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CNU Planar Hall Resistance- Thermal stability & field sensitivity :
Indirect exchange coupling, FM/AFM
- Increasing active area :
Hybrid AMR/PHR sensor
- Wearable biochip sensor:
Flexible MR substrate
-Applications :
o Biochip sensors
o Single bead magnetometry
o Ferrofluid driplet
o Magnetic phase transition
V. Results Magnetoresistive effects
AMR/PHR
Voltage in magnetic materials
AMR/PHR
II. PHR
-Navel Research Lab.- 80x5 µm2 (GMR)- 1 bead (2.8 µm)- 2002 ( 1998)
-U. Bielefeld-70 µm diameter-3 beads (0.86 µm)-2002
-Stanford U. -1x1 µm2 (GMR)-1 bead (2.8 µm)-2002
- INESC-2x6 µm2 (GMR)-1 bead (2 µm)-2003
-Philips Research-3x100 µm2
-10 beads (300 nm)-2005
-IMEC-1 bead (300 nm)-2002
Review article in J.MMM, 293 (2005) 702
-Tokyo Inst. of Tech. - Hall effect in InSb-3x5 µm2 (2005)
IEEE . Magn. 41 (2005) 3661
- CNU -- PHR (2006)
GMR sensors
Giant magnetoresistance in magnetic multilayers《Nobel Prize in Physics (2007)》
Basic patent : US 2002/0119470 A1 (NRL), Sensor patents 13
Developed magnetic sensors II. PHR
Single layer (France)
Bilayers (Denmark)
Spin-valve Structure (Korea, 2006)
SiO2
TaNiFeIrMn
NiFe
SiO2
TaNiFeCu
NiFeIrMn
SiO2
NiFe
L. Ejsing, et. al. . Magn. Magn. Mater. 293, 677 (2005)
F. Nguyen Van Dau et. al, Sensors and Actuators A, 53, 256 (1996)
PHR sensor structure [~ 2009) II. PHR
Exchange bias in NiFe/Spacer/CoO bilayer
J. Gkemeijer et al., Phys. Rev. Lett., 79, 4270 (1997)
NiFe 30 nm
CoO 30 nm
Spacer
Motivation
CNU: Trilayer structure (2009)
Role of Antiferromagnetic layer
Enhancement of field sensitivity Enhancement of thermal stability
Reducing shunt current
cm 1.7 :Cucm 20 : NiFe
cm 210 :IrMn
III. Sensitivity
V/Oe 12 V/Oe 0.6 : S
valve)-(spin Oe 20(bilayers) Oe 125
ex
ex
HH V/Oe 0.6 V/Oe 9.0 : S
Cu1.2A) :(trilayers % 60valve)(spin % 30
active
active
II
10-2010-0054238 특허출원, T. Hung et al, JAP 107, 09E715 (2010)
ᄋNano-Micro-sezed sensor
: Localized information & approaching time
ᄋ Average over overall sample volume
Sensor arrays or Large sensor area
Active sensor area
R : Radius W : width
r
w
CNU hybrid PHR & AMR III. Sensitivity
- US2011/0175605A1- 한국출원번호 10-2010-0005657- S. Sun et al, Solid state commun. 2011
V/Oe 320 V/Oe 12 : S
Test Materials : NiFe(50 nm)/MnIr(10 nm)
Self-balancing (Whistone-bridge)
PHR effect
AMR effect
0 2 4 6 80.0
0.5
1.0
1.5
2.0
2.5
3.0
Out
put V
olta
ge (m
V)
R/w ratio of Ring
R : Radius W : width
R
w
-400 -300 -200 -100 0 100 200 300 400-1000
-500
0
500
1000
1500
Vol
tage
(V
)H (Oe)
r = 150 μmw = 20 μm
Ring type sensorTest Materials : NiCo(10 nm)/MnIr(10 nm)
Enhance the output signal with no hysteresis
AMR/PHR performance : ring type
Multi-ring sensor elements
Off-set adjustment
Flexible organic substrates
Embedded electrodes
Solar Energy Materials & Solar Cells 95 (2011) 1339
Printed electrodes
KN Eindhoven, The Netherlands
June ,2010 IEEE Xplore,KIMM, Korea
Flexible organic GMR substrates
(Co/Cu)n deposition on polyester
Appl. Phys. Lett. 69 (1992) 3092
Multilayers & electrode : Sputtering
Weak adhesion
Hybrid fabrication procedures
(c)(b)(a) PEN - bilayer
3.387 nm
glass - bilayer
694.671 pm
Si - bilayer
rms roughness -180.821 pm
AFM PEN (Polyethylene naphthalin) film stability
Temperature dependence of PHR
16 14 12 10 8 6 4 2 00
15
30
45
60
75
90
Distance,D (mm)
Ang
le,
()
PEN film bending
0 10 20 30 40 50 60 70 80 90-10
-5
0
5
10
15
20
25
Vol
tage
(mV
)
Angel,()
concave convex
D=16 mmD=8 mm
D=0 mm
D=16 mm D=8 mm D=0 mm
Electrode stability: Resistance variation
Electrode stability: Resistance variation
0 15 30 45 60 75 90-20
-15
-10
-5
0
5
10
15
20
Angel,()
Vol
tage
(mV
)
Au electrode
Ag paste
Contact lost
D=16 mm D=8 mm D=0 mm
-200 -150 -100 -50 0 50 100 150 200
-3
-2
-1
0
1
2
3
4 0 15 30 45 0
Vol
tage
(mV
)
Field (Oe)
Electrode stability: Resistance variation
0 100 200 300 400 500 600
0
2
4
6
8
10
Vol
tage
(V)
Time (sec)
0 200 4000.44
0.46
0.48
0.50
Θ = 15°
30°45°
0°
15°75°
60°
Multilayers electrodes : Ta/IrMn/NiFe/Ta/PEN
PEN film – Electrode (Au)
PEN film – Electrode - bend
0 20 40 60 80
0
100
200
300
400
Hig
ht (n
m)
um
약 200 nm
Magnetic sensor performanceResearch group Sensor type Size (μm2) Sensitivity
(μV/Oe·mA) Label size Biological detection
Molecular resolution
Stanford U. (Shan X. Wang)USA
Rectangle GMR (SV) Strip (32)
TMR
12 × 310 × 2.593 × 1.5
-
35.8-
2.8 μm (Dynabead)100 nm (SAF)
50 nm -3 μm (MNT)50 nm (Macs)
16 nm (MFe2O4)
NoYesNoYesNo
10 pM5 fM (2010)
(Protein)(Biosen. Bioelec. 25
(2010) 2051.)
INESC-MN(P. Freitas) Portugal
Rectangle GMR(SV) array (32)
TMR
80 × 2.540 × 2.515 × 2
35.842.4
130 nm250 nm2.8 μm
NoYesNo
1 fM(2002)(DNA)
(Biosen. Bioelec. 24 (2009) 2690.)
DTU(M. F. Hansen) Denmark PHR-Cross 10 × 10
40 × 40 3.2 2 and 2.8 μm(Dynabead) No
Bielefeld U.(Reiss) Germany
TMR(Elliptical) (20)
GMR (SV) spiral
0.4 × 0.11800(dia.)1(width)
-
16 and 50 nm(Co)2.0 μm
(Dynabead)350 nm and 860 nm
(Bangs)
NoYes
800 fM(2008)(Protein)
(Biosen. Bioelec. 19 (2004) 1149.)
U.Minnesota(J.P. Wang) USA GMR (SV) 80 × 40 600 12 nm (FeCo) Yes
~zM (2009)(Protein)
(Angew. Chem. Int. Ed. 48 (2009) 2764.)
NRL(M.M. Miller) USA AMR (Ring) 5 (dia)
3 (width) 15.2 4.3 μm (NiFe) No
SFIT(P.A. Besse) Swiss Silicon Hall sensor 2.4 × 2.4 17.5 2.8 μm
(Dynabead) No
CNU(C.G. Kim) Korea
PHRHybrid ring
3 × 3300 (dia)5 (width)
12.0
1690
1 and 2.8 μm(Dynabead) No
Philips Research Europe(W.U. Dittmer)
NetherlandsGMR (SV) Strip - - 300 and 500 nm
(Ademtech) Yes
0.8 pM(2008)(Protein)
(J. Immunological Meth. 338 (2008)
40.)
1D assay application (Cardiac Troponin I (cTnI)
Diffusion processAnalyte binding
-300 -250 -200
1.35
1.40
1.45
1.50
1.55
Base Signal Mag Bacteria_1 Mag Bacteria_2 Mag Bacteria_3 Mag bead Mag bead remove
Vol
tage
(V)
Field (Oe)
-300 -200 -100 0 100 200 300
0.0
0.5
1.0
1.5
2.0
0 50 100 150 200 250 300
1.44
1.46
1.48
1.50
1.52
Vol
tage
(mV
)
Time (sec)
Bacteria spay
Bead drop
Bead wash
2D assay: Bacteria detection
Magnetosomes
2D assays
The voltage change during the repeated drop and washing of bead
-fluidic channel integrated with sensor
Punch card( ~ 1980s)
See poster: p. 71
Nanosized Spin-Crossover Materials
TEM image of 250 ± 40 nm nanoparticles and the corresponding size histogram. (The largest dimension of each nanoparticle was used for the statistics.)
(a) The voltage change associated with change of properties of SCO particles. (b) The diamagnetic/paramagnetic phases are characterised by a lower/higher voltage. (c) The insets show the colour change of the particles: pink in diamagnetic low spin state (d) and white in the paramagnetic high spin phase. (b) Reflectance measurements ( = 550 ±40 nm) (e) of the [Fe(hptrz)3](OTs)2 SCO nanoparticles on the sensor surface.