[Single‐sensor] Single crystal sensors can be supplied with or without water cooling which is useful in systems that are baked at high temperatures.

The small single sensors can be easily positioned inside the chamber, and are available either with or without vacuum feedthrough.

Long life external oscillators are available for use with these sensors.

[Multi-sensor] Mul t i c r ys ta l sensors a re ava i l ab le tha t ho ld 6 o r 12 crystals.

A vacuum motor inside the sensor head indexes the crystals with high reliability.

The sensor head can be removed f rom the system for reloading with fresh crystals.

If the CRTM controller detects an abnormal crystal, or one that has reached its end of l i fe, it sends a signal to the sensor which automatically switchs to the next crystal.

Evaporation sensor CRTS-4

Multi Sensor CRTS-M6

Multi Sensor CRTS-12NS

Crystal Oscillation Type Deposition Controller Sensor [CRTS Series]

The CRTS series sensors are used with ULVAC crystal oscillation type deposition controllers (Quartz Crystal Monitors).

The sensors come in many different types and configurations for compatibility with most any type of deposition equipment.

Features

Deposition Controller

Deposition Controller

Selection Guide

Sensor Connection Diagram

CRTS Ser ies Se lect ion

Osci

llato

r

Auxiliary cable ＊3

Water cooling connections

Introduced �ange

OSM OSM

Internal cableSensor head

CRTM

External cable ＊2

Oscillatercontrol cable＊1

Vacuum external motor cable

Controller for sensorSignal introduced �ange ＊1

Hermetic terminal

Vacuum internal motor cable

Vacuum internal cable

Sensor head

OSM connector

1/4VCO joint

Cooling water tube ＊1Cooling water introduced �ange ＊1

Auxliary cable

Vacuum external cable ＊2

Oscillator control cable

Oscillator

DC24Ｖ

CRTM

＊1 When using CRTS-80 series (Option).＊2 Part attached to a thing of CRTM.＊3 Not use in Bakeable sensor.

＊1 Introduced flange set (Option).＊2 Part attached to a thing of CRTM.

Single Sensor Mul t i Sensor

CRTS-4UCRTS-84U

100˚C (212˚F) or less

200˚C (392˚F) or less

80˚C (176˚F) or less

100˚C (212˚F) or less

200˚C(392˚F) or less

300˚C (572˚F) or less

350˚C (662˚F) or less

CRTS-6UCRTS-86U

CRTS-0CRTS-80

CRTS-4CRTS-84

CRTS-6CRTS-86

CRTS-0CRTS-80＋

CoolingWaterjacket

12 crystalMulti-sensor

CRTS-12NS

350˚C (662˚F) or less

6 crystalMulti-sensor

CRTS-M6

Temperature duringmeasurement

Temperature duringmeasurement

Will baking be done ?YES NO

Crystal Oscillation Type Deposition Controller Sensor [CRTS Series]

Specifications

Speci f icat ions and Accessor is : S ing le Sensor

Speci f icat ions and Accessor is : Mul t i Sensor

Model Evaporation sensor Evaporation sensor without water cooling pipe Bakeable evaporation sensor

CRTS-4 CRTS-6 CRTS-0 CRTS-4U CRTS-6U（Long life span type） （CRTS-84） （CRTS-86） （CRTS-80） with Water-cooled jacket （CRTS-84U） （CRTS-86U）

Application　＊1 Evaporation at 100℃ (212˚F) or less

Evaporation at 200℃ (392˚F) or less

Evaporation at 80℃ (176˚F) or less

Evaporation at 300℃ (572˚F) or less

Evaporation at 100℃ (212˚F) or less using ultra high vacuum

Evaporation at 200℃ (392˚F) or less using ultra high vacuum

Capacity of crystal 5MHz (6MHz ＊2)Baking temperature (Max.) 150℃ (302˚F) 150℃ (302˚F) 150℃ (302˚F) 150℃ (302˚F) 300℃ (572˚F) 300℃ (572˚F)Cooling water pipe Pipe length ＊3 100 to 800mm 100 to 800mm - 100 to 800mm 100 to 800mm 100 to 800mm

Pipe out diameter 4mm 6mm - 6mm 4mm 6mmWater capacity 200cc/min 400cc/min - 400cc/min 200cc/min 400cc/minTube connection ＊4 1/4inch 3/8inch - 3/8inch 1/4inch 3/8inch

Senser head dimensions φ31×H19mm φ34×H19mm φ28×H19mm φ45×H30mm φ31×H20mm φ34×H20mm

Accessoris （○：Standard accessoris、△：Options、－：N/A）Oscillator ＊5 ○ ○ ○ ○ ○ ○Oscillator contorol cable ＊5 △ △ △ △ △ △Internal cable ＊6 ○ ○ ○ ○ － －Auxiliary cable (150mm) ○ ○ ○ ○ － －OSM connector ＊7 ○ ○ △ △ － －Crystal (5MHz,5pcs) ○ ○ ○ ○ ○ ○Flange:UFC070 (company standard, Conflat compatible) △ △ △ △ ○ ○Flange:Dia.30mm boss type(company standard) △ △ △ △ － －Other flange △ △ △ △ － －

＊1 The sensor head temperature shoud be kept within the range of 0˚C to 80˚C (32˚F to 176˚F) during measurement. The temperature limitation for the internal cable is 150˚C (302˚F). If the temperature is higher than this limitation,wind the cable around the water cooling pipe , and use aluminum foil to protect it.＊2 Please specify 6MHz crystals when ordering.＊3 Appoint from 100mm to 800mm＊4 Synflex tube joint.＊5 CRTS-8＊ series sensors use long life span oscillators, it is necessary to use optional oscillator contorol cable (CRTM series catalog).

＊6 Internal cable length varies with the length of cooling water tube (Max.900mm).When CRTS-0 (CRTS-80), length of Internal cable are selectable from 200mm, 500mm, 900mm.＊7 When CRTS-0 (CRTS-80), optional feedthrough flange include OSM connector.

＊1 The sensor head temperature shoud be kept within the range of 0℃ to 80℃ (32˚F to 176˚F) during measurement. The temperature limitation for the internal cable is 150℃ (302˚F). If the temperature is higher than this limitation, wind the cable around the water cooling pipe , and use aluminum foil to protect it.

＊2 Please specify 6MHz crystal when ordering.

＊3 Optional length cables are shipped separately and need to be attached to the sensor.

＊4 Feedthrough flange (with OSM connector and Hermetic terminal)×1, Cooling water feedthrough flange×1 (with cooling water pipe)×1 Cooling water tube length is selectable from 50mm to 800mm. Please refer for the flange except UFC070.

Model CRTS-12NS CRTS-M6

Application High rate or long time continuous evaporation at 350℃ (662˚F) or less ＊1Equipped crystal number 12pcs 6pcsCapacity of crystal 5MHz (6MHz ＊2)Baking temperature N/ACooling water pipe Pipe out diameter 1/4inch

Water capacity 1L/minTube connection 1/4VOC

Mass Approx.2kg Approx.1kgSenser head dimensions (without cooling water pipe) φ104mm ×H61mm (Approx.) φ50mm ×H89mm (Approx.)Controller Internal status indication (LED) BUSY, ERROR, RETRYEND

Digital input INT, CNT, STOPDigital output Sensor No., BUSY, ERROR, RETRYENDUtility DC24V, 3.0AMass Approx.2kgDimension W 100mm×D 250mm×H 99mm

Accessories （○：Standard accessories, △：Options）Oscillator ○Oscillator control cable (4m) ○＊3Internal motor cable (900mm) ○Internal cable (900mm) ○Auxiliary cable (150mm) ○External motor cable (5m) ○＊3OSM connector ○Hermetic terminal ○Connector (Male 15 pins D-sub) ○Crystal (5MHz) ○ (12pcs) ○ (6pcs)Instruction manual (CD) ○Feedthrough flange set ＊4 :UFC070 (company standard, Conflat compatible) △Oscillator contorol cable (8m, 12m, 16m) △External motor cable (8m, 12m, 16m) △

www.ulvac.co. jpULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.

Dimensions

Single Sensor

Mul t i Sensor

1706E/2012062000UYO

29.5

19

φ 2

8φ

45 φ28

φ d

W

L＝100～800

19

CRTS-4, 84/CRTS-6, 86 evaporation sensorCRTS-0 sensor without water cooling piping

Water cooled jacket

φ28φ d

φ 6

9 .3

L=100～800

(Com

mon

na

me:

70 )

16 W20

120max

BNC

UFC070 rotating flange(CONFLAT compatible)

Synflex tube fixture

CRTS-4U, 84U/CRTS-6U, 86U bakeable sensors

φ50 （214.2）105.7

125.75632.5

Sensor-Head CRTS-12NS Sensor Controller

Sensor-Head CRTS-M6

D sub 9 pin female

D sub 15 pinfemale

Terminal forpower supply

100

4- dia. 4.337.5

12.5

3.5

92 847 .

5

99

50

2 25050

(62.6)

(107.3)

60.7

80

29.3 623 23

（φ

104）

φ1/4 VCD

6-M4×DP5for sensorhead attachment

29

30

2 1536

.515

evaporation sensor W φd

CRTS-4CRTS-84

31 φ4

CRTS-6CRTS-86

34 φ6

bakeable sensors W φd

CRTS-4UCRTS-84U

31 φ4

CRTS-6UCRTS-86U

34 φ6

Multi SensorController

Multi Sensor CRTS-M6Evaporation sensor without watercooling pipe CRTS-0

water cooled jacketfor CRTS-0

Evaporation sensor CRTS-4

Evaporation sensor CRTS-6

Bakeable evaporation sensorCRTS-4U Multi Sensor CRTS-12NS

Unit: mm

Unit: mm

Crystal Oscillation Type Deposition Controller Sensor [CRTS Series]