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DEPOSITION AND OPTIMIZATION OF NANOPARTICULATE
MANGANESE DIOXIDE THIN FILMS FOR ELECTROCHEMICAL
APPLICATIONS
Awangku Nabil Syafiq Bin Awangku Metosen
Master of Science
(Physical Chemistry)
2014
Faculty of Resource Science and Technology
DEPOSITION AND OPTIMIZATION OF NANOPARTICULATE
MANGANESE DIOXIDE THIN FILMS FOR ELECTROCHEMICAL
APPLICATIONS
AWANGKU NABIL SYAFIQ BIN AWANGKU METOSEN
A thesis submitted
in fulfillment of the requirements for the degree of
Master of Science
Faculty of Resource Science and Technology
UNIVERSITY MALAYSIA SARAWAK
2014
DECLARATION
No portion of the work referred to in this dissertation has been submitted in support of an
application for another master of qualification of this or any other university/institution of
higher learning.
…………………………………………………
Awangku Nabil Syafiq Bin Awangku Metosen (11021700)
Department of Chemistry (Physical Chemistry)
Faculty of Resource Science and Technology
Universiti Malaysia Sarawak
i
ACKNOWLEDGEMENT
First of all, I would like to express my special gratitude especially to my supervisor
Professor Dr. Pang Suh Cem, who have well-guided and advised me during these tremendous
years. I would like to thank you for your countless effort and time you have spent on my
research. Your guidance has motivated me so much throughout my study. Without your endless
support, I would not be able to conduct and complete my research successfully. My sincere thank
also goes to Dr. Chin Suk Fun who acts as my co-supervisor and for giving useful suggestions
and comments whenever I needed during my research activities. Not to forget, I would also like
to thank Madam Ting Woei and Mr. Syafri for their assistance in the process of taking the TEM
and SEM micrographs of my samples.
I would also like to express my appreciation to my lovely parents, spouse, daughter and
friends for all the continuous supports and sacrifices that you all have made on my behalf during
my master study period. With all your helps, I managed to strive for my goal. Once again, I
would like to thank all of you for everything and I am grateful for what you have contributed for
me.
ii
Deposition and Optimization of Nanoparticulate Manganese Dioxide Thin Films for
Electrochemical Applications
ABSTRACT
The deposition and optimization of nanoparticulate manganese dioxide (MnO2) thin films
as electrode material for the fabrication of electrochemical capacitors have received increasing
attention among researchers worldwide. Among major issues that need to be addressed include,
microstructural optimization of MnO2 thin films in order to enhance their specific capacitance,
and the development of efficient and effective approaches for the fabrication of MnO2 thin film
electrochemical capacitors. In this study, we have investigated the influence of deposition
parameters such as MnO2 sol pH, sol concentration and addition of different type of surfactants
using the self-assembly horizontal submersion approach. The surface morphologies and
microstructure of MnO2 thin films were optimized by varying these deposition parameters. The
electrochemical properties of MnO2 thin films were enhanced through microstructural control of
nanoparticulate thin films deposited on electrically conductive supporting substrate. Besides
nickel sputtered polyethylene terephthalate (PET) substrate, conductive layers of CuS and nickel
were deposited sequentially on PET by chemical bath deposition and electrodeposition processes.
Nanoparticulate MnO2 thin film was subsequently deposited on the conductive Ni/CuS/PET
supporting substrate. Nanostructured multilayer MnO2/Ni/CuS composite films on PET
supporting substrate exhibited satisfactory capacitive behaviors in mild aqueous Na2SO4
electrolyte. In addition, nanoparticulate MnO2 thin films were deposited on nickel sputtered PET
substrates using the electrophoretic deposition (EPD) process. Deposition parameters such as
deposition potential, deposition duration and addition of dispersant agents were optimized to
enhance the electrochemical properties of MnO2 thin films. The capacitive behaviors of
nanoparticulate MnO2 thin films deposited on both Ni/CuS coated and nickel sputtered PET
iii
supporting substrates were evaluated as electrode materials for the fabrication of thin film
electrochemical capacitors.
iv
Pemendapan dan Pengoptimuman Partikel Nano Mangan Dioksida Filem Nipis untuk
Aplikasi Elektrokimia
ABSTRAK
Pemendapan dan pengoptimuman partikel nano mangan dioksida (MnO2) filem nipis
sebagai bahan elektrod untuk fabrikasi kapasitor elektrokimia telah menerima perhatian
meningkat di kalangan penyelidik di seluruh dunia. Antara isu-isu utama yang perlu ditangani
termasuk, pengoptimuman mikrostruktur daripada MnO2 filem nipis bagi meningkatkan
kapasitan spesifik mereka, serta pembangunan yang cekap dan pendekatan berkesan untuk
fabrikasi MnO2 filem nipis kapasitor elektrokimia. Dalam kajian ini, kami telah mengkaji
pengaruh parameter pemendapan seperti pH sol MnO2 , kepekatan sol MnO2 dan penambahan
surfaktan yang berlainan jenis menggunakan pendekatan pemasangan sendiri penenggelaman
mendatar. Morfologi permukaan dan struktur mikro filem nipis MnO2 dioptimumkan dengan
mengubah parameter pemendapan. Sifat-sifat elektrokimia filem nipis MnO2 telah
dipertingkatkan melalui kawalan mikrostruktur daripada partikel nano filem nipis disimpan di
substrat sokongan elektrik konduktif. Selain substrat polietilena terephthalate (PET) diselaputi
nikel, lapisan konduktif Cus dan nikel yang dimendap secara berurutan pada PET melalui proses
pemendapan dalam larutan kimia dan pengelektroenapan. Partikel nano MnO2 filem nipis
kemudiannya dienapkan di atas substrat sokongan konduktif Ni/CuS/PET. Struktur nano lapisan
filem komposit MnO2/Ni/CuS pada substrat PET menunjukkan prestasi yang memberangsangkan
di dalam elektrolit akueus Na2SO4. Di samping itu, partikel nano MnO2 filem nipis dienapkan
pada substrat PET yang deselaputi nikel menggunakan proses pemendapan elektroforetik (EPD).
Faktor pemendapan seperti potensi pemendapan, tempoh pemendapan dan penambahan ejen
dispersan telah dioptimumkan untuk meningkatkan ciri-ciri elektrokimia filem nipis MnO2.
Tingkah laku kapasitif partikel nano MnO2 filem nipis yang dienapkan pada kedua-dua Ni/Cus
v
dan nikel bersalut PET substrat sokongan telah dinilai sebagai bahan elektrod untuk fabrikasi
kapasitor elektrokimia filem nipis.
vi
TABLE OF CONTENTS
Page
Acknowledgements i
Abstract ii
Abstrak iv
Table of Contents vi
List of Tables xi
List of Figures xi
List Abbreviations xv
List of Symbols xvi
CHAPTER 1 INTRODUCTION
1.1 Background 1
1.2 Objectives 6
1.3 Goals and Findings 6
CHAPTER 2 LITERATURE REVIEW
2.1 Preparation of Stable Metal Oxides Colloidal Suspensions 9
2.2 Manganese Dioxide Thin Films as Electrode Material of Electrochemical
Capacitors (EC)
12
2.3 Factors Influencing Electrochemical Properties of Manganese Dioxide
Thin Films
15
2.4 Deposition of Copper Sulfide and Nickel Films onto Polymer Surfaces 17
2.5 Electrophoretic Deposition of Manganese Dioxide Thin Films 20
vii
CHAPTER 3 DEPOSITION AND OPTIMIZATION OF MANGANESE
DIOXIDE THIN FILMS VIA A SELF-ASSEMBLY HORIZONTAL
SUBMERSSION PROCESS
3.1 Introduction 25
3.2 Materials and Methods
3.2.1 Materials 27
3.2.2 Pretreatment of Stainless Steel Substrate 27
3.2.3 Preparation of Manganese Dioxide Colloidal Suspension (Sol) 27
3.2.4 Optimization of MnO2 Thin Film Deposited via Self-Assembly
Process
3.2.4.1 Effect of MnO2 Colloidal Suspension (Sol)
Concentration
28
3.2.4.2 Effect of Sol pH 28
3.2.4.3 Effect of Surfactant 29
3.2.5 Deposition of MnO2 Thin Film 29
3.2.6 Characterization of Manganese Dioxide Thin Film 29
3.3 Results and Discussion
3.3.1 Morphological Characterization of Manganese Dioxide
Nanoparticles and Thin Films
31
3.3.1.1 Effect of MnO2 Sol Concentrations 31
3.3.1.2 Effect of Sol pH 34
3.3.1.3 Effect of Surfactants 40
3.3.2 Electrochemical Characterization of Manganese Dioxide Thin 45
viii
Films
3.3.2.1 Effect of Sol Concentrations 45
3.3.2.2 Effect of Sol pH 47
3.3.2.3 Effect of Surfactants 49
3.3.2.4 Effect of CTAB Surfactant Concentrations 51
3.4 Conclusion 54
CHAPTER 4 DEPOSITION AND OPTIMIZATION OF MULTILAYER
MnO2/Ni/CuS COMPOSITE FILMS ON POLYETHYLENE
TEREPHTHALATE (PET) SUPPORTING SUBSTRATE
4.1 Introduction 55
4.2 Materials and Methods
4.2.1 Chemical Deposition of Copper Sulfide (CuS) Film on PET
Substrate
57
4.2.2 Electrodeposition of Nickel Film onto CuS/PET Substrate 57
4.2.3 Deposition of MnO2 Thin Film on Ni/CuS/PET Substrate 58
4.2.4 Characterization of CuS/PET, Ni/CuS/PET and
MnO2/Ni/CuS/PET
59
4.3 Results and Discussion
4.3.1 Deposition of Copper Sulfide (CuS) on PET Film 60
4.3.1.1 Effect of Copper Sulfide Film Thickness 61
4.3.2 Electrodeposition of Nickel Film on CuS/PET 65
4.3.2.1 Effect of Electrodeposition Duration 68
4.3.2.2 Effect of Agitation Mode 71
ix
4.3.3 Effect of Post Deposition Annealing Temperatures 74
4.3.4 Effect of Surfactant on Electrodeposited Nickel Film 77
4.3.5 Characterization of MnO2/Ni/CuS/PET Composite Film 81
4.3.6 Fabrication and Characterization of Electrochemical Capacitor
Prototype
83
4.3.6.1 Cycling Stability of Electrochemical Capacitor
Prototype
84
4.4 Conclusion 86
CHAPTER 5 DEPOSITION AND OPTIMIZATION OF MANGANESE
DIOXIDE THIN FILMS VIA ELECTROPHORETIC
DEPOSITION PROCESS
5.1 Introduction 87
5.2 Materials and Methods 89
5.3 Results and Discussion
5.3.1 Effect of Deposition Voltage 91
5.3.2 Effect of Deposition Duration 94
5.3.3 Effect of Dispersant Agents 98
5.3.4 Electrochemical Cycling Stability 106
5.4 Conclusion 114
CHAPTER 6 CONCLUSION AND RECOMMENDATIONS
6.1 Concluding Remarks 115
xi
List of Tables Page
Table 3.1 Concentrations of MnO2 sols prepared 28
List of Figures Page
Figure 2.0 (a) MnO6 octahedron. (b) Crystal structures of MnO2 polymorphs
showing the connections of MnO6 octahedra.
13
Figure 2.1 Schematic diagram of Electrophoretic Deposition Process 21
Figure 3.1 SEM micrographs of MnO2 thin film deposited from MnO2 sols of
concentrations: a) 0.010 M, b) 0.0050 M, c) 0.0030 M, d) 0.0010 M,
and e) 0.0005 M.
32
Figure 3.2 TEM micrographs of MnO2 thin films deposited from MnO2 sol of
concentration: a) 0.010 M, b) 0.005 M, c) 0.003 M and d) 0.001 M.
34
Figure 3.3 SEM micrographs of MnO2 thin films deposited from acidic and
alkaline sols: a) pH 1.34, b) pH 2.45, c) pH 3.42, d) pH 7.62, e) pH
8.60, and f) pH 11.68.
37
Figure 3.4 TEM micrographs of dispersed MnO2 thin films deposited from MnO2
sols of different pH values: a) pH 2.45, b) pH 3.42, c) pH 8.60, and d)
pH 11.68.
38
Figure 3.5 Mass loading of MnO2 thin films deposited from MnO2 sol of different
pH values.
40
Figure 3.6 SEM micrographs of MnO2 thin films formed in the presence of
different surfactants without heating and heated at 200˚C: a) CTAB, b)
CTAB (heated), c) SDS, d) SDS (heated), e) Brij-35, and f) Brij-35
(heated).
42
Figure 3.7 SEM micrographs of MnO2 films deposited in the presence of different
CTAB surfactant concentrations: a) 0.0 M, b) 0.005 M, and c) 0.10 M.
43
Figure 3.8 Mass loading of MnO2 thin films deposited in the presence of different
CTAB concentrations in MnO2 sol.
44
Figure 3.9 (a) Cyclic voltammograms of the MnO2 thin films deposited at different
MnO2 sol concentrations, and (b) Effect of MnO2 sol concentration on
the specific capacitance (mF/cm²) of deposited MnO2 thin films.
46
Figure 3.10 (a) Cyclic voltammograms of MnO2 thin film deposited from sol of
different pH values and (b) Effects of sol pH on the specific capacitance
(mF/cm²) of MnO2 thin films.
48
Figure 3.11 (a) Cyclic voltammograms of MnO2 thin films deposited in the presence 50
xii
of different surfactants and heat treated in air at 200 ˚C, and (b) Effect
of different surfactants and heat treatment on the specific capacitance of
MnO2 thin films.
Figure 3.12 Cyclic voltammograms of MnO2 thin films deposited in the presence of
different concentrations of CTAB, (b) Effect of CTAB concentration on
the mass loading and specific capacitance of MnO2 thin films.
53
Figure 4.1 EDX spectrum of copper sulfide (CuS) on PEI treated PET film. 60
Figure 4.2 Color photograph of PEI-treated film before deposition and after
deposition of CuS films with different number of coatings.
62
Figure 4.3 SEM micrographs of PET substrate deposited with CuS film after
various numbers of coating with chemical bath deposition. (a) 0, (b) 1,
(c) 2, (d) 3, and (e) 4. Inset shows individual particles of CuS on the
film.
63
Figure 4.4 Relative surface resistance (ohms per square) of PET substrate coated
with different layers of copper sulfide film.
64
Figure 4.5 SEM micrographs of nickel films electrodeposited under different
applied potential: (a) 2.0 V, (b) 2.5 V, and (c) 3.0 V.
66
Figure 4.6 Relative surface resistance (ohms per square) of nickel electrodeposited
under different applied potential at a fixed deposition duration of 20
minutes.
67
Figure 4.7 SEM micrographs of nickel films electrodeposited under different
duration: (a) 5 minutes, (b) 10 minutes, (c) 15 minutes, (d) 20 minutes,
and (e) 25 minutes.
69
Figure 4.8 Relative surface resistance (ohms per square) of nickel deposited at
various duration at a fixed applied potential of 2.0 V.
70
Figure 4.9 Relative surface resistance of nickel films deposited under different
agitation modes: a) Without agitation, b) Magnetic stirring, and c)
Ultrasonication.
72
Figure 4.10 SEM micrographs of nickel films deposited under different agitation
modes: a) Without agitation, b) Magnetic stirring, and c)
Ultrasonication.
73
Figure 4.11 SEM micrographs of Ni (a-d) and CuS (e-f) films annealed at different
temperatures. (a) 50 ˚C, (b) 100 ˚C, (c) 150 ˚C, (d) 200 ˚C, (e) CuS
(without heating) and (f) CuS (heated at 150 ˚C).
75
Figure 4.12 Effect of annealing temperatures on the relative surface resistance of
both nickel and copper sulfide films.
77
xiii
Figure 4.13 SEM micrographs of nickel film deposited in the presence of different
concentration of SDS surfactant. (a) Without SDS, (b) 0.5 g/L SDS, (c)
1.0 g/L SDS, (d) 1.5 g/L SDS; and (e) 2.0 g/L SDS.
79
Figure 4.14
Surface resistance of nickel films electrodeposited with different SDS
concentrations.
81
Figure 4.15
Figure 4.16
Figure 4.17
(a) SEM and (b) TEM micrographs of MnO2 thin film deposited onto
the Ni/CuS/PET substrate.
Cyclic voltammogram of electrochemical capacitor prototype fabricated
from the multilayers of MnO2/Ni/CuS/PET composite film.
Cyclic voltammogram of electrochemical capacitor prototype fabricated
from the multilayers of MnO2/Ni/CuS/PET composite film.
82
83
85
Figure 5.1 SEM micrographs of MnO2 films electrophoretic deposited at the
applied voltage of (a) 1.0 V and (b) 2.0 V.
92
Figure 5.2
(a) Cyclic voltammograms of EC prototypes with MnO2 thin films
deposited at different applied potentials, and (b) Effect of applied
potentials on specific capacitances (mF/cm²) of EPD MnO2 films.
93
Figure 5.3 MnO2 films deposited at a duration of (a) 5 minutes, (b) 25 minutes, and
(c) 30 minutes under constant applied potential of 2.0 V.
95
Figure 5.4 (a) Cyclic voltammogramms of EC prototypes with MnO2 thin films
deposited at various deposition durations, and (b) Specific capacitance
(mF/cm²) of the MnO2 films deposited at variable durations.
97
Figure 5.5 MnO2 films deposited in the presence of different types of dispersant
agents (sodium alginate: 5a - 5c; sodium tripolyphosphate: 5d – 5f) at
different concentrations (0.5 g/L: 5a and d; 1.0 g/L: 5b and e; 2.5 g/L:
5c and f). Insets of Figures 5b and 5e show TEM micrographs of MnO2
nanoparticles.
101
Figure 5.6 (a) Cyclic voltammograms of EC prototypes with MnO2 thin films
deposited in the presence of different concentrations of (a) sodium
alginate, and (b) sodium tripolyphosphate.
105
Figure 5.7 Comparison of charge capacity (mF/cm²) of EC prototypes with MnO2
films deposited in the presence of different dispersant agents at various
concentrations. (a) Sodium tripolyphosphate, and (b) sodium alginate.
106
Figure 5.8 Capacitive behaviors of EC prototypes with MnO2 thin film in 0.2 M
Na2SO4 aqueous solution. (a) cyclic voltammograms at various cycles,
and (b) variation of specific capacitances with number of cycles.
108
Figure 5.9 SEM micrograph of MnO2 films a) before cycling, and after cycling for
(b) 250 cycles, and c) 2500 cycles.
110
xiv
Figure 5.10 Cyclic voltammogram of EC prototypes with MnO2 thin film deposited
on Ni/CuS/PET supporting substrate at various cycles.
112
Figure 5.11 Comparison of specific capacitance (mF/cm²) of EC prototypes with
MnO2 thin films deposited on Ni/CuS/PET and sputtered-Ni/PET
substrates.
112
Figure 5.12
SEM micrographs of MnO2 film deposited on Ni/CuS/PET substrate: a)
before cycling, and b) after cycling for 2500 cycles.
113
xv
List of Abbreviations
AAS Atomic Absorption Spectrophotometer
ABS Acrylonitrile Butadiene Styrene
CMC Critical Micellar Concentration
CTAB Cetyl Trimethylammonium Bromide
CV Cyclic Voltammetry
DC Direct Current
EC Electrochemical Capacitor
ECD Electrochemical Deposition
EDLC Electrochemical Double Layer Capacitor
EDX Energy Dispersive X-Ray
EPD Electrophoretic Deposition
MWCNT Multiwalled Carbon Nanotube
PEI Polyethyleneimine
PET Polyethylene Terephthalate
SC Specific Capacitance
SCE Saturated Calomel Electrode
SDS Sodium Dodecyl Sulphate
SEM Scanning Electron Microscope
TEM Transmission Electron Microscope
xvi
List of Symbols
dm3 Cubic decimeter
C Capacitance
q Charge
V Voltage difference between plates
F/g Farad per gram
% Percentage
> Higher than
cm2 Centimeter square
mF/cm2 Millifarad per centimeter square
˚C Degree Celsius
β Beta
mg/cm2 Milligram per centimeter square
F/cm2 Farad per centimeter square
mV/s Millivolt per second
V Voltage
mm millimeter
mL milliliter
M Molarity
g/mol Gram per mole
mA Milliampere
g/L Gram per liter
kHz Kilohertz
nm Nanometer
Ω/square Ohm per square
1
CHAPTER 1
INTRODUCTION
1.1 Background
The rapid development of our society has aggravated environmental pollution and
escalated depletion of fossil fuels. There is a pressing need for research and development on more
environmental friendly and sustainable sources of energy as well as novel materials and
technologies associated with energy conversion and storage. The importance of nanostructured
thin-film materials for energy conversion and storage have resulted in a tremendous increase of
innovative thin-film processing technologies in recent years. Currently, this development goes
hand-in-hand with the explosion of scientific and technological breakthroughs in
microelectronics, optics and nanotechnology. Thin-film process technologies for films of
thicknesses ranging from one to several microns are essential for a multitude of applications such
as thermal barrier coatings and wear protections, enhancing service life of tools and to protect
materials against thermal and atmospheric influences (Lokhande et al., 2009).
Batteries and electrochemical capacitors represents the current state of the art of energy
storage technologies for storing kinetic, potential, chemical, magnetic, or thermo-chemical
energy. Batteries and low temperature fuel cells are some typical low power devices. In contrast,
electrochemical capacitors possess high power density but low energy density. Henceforth, a
combination of battery and electrochemical capacitor is expected to enhance the overall
performance in terms of power density and energy density. In addition, electrochemical
capacitors have a much longer cycle life than batteries because negligible chemical charge
2
transfer reactions are involved (Conway et al., 1997; Kötz and Carlen, 2000; Dario and Kötz,
2012; Deng et al., 2013).
Based on the current research and development trends, electrochemical capacitors can be
divided into three general classes, namely electrical-double layer capacitors, pseudocapacitors,
and hybrid capacitors with each class having its own unique individual characteristic mechanism
for storing charge, which are non-faradaic, faradaic, and a combination of the two, respectively.
Faradaic processes such as oxidation and reduction reactions involve the transfer of charge
between electrode and electrolyte. Hence, pseudo-capacitive electrochemical capacitors functions
based on the charge storage brought about by the fast and reversible redox reaction near the
surface of electroactive material (Shukla et al., 2012; Deng et al., 2013). Electrochemical
capacitor can be charged and discharged quickly like a capacitor, but it exhibits 20–200 times
greater capacitance than conventional capacitors. The higher capability of electrochemical
capacitor comes from the electrostatic storage of charge at the electrode surface. The transport of
ions in the electrolyte to the electrode surface is rapid, leading to fast charge and discharge
capability. The charging and discharging processes are highly reversible and do not require phase
changes in the electrodes. This, logically, also leads to increased cycle life compared to batteries
(Chu and Braatz, 2002). Electrochemical capacitor basically consists of two symmetrical
electrodes arranged in parallel or in array, separated by an aqueous or non-aqueous electrolyte
either in liquid or solid form that stores electrical energy at the electrode/electrolyte interface
(Kötz and Carlen, 2000; Choudhury et al., 2009).
Metal oxides present attractive alternatives as electrode materials due to their high
specific capacitance and comparatively low resistance, and hence their potential utility in
3
fabricating electrochemical capacitors of high energy and power density. Notably, ruthenium
dioxide (RuO2) has been known to exhibit very high specific capacitance which ranges from 720
F/g to 900 F/g. However, its high cost and scarcity have rendered its utilization for the fabrication
of electrochemical devices not economically feasible. As such, researchers have diverted their
attention towards other transition metal oxides including MnO2, NiO, Ni(OH)2, Co2O3, IrO2,
FeO, TiO2, SnO2, V2O5, and MoO (Jayalakshmi and Balasubramanian, 2008). Manganese oxide
is of particular interest because of its various potential applications, for instance, in
electrochemical, electrochromic, and fuel cell devices, (Ul Islam et al., 2005), as catalyst for a
wide range of industrial catalytic applications (Luo, 2007), molecular sieves, sensors (Umek et
al., 2011), ion-exchangers and selective adsorption materials of radio nuclides (Unuma et al.,
2003). Manganese dioxide (MnO2) is one of the most widely used and promising
pseudocapacitive electrode materials due to its high specific capacitance, low cost and
environmental compatibility (Deng et al., 2013).
In recent years, concerted efforts have been focused on the preparation and optimization
of manganese dioxide thin films for large-scale commercial production (Yan et al., 2009).
Nanoparticulate manganese dioxide thin films have been comprehensively studied in recent years
in order to gain better knowledge on its intrinsic properties and to determine the relations among
its morphological, structural, and compositional characteristics for enhancing performance as
electrochemical capacitors (Staiti and Lufrano, 2009). Manganese dioxide has been reported to
exhibit specific capacitance as high as 600 F/g for thin films and 150-300 F/g for powder-based
electrodes within a potential window of 0.9-1.2 V in aqueous electrolytes containing KCl, K2SO4,
Na2SO4, or KOH (Yang et al., 2009).
4
Nanostructured manganese dioxide thin films were synthesized mainly by wet chemical
processes such as anodic oxidation, electrodeposition, electroless deposition, successive ionic
layer adsorption and reaction (SILAR), chemical bath deposition, spin coating, dip coating, and
spray pyrolysis, but also by electron beam evaporation, chemical vapor deposition, reactive
sputtering, molecular beam epitaxy, pulsed layer deposition, and atomic layer deposition (Nilsen
et al., 2003). Thin-film deposition methods which involve growth from solution are known as
chemical methods. Chemical deposition methods are inexpensive, enable synthesis of thin-film
materials with complex chemical compositions, and require low operating temperature. The low
deposition temperature is highly desirable in order to avoid effects such as inter-diffusion,
contamination and dopant redistribution. Besides, the morphology of thin films can be easily
controlled via optimizing preparative parameters. Unlike physical deposition methods, chemical
deposition methods do not require high quality target or substrates nor do they require vacuum at
any stage of deposition process (Lokhande et al., 2011).
However, a main drawback in the deposition of MnO2 thin film by chemical methods is
the lack of stable Mn(IV) precursors in aqueous solution (Jacob and Zhitomirsky, 2008).
Chemical vapor deposition has advantages for thin-film manufacture in the industry as it has a
high growth rate, excellent conformality, no requirement for expensive vacuum equipment, and
due to the chemical nature of the process, it tends to produce adherent and durable films
(Warwick and Binions, 2014). However, the chemical vapor deposition (CVD) method is costly
and complicated for mass production (Chaoumead et al., 2013). For metal evaporation or
sputtering, this method can be quite complex requiring raised temperatures and a vacuum system
(Mallick et al., 2006). The hydrothermal method is attractive because of its operational
simplicity, good coating efficiency and capability for large scale production. Furthermore,
5
deposition on a 3D structure is an additional advantage of the hydrothermal deposition method,
with which a thin film can be deposited on all surfaces of supporting substrates (Yan et al.,
2012).
In this study, the novel self-assembly horizontal submersion and the electrophoretic
deposition processes have been demonstrated to be versatile and cost effective deposition
techniques for the deposition and optimization of nanoparticulate MnO2 thin films for the
fabrication of thin-film electrochemical capacitors.