation/Recombination
Literature:
Pierret, Chapter 1-3, page 1-132
Acknowledgement Oliver Brand for slides
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
2.1 Semiconductor Materials
Material Classification by Resistivity:
Literature: Pierret, Chapter 1.1, page 3-6
MaterialResistivity
[!"cm]
Insulators 105< !
Semiconductors 10-3< < 105 (108)
Conductors !< 10-3
Jaeger, Blalock, Table 2.1
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Semiconductor Materials
Semiconductors haveconductivities between thoseof insulators and those ofconductors
Semiconductors are materialswhose electric properties
(e.g. conductivity & resistivity)can be controlledover a widerange by doping, i.e. additionof controlled amounts ofspecific impurity atoms
Semiconductor materials are
the base of all semiconductordevices, such as diodes andtransistors (BJT andMOSFET)
Pierret, Fig. 3.8
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Resistivity/Conductivity of Insulators,
Semiconductor and Conductors
Sze, Fig. 2.1
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
What Elements are Semiconductors based on?
Elemental Semiconductors:Silicon (Si), Germanium (Ge)
Compound Semiconductors:
III-V: e.g. Gallium Arsenide (GaAs)II-VI: e.g. Zinc Selenide (ZnSe)IV-IV: Silicon Carbide (SiC)
Alloy Semiconductors:Binary: Si1-xGexTernary: AlxGa1-xAs
AlxIn1-xAsGaAs1-xPx
Quaternary: GaxIn1-xAs1-yPy
Because of its well-developedfabrication technology, SILICONis by far the most importantsemiconductor material
Jaeger, Blalock, Table 2.2
Shaded = most important semiconductor elements
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Semiconductor Fundamentals
Element and Compound
Semiconductors
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
The OtherSemiconductor Materials
Silicon is the dominatingsemiconductor material The othersemiconductor
materials are utilized inapplications requiring e.g.
High speed
Optoelectronic properties High temperature operation
Example: Ternary alloys, suchas AlxGa1-xAs, have a tunablebandgap, enabling LEDs andlaser diodes with engineeredoutput spectrum
Substantial research isperformed (also at GaTech!) onboth Si and non-Sisemiconductor devices
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
2.2 Crystal Structure
2.2.1 Unit Cell
Unit Cell & Primitive Unit Cell
Cubic Crystal Structure
2.2.2 Semiconductor Lattice
Diamond lattice Zincblende lattice
2.2.3 Miller Indices
Crystal Directions
Crystal Planes
Literature: Pierret, Chapter 1.2, page 6-16
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Classification of Solids
Solids can be classified based on their degree of atomic order
Most semicon. devices are based on crystalline semiconductors!
Amorphous
No recognizablelong-range order
Polycrystalline
Solid is made up ofcrystallites, i.e.
segments which arecompletely ordered
Crystalline
Entire solid is madeup of atoms in an
orderly array
Pierret, Fig. 1.1
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
2.2.1 Crystal Unit Cell
Crystal= Periodic 3-D arrangement ofatoms
Unit cell= small portion of the crystal
that can be used to reproduce thecrystal
Primitive (unit) cell= smallest unit cell
possible
Unit cells (including primitive unit cells)are not unique
A unit cell does not need to be primitive;often it is more convenient to have aslightly larger unit cell with orthogonal
sides (instead of primitive cell with non-orthogonal sides)
WWW-page on crystal structures:http://departments.kings.edu/chemlab/chemlab_v2/
Which cells are unit cells?Which cells are primitive cells?
Which cell is not a unit cell?
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Cubic Crystal Structure
Simple cubic (sc) is the simplestof all 3-D unit cells:
Cube with an atompositioned at each corner
Only 1/8 of each corneratom is inside the unit cell: 1
atom per unit cell; eachatom has 6 nearestneighbors
The side length is called thelattice constant a
Very few materials crystallize ina simple-cubic lattice
How can we seethe crystalstructure of a crystal?
Sze, Fig. 2.3
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Cubic Crystal Structures
fcc
andbcc
Lattice Body-Centered-Cubic (bcc) unit cell
Additional atom in the center of the cube
2 atoms per unit cell8 nearest neighbors for each atom
Examples: Cr, W, Na, Fe
Face-Centered-Cubic (fcc) unit cell
Additional atoms in the center of eachface of the cube
Also known as cubic-close-packed (ccp) 4 atoms per unit cell
12 nearest neighbors for each atom
Examples: Ni, Ag, Au, Cu, AlSze, Fig. 2.3
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
2.2.2 Diamond LatticeSilicon Crystal Structure
Silicon and germanium have a
diamond lattice, a special cubiccrystal structure
The diamond lattice consists oftwo interpenetrating face-
centered-cubic (fcc) latticesshifted by one-quarter of thecube body diagonal
Each silicon atom has 4 nearestneighbors forming a tetraederstructure
The silicon unit cell has a lattice
constant a = 5.43 (T = 300 K)(1 = 10-10m = 10-8cm = 0.1 nm)
Each silicon atom forms fourcovalent bonds with its nearestneighbors (see Chapter 2.3)
Sze, Fig. 2.4
Calculate:How many Si atoms dowe have per cm-3?
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Diamond Lattice along Axis
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Zincblende LatticeGaAs Crystal Structure
Most III-V semiconductors (e.g.
GaAs) have a zincblende lattice,again a cubic crystal structure
Similar to the diamond lattice,the zincblende lattice consists of
two interpenetrating face-centered-cubic (fcc) latticesshifted by one-quarter of thecube body diagonal, but withdifferent atoms occupying eachfcc sublattice
The GaAs unit cell has a lattice
constant a = 5.65 (T = 300 K)(1 = 10-10m = 10-8cm = 0.1 nm)
Sze, Fig. 2.4
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
2.2.3 Miller Indices
Miller indices are used to specifycrystallographic planes anddirections
How do I find the Miller index for aplane? Record where the plane
intersects coordinate axes inunits of a: e.g. 1,2,3
Invert intercept values:e.g. 1, 1/2, 1/3
Multiply with constant to getsmallest possible set of wholenumbers: e.g. 6,3,2
Enclose set with curvilinearbracket: e.g. (632)
Note: What are the other planes indices?
(6 " 32)# (63 2)
(001)
(632)
(22 1)
Pierret, Fig. 1.6
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
More on Miller Indices
Miller indices for directions are found analogous to thecomponents of a vector
In a cubic crystal, the planes
are equivalentbecause of symmetry and summarized as {100}
For cubic crystals, the direction [hkl] is normal to the plane (hkl)
(hkl) Particular crystal plane
{hkl} Equivalent planes
[hkl] Particular crystal direction
Equivalent directions
(100),(010),(001),(1 00),(01 0),(001)" {100}
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Crystal Planes and Directions Cubic Crystal Structure
Pierret, Fig. 1.7
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August 18, 2014 ECE 3040: Chapter 2.1-2.2
Semiconductor Fundamentals
Wafer Flats
Silicon wafers used for device processing have flats (or a notch)indicating crystal direction and doping type
A {100} waferhas{100} surface
For {100} wafer,the surface directionperpendicularto primary flatis [011]
How is a waferfabricated?
[011]
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 Semiconductor
Fundamentals
2.3 Semiconductor Models
2.3.1 Electron States in Atoms2.3.2 Semiconductor Bond Model
Covalent Bonds2.3.3 Semiconductor Band Model
Energy Bands
Band Gap Electron and Holes
Band Structure & Effective Mass
Simplified Semiconductor Band Model
Literature: Pierret, Chapter 2.1-2.3, page 23-40
Pierret, Appendix A, page 733-748
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 Semiconductor
Fundamentals
Silicon Atomic Structure
Silicon with its 14 electronshas (in its ground state) filledn = 1 (2 electrons) and n = 2(8 electrons) levels; theseare deep-lying energy levels,tightly bound to the nucleus
In case of the n = 3, thepossible states (2 s- and 6 p-states) are filled with the 4remaining electrons; these 4rather weakly boundelectrons are called valence
electronsand participate inchemical reactions andatom-atom interaction
Pierret, Fig. 2.2
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 Semiconductor
Fundamentals
2.3.2 Semiconductor Bond Model
Bonding to next neighbors isachieved by sharing valenceelectrons (electrons inoutermost shell), formingcovalent bonds
In case of silicon: Atomic number
= number of electrons= 14
Number of valenceelectrons = 4
Covalent tetraederbonding (diamond lattice)
Sze, Fig. 2.11
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 Semiconductor
Fundamentals
Semiconductor Bond Model
Valence electrons areweakly bound (compared toelectrons in inner shells)
Thermal energy at roomtemperature can break
covalent bonds andfree
electrons which now
contribute to the materialsconduction
Remaining are missingbonds/electrons, which are
called holes (and alsocontribute to the conduction,but why?)
Sze, Fig. 2.12
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.3.3 Semiconductor Band Model
Single atom:according to Bohrsatom model, theelectrons occupywell defined,discrete energy
levels
Crystal: due to the interaction of neighboring atoms, thediscrete energy levels split up and a bandstructureisdeveloping featuring allowed and forbidden energy bands
Sze, Fig. 2.15
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Semiconductor crystal has valence
bandand conduction bandseparated by bandgap Eg
At T = 0 K:
Completely filled valence band
Completely empty conductionband
At elevated T, some electrons canbe excited from the valence to theconduction band
Note: Electrons in bands are notassociated with particular atom
From
Isolated
Atomsto a Crystal
Pierret, Fig. 2.5
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Semiconductor Band Model
Reason for energy level splitting is the Pauli principlestatingthat no 2 electrons can occupy the same state (with respect toenergy, momentum, spin), i.e. have the same quantum numbersn, l, m, and s
Simplified Model: valence and conduction band are separatedby a band gap; ECis the lowest energy of the conduction band,
EVthe highest energy of the valence band
EC
EV
Band GapEg
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carriers: Electrons and Holes
Completely filled band and empty band do not contribute to current
conduction
If an electron is excitedfrom the valence into the conduction band,the additional electronin the conduction band contributes to thecurrent conduction; similarly, the missing electron in the valence band(like a bubble in a liquid), a so-called hole, contributes to the currentconduction; the (thermal) excitation has created an electron/hole pair
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Band Gap & Material Classification
Pierret, Fig. 2.8
Insulator Semiconductor
Metal
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Indirect vs. Direct Bandgap Semiconductor
Simplified Si & GaAs Band Structure
Sze, Fig. 2.18
Indirect Bandgap Direct Bandgap
#p $0 #p = 0
Using quantummechanicsbysolving the 3-DSchrdingerequationin theperiodic potential
of the nuclii Numerical
calculations deliverthe band diagrams,i.e. the E(k), E(p)relationships with
wavenumber kandcrystal momentump
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Characteristics of Si and GaAs
Silicon Si
Element semiconductor Diamond lattice structure Indirect Semiconductor Generation of electron-hole
pairs requires !E and !p Bandgap: Eg= 1.12 eV at
room temperature Lattice constant: a = 5.43
Gallium Arsenide GaAs
III-V semiconductor Zincblende lattice structure Direct Semiconductor Generation of electron-hole
pairs requires !E only,making GaAs suitable forphotonic applications
Bandgap: Eg= 1.42 eV atroom temperature
Lattice constant: a = 5.65
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Simplified Semiconductor
Bandstructure
EC
EV
Band GapEg
mn*
mp*
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Effective Mass meff (mn*, mp*)
Definition 1-D:
Definition 3-D:
Electron kinetics in single-crystal material is similar tofree electron behavior but with effective mass meff
meff
"1=
1
!2
#2E(k)
#
k
2
1
meff
"
#$
%
&'
ij
=
1
!2
(2E(k)
(k i(kj
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Effective Mass in Si, Ge & GaAs
Material mn*/m0 mp
*/m0
Si 1.18 0.81
Ge 0.55 0.36
GaAs 0.066 0.52
Free electron mass: m0= 9.1 10-31kg
Shown are average electron and hole effective masses asneeded for the density of statesat 300 K (see Chapter 2.5),but keep in mind that mn* and mp* are tensors!
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Effective Mass Concept
The movement of carriers (electrons and holes)inside the semiconductor crystal can be described byclassical (Newtonian) mechanics relations just byreplacing the free-electron-mass m0with the effectivemass m
n* (or m
p* for holes)
The effective masses are however tensors, i.e. thecarrier acceleration generally varies with direction oftravel in the crystal
F =mn* dvn
dtand F =mp
* dvp
dt
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.4 Semiconductor Doping
Example: Silicon Doping: Doping with donoratoms,
phosphorous Por arsenicAs,having both 5 valenceelectrons, yielding N-typesilicon
Doping with acceptoratoms, boron B,having 3valence electrons, yieldingP-type silicon
With doping, the electricalconductivity of thesemiconductor material isadjusted over a wide range
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Semiconductor Doping
Doping in Bond Model: N-Type Doping:fifths valence electron does notparticipate in covalent bonds tonext neighbors; only small energyis required to freethis electron,thus contributing to the materialsconductivity
P-Type Doping:due to doping atom with threevalence electrons, one electron ismissing for the covalent bonds tothe four next neighbors; thismissing electron(called a hole)can hop from covalent bond tobond, thus also contributing to thematerials conductivity
Sze, Fig. 2.23
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Semiconductor Doping
Doping in Band Model: Doping atoms distort the periodicity of
the single-crystal crystal structure, thuscreating allowed (localized) energystates in the band gap
N-Type Doping: additional electron
states EDclose to the bottom of theconduction band EC; at roomtemperature, the electrons from thesestates are excited into the conductionband, increasing the conductivity
P-Type Doping: additional electronstates EAclose to the top of the valence
band EV; at room temperature, thesestates are occupied by electrons fromthe valence band, increasing thenumber of holes in the valence bandand, thus, the conductivity
EC
EiEV
ED
EC
EiEV
EA
P in Si: EC- ED= 0.045 eV
B in Si: EA- EV= 0.045 eV
EC- ED resp. EA- EV"kT = 0.026 eVat room temperature
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Concentration
Intrinsic Semiconductor(no doping: NA, ND= 0)
Carrier Concentration: n = p = n i
Extrinsic Semiconductor(doping concentration NA, ND#0)
Assumption: Complete Ionization (see Chapter 2.5) Majority Carrier Concentrations:
N-Type Semiconductor:Density of donor atoms: ND[cm
-3]Density of electrons (ND ni) : n"ND[cm
-3]
P-Type Semiconductor:Density of acceptor atoms: NA[cm-3]Density of holes (NA ni) : p"NA[cm
-3]
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5 Carrier Statistic
2.5.1 Density of States2.5.2 Fermi Function & Fermi Energy
Physical Interpretation Characteristics
2.5.3 Carrier Densities Intrinsic/Extrinsic Semiconductor Intrinsic Fermi Energy Mass Action Law Temperature Dependence
2.5.4 Charge Neutrality Relationship2.5.5 Non-Complete Ionization
Pierret, Chapter 2.4-2.6, page 40-68
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5.1 Density of States
From quantum mechanics, we not only obtain the bandstructure, i.e., the E(k) relations, but also the density ofstates g(E)dE, i.e., how many allowed states are in therange E$E+dE:
gC(E)dE =mn
* 2mn* E "EC( )
#2!3
dE $ E "EC( )1/2
gV(E)dE =mp
*
2mp*
EV "E( )#2!3
dE $EV "E( )1/2
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Density of States
Band Gap
EC
EV
EgC(E)
gV(E)
g(E)
Units of g(E)dE are [cm-3]
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5.2 Fermi Function & Fermi Energy
What determines whether anallowed state is occupied byan electron or not?
Fermi Function f(E):
f(E) is a probability functionwhich gives the probabilitywhether a state is occupiedor not
EFis the Fermi Energy
f(E) =1
1+ e(E"EF)/kT
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Characteristics of Fermi Function
Because of Pauli principle:0 %f(E) %1
f(E = EF) = 0.5The probability that a state is
occupied at the Fermienergy is 50%
f(E) is symmetric around EF:f(EF + E) = 1 f(EF E)
For T = 0 the Fermi functionbecomes a step function, i.e.all states below EFareoccupied, all states above EFempty
0
0.5
1
0 1 2
Energy E [eV]
FermiFunctionf(E)
EF= 1 eVkT = 0.0259 eV
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Physical Interpretation of
Fermi Energy EF
The Fermi energy EFhas the function of athermodynamic potential
In thermodynamic equilibrium, EFis constantacross the device!!!
A gradient in EFindicates non-equilibrium, resulting ina net flow of carriers
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Boltzmann/Classical
Approximation
Away from E = EF, i.e. for |E EF| > 3kT, the Fermi function canbe approximated by exponential functions:
This approximation is called the Boltzmannor Classicalapproximation
E "EF( ) >3kT # f(E) $e"(E"EF)/kT
EF "E( ) >3kT # f(E) $ 1" e"(E"EF)/kT
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5.3 Carrier Density n and p
The carrier densities of electrons n [cm-3] and holes p [cm-3] canbe calculated from the density of states g(E) and the Fermifunction f(E):
The solution of the integral generally requires numericalmethods; in case of the Boltzmann approximation however, theintegrals can be solved analytically!
n = gC(E) f(E) dE
EC
Top
"
p = gV(E) 1# f(E)( )!"# $#
dE
Bottom
EV
"a hole is a non-occupied electron state
%
-%
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Concentration
Intrinsic
ExtrinsicN-Type
ExtrinsicP-Type
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Density Boltzmann
Approximation
For electrons: (EC EF) &3kT
For holes: (EF EV) &3kT
n = NCe
(EF!E
C)/kT
NC =2m
n
*kT
2"!2
#
$%%
&
'((
3/2
)2.86 1019 cm!3
Si @ 300K
" #$$ %$$
p = NVe
(EV!E
F)/kT
NV =2
mp
*kT
2"!2
#
$%%
&
'((
3/ 2
)2.66 1019 cm!3
Si @ 300K
" #$$ %$$
EC
Ei
EV
EC3kT&EF&EV+3kT
NC,V
=2.51!1019 m
n,p
*
m0
"
#$$
%
&''
3/2
cm(3
NC)3.2!1019 cm(3
NV) 1.8 !1019 cm(3
for Si@ 300K
From Pierret:
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Density General Solution
For electrons:
For holes:
F1/2("c) is the tabulatedFermi-Dirac integralof order 1/2:
n =NC2
"
F1/2 #C( ) with #C = EF $EC( ) /kT
p =NV
2
"F1/2 #V( ) with #V = EV $EF( ) /kT
ECEi
EV
Range
for EF
F1/2 "c( ) ="1/2
1+ e"#"c
0
$
% d"
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Intrinsic Semiconductor
No doping Carrier concentration n = p = ni (for every electron in theconduction band, we have a hole, i.e. missing electron,in the valence band)
Fermi energy EF= Eiclose to center of band gap
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Intrinsic Semiconductor Carrier Concentration ni(T)
Pierret, Fig. 2.20
Ge: ni,(300K) = 2.5 1013cm-3GaAs: ni,(300K) = 2.25 10
6cm-3
Si: ni,(300K) = 1.0 1010cm-3
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Location of Ei
From the intrinsic carrier concentrations
With n = p, the intrinsic Fermi level E ican be extracted
The intrinsic Fermi level is only in the center of the bandgap if mn* = mp* !!
p = ni =NV e(EV "Ei)/kT
n = ni =NC e(Ei"EC)/kT
NV e(EV "Ei)/kT
=NC e(Ei"EC)/kT
" Ei =EC +EV
2+
3
4kT ln
mp*
mn*
#
$
%%
&
'
((
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Extrinsic Semiconductor
From Boltzmann approximation
Analogous for the holes
n =NCe(EF "EC)/kT
=NCe(Ei"EC)/kT
=
ni
! "## $##
e(EF "Ei)/kT
n =nie(EF "Ei)/kT
p = ni e(Ei"EF)/kT
n p = ni2
Mass-Action-Law
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Fermi Energy EF Ei[eV] as a
Function of Doping and Temp.
Sze, Fig. 2.28
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5.4 Charge Neutrality Relation
In equilibrium, charge neutralityis fulfilled:
Assuming complete ionization NA= NAand ND
+= ND:
p
holes
!
" n
electrons
!+ ND
+
ionized
donors
!
" NA"
ionized
acceptors
!
=0
p"n+
ND"NA
=
0n p = ni
2
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Electron and Hole Concentration
From mass-action-law and charge neutrality:
Special Cases:
n =ND"NA
2+
ND"NA2
#
$%
&
'(
2
+ ni2
p =NA"ND
2 +NA"ND
2
#
$%
&
'(
2
+ ni2
ND >>NA and ND >>ni: n =ND
p=
ni2
/NDNA >>ND and NA >>ni: p =NA
n =ni2 /NA
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Measurement of Carrier Concentration Hall Effect
The carrier concentration n or pcan be measured using the Halleffect
Assume: p-type semiconductorplate with L > W t (thin plate)with current I applied in x-directionand a magnetic induction B
z
applied along z-direction
Holes experience a Lorentz forcein y-direction:
Hole accumulation creates electric field in y-direction (electrostatic force =
Lorentz force, because no current flow in y-direction), resulting in a Hallvoltage VH:
x
y
zBz
+
+VH
VI
L
t
W x
y
P-Type Semiconductor
F = q (!
v "!
B) = (0,#qvxBz,0)
VH = "yW = vxBzW =Jxqp
BzW =1
qp
#RH
!
IBzt
Hall Coefficient
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.5.5 Temperature Dependence of
Carrier Density
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Temperature
Dependence
of Carrier
Density
Pierret, Fig. 2.22
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Carrier Statistics Formula Summary
Charge Neutrality & Mass-Action Law:
Intrinsic Semiconductor
Extrinsic Semiconductor
Linking Doping and Carrier Concentration
Linking Band Structure and Carrier Concentration
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.6 Carrier Transport
2.6.1 Carrier Drift Drift Current Mobility Resistivity
Band Structure under Applied Field2.6.2 Carrier Diffusion
Diffusion Current2.6.3 Total Current Equations
2.6.4 Einstein Relations
Pierret, Chapter 3.1-3.2, page 75-104
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.6.1 Carrier Drift
Drift = Charged particle motion in response to an
applied electric field
Macroscopic Definition: Carriers of a given type(electrons or holes) move along at a constantvelocity, the drift velocity, parallel or antiparallel to theapplied electric field
Drift Current Densities[A/cm2]:!
Jp,drift=
q p
!
vd,p!
Jn,drift = "q n !
vd,n
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Drift
For small electric fields, the drift velocity isproportional to the applied electric field with themobility 'as proportionality factor:
The mobility is the central parameter characterizingthe carrier drift, resulting in the following currentdensities:
vd,p = p "
vd,n = #n "
!
Jp,drift = q p p!
"!
Jn,drift = q n n!
"!
Jdrift =!
Jn +!
Jp = q nn+ pp[ ] !
"
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Drift Velocity in Undoped Si at
Room Temperature
Pierret, Fig. 3.4
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Mobility
Definition of the carrier mobility [cm2/Vs]:
Room-temperature mobility of Si and GaAs:
p "vd,p
#n " $
vd,n
#
Silicon (low-doped)'n"1360 cm
2/Vs
'p"460 cm2/Vs
Gallium Arsenide (low-doped)'n"8500 cm2/Vs'p"400 cm
2/Vs
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Scattering
Mechanisms I (a) Impurityand (b) lattice
scatteringlimit the carriermobility
The mobility decreases withincreasing totaldopingconcentration (NA+ ND)
= q "
m*
mean free time
between collisions
effective mass
Pierret, Fig. 3.5
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Room Temperature Mobility in Si as a
Function of Doping Concentration
Pierret, Fig. 3.5a
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Scattering
Mechanisms IIT-dependence of the mobility:
Lattice Scattering:in Si: &~ T(2.2'2.3)(experiment)Reducing the temperature meansless thermal lattice vibration, i.e.less interaction with carriers, i.e.
higher mobility
Impurity Scattering:
in Si: &~ T+1.5(theory)Dominant scattering mechanism atlow temperatures; interaction isreduced at higher temperatures,
i.e. higher thermal velocities,because carrier is less time inclose proximity to impurity
&= &(T, NA+ND)
Pierret, Fig. 3.7
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Resistivity
Definition of conductivity $and resistivity ![%cm]tensor:
From the drift current, theresistivity is given by:
!
J=
"
!
#=
1
$
!
#
" =1
q nn + pp( )Pierret, Fig. 3.8
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Four-Point Probe
The resistivity of asemiconductor can bedetermined by a current-voltage measurement usinga four-point probe
W is the substrate thickness,CF a correction factor (seegraph)
" =V
IW CF
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Band Bending by Electric Field
The presence of an electricfield results in a bandbending, i.e. ECand EVareno longer constant
Electrostatic Potential V:
Note: V and E are arbitraryto within a constant!
Electrostatic Field #:
V = " 1q
EC "Eref( )
"= #$V
" =1
q
dECdx
=
1
q
dEVdx
=
1
q
dEidx
x
V
electronmovement
x
acceleration
EC
Ei
EV
Ecollisionloss of energy
holemovement
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Band Bending and Electric Field
Pierret, Fig. 3.10
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Diffusion Current
In case of diffusion of charged particles, i.e. electronand holes in our case, a diffusion current is resulting(equaling the product of flux density and carriercharge)
with diffusion coefficients Dnand Dp[cm2/s]
Why has the electron diffusion current no
sign?
Jp,diff = "qDp #pJn,diff = qDn #n
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.6.3 Total Current Equations
Summing up drift and diffusion current densities, weobtain the total current density equations:
!
Jp = q p p
!
"#qDp
!
$p!
Jn = q n n!
"+ qDn!
$n
!
J =!
Jn +!
Jp
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.6.4 Einstein Relations
Einstein Relationsrelate drift(') and diffusion (D)
Simplified Derivation:
Assume non-uniformly dopedn-type semiconductor in
equilibrium (i.e. EF= const.across the material)
In equilibrium, the total electronand hole current densities arezero:!
Jp = q p p
!
"#qDp!
$p = 0!
Jn = q n n!
"+ qDn!
$n = 0
Pierret, Fig. 3.14
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Einstein Relations
Fromwe obtain
knowing that
Inserting into the current density equation for theelectrons yields theEinstein Relationsrelating drift('n) and diffusion (Dn)
(similar derivationfor Dpand 'p)
Dn =kT
qn and Dp =
kT
qp
n =nie(EF"Ei)/kT
dn
dx= "
nikT
e(EF"Ei)/kTdEidx
= "q#
kTnie
(EF "Ei)/kT
=n
! "## $##
# =1
q
dEi
dx
and dEF
dx
=0
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Drift & Diffusion in Si (T = 300 K)
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.7 Carrier Generation & Recombination
Perturbation of semiconductor, i.e. an excess or deficit incarrier concentrationwith respect to the equilibrium values iscreated, resulting in non-equilibrium conditions
If the perturbation is removed, recombination/generation (R-G)processes will restore equilibrium conditions; if perturbation ismaintained, R-G processes will stabilize the (non-equilibrium)carrier concentrations
2.7.1 Generation and Recombination Processes
2.7.2 R-G Statistics
2.7.3 Continuity Equations
Literature: Pierret, Chapter 3.3-3.5.1, page 105-132
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.7.1 Generation/
Recombination
Processes Band-to-band R-G
processes onlyinvolveelectron in conduction bandand hole in valence band
R-G center generation/recombinationrequires
R-G center (lattice defect orimpurity which generatesstates in the bandgap)
Auger recombinationrequires 3 carriers (either 2holes and 1 electron or 2electrons and 1 hole)
All processes occur at alltimes (even in equilibrium),with the process having thehighest rate dominating
Reco
mbination G
enerat
ion
Pierret, Fig. 3.15
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Perturbation:
Carrier Injection/Generation
Processes:
Photogeneration
Operation of diode in forward direction
Impact ionization
p n > ni2
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Perturbation:
Carrier Extraction/Recombination
Process:
Operation of diode in reverse direction
p n < ni
2
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Carrier Generation/Recombination
After switching off the distortion, the system returns tothe equilibrium state (p n = ni
2) with a characteristictime constant, i.e. excess carriers will recombine (in casep n > ni
2) or additional carriers will be generated (in case
p n < ni2
)Notation: nn electron density in n-type semiconductor
pn hole density in n-type semiconductornn0, pn0 equilibrium carrier densities
np electron density in p-type semiconductor
pp hole density in p-type semiconductornp0, pp0 equilibrium carrier densities
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Low-Level/High-Level Injection
Low-Level Injection: High-Level Injection:
"n = "p nn0
pn = pn0 + "p $ "p > nn0
Example: Injection by photogeneration (&n = &p) in n-typematerial
"n = "p = 1012cm#3
nn $ 1015cm#3
pn $ 1012cm#3
"n = "p = 1017cm#3
nn $ 1017cm#3
pn $ 1017cm#3
Example: n-type Si, ND= nn0= 1015cm-3, p = ni
2/n = 105cm-3
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Low-Level/High-Level Injection
Example:N-type semiconductorND= 10
15cm-3 Equilibrium:
nn0= ND= 1015cm-3
pn0= ni2/n = 105cm-3
Low-Level Injection:&n = &p = 1012cm-3nn"nn0= 10
15cm-3pn"&p = 10
12cm-3< nn0 High-Level Injection:
&n = &p = 1017cm-3
nn" 1017cm-3> nn0pn"&p = 1017cm-3 > nn0
Equilibrium LL Injection HL Injection
89
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.7.2 R-G StatisticsBand-to-Band Recombination
Likely in direct(band gap)semiconductors, such as GaAs
Unlikely in indirect(band gap)semiconductors, such as Si,because of required momentumconservation
In thermal equilibrium, thethermal generation rate Gthequals the recombination rate Rth:
The thermal recombination rate isproportional to the electron andhole carrier densities with'being the proportionality factor
Equilibrium:
Non-Equilibrium:
Gth =Rth =" nn0 pn0
Sze, Fig. 3.10
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Band-to-Band Recombination
In non-equilibrium, the change in minority carrier concentrationis:
Assuming steady state, dpn/dt = 0, we obtain
with the net-recombination rate U
The recombination rate and the thermal generation rate areproportional to the available carrier densities (see equilibrium):
Assuming low-level injection, i.e. &p and pn0
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Band-to-Band Recombination
The minority carrier lifetime (pcontrols the recombination velocityafter the distortion is switched off
The minority carrier lifetime in case of the direct recombination isinversely proportional to the majority carrier equilibrium density nn0
Excess carriers recombine after switching off GL(GL= 0 in DE) with thetime constant (p:
How can we measure the minority carrier lifetime?
U =" nn0 #p =pn$ pn0
1
" nn0
=
pn$ pn0%p
"p #
1
$ nn0
pn(t) = pn0 + "p GL e
#t / "p
dpn(t)
dt=
GL!U=
GL!pn!p
n0
"p
=
GL!
#pn
"p
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
R-G Center Recombination
Dominant recombinationprocess in indirectsemiconductors, such as Si
Indirect recombination &generation of electron-hole
pairs via localized energystates in the band gap, socalled recombinationcentersor R-G centers
The R-G centers arecharacterized by their
energy Etand their densityNt
Sze, Fig. 3.12
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
Location of Impurity
Atom Energy States
Sze, Fig. 2.24
95
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
R-G Center Recombination
In a more involved derivation, an expression similar to that of the band-
to-band R/G case can be obtained for R-G center recombination/generation (again assuming minority carriers and low-level injection) inresponse to a perturbation:
The minority carrier lifetimes are now inversely proportional the R-Gcenter concentration NT:
In case of arbitrary injection levels and for both carrier types in a non-degenerate semiconductor, we find:
dpn(t)
dt=G
L!U =G
L!
"pn
#p
anddn
p(t)
dt=G
L!
"np
#n
!n"
1
NT
and !p"
1
NT
U =p
nn
n!ni2
( )"
pp
n+n
ie
(Ei!E
t)/kT#
$%&+"n nn +nie
(Et!E
i)/kT#
$%&
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2 7 3 C ti it E ti
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August 18, 2014 ECE 3040: Chapter 2.1-2.2 SemiconductorFundamentals
2.7.3 Continuity Equationsputting it all together
!n
!t=
!n
!tdrift
+
!n
!tdiffusion
=
1
q"
!
Jn
" #$$ %$$
+
!n
!tthermalR#G
=#$n
%n
" #$ %$
+
!n
!tother processes
e.g.GL
" #$$ %$$
!p
!t=
!p
!tdrift
+
!p
!tdiffusion
=#1q"
!
Jp
" #$$ %$$
+
!p
!tthermalR#G
=#$p%
p
" #$ %$
+
!p
!tother processes
e.g.GL
" #$$ %$$
Net change of carrier concentration due to currents and R/G:
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A t 18 2014 ECE 3040 Ch t 2 1 2 2 S i d t
1-D Continuity Equations
!np(x,t)
!t= +n
p
n
!"!x
+n"!np
!x+D
n
!2np
!x2 +G
L#np #np0
$n
!pn(x,t)
!t= #p
n
p
!"
!x#
p"!p
n
!xDrift
! "### $###
+Dp
!2p
n
!x2
Diffusion
! "# $#
+GL
Perturb.
%
#pn#p
n0
$p
thermalR#G
! "# $#
For minority carriers in 1-D case: Jp = q p p " # qDp $p
Jn = q n n "+ qDn $n
99