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Specifications
Pumping Speed
10,500 Liters/sec.
13,000 Liters/sec.
30,000 Liters/sec.
8,500 Liters/sec.
Type
N2
H2
H2O
Ar
Capacity at 1 ×10-6 Torr
12 std Liters
2,200 std Liters
© 2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
Roughing Flange KF40
Accessory Flange 2 ¾" OD, 3/8" thick
Purge Tube ½" Ultra-Seal fitting. Viton O-ring Includes blank and 0.33" bored tailpieces
Pressure Relief 5 psig poppet valve with KF40 flange
Helium Connections ½" Aeroquip fittings
Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector
Interfaces
Operating Orientation Any
Purge Tube Integral
Instrumentation Silicon diode standard Hydrogen vapor bulb thermometer optional
Ar Throughput Capacity at 20K 10 Torr Liters/sec. 790 scc/min.
Weight
180 lbs.(81.8 kg)
Crossover
550 Torr Liters
Cooldown Time
210 min to 20Kwith CBST6.0 Compressor
(Performance data based on 60-HZ operation)
SystemFlange
ANSI
OD
27.5"
ID
20.813"
BC
25
Bolt Holes
20 ea 1.25" DIA
O-Ring
21.95" ID × 0.210"thick Viton(supplied)
Cryopump 20" TM500 (ANSI)
20" TM500 (ANSI)
© 2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
1.25" DIA HOLESON 25" BC
O-RING GROOVE21.953" ID x 9/32"" WIDE x 11/64" D
20 13/16" ID
27 1/2" OD
21 1/2" DIA.
1 1/2"
2 1/2"5 1/16"
17 3/16"
8 11/16"
10 13/16"
12 3/4"
25 7/8"
3/4"
1/2" GHeINLET
ELECTRICALCONNECTOR
PURGETUBE
KF40PUMP-OUT
PORT
1/2" GHeOUTLETINSTRUMENT
FEED-THRU
INSTRUMENTFEED-THRU
5 PSIG RELIEFVALVE WITHKF40 FLANGE
PORTS LOCATEDON 6 3/4" RADIUS
2 3/4" OD x 3/4" THKAUX PORT
Cryopump 20" TM500 (ANSI)
