GE4230 Micromirror Project 2

MICROMIRROR DESIGN USING SANDIA SUMMIT TOOLS

GE 4230: Design and Fabrication of MEMS Dr. Osama Jadaan

University of Wisconsin – Platteville Jon Zickermann

December 12, 2011

Abstract: Structural and modal finite element analysis (FEA) simulations were ran on the micromirror created in the previous project using ANSYS Workbench. The structural simulation determined the stresses and deformation of the mirror at 10° and if the mirror will fail at 5°. The modal analysis determined six resonant frequencies and corresponding modal shapes for each frequency.

1

TABLE OF CONTENTS Objective . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Development . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Mesh . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Loads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

2

OBJECTIVE Although the Sandia SUMMiT V tools allowed for the creation of a MEMS device, there is no certainty how the device will behave when a load is applied. To avoid high costs in real -world testing, the 3d model generated in AutoCAD can be imported into ANSYS workbench and real-world physics can be applied. For the torsional micromirror, a structural simulation was needed to determined the stresses and deformation of the mirror at 10° and if the mirror will fail at 5°. The modal analysis was needed to determine six resonant frequencies and corresponding modal shapes and deformation at each frequency.

DEVELOPMENT The first step to creating the simulation was to create a mesh for the model. Originally,

the imported model contained over 100,000 nodes, which was far too many for a simulation requiring a simple load for a design that would not be used in production; t oo many nodes for model only used to demonstrate the knowledge of using ANSYS Workbench. To reduce the number of nodes, mapped face shaping and body sizing operations were applied to cut down on the number of nodes from to about 50,000. The body sizes were around 100 µm for the substrate and closer to 10 µm for more vital structures such as the supports for the spring. Since the spring was the main focus of the simulation, the spring only received mapped face meshing.

The next was to fix the connections automatically generated by Workbench. By default, there were too many connections between objects that never made contact, such as the Poly0 layer to the spring. After, the contact tool was run and many connections were manually fixed since the simulation considered the connections to lack contact even if the two bodies were touching. This proved to fix problems with the simulation reporting errors with structures not initial contact.

Afterwards, the loads and supports were applied. For the static structural analysis, the Poly 0 layer was used as the fixed support to simplify and reduce the time to solve. The load was determined to be a 0.36117µN*µN moment. A moment was chosen since using a force resulted in the mirror bending downwards in both directions. The 0.36117µN*µN moment was determined experimentally from 3 separate moments and their deformations and the equation determined from the linear regression in excel (see appendix fig 1). For the modal analysis, the spring supports were assumed to be a fixed load due to the rigid body motion that resulted with only the substrate acting as a fixed support.

3

3D MODEL:

MESH:

4

STRESS IMAGES:

5

6

DEFORMATION IMAGES:

7

MODAL DEFORMATION RESULTS:

8

9

10

RESULTS Static Structural Results:

Object Name Maximum

Principal Stress Maximum

Principal Stress 2 Maximum

Principal Stress 3 Maximum

Principal Stress 4 Total

Deformation

Scope

Scoping Method

Geometry Selection

Geometry All Bodies 1 Body 2 Bodies All Bodies

Results

Minimum -1.5729e-003

MPa -2.2717e-004

MPa -1.5729e-003

MPa -5.3634e-004

MPa 0. µm

Maximum 6.277e-003 MPa 1.1628e-003

MPa 6.277e-003 MPa

1.5247e-003 MPa

19.164 µm

Minimum Occurs On

Spring Part 6 Poly0

Maximum Occurs On

Spring Part 6 Plate

Modal Results:

Type Total Deformation

Mode 1. 2. 3. 4. 5.

Identifier

Results

Minimum 0. µm

Maximum 1.3285e+005

µm 1.4596e+005

µm 2.0527e+005

µm 2.1181e+005

µm 2.1742e+005

µm

Minimum Occurs On

Substrate

Maximum Occurs On

Plate

Information

Reported Frequency

2.7379e-004 MHz

3.7744e-004 MHz

5.2514e-004 MHz

5.624e-004 MHz

9.1669e-004 MHz

DISCUSSION In the static structural tests, the maximum observed stresses were only 6Pa, far below

the yield of any material used in MEMS if the mirror was deformed to 10 degrees. Therefore, the mirror should not fracture at 5 degrees under normal operation. Looking at the images from the moment tests, the mirror will not be able to work since the mirror does not bend uniformly; the mirror looks like it twists rather than rotates. This is a result from oversupporting the spring to the Poly1 layer below. Originally there was a concern about the first design’s spring sagging without any loads, however the simulation could not be run in the design phase of the first project one due to lack of experience with ANSYS Workbench. If this design was to be used in real life, the supports would have to be removed to allow the mirror to rotate.

In the modal analysis, each frequency had a unique shape following one of three patterns: bending at the sides that were perpendicular to the supporting Poly1 layer structure, bending at the corners and bending both at the sides and corners. The shapes of the

11

deformation became more extreme as the frequency increased, slowing turning from a simple deformation similar to the static force where both sides deformed in the downward direction, to a complex deformation where all corners and both sides were deformed. In addition, the resonant frequencies occurred only at extremely high frequencies, where the lowest was reported at 2.7GHz, far lower than any mechanical vibration in a typical envi ronment. This could possibly be a result from the over-engineering done on the spring’s support structure.

CONCLUSION The results from Workbench conformed to the primary concern of the design - would

the design be strong enough to withstand a load strong enough to bend the mirror 10 degrees? From the FEA simulation, the answer was yes. However, the design would not be practical since the mirror does not rotate – instead, it bends and twists. This would not allow the mirror to reflect the total amount of light emitted. Looking at the animations and images from the simulation from both the structural and modal modes, the mirror was over-engineered from the fear of fracture. Therefore, the design needs to be re-considered with less support, requiring more testing and redesigns before this mirror should be considered for production . APPENDIX Fig 1: Moment Calculation: Distance for 10 degree angle:

Moment calculation: Torque vs Deformation

Deformation Moment

12 0.23

15.98 0.3

19 0.36

Required Moment

19.22 0.36117

y = 0.0185x + 0.0056

0.2

0.25

0.3

0.35

0.4

10 12 14 16 18 20

Def

orm

atio

n (μ

m)

Moment (μN*μm)

Torque vs Deformation

Fig 2: Preprocessing Data: Units

12

TABLE 1

Unit System Metric (µm, kg, µN, s, V, mA) Degrees rad/s Celsius

Angle Degrees

Rotational Velocity rad/s

Temperature Celsius

Mirror (A4, B4) Geometry

TABLE 2 Mirror (A4, B4) > Geometry

Object Name Geometry

State Fully Defined

Definition

Source J:\GE423\Micromirror\3d6\3d6.sat

Type ACIS

Length Unit Micrometers

Element Control Manual

Display Style Part Color

Bounding Box

Length X 330. µm

Length Y 252. µm

Length Z 15.73 µm

Properties

Volume 4.0907e+005 µm³

Mass 9.5314e-010 kg

Scale Factor Value 1.

Statistics

Bodies 20

Active Bodies 20

Nodes 63251

Elements 20598

Mesh Metric None

Preferences

Import Solid Bodies Yes

Import Surface Bodies Yes

Import Line Bodies No

Parameter Processing Yes

Personal Parameter Key DS

CAD Attribute Transfer No

Named Selection Processing No

Material Properties Transfer No

CAD Associativity Yes

Import Coordinate Systems No

Reader Save Part File No

Import Using Instances Yes

Do Smart Update No

Attach File Via Temp File Yes

Temporary Directory C:\Documents and Settings\Student\Application Data\Ansys\v121

Analysis Type 3-D

Mixed Import Resolution None

13

Enclosure and Symmetry Processing Yes

TABLE 3 Mirror (A4, B4) > Geometry > Parts

Object Name Substrate Thermal Electrical

State Meshed

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No

Stiffness Behavior Flexible

Brick Integration Scheme Full

Coordinate System Default Coordinate System

Reference Temperature By Environment

Material

Assignment Silicon Anisotropic

Nonlinear Effects Yes

Thermal Strain Effects Yes

Bounding Box

Length X 330. µm

Length Y 252. µm

Length Z 1. µm 0.63 µm 0.8 µm

Properties

Volume 83160 µm³ 52391 µm³ 66528 µm³

Mass 1.9376e-010 kg 1.2207e-010 kg 1.5501e-010 kg

Centroid X 2212.2 µm

Centroid Y 1511.1 µm

Centroid Z 0.5 µm 1.315 µm 2.03 µm

Moment of Inertia Ip1 1.0254e-006 kg·µm² 6.46e-007 kg·µm² 8.2032e-007 kg·µm²



Statistics

Nodes 287 5888

Elements 32 800

Mesh Metric None

TABLE 4 Mirror (A4, B4) > Geometry > Body Groups

Object Name Part 4 Part 5 Part 6 Base

State Meshed

Graphics Properties

Visible Yes

Definition

Suppressed No



Bounding Box

Length X 330. µm 310. µm 294. µm 310. µm

Length Y 252. µm 232. µm 226. µm 232. µm

Length Z 0.3 µm 3. µm 1.61 µm 3.5 µm

14

Properties

Volume 24947 µm³ 20793 µm³ 129.29 µm³ 29970 µm³

Mass 5.8127e-011 kg 4.8448e-011 kg 3.0124e-013 kg 6.9831e-011 kg

Centroid X 0. µm 2335.5 µm 2212.2 µm

Centroid Y 0. µm 1511.6 µm

Centroid Z 0. µm 5.1149 µm 4.535 µm 6.4504 µm

Moment of Inertia Ip1 0. kg·µm² 9.1465e-008 kg·µm² 2.2198e-009 kg·µm² 2.6271e-007 kg·µm²



Statistics

Nodes 12071 5533 2784 4118

Elements 1664 2471 272 1918

Mesh Metric None

TABLE 5 Mirror (A4, B4) > Geometry > Part 4 > Parts

Object Name Poly0

State Meshed

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





Material




Bounding Box

Length X 330. µm

Length Y 252. µm

Length Z 0.3 µm

Properties

Volume 24947 µm³

Mass 5.8127e-011 kg



Centroid Z 2.58 µm

Moment of Inertia Ip1 3.076e-007 kg·µm²



Statistics

Nodes 12071

Elements 1664

Mesh Metric None


15

Object Name Part 5 Part 6

State Fully Defined

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





Material




Bounding Box

Length X 110. µm

Length Y 232. µm

Length Z 3. µm

Properties

Volume 10397 µm³

Mass 2.4224e-011 kg

Centroid X 2088.9 µm 2335.5 µm


Centroid Z 5.1149 µm

Moment of Inertia Ip1 9.1268e-008 kg·µm² 9.1465e-008 kg·µm²



Statistics

Nodes 2759 2774

Elements 1233 1238

Mesh Metric None


Object Name Part 7 Part 8 Part 9 Part 10 Part 11

State Fully Defined

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





Material




16

Bounding Box

Length X 19.859 µm 1.9998 µm 19.859 µm

Length Y 1.9999 µm

Length Z 1.61 µm

Properties

Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³

Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg

Centroid X 2079.7 µm 2344.7 µm 2358.2 µm 2079.7 µm

Centroid Y 1401.6 µm 1621.6 µm 1456.6 µm 1511.6 µm 1456.6 µm





Statistics

Nodes 324 96 324

Elements 32 8 32

Mesh Metric None


Object Name Part 12 Part 13 Part 14 Part 15 Part 16

State Fully Defined

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





Material




Bounding Box

Length X 19.859 µm 1.9998 µm 19.859 µm

Length Y 1.9999 µm

Length Z 1.61 µm

Properties

Volume 15.518 µm³ 2.5727 µm³ 15.518 µm³

Mass 3.6156e-014 kg 5.9944e-015 kg 3.6156e-014 kg

Centroid X 2344.7 µm 2079.7 µm 2066.2 µm 2344.7 µm

Centroid Y 1566.6 µm 1511.6 µm 1623.6 µm 1399.6 µm





Statistics

Nodes 324 96 324

17

Elements 32 8 32

Mesh Metric None

TABLE 9 Mirror (A4, B4) > Geometry > Base > Parts

Object Name Right Left

State Fully Defined

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





Material




Bounding Box

Length X 110. µm

Length Y 232. µm

Length Z 3.5 µm

Properties

Volume 14985 µm³

Mass 3.4915e-011 kg

Centroid X 2088.4 µm 2336.1 µm






Statistics

Nodes 2088 2030

Elements 979 939

Mesh Metric None

TABLE 10 Mirror (A4, B4) > Geometry > Parts

Object Name Spring Plate

State Meshed

Graphics Properties

Visible Yes

Transparency 1

Definition

Suppressed No





18

Material




Bounding Box

Length X 300. µm 216. µm

Length Y 60. µm 218. µm

Length Z 4.25 µm

Properties

Volume 28294 µm³ 1.0286e+005 µm³

Mass 6.5925e-011 kg 2.3966e-010 kg



Centroid Z 10.299 µm 14.561 µm




Statistics

Nodes 13590 13092

Elements 6602 6039

Mesh Metric None

Coordinate Systems TABLE 11

Mirror (A4, B4) > Coordinate Systems > Coordinate System

Object Name Global Coordinate System

State Fully Defined

Definition

Type Cartesian

Ansys System Number 0.

Origin

Origin X 0. µm

Origin Y 0. µm

Origin Z 0. µm

Directional Vectors

X Axis Data [ 1. 0. 0. ]

Y Axis Data [ 0. 1. 0. ]

Z Axis Data [ 0. 0. 1. ]

Connections TABLE 12

Mirror (A4, B4) > Connections

Object Name Connections

State Fully Defined

Auto Detection

Generate Contact On Update

Yes

Tolerance Type Slider

Tolerance Slider 0.

Tolerance Value 1.0388 µm

Face/Face Yes

19

Face/Edge No

Edge/Edge No

Priority Include All

Group By Bodies

Search Across Bodies

Revolute Joints Yes

Fixed Joints Yes

Transparency

Enabled Yes

Analysis Data Management

Solver Files Directory

C:\Documents and Settings\Student\Desktop\wb\wb_files\dp0\global\MECH\SYS\Contact Tool\

TABLE 13 Mirror (A4, B4) > Connections > Contact Regions

Object Name Bonded -

Substrate To Thermal

Bonded - Thermal To Electrical

Bonded - Electrical To

Poly0

Bonded - Part 5 To Part 11

Bonded - Part 5 To Part 13

State Fully Defined

Scope

Scoping Method

Geometry Selection

Contact 1 Face 5 Faces

Target 1 Face 5 Faces

Contact Bodies

Substrate Thermal Electrical Part 5

Target Bodies

Thermal Electrical Poly0 Part 11 Part 13

Definition

Type Bonded

Scope Mode Automatic

Behavior Symmetric

Suppressed No

Advanced

Formulation Pure Penalty

Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region

Program Controlled


Object Name Bonded - Part 5

To Right Bonded - Part 6

To Part 12 Bonded - Part 6



To Right

State Fully Defined

Scope

Scoping Method

Geometry Selection

Contact 26 Faces 5 Faces

Target 46 Faces 5 Faces

20

Contact Bodies

Part 5 Part 6 Part 7

Target Bodies Right Part 12 Part 15 Part 16 Right

Definition

Type Bonded


Behavior Symmetric

Suppressed No

Advanced


Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region

Program Controlled




To Left Bonded - Part

10 To Left Bonded - Part 11

To Right Bonded - Part

12 To Left

State Fully Defined

Scope

Scoping Method

Geometry Selection

Contact 5 Faces

Target 5 Faces

Contact Bodies

Part 8 Part 9 Part 10 Part 11 Part 12

Target Bodies Right Left Right Left

Definition

Type Bonded


Behavior Symmetric

Suppressed No

Advanced


Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region

Program Controlled




To Right Bonded - Part

15 To Left Bonded - Part

16 To Left Bonded - Right

To Spring

State Fully Defined

Scope

Scoping Method

Geometry Selection

21

Contact 5 Faces 1 Face

Target 5 Faces 3 Faces

Contact Bodies

Part 13 Part 14 Part 15 Part 16 Right

Target Bodies Right Left Spring

Definition

Type Bonded


Behavior Symmetric

Suppressed No

Advanced


Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region

Program Controlled


Object Name Bonded - Left

To Spring Bonded - Spring

To Plate Bonded - Part 5

To Poly0 Bonded - Part 6

To Poly0 Bonded - Part 7

To Part 5

State Fully Defined

Scope

Scoping Method

Geometry Selection

Contact 1 Face 7 Faces 4 Faces

Target 3 Faces 1 Face 5 Faces

Contact Bodies

Left Spring Part 5 Part 6 Part 7

Target Bodies Spring Plate Poly0 Part 5

Definition

Type Bonded

Scope Mode Automatic Manual

Behavior Symmetric

Suppressed No

Advanced


Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region

Program Controlled


Object Name Bonded - Part 14 To

Part 5 Bonded - Part 5 To

Part 8 Bonded - Left To

Multiple Bonded - Left To

Part 6

State Fully Defined

Scope

22

Scoping Method

Geometry Selection

Contact 4 Faces 12 Faces 1 Face

Target 4 Faces 12 Faces 1 Face

Contact Bodies Part 14 Part 5 Left

Target Bodies Part 5 Part 8 Multiple Part 6

Definition

Type Bonded

Scope Mode Manual

Behavior Symmetric

Suppressed No

Advanced


Normal Stiffness

Program Controlled

Update Stiffness

Never

Pinball Region Program Controlled

TABLE 19 Mirror (A4, B4) > Connections > Contact Tools

Object Name Contact Tool

State Solved

Scope

Scoping Method Worksheet

Mirror (A4, B4) > Connections > Contact Tool

Name Contact Side

Bonded - Substrate To Thermal Both

Bonded - Thermal To Electrical Both

Bonded - Electrical To Poly0 Both

Bonded - Part 5 To Part 11 Both


Bonded - Part 5 To Right Both






Bonded - Part 9 To Left Both








Bonded - Right To Spring Both

Bonded - Left To Spring Both

Bonded - Spring To Plate Both

Bonded - Part 5 To Poly0 Both

23

Bonded - Part 6 To Poly0 Both

TABLE 20 Mirror (A4, B4) > Connections > Contact Tool > Contact Data Tables

Object Name Initial Information

State Solved

Mirror (A4, B4) > Connections > Contact Tool > Initial Information

Name Contact Side

Type Status Number

Contacting

Penetration (µm)

Gap (µm

)

Geometric Penetratio

n (µm)

Geometric Gap (µm)

Resulting Pinball

(µm)

Real Constan

t

Bonded -

Substrate To

Thermal

Contact

Bonded

Closed

32. 0. 0. 2.2204e-

016 2.2204e-

016 3.7529 21.

Bonded -

Substrate To

Thermal

Target Bonde

d Close

d 800. 0. 0.

2.2204e-016

2.2204e-016

0.7604 22.

Bonded -

Thermal To

Electrical

Contact

Bonded

Closed

800. 0. 0. 4.4409e-

016 4.4409e-

016 0.76912 23.

Bonded -

Thermal To

Electrical

Target Bonde

d Close

d 800. 0. 0.

4.4409e-016

4.4409e-016

0.7604 24.

Bonded -

Electrical To

Poly0

Contact

Bonded

Closed

800. 0. 0. 4.4409e-

016 8.8818e-

016 0.76912 25.

Bonded -

Electrical To

Poly0

Target Bonde

d Close

d 1664. 0. 0.

1.3323e-015

8.8818e-016

0.49999 26.

Bonded - Part 5 To Part

11

Contact

Bonded

Closed

20. 0. 0. 6.8212e-

013 9.0949e-

013 0.31581 27.


11

Target Bonde

d Close

d 60. 0. 0.

4.5475e-013

2.2737e-013

0.26989 28.


13

Contact

Bonded

Closed

20. 0. 0. 4.5475e-

013 4.5475e-

013 0.31581 29.

Bonded Target Bonde Close 60. 0. 0. 4.5475e- 4.5475e- 0.26989 30.

24

- Part 5 To Part

13

d d 013 013

Bonded - Part 5 To Right

Contact

Bonded

Closed

342. 2.2737e-

013 0. 0.325 0.2251 0.68128 31.


Target Bonde

d Close

d 266.

2.2737e-013

0. 0.33066 0.2251 1.0985 32.


12

Contact

Bonded

Closed

20. 0. 0. 9.0949e-

013 4.5475e-

013 0.31803 33.


12

Target Bonde

d Close

d 60. 0. 0.

2.2737e-013

9.0949e-013

0.26989 34.


15

Contact

Bonded

Closed

20. 0. 0. 9.0949e-

013 4.5475e-

013 0.31774 35.


15

Target Bonde

d Close

d 60. 0. 0.

4.5475e-013

4.5475e-013

0.26989 36.


16

Contact

Bonded

Closed

20. 0. 0. 9.0949e-

013 9.0949e-

013 0.31774 37.


16

Target Bonde

d Close

d 60. 0. 0.

4.5475e-013

9.0949e-013

0.26989 38.


Contact

Bonded

Closed

52. 0. 0. 4.5475e-

013 2.2737e-

013 0.30566 39.


Target Bonde

d Close

d 16. 0. 0.

4.5475e-013

4.5475e-013

1.4671 40.


Contact

Bonded

Closed

52. 0. 0. 4.5475e-

013 2.2737e-

013 0.29754 41.


Target Bonde

d Close

d 16. 0. 0.

4.5475e-013

4.5475e-013

1.2457 42.

Bonded - Part 9 To Left

Contact

Bonded

Closed

52. 0. 0. 2.2737e-

013 4.5475e-

013 0.30566 43.


Target Bonde

d Close

d 16. 0. 0.

9.0949e-013

9.0949e-013

1.8976 44.

Bonded - Part 10

Contact

Bonded

Closed

16. 0. 0. 4.5475e-

013 9.0949e-

013 0.25178 45.

25

To Left


Target Bonde

d Close

d 36. 0. 0.

9.0949e-013

4.5475e-013

0.16123 46.


Contact

Bonded

Closed

52. 0. 0. 4.5475e-

013 4.5475e-

013 0.30566 47.


Target Bonde

d Close

d 16. 0. 0.

9.0949e-013

4.5475e-013

1.8932 48.


Contact

Bonded

Closed

52. 0. 0. 2.2737e-

013 4.5475e-

013 0.29754 49.


Target Bonde

d Close

d 16. 0. 0.

9.0949e-013

9.0949e-013

1.6997 50.


Contact

Bonded

Closed

52. 0. 0. 4.5475e-

013 4.5475e-

013 0.30566 51.


Target Bonde

d Close

d 16. 0. 0.

9.0949e-013

9.0949e-013

1.9022 52.


Contact

Bonded

Closed

16. 0. 0. 4.5475e-

013 4.5475e-

013 0.25178 53.


Target Bonde

d Close

d 36. 0. 0.

9.0949e-013

4.5475e-013

0.17247 54.


Contact

Bonded

Closed

52. 0. 0. 2.2737e-

013 4.5475e-

013 0.30566 55.


Target Bonde

d Close

d 16. 0. 0.

1.3642e-012

4.5475e-013

1.7209 56.


Contact

Bonded

Closed

52. 0. 0. 4.5475e-

013 4.5475e-

013 0.29754 57.


Target Bonde

d Close

d 16. 0. 0.

9.0949e-013

4.5475e-013

1.8058 58.

Bonded - Right

To Spring

Contact

Bonded

Closed

6. 0. 0. 8.8818e-

016 1.7764e-

015 1.2151 59.

Bonded - Right

To Spring

Target Bonde

d Close

d 98. 0. 0.

1.7764e-015

8.8818e-016

0.28404 60.

Bonded - Left To Spring

Contact

Bonded

Closed

6. 0. 0. 8.8818e-

016 0. 1.2295 61.

Bonded - Left To

Target Bonde

d Close

d 98. 0. 0.

8.8818e-016

8.8818e-016

0.27719 62.

26

Spring

Bonded - Spring To Plate

Contact

Bonded

Closed

189. 0. 0. 5.3291e-

015 1.7764e-

015 0.5566 63.

Bonded - Spring To Plate

Target Bonde

d Close

d 224. 0. 0.

1.7764e-015

7.1054e-015

0.48926 64.

Bonded - Part 5

To Poly0

Contact

Bonded

Closed

50. 0. 0. 4.4409e-

016 1.3323e-

015 0.42916 65.

Bonded - Part 5

To Poly0 Target

Bonded

Closed

28. 0. 0. 4.4409e-

016 8.8818e-

016 0.49999 66.

Bonded - Part 6

To Poly0

Contact

Bonded

Closed

50. 0. 0. 8.8818e-

016 1.3323e-

015 0.42916 67.

Bonded - Part 6

To Poly0 Target

Bonded

Closed

28. 0. 0. 0. 8.8818e-

016 0.49999 68.

Mesh TABLE 21

Mirror (A4, B4) > Mesh

Object Name Mesh

State Solved

Defaults

Physics Preference Mechanical

Relevance 0

Sizing

Use Advanced Size Function Off

Relevance Center Medium

Element Size Default

Initial Size Seed Active Assembly

Smoothing High

Transition Fast

Span Angle Center Fine

Minimum Edge Length 0.30 µm

Inflation

Use Automatic Tet Inflation None

Inflation Option Smooth Transition

Transition Ratio 0.272

Maximum Layers 5

Growth Rate 1.2

Inflation Algorithm Pre

View Advanced Options No

Advanced

Shape Checking Standard Mechanical

Element Midside Nodes Program Controlled

Straight Sided Elements No

Number of Retries Default (4)

Rigid Body Behavior Dimensionally Reduced

27

Mesh Morphing Disabled

Pinch

Pinch Tolerance Please Define

Generate on Refresh No

Statistics

Nodes 63251

Elements 20598

Mesh Metric None

TABLE 22 Mirror (A4, B4) > Mesh > Mesh Controls

Object Name Mapped Face Meshing Body Sizing Body Sizing 2 Body Sizing 3

State Ignored Fully Defined

Scope

Scoping Method Geometry Selection Geometry Selection

Geometry 6 Faces 1 Body 4 Bodies 1 Body

Definition

Suppressed No No

Constrain Boundary No

Type Element Size

Element Size 100. µm 50. µm 10. µm

Behavior Soft

Advanced

Specified Sides None

Specified Corners None

Specified Ends None

FIGURE 1 Mirror (A4, B4) > Mesh > Image

Static Structural (A5)

TABLE 23 Mirror (A4, B4) > Analysis

Object Name Static Structural (A5)

State Solved

Definition

Physics Type Structural

Analysis Type Static Structural

Solver Target ANSYS Mechanical

Options

Environment Temperature 22. °C

Generate Input Only No

TABLE 24 Mirror (A4, B4) > Static Structural (A5) > Analysis Settings

Object Name Analysis Settings

State Fully Defined

Step Controls

Number Of Steps 1.

Current Step Number 1.

Step End Time 1. s

Auto Time Stepping Program Controlled

Solver Controls

28

Solver Type Program Controlled

Weak Springs Off

Large Deflection Off

Inertia Relief Off

Nonlinear Controls

Force Convergence Program Controlled

Moment Convergence Program Controlled

Displacement Convergence Program Controlled

Rotation Convergence Program Controlled

Line Search Program Controlled

Output Controls

Calculate Stress Yes

Calculate Strain Yes

Calculate Contact No

Calculate Results At All Time Points

Analysis Data Management

Solver Files Directory C:\Documents and Settings\Student\Desktop\wb\wb_files\dp0\SYS\MECH\

Future Analysis Prestressed analysis

Scratch Solver Files Directory

Save ANSYS db Yes

Delete Unneeded Files Yes

Nonlinear Solution No

Solver Units Active System

Solver Unit System µmks

TABLE 25 Mirror (A4, B4) > Static Structural (A5) > Loads

Object Name Moment Fixed Support 4

State Fully Defined

Scope

Scoping Method Geometry Selection

Geometry 1 Face

Definition

Type Moment Fixed Support

Define By Components

Coordinate System Global Coordinate System

X Component -0.36117 µN·µm (ramped)

Y Component 0. µN·µm (ramped)

Z Component 0. µN·µm (ramped)

Suppressed No

Behavior Deformable

Advanced

Pinball Region All