California nanoSyStemS inStitute

State-of-the-art shared user facilities enabling cutting-edge research in nanoscience and nanotechnology

C a l i f o r n i a n a n o S y S t e m S i n S t i t u t e

university of California, los angeles

Core laboratories

CNSI 2012 core lab bro FINAL to Colornet 052112 1130pm.indd 1 5/23/12 3:16 PM

user registration and equipment reservations are available online at http://clms.cnsi.ucla.edu

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California nanoSystems institute university of California, los angeles

Core laboratories

the future impact of nanotechnology toward solving modern, real-world challenges will be determined not only through the acquisition of scientific knowledge, but also by the application of creative thought and imagination. in order to initiate such groundbreaking research, scientists require access both to state-of-the-art physical resources as well as a dynamic, interactive environ-ment that fosters meaningful interdisciplinary collaboration. CnSi addresses these crucial needs as a top priority.

Strategically located within the Court of Sciences, amid the disciplines that comprise the CnSi membership – life and Physical Sciences, engineering, medicine, neuroscience, and Public Health – the CnSi facility provides critical space for new research initiatives and sophisticated laboratories. realization of this physical facility has played a crucial role in CnSi’s mission to foster novel research across disciplines, facilitate university collaborations with industry, to assist faculty and entrepreneurs in navigating the challenging landscape of technology transfer, and to aid in the rapid commercialization of discoveries in nanosystems.

CnSi Core laboratories provide access, expertise, and training on state-of-the-art tools and methods to diverse users, including students, postdocs, staff, faculty, and industrial scientists from companies large and small. after mak-ing services available to the general public in 2008, the CnSi Core laboratories collectively have trained over 2000 users from academia and industry. open workshops showcase new instrumentation to our community of members and users as well as to all other interested parties.

these facilities support CnSi’s mission to survey the broader field through its user base, in order to identify new opportunities to develop novel enabling instru-mentation and methods and to improve the available infrastructure through direct grant support, user proposal support, and industrial partnerships.

the CnSi Core laboratories also provide outreach activities to non-expert aca-demic and industrial communities and the general public including tutorials, events, and hands-on workshops coordinated with both California State univer-sities and southern California school districts.

nanoscience and related technologies are rapidly changing disciplines by enabling

new views of the atomic and molecular worlds. the last decade has provided many

examples of the ability of new tools and methods to transform perspectives and

capabilities in the fields of science, engineering, and medicine.


California nanosystems institute > core labs page 3

4 fluorescence imaging Advanced Light Microscopy / Spectroscopy LabMacro-Scale Imaging Lab

6 electron microscopyElectron Imaging Center for Nanomachines

8 Scanning Probe microscopyNano & Pico Characterization Lab

10 High throughput Screening | Drug Discovery | functional GenomicsMolecular Shared Screening Resource

12 molecular Beam epitaxyIntegrated NanoMaterials Lab

14 Cleanroom fabrication and foundry Integrated Systems Nanofabrication Cleanroom

table of contents

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the advanced light microscopy/Spectroscopy (almS) and macro-Scale imaging

(mSi) laboratories provide a unique collection of high-end, customized fluorescence

microscopes, small-animal imaging devices, and fluorescent probes to per-

form fluorescence-based measurements at various spatial (nm to cm), temporal

(ns to days) and spectral (uV-nir) ranges. our laboratory provides consultative

services and offers support for the application of novel spectroscopic methods

and advanced microscopy techniques to achieve high spatial and temporal res-

olution from whole in vivo animal imaging down to sub-70 nm imaging using

super-resolution nanoscopy techniques. along with access to specialized state-

of-the-art instrumentation, we train investigators in advanced imaging techniques

which are used to study macromolecules, cellular dynamics and to characterize

biomaterials with nanometer-accuracy. our laboratories offer open access to all aca-

demic investigators from local, national and overseas universities as well as to small

start-up and mid-size companies.

Fluorescence imaging at all length scales: from single-molecule detection to in vivo small animal imaging

the field of optical microscopy imaging is experiencing major technical advances which are allowing cell biol-ogists and physicians to visualize a new, dynamic, sub-cellular world where genes and gene products interact in space and time, in health and disease with nanometer-accuracy.

at-a-Glance

• fluorescence imaging at all length scales

• Consultation, service and training

• Dissemination and teaching

• Collaborative research and development

• academic and industrial partnerships

• first super-resolution SteD microscopy in the uS (sub-70 nm resolution)

• macromolecules, cellular dynamics and nano-scale characterization of bio-materials

• 10 controlled-environment optical rooms

• more than 1100 registered users: 322 faculty Pis from 154 Departments

• more than 310 peer-reviewed research publications

at-a-Glance

• fluorescence imaging at all length scales

• Consultation, service and training

• Dissemination and teaching

• Collaborative research and development

• academic and industrial partnerships

• first super-resolution SteD microscopy in the uS (sub-70 nm resolution)

• macromolecules, cellular dynamics and nano-scale characterization of bio-materials

• 10 controlled-environment optical rooms

• more than 1100 registered users: 322 faculty Pis from 154 Departments

• more than 310 peer-reviewed research publications

High-impact journals include: Science, Nature, Nature Materials, Nature Nanotechnology, Nature Methods, PNAS, PLoS, ACS Nano, JACS, Nano Letters, Small, the Journal of Immunology.

fluorescence imaging advanced light microscopy/Spectroscopy laboratory and macro-Scale imaging laboratory



Leica TCS SP confocals are high-resolution spec-tral confocal microscopes offering filter-free spectral detection technology on Pmts or aPDs. they are optimized for applications such as 3D live cell and time-lapse imaging, fraP, fret, flim, or fCS ana-lytical techniques as well as high-content screening.

Leica TCS STED confocal integrates the super-resolution concept of SteD with high-speed scanning (up to 16 KHz) to fully cover a broad range of requirements in confocal and multi-photon imag-ing. this confocal nanoscope delivers sub-70 nm lateral spatial resolution in a purely optical way. this system enables the exploration of cellular architec-ture and artificial molecular systems beyond the diffraction limit.

Spinning disk confocal microscope provides an ideal platform for high speed, high signal-to-noise ratio imaging while minimizing photobleaching and photo-toxicity. this system is ideal for observing development and differentiation processes, intra-cellular transport, cell division and dynamics in tissue culture and in small organisms.

Leica LMD7000 laser capture micro-dissection system makes it possible to retrieve rare cells (down to single cells) from non-relevant cells or tissues. it enables the researcher to obtain homo-geneous, ultra-pure samples from heterogeneous starting material such as live cell populations and histopathology tissue sections. the specimen is collected by gravity and is contact-free and contam-ination-free enabling any downstream proteomic or genomic analysis.

CRi Maestro™ 2 imaging system enables in vivo fluorescence imaging of small animals in the ViS-ir range. maestro’s spectral imaging technol-ogy removes auto-fluorescence emitted from skin and other tissues to reveal otherwise hard-to-detect labeled targets of interest. Signal-to-noise improvement increases sensitivity up to several hundred-fold, enabling much smaller or fainter sig-nals from biological targets to be detected.

ART Optix® MX2 optical molecular imaging sys-tem uses fluorescence lifetime for non-invasively measuring and visualizing endogenous fluorescent cellular and molecular processes in vivo. the optix system provides accurate recovery of depth and rel-ative fluorophore concentration and enables true 3D representations of fluorophore distribution for whole-body imaging in such research disciplines as oncology and neuroscience.

Instrumentations and optical techniques available

The Macro-Scale Optical Imaging core laboratory (MSOI): For macro-scale small animal imaging

located on the second floor of the CnSi building, a second opti-cal suite of 1,800 square feet houses light microscopes and other optical instruments to image small live animals (rodents, zebrafish, drosophila, and C. elegans). We have assembled a comprehensive collection of commercial and custom built systems for deep tissue, multi-spectral imaging in small animals. this instrumentation is based on visible and nir fluorescence, lifetime and spectral imag-ing modalities, laser capture micro-dissection, and spinning disk fast confocal microscopy. an adjacent dedicated vivarium is avail-able for rodents undergoing longitudinal imaging studies.

The Advanced Light Microscopy/Spectroscopy core laboratory (ALMS): For macro- and nano-scale imaging

located on the lowest floor of the CnSi building, almS is an opti-cal suite of 1,800 square feet specifically designed to house light microscopes with the required environment control (low vibration, air-filtered, air-conditioned to ±1°C and light-tight) and services. the facility currently provides: wide-field fluorescence imaging microscopy, stereo microscopy, iterative deconvolution and com-putationally derived optical sectioning, confocal one-photon and two-photon laser scanning confocal microscopy imaging, fluores-cence Correlation Spectroscopy (fCS), fluorescence resonance energy transfer (fret), fluorescence lifetime imaging (flim), time-correlated-single-photon-counting (tCSPC), near-infrared (nir) and aPD imaging, and a super-resolution Stimulated emis-sion Depletion (SteD) confocal microscope for probing biological and artificial molecular systems at the nanoscale offering ~70 nm spatial resolution.

SHIMON WEISS, DSc

the Dean Willard Chair in Chemistry & Biochemistry

Professor, Chemistry & Biochemistry, and Physiology

Director

L AURENT BENTOLIL A, PhD

Scientific Director

310-983-1076

[email protected]

MAT THEW SCHIBLER, PhD

Staff Microscopy Scientist

310-983-1077

[email protected]

http://alms.cnsi.ucla.edu training requests: [email protected]

STED Confocal



Services

• assisted usage• Self usage

Highly experienced staff provides the necessary training and can help users address complex electron imaging needs.

transmission electron microscopy uses a variety of techniques to image and characterize samples. for example:

• High resolution imaging can resolve individual atoms• Cryoem can reveal structures and molecular

interactions of biological complexes• Stem imaging can differentiate atom types• X-ray spectroscopy (eDX) can quantify elemental

composition • tomography can resolve the 3D structure of

materials and biological tissues

How electron microscopy can facilitate your research project

eiCn can assist you in achieving success in your research by providing state-of-the-art transmission electron microscopy instruments and assisted usage services. eiCn offers advanced electron imaging techniques for visualizing materials, nanomachines, and cellular structures at atomic or nanometer scales in 2D and 3D.

Seeing molecules, materials, and molecular machines at atomic resolution

and in three dimensions is critical to nanoscience. in order to facilitate this,

the electron imaging Center for nanomachines (eiCn) was established at the

California nanoSystems institute (CnSi) through a major instrumentation

grant from niH and support from uCla.

eiCn provides advanced electron imaging tools for a broad range of research, covering a scale range from micrometers to angstroms, and delivering valuable structural information for cell biology, microbiology, biomolecular, molecular, and materials sciences. the state-of-the-art eiCn facility offers all major electron microscopy (em) modalities, including:

• Cryo electron microscopy (cryoem) • Cryo electron tomography (cryoet) • Cryo-immuno em • Single-particle 3D reconstruction • 3D tomographic reconstruction • ultrathin sectioning (room temperature and cryo) • High-resolution transmission electron microscopy (Hr tem) • High-resolution scanning transmission electron microscopy (Stem) • energy dispersive X-ray spectroscopy (eDX) analysis for mass and elementary mapping

at-a-Glance

• leader in the field of cryoem

• Provides state-of-the-art electron imaging tools

• Develops cutting-edge technology of cryoem reconstruction

• Study virus structures and infection processes; important sub-cellular complexes; engineered nanostructures and devices

at-a-Glance

• leader in the field of cryoem

• Provides state-of-the-art electron imaging tools

• Develops cutting-edge technology of cryoem reconstruction

• Study virus structures and infection processes; important sub-cellular complexes; engineered nanostructures and devices

electron microscopyelectron imaging Center for nanomachines



Instruments available at the EICN

Z. HONg ZHOU, PhD

Professor, microbiology, immunology & molecular Genetics

Director

XINg ZHANg, PhD

Technical Director

310-983-1257

[email protected]

IvO ATANA SOv

Associate Director

310-983-1068

[email protected]

http://www.eicn.cnsi.ucla.edu

CM 120

JEOL

the Titan Krios is a cryoem instrument based on the fei titan™. this instrument is dedicated to high-resolution cryo electron microscopy.

• 80-300 kV, field emission gun (feG)

• Point resolution: 0.27 nm; line resolution: 0.14 nm

• Parallel Beam

• Computer-controlled compustage

• +/- 70° double-tilt specimen stage

• automated specimen handling system (the fei autoloader)

• automated liquid nitrogen cooling system

• ultrascan, 4Kx4K CCD camera

• Gatan image filter (Gif) 2002 with 2K x 2K camera

• leginon and fei Xplorer3D data acquisition systems

the Titan 80-300 kv S/TEM, from the fei titan™ family, is the world’s most powerful, commercially-available scan-ning transmission electron microscope.

• 80-300 kV, field emission gun (feG)

• Point resolution: 0.14nm; line res-olution: 0.1nm; Stem resolution: 0.14nm

• Parallel Beam


• +/- 70° single or dual tilt

• Scanning tem mode (Stem)

• energy Disperse X-ray (eDX) anal-ysis

• ultrascan, 2K x 2K digital camera

• Cs corrector compatible (coming soon)

TF 20 CryoEM and CryoET

• 20-120 kV, field emission gun

• Point resolution: 0.27 nm; line resolution: 0.16nm


• +/- 80° tilt

• Gatan 626 cryo specimen holder

• tietZ f415mP 16 megapixel CCD camera (4K x 4K, pixel sixe- 15 um)

• image processing acquisition installed; emmenu4

• emtool tomography Package

• leginon data acquisition system

T12 Quick CryoEM and CryoET

• 20-120 kV, laB6 filament

• Point resolution: 0.34nm; line resolution: 0.2nm


• +/- 80° tilt single tilt

• Gatan 626 cryo specimen holder, Gatan tilt-rotate holder for conical tomography

• Gatan 2k x 2k CCD



SPm systems operate in a diverse range of environ-ments, including temperatures and pressures ranging from extreme ultra-high vacuum (uHV) to atmospheric and liquid environments. this diversity of opera-tional conditions enables the direct investigation of structural, chemical, mechanical, electrical, and mag-netic properties of nanoscale materials and devices. Beyond imaging, spectroscopic methods enable the measurement of fundamental forces acting at the nanoscale including bond formation, electromag-netism, single molecular events such as binding, unwinding, and folding as well as nanomechanics at the molecular, cellular, and organismal scale.

the nano and Pico Characterization lab offers the technical infrastructure and expertise to meet the ever-increasing demand for insight into the proper-ties of matter at the nanoscale and beyond through consultation, proof-of-concept testing, user train-ing and direct research collaboration. in addition to providing the latest commercial instrumentation, an ongoing focus on in-house method and instrument development strives to afford researchers access to cutting edge techniques that define the forefront of nanoscience research and development.

State of the art techniques for probing, manipulating and visualizing nanomaterials through Scanning Probe Microscopy

the nano and PiCo CHaraCteriZation laB (nPC) provides an unprecedented

collection of surface analysis instrumentation in a single, multi-user facility. Spe-

cializing in local probe techniques, namely scanning probe microscopy (SPm), the

nano and Pico Characterization lab offers state-of-the-art microscopic techniques

to visualize surfaces, adsorbates, nanostructures, and devices at the atomic and

molecular scale under a wide range of experimental conditions.

at-a-Glance

• over 50 years combined experience in SPm applications

• Provides state-of-the-art SPm imaging tools

• nanoscale imaging and spectroscopy in nearly any environment

• in-house instrument and method development

• Consultation, training and collaboration

• Quantitative tools for nanomechanical analysis

• Biomaterial and live cell characterization

at-a-Glance

• over 50 years combined experience in SPm applications

• Provides state-of-the-art SPm imaging tools

• nanoscale imaging and spectroscopy in nearly any environment

• in-house instrument and method development

• Consultation, training and collaboration

• Quantitative tools for nanomechanical analysis

• Biomaterial and live cell characterization

from atoms molecules assemblies cells organisms

Scanning Probe microscopynano Pico Characterization laboratory



Instruments available

Bruker Dimension Icon and 5000 Probe Microscopes provide ideal automated tools for large-sample metrology and high-resolution imaging including mechan-ical (PF-QNM), electrical (EFM/KPFM) and magnetic properties (MFM). The additions of several applications modules further expand functionality to include scanning tunneling (STM), conductive (cAFM), scanning capacitance (SCM) and spreading resistance (SSRM) imaging.

Bruker Multimode 8 (MM8) and Innova Scanning Probe Microscopes provide atomic and molecular scale imaging with a full array of SPM modes. With the new ScanAsyst-HR mode, data acquisition speeds on the MM8 can be increased 20-fold. Additional PicoForce, cAFM and electrochemistry options modes deliver the capacity for imaging and spectroscopy at atomic and molecular resolution.

Bruker Bioscope Catalyst Atomic Force Microscope is a versatile instrument designed for advanced biomedical research that enables imaging and spec-troscopy under a broad range of dynamic and biologically relevant conditions. Mounted on the Zeiss LSM laser scanning confocal microscope, the Catalyst AFM enables co-localized optical and fluorescence imaging in real-time.

Bruker NT9300 optical profiler provides fast, highly accurate 3D surface topogra-phy measurements. A state-of-the-art technique developed in-house by the NPC Lab, mechanical imaging interferometry (MII), enables high-throughput mechani-cal analysis of soft materials including polymers, cells, and tissues.

NPC and Omicron Ultrahigh Vacuum Scanning Probe Microscopes are custom built/modified microscopes capable of carrying out combined STM/non-contact AFM measurements in UHV. Access to these instruments generally involves a col-laborative research arrangement with the NPC Lab.

JAMES GIMZEWSKI, DSc, FRS

Distinguished Professor, Chemistry & Biochemistry

Director

ADAM STIEG, PhD

Scientific Director

310-983-1026

[email protected]

ShIVANI ShARMA, PhD

Project Scientist

310-983-1027

[email protected]

http://nanopicolab.cnsi.ucla.edu [email protected] 310.206.2144

Research in the Nano & Pico Characterization Lab has generated numerous cutting edge results and high-impact publications.

page 1 0 California nanosystems institute > core labs

recent publications from the mSSr include top-ics such as oncology, nanotoxicology, identification of compounds inhibiting gene function or restoring normal gene expression in diseased cells, identifica-tion of compounds and cellular signal transduction networks that modulate human stem cell fate, and identification of compounds active against radiation sickness. We offer services that go beyond tradi-tional HtS facilities: for example, we are pursuing the construction of genome-wide deletion libraries of rel-evant organisms for biofuel production and work in collaboration with equipment and reagent manufac-turers on technology development and beta-testing of products.

Services

DRUg DISCOvERy

our compound libraries consist of over 180,000 mol-ecules. for the purpose of chemical genomics the mSSr provides annotated small-molecule libraries where the targets are known. other sets contain over 1000 fDa approved drugs, a comprehensive set of anti-cancer agents provided by the nCi and over 2000 purified natural products. for drug discovery proj-ects, the mSSr offers small molecule libraries which target high value classes of proteins such as kinases, proteases, ion channels as well as g-protein coupled receptors (GPCrs). the residual 140,000 compounds are contained in libraries sampling the drug-like chemical space and are filtered for any toxicological liabilities. over 70% of our compounds are in libraries that were custom selected for the mSSr and are not likely to be found in another screening facility.

the molecular Screening Shared resource (mSSr) offers a comprehensive range

of high-throughput screening (HtS) services including chemical genomics, func-

tional genomics, and drug discovery. the mSSr is an open environment and

welcomes academic investigators from uCla as well as from all over the globe.

industrial clients are equally welcome as the mSSr is set up as a fee for service

entity and does not retain intellectual property. in conjunction with the Center for

environmental implications of nanotechnology, the mSSr is currently the only HtS

facility in the nation with an ongoing, dedicated effort towards high-throughput

toxicity testing of nanomaterials. the mSSr is a shared resource supported in part

by the Jonsson Comprehensive Cancer Center (JCCC) and works with JCCC scien-

tists on oncology related projects.

at-a-Glance

• High-throughput Screening

• Drug Discovery

• functional Genomics & novel applications

• user base includes: Small Biotech, Big Pharma, academics, niH

• Chemical libraries: 180,000 compounds of drug-like molecules with emphasis on desirable target classes such as kinases, proteases, phosphatases, GPCrs and ion channels

• shrna libraries targeting druggable targets and custom built libraries tailored to research interest of users with over 60,000 clones targeting 18,000 genes accessible

• cDna overexpression library of 16,000 clones accessible as “expression-ready” sets

• sirna sets for the mouse and human genome

• Plater reader based readouts and high content screening available

at-a-Glance

• High throughput Screening

• Drug Discovery

• functional Genomics & novel applications

• user base includes: Small Biotech, Big Pharma, academics, niH

• Chemical libraries: 180,000 compounds of drug-like molecules with emphasis on desirable target classes such as kinases, proteases, phosphatases, GPCrs and ion channels

• shrna libraries targeting druggable targets and custom built libraries tailored to research interest of users with over 60,000 clones targeting 18,000 genes accessible

• cDna overexpression library of 16,000 clones accessible as “expression-ready” sets

• sirna sets for the mouse and human genome

• Plater reader based readouts and high content screening available

High-throughput Screening | Drug Discovery | functional Genomicsmolecular Shared Screening resource



Functional Genomics

In addition to drug discovery and chemical genom-ics, the MSSR provides functional genomics librariesusing inhibitory RNA (RNAi) for gene KO and the com-plementary cDNA overexpression methodologies.The MSSR offers three commercially available siRNAlibraries covering the human and mouse druggableand the entire mouse genome. Kinases and GPCR’sare available as sub-libraries with 4 siRNA constructsper gene. This enables advanced analysis methodol-ogies such as redundant siRNA analysis (RSA) whichallows for elimination of outliers and siRNA’s whichmight be off-target.

Our arrayed shRNA libraries contain over 60,000clones targeting about 18,000 genes with an empha-sis in coverage on desirable target classes, such askinases, proteases, phosphatases, GPCRs and ionchannels. In addition to the traditional target classes,we offer various custom libraries such as a validatedcancer-specific shRNA set of about 150 targets fromthe NCI and a cancer-specific set of over 2000 clonescovering 500 cancer-related genes selected by theSanger Institute. Other sublibraries cover transcrip-tion factors, ubiquitinization and de-ubiquitinizationpathways, apoptosis, etc. These libraries are pro-prietary to the MSSR as they were custom selectedand arrayed at the MSSR. The capability of custom-izing shRNA libraries enables the MSSR to tailorshRNA libraries to the needs of a particular PrincipalInvestigator.

The MSSR offers a mixed mouse and human cDNAgenome-wide collection for screening. The librarycovers about 16,000 full length cDNA clones customarrayed at the MSSR. Such a cDNA overexpressionlibrary is essential for gain-of-function (GOF) screens,which are complementary to loss-of-function RNAistrategies.

The MSSR has as well arrayed genome wide Knock-out or deletion libraries of the model system E.Coliand S.Cervisiae available. These libraries containall non-essential genes and are especially useful fornanotoxicology studies as they offer insight into themechanism of nanotoxicity.

SPECIALIZED eQUIPMENT

Two Beckman CORE systems with a throughput ofover 100,000 samples a day are the foundation ofour automation equipment employed by the MSSR.These systems consist of high-end multi-mode platereaders addressing all available readouts, liquidhandlers, bulk-dispensers, a plate washer, and auto-mated CO2-incubators. The systems are controlled byBeckman-Coulter SAMI scheduling software, whichallows for 24/7 walk-away automation. The systemsare configured for maximal flexibility and allow for allassay workflows conceivable and automated hitpick-ing is incorporated. An Acumen Explorer high-contentscreening system and an Image Xpressmicro high-content screening system allow for image-basedscreening. This is especially important in functionalgenomics where frequently only a cellular phenotypeis known. The Acumen is currently integrated with aTwister robot allowing for 80 plate capacity. Anotherliquid-handling integrated system consisting of aVelocity 11 Benchcell plate handling robot with Vprepliquid handler, PlateLoc plate sealer and Vcode bar-coder are housed in a custom HEPA-filtered Biosafetycabinet and are used for aliquoting our shRNA librar-ies into plates once the libraries are in lentiviral form.Other liquid handlers such as the Precision 2000, twoQbot colony pickers and a Hydra 96 with XY platformare available for use as well.

How we work

The MSSR works in close conjunction with eachPrincipal Investigator. In addition to infrastructureand chemical or biological libraries the MSSR pro-vides the necessary expertise to guide a given HTSproject towards fruition. We have adopted a collab-orative work model in which typically one memberof the Principal Investigator’s laboratory is workingwith the MSSR team on a given project. This ensuresthat a person with detailed knowledge of the biol-ogy stands behind each project and is available at alltimes as well as high quality results and value addedto the project.

KEN Bradley, phd

Associate Professor, Microbiology, Immunology & Molecular Genetics

Director

RoBert damoise aux, phd

Scientific Director

[email protected]

310-794-1974

http://www.mssr.ucla.edu

Work performedat the MSSRhas supportednumerouspublications intop notch journalssuch as NatureBiotechnology,Science, PNASamongst others.

CNSI 2012 core lab bro FINAL052412.indd 11 5/24/12 4:47 PM


Epitaxial services and research expertise

inml provides epitaxial services for a wide array of research clients, from academic groups both here at uCla and around the world, to national laboratories and many partners in industry. inml grows iii-V and iii-n compound semiconductor materials in ultra high vacuum (~10-10 torr) with emphasis on purity, control, and atomic-layer precision. nanomaterials and nanostructures grown in inml are used in lasers, solar cells, detec-tors, transistors, modulators, and a wide range of other electronic and photonic devices.

the integrated nanomaterials laboratory (inml) is a state-of-the-art nano-

materials synthesis and characterization facility. inml addresses the critical

technological needs of the future through material development as we integrate

nanoscience with disciplines such as electronics, photonics, renewable energy,

chemistry, biology, and physics. the extensive technological advances made by

the inml particularly in the areas of integrated iii-Sb/CmoS optoelectronics, infra-

red photonics, and electronics form the basis of a large number of our on-going

partnerships and collaborations.

at-a-Glance

• Semiconductor nanomaterials synthesis & characterization facility

• iii-as/Sb and iii-n mBe epitaxial growth foundry services

• High quality alloys for electronic / photonic devices

• integration of dissimilar materials for novel applications

• Work closely with iSnC cleanroom and nPC at CnSi

at-a-Glance

• Semiconductor nanomaterials synthesis & characterization facility

• iii-as/Sb and iii-n mBe epitaxial growth foundry services

• High quality alloys for electronic / photonic devices

• integration of dissimilar materials for novel applications

• Work closely with iSnC cleanroom and nPC at CnSi

molecular Beam epitaxyintegrated nanomaterials laboratory


California nanosystems institute > core labs page 1 3

Molecular Beam Epitaxy (MBE) facilities

featuring two interconnected Veeco Gen-930 mBe systems, the inml is equipped with the material synthesis and growth-monitoring tools necessary to fabricate a wide range of iii-V and iii-n compound semiconductor nanostructures.

III – N chamber• n plasma source with rf generator• fully automated n gas delivery system• High t substrate heater – 1200°C• emissivity correcting optical pyrometer• up to 3” diameter wafers• rHeeD for real-time in-situ monitoring

III – As/Sb chamber• Group iii: in, Ga, al effusion cells• automated as and Sb valved crackers• Dopants: Si, te, and Be cells• rHeeD for real-time in-situ monitoring• KSa400 software for image/video analysis• automated growth control - molly

Characterization facilities

Optical characterization:

Photo luminescence (Pl) and microPl with closed-cycle

low vibration cryostat

(10K), excitation lasers

(402nm-1300nm),

oma-V 2D inGaas CCD array,

nicolate 8700 ft-ir.

Device I-V and C-V characterization:

agilent 4156C parameter analyzer, agilent e4980a (20Hz-2mHz) precision lCr meter, lakeshore ttPX cryogenic probe station.

Nomarski phase contrast microscope:

High-resolution digital camera, control software, and objectives up to 100X magnification.

Photovoltaic characterization:

newport one-sun solar simulator, newport Qe/iPCe measurement set-up (Qe-PV-Si).

DIANA HUFFAKER, PhD

Professor, electrical engineering

Director

BAOL AI LIANg, PhD

Technical Director

[email protected]

PAUL SIMMONDS, PhD

Laboratory Manager

[email protected]

http://inml.cnsi.ucla.edu 310-983-3116

impact on research community and publications:

Nano Letters, Physical Review B, Applied Physics Letters, IEEE Photonics Technology Letters, Applied Physics Express, Journal of Applied Physics, Journal of Physics D: Applied Physics, Journal of Nanoscience and Nanotechnology, Nanoscale Research Letters



the integrated Systems nanofabrication Cleanroom (iSnC) is a shared-use clean-

room that provides state-of-the-art equipment, facilities, and technical expertise

for fabricating the most demanding nano-scale structures and devices. the iSnC

was created to support all aspects of nanofabrication-related research and to

advance research and learning in nanoscience.

the iSnC provides open-access of resources to all members and welcomes both academic and non-academic members equally. the iSnC staff has deep knowledge of fabrication techniques and has exten-sive experience with academic and commercial r&D projects. no fabrication experience is needed to become a member of the facility; our knowledge-able staff can train and guide new members working in the facility as well perform remote processing for members who cannot travel to the facility.

the iSnC facility consists of 9700 ft2 of class 100 and class 1000 cleanroom space and offers process-ing equipment with a broad range of capabilities including working with substrate sizes from pieces to 150mm wafers.

E-Beam Lithography

Vistec eBPG 5000+eS• 10-nm on-axis resolution• 30-nm overlay & Stitching accuracy • automated focus and alignment• 20-keV to 100-keV Voltage• 50-mHz Pattern Generator• CaD & Pattern fracture available

Optical Lithography

Stepper - aSml PaS 5500/200 • 300-nm resolution• Variable, High-na i-line lens• 50-nm machine overlay• 5x reduction• 22-mm x 22-mm field Size

track - SVG 8800• automated Coat & Develop Capability• Standard Positive & negative resist Processes

Contact Printer - Karl Suss ma-6 • 1000-nm resolution• full Wafer Patterning

maskless lithography – imP Sf-100 • Direct Write• 1000-nm resolution• Patterning of non-flat Substrates

manual Coaters - Headway PWm32

Cleanroom fabrication and foundryintegrated Systems nanofabrication Cleanroom

at-a-Glance

• no membership fee, pay as you go model

• Provide foundry services for investigators seeking device design and fabrication

• High-throughput 300-nm optical lithography and inspection

• nanoscale electron beam patterning

• experienced professional staff

• train professional engineers in fabrication techniques and engineering practices

• Collaborate with industry and government laboratories for technology transfer

• iSnC is currently the only fully-equipped clean room for r&D locally

California nanosystems institute > core labs page 1 5

Thin-Film Deposition

Sputter machine - ulVaC JSP 8000 • Simultaneously Holds 4 Sputtering targets • Co-Sputtering of 2 targets• reactive Sputtering• Wide range of targets available

e-Beam evaporator - CHa Solution • 6 Source Pockets• Wide range of Sources are available

Sputter machine - Denton Desk V • au-Pd and au targets• Capable of Sputter Cleaning Samples

Parylene Coating - SCS PDS-2010 • Highly Conformal Biocompatible uSP Class Vi Polymer Coating• moisture, Chemical, & Dielectric Barrier Protection

Dry Etch

fluorine rie - oxford 80 Plus • oxide, nitride, & Silicon etch• etch Gasses: Sf6, Cf4, CHf3

metal etch - ulVaC 550• Standard metal, iii-V, & Silicide etch• etch Gasses: Cl, BCl3, H2 • Heated Chuck

Down Stream and Barrel ashers - matrix 105 & Branson

Thermal Processing

rapid thermal Processing - mPtC rtP-600xp • temperature range: 250-1300°C ±2°C• ramp rate: 0-200°C per sec.

thermal oxidation - tystar mini-3600 • Wet and Dry oxidation• long Duration oxidation for Sio2 films up to 10-µm thick

High temperature annealing furnace - Carbolite HtCr6/28 • maximum temperature: 600°C• Programmable

Vacuum oven – yeS lP iii

Metrology

analytic Sem - Jeol 7500f • magnification 25x to 1,000,000,000x• 1.0-nm at 15 keV resolution• accelerating Voltage 0.1 V to 30 keV• Variable tilt and Working Distance• Wafer Handling Pieces to 6”

Critical Dimension Sem – amat 7830i • fully automated Wafer mapping and CD measurement• Simple to operate• low Voltage operation minimizes Charging

afm - Vecco diinnova • atomic resolution• full range of Standard SPm modes

Semiconductor ftir – nicolet eCo 1000s • reflectance and transmission modes

Profilometer - Vecco Dektak 150 • 0.1-nm Vertical resolution• 3-D mapping Capability

Spectroscopic ellipsometer - Sopra GeS5

resistivity measurement - omnimap rS-35C

Miscellaneous

Wafer Bonder - Karl Suss SB6 • anodic, thermo Compression, & low temperature Bonding • maximum temperature range: 450°C

Probe Station – m&m• agilent 4155C parametric tester

Scribe & Break – loomis lSD-100

Integrated Bio-Suites

• Bio-Safety level -2 Containment• accessible from main Cleanroom• Separate environmental Systems• Preservation of Cleanliness for Biological testing

K ANg WANg, PhD

raytheon Chair in Physical electronics

Professor, electrical engineering

Director

CHANDRA K ANTAMNENI

Technical Director

[email protected]

http://isnc.cnsi.ucla.edu


California NanoSystems Institute

www.cnsi.ucla.edu

Equipment Reservations:

http://clms.cnsi.ucla.edu

570 Westwood Plaza

Building 114, mC 722710

los angeles, California 90095-7227

uSa


Documents

California nanoSyStemS inStitute