G-30-045AH14 Rev 06

PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

A Resource for Semiconductor Manufacturers

Source Body ComponentsNon-Vaporizer / VaporizerPgs. 2-11

Extraction Electrode Version 34Pgs. 14-19

GSD AnalyzerComponents

Pg. 20High Current Post Accel Extraction Electrode Assembly/Beam GuidePg. 21

Faraday Flag ComponentsPg. 22-25

Electron Shower ComponentsPg. 26-28

Electron Shower Housing and Assembly for Eaton GSD

Pg. 29-31

Plasma Shower Components

Pg. 34-37

Faraday Strike PlatesPg. 39

GSD Water Cooled & Non-Water Cooled Bushing and Liner Flange Upgrades

Pgs. 12-13

Illustrated Parts Guide for Axcelis GSD 200E

G-30-045AH14 Rev 062 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82411 SHCS 6-32 X 3/8” , SST 4400044 22 82420 SHCS 6-32 X 5/8” , SST 4400061 63 82469 #6 Washer, 18-8 , SST, .032TH, 5/16 ID, 1/4 OD 8462-0043-0001 64 82604 Lock Washer No.6 Internal Tooth 4400059 15 82606 #6 Regular Spring Washer, 18-8 , SST 4400034 66 82625 BHSS 6-32x1/4”, SST 44K00002 17 99014 Retainer Pin Assembly 1200080 48 99022 Filament Insulator, Ceramic 1708680 19 99176 Ball Joint, Graphite 17021591 110 99177 SKT Joint 17033150 111 99292 Shoulder Screw Spacer 17128230 412 99338 Arc Chamber Mounting Screw 17127640 413 99428 Cathode Wire 17156990 114 99429 Repeller, Tungsten 17170600 115 99430 Repeller Screw 17170610 116 99589 GSD ELS Arc Chmb., .313 Repeller Hole, No Vaporizer Ports, No Liner Pocket, Tungsten 17133310 117 99172A Compression Spring, Inconel 17033140 118 99285A Spacer, Alumina 17124410 419 99290W Face Plate, 15R, Tungsten 17129020 120 99401B Insulator Mounting Block 17287870 121 99404A Screw Retainer 17189140 122 99409W Cathode Repeller, Tungsten 17133340 123 99410GC Cathode Support Plate, Graphite 17287860 124 99412A Repeller Insulator 17170590 125 99413A GSD ELS Cathode, Arc Wire, w/ 4.6mm Tungsten Button 17158000 126 99477A GSD ELS Filament, .040 17287850 127 99176C Ball Joint, Alumina 1728769028 99177C SKT Joint, Alumina 1728768029 99664A Compression Spring, Gas Feed, GSD, Long Life Gas Feed, GSD, Long Life 17270640

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Source Body ComponentsNon-Vaporizer

G-30-045AH14 Rev 063 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82411 SHCS 6-32 X 3/8” , SST 4400044 22 82420 SHCS 6-32 X 5/8” , SST 4400061 63 82469 #6 Washer, .032TH, 5/16 ID, 1/4 OD, 18-8 SST 8462-0043-0001 64 82604 Lock Washer No.6 Internal Tooth 4400059 15 82606 #6 Regular Spring Washer, 18-8 , SST 4400034 66 82625 BHSS 6-32x1/4”, SST 44K00002 17 99014 Retainer Pin Assembly 1200080 48 99176 Ball Joint, Graphite 17021591 19 99177 SKT Joint 17033150 110 99290 Face Plate, 15 R 17128110 111 99338 Arc Chamber Mounting Screw 17127640 412 99403 Repeller Screw 17121770 113 99405 Repeller Set Screw 17121760 114 99406 Repeller, Moly 17121740 115 99409 Cathode Repeller, Molybdenum 17121930 116 99412 Repeller Insulator 17121850 117 99415 Inner Cup Shield, Molybdenum 17121750 118 99428 Cathode Wire 17156990 119 99477A GSD ELS Filament, .040 17287850 120 99410GC Cathode Support Plate, Graphite 17287860 REV A 121 99172A Compression Spring, Inconel 17033140 122 99285A Spacer, Alumina 17124410 423 99286C Arc Chamber, ELS Standard, Without Vaporizer Ports, .140 Dia. Repeller Hole, Molybdenum 17133400, 17235720 124 99404A Screw Retainer 17189140 125 99413A GSD ELS Cathode, Arc Wire, w/ 4.6mm Tungsten Button 17158000 1

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Source Body ComponentsNon-Vaporizer, Molybdenum

G-30-045AH14 Rev 064 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82337 Nut 5/8-11 Hex, , SST 5053-0027-0632 22 82420 SHCS 6-32 X 5/8”, , SST 4400061 63 82439 SHCS 10-32 X 3/8” , SST 4400001 24 82469 #6 WASHER, 18-8 , SST, .032TH, 5/16 ID, 1/4 OD 8462-0043-0001 65 82474 #8 Flat Washer, Standard, 18-8 , SST 8462-0004-0807 46 82491 Washer Filament Feed-Thru 1700250 27 82606 #6 Regular Spring Washer, 18-8 , SST 4400034 68 82608 Lock Washer No.10 Regular Spring 8465-0002-0102 29 82630 8-32 X 1/4”, Button Head Socket Screw, , SST 4400735 410 82631 8-32 X 3/8” Button Head Socket Screw, , SST 4400183 111 83114 O-Ring, -214 Buna N No OEM Reference 212 83264 O-Ring, 364 Buna-N 3500028 113 99252 Vaporizer Exit Shield No OEM Reference 114 99277 Source Body 17174120 115 99293 Shoulder Screw Spring 4001166 416 99407 Filament Clamp 17287880 217 99414 Filament Feed Strap 17133300 218 99422 Insulator, Cathode Feed Thru 17147310 119 99426 Feed-Thru Cathode 1910710 120 99445 Connector, Feed-Thru / Cathode 5101979 121 82207V O-Ring, -208 Viton® No OEM Reference 222 99324A Feed-Thru Insulator, Long, Vespel 17127830 2

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G-30-045AH14 Rev 065 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82442 SHCS 10-32 X 1 , SST 4400022 42 82527 Fitting, Connector, 1/4”, 1/8” Male NPT, , SST 3400064 13 82655 BHSS 1/4”-20 X 1” , SST 4500263 44 82528 Fitting, Male Elbow, 1/4” TUBE, 1/8 NPT, 3400501 15 82708 Knob, Plastic Fluted Hand Knob 4000861 26 82751 Tube 1/4”OD X .040 Wall LDPE Yellow 7500007 13.5”7 83701 Fitting, QC Series Instrumentation Quick Connect Stem, Key 1 No OEM Reference 18 83703 Fitting, QC Series Instrumentation Quick Connect Stem, Key 3 No OEM Reference 19 99120 Threaded Stud 1700220 210 99251 Vaporizer Blank-off Plate No OEM Reference 111 99326 Source Handle 17036660 212 99327 Feed-Thru Connector 17033010 113 99329 Positive Feed-Thru 17033021 114 99330 Negative Feed-Thru 17033020 115 99333 Gas Feed Tube Assembly 17032980 116 99418 Insulator 17127840 117 82535A Fitting, Union Elbow, 1/4” W/O Nut, , SST No OEM Reference 118 83141V O-Ring,-241, Viton® 3500344 119 8A130 Street Elbow, 45º 1/8 NPTF X 1/8 NPTM, , SST 3401279 2

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G-30-045AH14 Rev 066 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM1 99589 GSD ELS Arc Chmb., .313 Repeller Hole, No Vaporizer Ports, No Liner Pocket, Tungsten 171333102 99290 GSD Face Plate, 15R, Molybdenum 171281103 99402 GSD Face Plate, 20R, Molybdenum 171555804 99290T15 GSD Face Plate, Molybdenum 172301005 99290T15W GSD Face Plate, Tungsten 172300906 99290W GSD Face Plate, 15R, Tungsten 171290207 99402W GSD Face Plate, 20R, Tungsten 17155580

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Source Body Arc Chamber / Face PlatesNon-Vaporizer

G-30-045AH14 Rev 067 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82411 SHCS 6-32 X 3/8” , SST 4400044 22 82420 SHCS 6-32 X 5/8” , SST 4400061 63 82469 #6 WASHER, 18-8 , SST, .032TH, 5/16 ID, 1/4 OD 4400232 64 82604 Lock Washer No.6 Internal Tooth 4400059 15 82606 No.6 Regular Spring Washer, 18-8 , SST 4400034 66 82625 BHSS 6-32x1/4”, SST 44K00002 17 99014 Retainer Pin Assembly 17036440 48 99022 Filament Insulator, Ceramic 1708680 19 99338 Arc Chamber Mounting Screw 17127640 410 99428 Cathode Wire 17156990 111 99429 Repeller, Tungsten 17170600 112 99430 Repeller Screw 17170610 113 99595 Arc Chamber, ELS, W/ Vaporizer Ports, No Liner Pocket, Tungsten 17133310 114 99285A Ceramic Spacer 17124410 415 99401B Insulator Mounting Block W/ Screws 17287870 116 99404A Screw Retainer, No Slots 17189140 117 99412A Repeller Insulator 17170590 118 99290T15W Face Plate, T15, Tungsten 17230090 1

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Source Body ComponentsVaporizer

G-30-045AH14 Rev 068 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82439 SHCS 10-32 X 3/8” , SST 4400001 22 82474 No.8 Flat Washer, Standard, 18-8 , SST 4400498 43 82478 Washer No.10 Standard 18-8 , SST 4400007 24 82608 Lock Washer No.10 Regular Spring 4400041 25 82630 8-32 X 1/4”, Button Head Socket Screw, , SST 4400735 46 82633 BHSS 8-32 X .50 Long 18-8 , SST 4400042 17 99176 Ball Joint, Graphite 17021591 38 99292 Shoulder Screw Spacer 17128230 49 99293 Shoulder Screw Spring 4001166 410 99331 Retainer Washer, Vaporizer Heat Shield 17033100 111 99407 Filament Clamp 17287880 212 99422 Insulator, Cathode Feed Thru 17147310 113 99445 Connector, Feed-Thru / Cathode 5101979 114 99172A Compression Spring, Inconel 17033140 315 99183B Heat Shield Assembly 17142660 1

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G-30-045AH14 Rev 069 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82337 Nut 5/8-11 Hex , SST 4400006 22 82491 Washer Filament Feed-Thru 1700250 23 82655 BHSS 1/4”-20 X 1” , SST 4500263 44 83114 O-Ring, -214 Buna N No OEM Reference 25 83264 O-Ring, 364 Buna-N 3500028 16 99277 Source Body W/ Vaporizer Ports 17174120 17 99326 Source Handle 1703660 28 99426 Feed-Thru Cathode 1910710 19 82207V O-Ring, -208, Viton® No OEM Reference 2

10 99324A Feed-Thru Insulator, Long 17127830 2

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G-30-045AH14 Rev 0610 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82442 SHCS 10-32 X 1 , SST 4400022 42 82527 Fitting, Connector, 1/4”, 1/8” Male NPT, 316 , SST 3400064 13 82528 Fitting, Male Elbow, 1/4” TUBE, 1/8 NPT, 316 , SST 3400501 14 82535 Fitting, Union Elbow, 1/4”, 316 , SST 3400062 15 82708 Knob, Plastic Fluted Hand Knob 4000861 26 82751 Tube 1/4”ODX.040 Wall LDPE Yellow 7500007 13.5”7 83701 Fitting, QC Series Instrumentation Quick Connect Stem, Key 1 No OEM Reference 18 83702 Fitting, QC Series Instrumentation Quick Connect Stem, Key 2 No OEM Reference 19 99120 Threaded Stud 1700220 210 99327 Feed-Thru Connector 17033010 111 99329 Positive Feed-Thru 17033021 112 99330 Negative Feed-Thru 17033020 113 99333 Gas Feed Tube Assembly 17032980 114 99335 Cooling Tube Assembly 1200850 115 99418 Insulator 17127840 116 99551 Dual Vaporizer Assembly, 1-1/8” Nozzle Thread, 17033330 117 83141V O-Ring -241, Viton® 3500344 118 8A130 Street Elbow, 45 DEG. 1/8 NPTF X 1/8 NPTM, SS 3401279 2

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G-30-045AH14 Rev 0611 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM1 99333A-S1 Gas Feed Tube Assembly, Stainless Body, Stainless Fitting No OEM Reference2 99333AM-S1 Gas Feed Tube Assembly, Molybdenum Body, Stainless Fitting No OEM Reference3 99334A Gas Feed Nozzle, Tungsten No OEM Reference4 99334AG Gas Feed Nozzle, Graphite No OEM Reference5 99334AM Gas Feed Nozzle, Molybdenum No OEM Reference

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Gas Feed Tube and Nozzle Options (Used in place of OEM P/N 17032980 - Glemco P/N 99333)

G-30-045AH14 Rev 0612 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 99196 Source Cooling Flange, Modified 11026870MOD 12 99280A Source Liner, Modified 17263590MOD 13 99453A Beam Defining Aperture 17208240 14 99462 Source Collar 1190320 15 99463 Source Clamp Ring, Graphite 17128740 16 99548 Source Shield 17139160, 17128250 17 99636 GSD II Source Bushing, High Voltage 11022760 1

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GSD Water Cooled Bushing and Liner Flange Upgrades

G-30-045AH14 Rev 0613 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM1 99196A Source Flange, Modified 11051680MOD2 99280C Liner Source Housing, Modified 172635903 99453A Beam Defining Aperture 172082404 99454B Source Bushing, High Voltage Insulating, Non-Lead 173224005 99462C Source Collar 11903206 99548B Source Shield, Fixed Clamp Flange, Graphite 17304460

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GSD Non-Water Cooled Bushing and Liner Flange Enhanced Upgrades

G-30-045AH14 Rev 0614 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82456 Washer, #4, .028” Thick X .125” ID X .250” OD, 300 Series, , SST 4400035 62 82580 4-40 X 3/8”, Flat Head Socket Screw, 18-8 , SST 4400208 63 82735 8-32 X 5/8” Flat Head Cap Screw, Slotted, Vented, , SST 4400619 64 82737 Flat Head Screw, 8-32 X 3/4”, Slotted, Vented 4400659 125 83628 4-40 X 5/16 Slotted PHCS, 18-8 , SST 4400364 66 99432 Extraction Electrode Aperture, Graphite 17170040 47 99455 Spacer, Ground Electrode, Graphite 17192390 68 99456 Standoff, Ceramic 17192380 69 99472 Suppression Strap, Aluminum 17251090 REV A 110 99537 End Plate, Graphite 17192430 211 8A060 6-32 X 5/16”, Pan Head Phillips Screw, 18-8 , SST 4400113 212 99238A Ground Electrode Aperture 17132290 213 99262-3 Shoulder Screw, Lower Extraction Electrode 1214390 214 99433A Insulator Shield, Aluminum 17192400 615 99436A Extraction Electrode, Graphite 17192410 216 99437A Ground Plate, Graphite 17192420 2

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Extraction Electrode Version 34

G-30-045AH14 Rev 0615 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 30680 Ceramic Standoff, 3/8” Dia X 3/4 Long 5001608 22 82420 SHCS 6-32 X 5/8” , SST 4400061 23 82474 #8 Flat Washer, Standard, 18-8 , SST 4400498 44 82547 Fitting, Fast & Tite Male Elbow, White Polypro No OEM Reference 25 82629 6-32 X 1/2” Button Head Socket Screw, , SST 4400431 66 82634 BHSS 8-32 x 5/8 18-8 1236200810 47 99186 Electrode Mounting Plate Nut 17133750 48 99469 Extension Spring, Short 17255000 19 99470 Extension Spring, Long 17254990 110 99756 Electrode Mounting Plate, Bottom , SST 17133741 111 99757 Top Electrode Mounting Plate With Cam Assy. 17133740 112 8A060 6-32 X 5/16”, Pan Head Phillips Screw, 18-8 , SST 4400113 213 99254AV Top Extraction Electrode Assembly Arm, VIG 17133800 114 99255AV Bottom Extraction Electrode Assembly Arm, VIG 17133790 115 99262-13L Bellows Shield, Left 17097661 216 99262-13R Bellows Shield, Right 17097660 217 99262-5 Liner, Extraction Electrode 17122880 218 99435A Shield, Extraction Insulator 17254950 2

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G-30-045AH14 Rev 0616 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82446 1/4-20 X 1” Socket Head Cap Screw, , SST 4500138 22 82395 8-32 X 1/2, SHCS, 18-8 , SST 44000145 43 83277 O-Ring - 377 Buna-N 3500263 24 83628 4-40 X 5/16 Slotted PHCS, 18-8 , SST 4400364 65 99265 Readback Harness, Extraction Electrode 1176940 16 99267 Lead Screw Assembly No OEM Reference 17 99270 Modified Linear Slide Bearing No OEM Reference 28 99546 Feed-Thru, 10Kv 1909860 29 83112V O-Ring 212 Viton® E35000190 110 8A257 6-32 X 3/8” Vented Button Head Socket Screw, , SST No OEM Reference 411 99270A Modified Linear Slide Bearing No OEM Reference 112 99262-12 No. 1Linear Slide Mtg Plate No OEM Reference 113 99262-17 No. 2 Linear Slide Mtg Plate No OEM Reference 114 99262-19 Sensor Plate Assembly No OEM Reference 115 99262-20 Sensor Plate Assembly No OEM Reference 116 99262-21 Handle, Extraction Assembly No OEM Reference 117 99262-6 Shield Plate No OEM Reference 118 99262-7 Brace Clamp No OEM Reference 219 99267-4 Bearing Screw Assembly No OEM Reference 120 99267-5 Washer Face Jam Nut 7/8-14 UNF No OEM Reference 1

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G-30-045AH14 Rev 0617 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82875 Hex Head Screw 10-32 X 5/8, 18-8 , SST No OEM Reference 72 82234 Dowel Pin 1/8D x 1/2 18-8 , SST No OEM Reference 13 82299 Nut, 10-32 Hex, 18-8 , SST 4400049 14 82342 Retaining Ring No OEM Reference 25 82395 8-32 X 1/2, SHCS, 18-8 , SST 44000145 46 82430 SHCS 8-32 X 5/8” , SST 4400074 47 82439 SHCS 10-32 X 3/8” , SST 4400743 38 82442 SHCS 10-32 X 1 , SST 4400022 29 82579 Bearing, Angular Contact No OEM Reference 210 82672 Sprocket No OEM Reference 111 83008 O-Ring -108 -Buna-N 3500196 212 83112 O-Ring 212 Buna-N 3500086 113 8A452 Split Circular Hub Clamp No OEM Reference 114 8A454 Anti Backlash Nut No OEM Reference 115 99262-9 Mounting Block No OEM Reference 216 99267-1 Bearing Housing No OEM Reference 117 99267-2 Bearing Spacer No OEM Reference 218 99267-3 Lead Screw Mounting Plate No OEM Reference 119 99267-6 Acme Lead Screw,7/16-4, 8TPI No OEM Reference 120 99267-9 Spacer, Leadscrew Assy No OEM Reference 1

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G-30-045AH14 Rev 0618 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82446 1/4-20 X 1” Socket Head Cap Screw, , SST 4500138 4 2 82748 VSHCS, 1/4-20 X 1, 18-8 , SST Vented, Cap Screw No OEM Reference 43 83293 O-Ring 374, Buna-N 3500074 14 99468 Feed-Thru Shield, Aluminum 17254980 25 8A235 Nut, 1/4-20, Hex, Thin (Jam), , SST 4400153 26 8A820 Flat Washer Ø.275 ID, Ø.50 OD, X.06-.09 No OEM Reference 47 99262-2 Extraction Electrode Housing No OEM Reference 18 99262V34-1 Mounting Plate No OEM Reference 19 99353B Electrode Insulator, 96% Al2O3 Not glazed w/ 8-32 Threaded Hole 17254970 2

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G-30-045AH14 Rev 0619 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Package includes:•  P/N 99281 – OEM 1176910 GSD100 Motor Tach Assembly (1x)

•  P/N 8A980 – Mounting Bolts* FH, M2 X 0.4 X 6MM, 90° Head, Slotted (3x)

P/N 99399 – OEM 1181620GSD100 Motor Drive Assembly

Glemco, also offers this component in a convenient individual package.

* P/N 8A980 – Mounting Bolts for P/N 99281

Extraction Electrode Version 34Motor Drive Assembly

G-30-045AH14 Rev 0620 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82395 8-32 X 1/2, SHCS, 18-8 , SST 44000145 22 82420 SHCS, .138 X .625, 6-32 X 5/8, ss, cap 4400061 43 99213 Extension Liner 17122930 14 99259 Accel Graphite Tube 17122950 15 99264 Exit Liner 17122910 16 99457 Quadrapole Lens Tube 17122960 17 99458 Face Plate, Quadrapole Lens, Graphite 17122970 18 99466 Outer Exit Shield, Graphite 17122890 19 99467 Inner Exit Shield, Graphite 17122900 110 99481 Long Strike Plate, Graphite 17099661 111 99489 Aperture, Post Accel, Graphite 17122940 112 99585 Spacer .250OD,.144 ID,.125 Deep 4001150 413 99684 Inner Beam Dump, Graphite 17099631 1

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GSD Analyzer Components

G-30-045AH14 Rev 0621 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82119 6-32 X 1/2, Set Screw, 18-8 , SST 4400082 42 82385 SHCS 4-40 X 1/4” , SST 4400194 43 82587 FHSS No.6-32 3/8 LG , SST No OEM Reference 44 82785 Wire, Safety, Ø.032”, 302 , SST 71000425 99030 Single Gas Electrode Ground Plate 1712070 16 99054 Ceramic Standoff, 3/8” Dia X 3/8” Long X 6-32 Thread 2866042 47 99137 Bar 1701730 28 99138 Small Cup 1711262 49 99139 Large Cup 1711261 410 99215 Extension Tube, Graphite 17119351 111 99243 Shield, Graphite 17126830 112 99473 Post Accel Aperture, Graphite 17122980 113 99473A Post Accel Aperture Block, Modified, Graphite 1712298014 99582 Electrode Standoff 1712391 415 40570A Shield, Extraction Electrode, Graphite 17237120 116 8A217 8-32 X 3/8” Flat Head Screw, 18-8 , SST, 82º 4400024 417 8A387 VSS, 8-32 X 1/2, , SST 4400664 418 99181A Aperture, Graphite 17099281 119 40570AW Shield, Extraction Electrode, Tungsten 17237120

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High Current Post Accel Extraction Electrode Assembly/Beam Guide Shield

G-30-045AH14 Rev 0622 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82294 Nut 4-40 Hex 18-8 , SST 5053-0001-0042 42 82412 6-32 X 1/4”, SHCS, , SST 18-8 6973-0002-6202 23 82433 SHCS 8-32 x 1.0 , SST 1231110820 24 82455 No.4 Flat Washer, .032 Thick, , SST 1412200400 45 82458 SHCS 1/4-20 x 3.50, Alloy No OEM Reference 46 82601 Lock Washer REG. Spring .120 ID, .209 OD, .025 Thick No.4 48K00033 47 82608 Lock Washer No.10 Regular Spring 4400041 28 99395 Shaft Clamp Spacer, , SST 1212680 19 8A222 O-Ring, -018 Buna-N No OEM Reference 1

10 8A312 Limit Switch 6500393 211 8A313 Fitting, 1/4 NPT Male 3401324 2 12 8A315 Air, Cylinder 3” Bore X 3.25” Stroke No OEM Reference 113 8A316 Flow Control, Recessed No OEM Reference 214 8A331 Washer, Flat .260 ID X .500 ODX .060 Thick No OEM Reference 415 8A332 Washer, Lock, 1/4 Reg. Spring .260ID, .489OD, .06 Thick No OEM Reference 416 8A333 Nut, Hex 10-32, Nylon No OEM Reference 117 8A334 PH, 10-32 X 2”, Nylon Slotted No OEM Reference 118 8A338 PH, 4-40 X 3/4” Slotted Pan HDSS 18-8 No OEM Reference 419 8A345 Washer, Shoulder, .260 ID, .500 OD X .060 Lng Shoulder, .312 OD X .630 Shank Lth., Nylon 4000982 420 99820-11 Arm, Limit Switch Activator 17133500 121 99820-12 Cover 17104770 122 99820-4 Manifold 17065260 123 99820-8-1 Support Plate, Bracket 17065280 1

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Faraday Flag Aperture Components

G-30-045AH14 Rev 0623 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82216 O-Ring, -223 BUNA-N No OEM Reference 22 83110 O-Ring, -210 Buna-N 3500032 13 83127 O-Ring, -227 Buna-N 3500104 14 84171 SHCS 1/4-20 X 1.5 LONG,ALLOY No OEM Reference 15 99394 Cooling Tube Assembly 1215620 16 99721 Seal Block, GSD & HE Faraday Flag 17099140 17 83269K O-Ring, 7.975ID X .210W, 4079 Kalrez 22-00657-00 18 8A331 Washer, Flat .260 ID X .500 OD X .060 Thick, Black Oxide Finish No OEM Reference 19 8A332 Washer, Lock, 1/4 Regular Spring.260ID, .489OD, .06 Thick Black Oxide Finish No OEM Reference 110 8A336 PH, 8-32 X 5/8”, SS 18-8 Slotted, Bnding No OEM Reference 411 8A337 PH, 6-32 X 5/16” Phillips Pan SS 18-8, W/ Internal Tooth Washer No OEM Reference 412 99820-1 Base Plate Assembly, Faraday Flag 17099130 113 99820-1-2 Retainer, O-Ring, 17065370 114 99820-1-3 Stand-Off 5000009 4

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G-30-045AH14 Rev 0624 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82446 1/4-20 X 1” Socket Head Cap Screw, , SST 1231111420 22 82621 4-40 X 1/2” Button Head Socket Screw, , SST No OEM Reference 63 82627 6-32 X 3/8” Button Head Socket Screw, , SST 1236200606 24 82629 6-32 X 1/2” Button Head Socket Screw, , SST 1236200608 85 82630 8-32 X 1/4”, Button Head Socket Screw, , SST 4400735 36 82631 8-32 X 3/8” Button Head Socket Screw, , SST 4400183 47 99087 Standoff Insulator 1744570 28 99088 Top Insulator 1744690 29 99230 Faraday Flag Aperture 17099181 110 99339 Strike Block, Faraday Flag 17099201 611 99390 Shield, Faraday Flag 17099831 112 99392 Shield, Faraday Flag 17100461 113 8A314 Magnet, .50 X .88 X 1.75, Samarium Cobalt No OEM Reference 214 99040A Burn-Thru Sensor Plate 1766531 115 99464A 5 Amp Mini MHV Coaxial Connector, Feed-Thru Glemco Modified Design 1214980 116 99820-10 Cover Plate 17104820 217 99820-10G Cover Plate, Graphite 1710482018 99820-2 Aperture Housing 17099190 119 99820-5-1 Bracket, Magnet, Right 17065301 120 99820-5-2 Bracket, Magnet, Left 17065300 121 99820-5-3 Support Plate, Bracket Nickel Plate 17099150 122 99820-6 Faraday Cup 17104810 1

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* Note: P/N T99464 - Feed Thru Installation Tool This handy tool is designed to help hold the feedthru stationary while tightening the hex nut with a wrench.

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G-30-045AH14 Rev 0625 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 99230CV Faraday Flag Aperture, Custom, Graphite VIG 17099181 12 99679 Spacer, Strike Plate, Graphite 17320320 13 99679V Spacer, Strike Plate, Graphite VIG 173203204 99681AV Strike Plate, Serrated, Graphite VIG 17319860 15 99781 Strike Plate, Graphite 17319860 2

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Upgraded Faraday Flag Aperture Components

G-30-045AH14 Rev 0626 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82385 SHCS 4-40 X 1/4” , SST 1236200403 22 82412 6-32 X 1/4”, SHCS, , SST 18-8 4400216 33 82415 6-32 X 1/2” SHCS, , SST 1231200608 154 82470 Washer Flat 6 X .025 Thick , SST 141220600 45 82606 #6 Regular Spring Washer, 18-8 , SST 4400034 106 99419 BSHG Snap Insulator 17109340 47 99475 Electron Shower Aperture Entrance 17173230 REV A 18 99476 Electron Shower Target, Graphite 17164580 19 99363A Electron Shower Tube 17135440 110 99367A Electron Shower Tube Insulator 17109910 REV A 4

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Electron Shower Components

G-30-045AH14 Rev 0627 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82200 O-Ring -012 Buna-N 2542012 / E35000067 / 3500068 22 82385 SHCS 4-40 X 1/4” , SST 1236200403 / 4400194 / 4400105 83 83264 O-Ring -364 Buna-N 3500028 14 99318 E-Shower Base Insulator No OEM Reference 15 99375 Clamp Feed Strap 17A0830 26 99379 Feed-Thru Insulator 17S4891 REV A 27 8A218 O-Ring - 137 Buna-N 3500774 28 99240A Electron Shower Feed-Thru, For Glemco Design No OEM Reference 29 99376A Strap Mount 17S1597 210 99380A Spacer, for Glemco Design, Vespel® No OEM Reference 2 11 99396 Feed-Thru Nut, 10-32, , SST 17S1354 2

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* Note Also available E-Shower Upgrade Kit P/N K99240A Kit Includes:

• 99240A (2x)• 99376A (2x)• 99379 (2x)• 99380A (2x)• 99396 (2x)

G-30-045AH14 Rev 0628 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82384 SHCS 4-40 X 3/16 , SST 4400002 22 82431 SHCS 8-32 X 3/4” , SST 1236200620 / 4400057 43 82455 No. 4 Flat Washer, .032 Thick, , SST 1412200400 / 4400033 / 4400222 24 82474 #8 Flat Washer, Standard, 18-8 , SST 4400498 / 4400122 / 8462-0004-0807 45 82609 #8 Lock Washer, .174 ID .293 OD , SST 4400062 46 99461 E-Shower Aperture, Graphite 17165510 17 99689 Strap Straight, Silver 17164560 18 8A154 BHSS 2-56 x 1/4 18-8 , SST 4400202 29 8A155 2-56x3/4 Fillister HD Slotted 4400921 210 8A747 SHCS, 4-40 X 3/4 , SST No OEM Reference 211 99033A E-Shower Filament 1909360 REV A 112 99421HC E-Shower Filament Insulator, Boron Grad, HBC 17321470 113 99670A Filament Mount, One Piece Type 17164570 / 4100028 214 99690A Expansion Strap, RT, E-Shower Silver Strap 17164550 1

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G-30-045AH14 Rev 0629 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82385 SHCS 4-40 X 1/4” , SST 1236200403 12 82414 SHCS 6-32 X 7/16” , SST 4400044 83 82455 No. 4 Flat Washer, .032 Thick, , SST 1412200400 14 82470 #6 Flat Washer, .025 Thick , SST 141220600 45 82787 FHPS 4-40 X 3/16 82° , SST 4400076 36 99363 Electron Shower Tube 17123000 17 99364 Electron Shower Liner Housing 17123010 18 99365 End Cap, Electron Shower Housing 17123020 19 99368 Electron Shower Housing Mount 17131030 110 99419 BSHG Snap Insulator 17109340 411 99367A Electron Shower Tube Insulator 17109910 4

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Electron Shower Housing and Assembly for Eaton GSDP/N 99400

OEM 1183280

G-30-045AH14 Rev 0630 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82383 SHCS 2-56 x 3/8 , SST No OEM Reference 22 82385 SHCS 4-40 X 1/4” , SST 1236200403 63 82390 SHCS 4-40 X 5/8” 18-8 , SST 4400219 24 82424 SHCS 6-32 X 1 1/4” , SST E47000284 25 82455 No. 4 Flat Washer, .032 Thick, , SST 1412200400 26 99033 Electron Shower Filament 1900400 17 99093 Filament Mount 1718960 28 99094 Filament Collar 4100028 29 99099 Electron Shower Filament Shield 1718290 110 99180 Filament Mount Block Insulator 17083020 111 99240A Electron Shower Feed-Thru 17A0732 212 99373 Electron Shower Feed Strap 17107980 113 99374 Electron Shower Feed Strap 17107990 114 99375 Clamp Feed Strap 17A0830 215 99376A Strap Mount 17S1597 216 99377 Feed-Thru Cover 17A3700 117 99379 Feed-Thru Insulator, Vespel® 17S4891 218 99380A Spacer, Vespel® 17S4889 219 99396 Feed-Thru Nut, 10-32, , SST 17S1354 220 82912V O-Ring, -012, Viton® E3500068 4

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G-30-045AH14 Rev 0631 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82200 O-Ring, -012 Buna-N 2542012 12 82387 SHCS 4-40 X 3/8” , SST 4400004 63 82455 No. 4 Flat Washer, .032 Thick, , SST 1412200400 64 82456 Washer, No.4, .028” Thick X .125” ID X .250” OD, 300 Series , SST 4400035 35 82523 Fitting, Union, 1/4”, 316, , SST 340806 16 82609 Washer, No.8 .174 ID .293 OD, , SST 4400062 27 82621 BHSS 4-40 X 1/2”, , SST No OEM Reference 38 82788 FHPS 4-40 X 1/4 82º No OEM Reference 49 83264 O-Ring, -364 Buna-N 3500028 110 83581 O-Ring, -011 BUNA-N No OEM Reference 111 99345 Insulator 17A7036 312 99369 Electron Shower Insulator 17116930 113 99370 Electron Shower Shield, Graphite 17121720 114 99381 Feed-Thru 17A0843 115 99382 Feed-Thru Insulator 17A0842 116 99385 Electron Shower Housing Base 17115040 1 17 99386 Ground Plate 17115510 118 99389 Gas Tube Feed-Thru Assembly 17107970 119 99391 Terminal Wire Assembly No OEM Reference As needed20 82682 Electrical, Weather-Proof Miniature 5 Amp MHV Coaxial Connector 5100024 221 99371A Electron Shower Housing Liner, 3.03” OD W/ Polished ID 17135430 1

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G-30-045AH14 Rev 0632 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

P/N 99033 Electron Shower Filament

• High pressure mechanical crimping over complete circumference

• Precisely bent one piece tungsten wire form

• Designed to easily slide into an insulator block without manipulation.

Performance Improvements by Glemco

P/N 99464 This 5 amp mini-MHV coaxial connector, is a Glemco design with a teflon insulated lead wire.

G-30-045AH14 Rev 0633 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 99379 Feed-Thru Insulator 17S4891 REV A 22 99396 10-32 Feed-Thru Nut 17S1354 23 99093A Filament Mount, One Piece Nickel Design 1718960 (Modified) 24 99240A Electron Shower Feed-Thru No OEM Reference 25 99380A Spacer, Vespel No OEM Reference 26 99376B Strap Mount 17S1597 2

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* Note Also available Feed Thru Option Kit P/N K99240A3 Kit Includes:

• 99240A (2x)• 99376B (2x)• 99379 (2x)• 99380A (2x)• 99396 (2x)

Feed Thru Option

G-30-045AH14 Rev 0634 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82382 2-56 X 1/4” Socket Head Cap Screw, , SST 4400120 22 82455 No. 4 Flat Washer, .032 Thick, , SST 1412200400 13 82580 4-40 X 3/8”, FHSS, 18-8, , SST 4400208 14 99490 Plasma Shower Tube Ring 17249700 15 99503 Tube Potential 17243830 16 99504 Rectangular Potential 17243440 17 99505 Half-Octagonal Potential 17243450 1 8 99509 Plasma Shower Tube Liner 17135960 1 9 99509V Plasma Shower Tube Liner, VIG 17135960

10 99510 Plasma Shower Tube Cover 17242360 111 99514 Screw Insulator 17269310 512 99522 Plasma Shower Tube 17242410 113 99526 Knurled Thumb Screw No OEM Reference 114 8A123 SHCS, .112 X .438, 4-40 X 7/1618-8, , SST No OEM Reference 315 8A125 4-40 X 1/8, Flat Head Screw, 18-8, , SST 4400683 316 8A126 SHCS, .112 X .875, 4-40 X 7/8 18-8, , SST No OEM Reference 2

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Plasma Shower Assembly for Eaton GSD ELSP/N 99540

OEM 11013880

G-30-045AH14 Rev 0635 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82294 Nut 4-40 Hex 18-8 , SST 5053-0001-0042 22 82389 SHCS 4-40 X 1/2” , SST No OEM Reference 43 82455 No.4 Flat Washer, .032 Thick. , , SST 1412200400 74 82580 4-40 X 3/8”, Flat Head Socket Screw, 18-8 , SST 4400208 25 82601 Lock Washer Reg Spring .120 Id, .209 OD, .025 Thick No.4 48K00033 76 83137 O-Ring -237 Buna N E35000088 17 99310 Filament Screw 17B5814 28 99311 Filament 17263200 19 99491 Plasma Shower Cup 17234200 110 99492 Filament Clamp 17254090 211 99493 Retaining Ring 17234180 112 99494 Filament Bottom Ring 17248060 113 99495 Filament Bottom Support 17248070 114 99496 Filament Locating Plate 17248090 115 99499 Cup Gasket 17242340 116 99500 Heat Shield Gasket 17253420 1 17 99501 Heat Shield Gasket 17242440 218 99502 Clamp Isolator 17234240 119 99506 Short Base Plate Gasket 17247750 220 99507 Long Narrow Gasket, Base Plate 17247740 221 99508 Base Plate Gasket - Adhesive Backed, Kapton© Film 17247730 122 99508A Base Plate Gasket - Non Adhesive Backed, Kapton© Film 1724773023 99517 Plasma Shower Bracket 17231600 124 99521 Tabbed Shield, Plasma Shower 17253280 125 99525 Narrow Tab 17243390 226 99527 Small Strap 17265500 527 99532 Filament Insulator 17248080 128 99563 Shield, Clamp Isolator No OEM Reference 229 8A123 SHCS, .112 X .438, 4-40 X 7/1618-8 , SST No OEM Reference 930 8A124 SHCS, .112 X .563, 4-40 X 9/1618-8 , SST No OEM Reference 4

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G-30-045AH14 Rev 0636 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82390 SHCS 4-40 X 5/8” 18-8 , SST 4400219 22 82436 10-32 x 5/8 SHCS 18-8 , SST E47000049 43 82456 Washer, No. 4, .028” Thick X .125” ID X .250” OD, 300 Series , SST 4400035 14 82528 Fitting, Male Elbow, 1/4” Tube, 1/8 NPT, 316, , SST 5869-0001-0006 25 82643 BHSS 10-32 x 1/2 , SST 1236206008 4 6 83014 O-Ring, -114 Buna-N 3500057 27 83581 O-Ring, -011 Buna-N 3500213 28 99511 Upper Feed-thru Isolation Block 17247760 19 99512 Lower Feed-thru Isolation Block 17247770 110 99515 Cylindrical Insulator 17B5099 111 99516 Feed-Thru Insulator 17251040 212 99518 Feed-Thru, Left 17B5097 113 99519 Feed-Thru, Right 17B5098 114 99520 Four Arm Knob With Stud 4001587 215 99523 Cover Assembly, Feed-thru Side 17249920 116 99529 Handle 17249770 217 99530 Hex Male-female Standoff, 5/16 Hex X 1.69 LONG, 6-32 Thread, Aluminum No OEM Reference 418 99534 Screw Insulator No OEM Reference 419 8A113 Fitting, Male O-Seal Connector 1/4” Tube, 7/16-20, -111 O-Ring, No OEM Reference 220 8A114 Male O-Seal Connector, 3/16 Tube, 3/8-24 THD, -112 O-Ring, No OEM Reference 121 8A122 4-40 X 1-1/2, SHCS, , SST 18-8 44S0040 1

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G-30-045AH14 Rev 0637 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 82321 Hex Nut, .375, 3/8-16, 18-8 , SST No OEM Reference 22 84228 4-40 X 5/16 SHCS, 18-8 , SST 4400873 83 99497 Small Flexible Connector 17234220 14 99498 Large Flexible Connector 17234230 15 99513 Feed-Thru Ring 17B3550 26 99524 Chamfered Tab 17B3555 47 99528 Plasma Shower Base 17234190 18 8A112 Washer, Narrow, .390 ID X .625.063 Thick., SS, 18-8 No OEM Reference 29 8A120 O-Ring -390, Buna N E35000186 1

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G-30-045AH14 Rev 0638 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 99903 V3 Bellows Liner Flange, Aluminum 170103830 12 99903A V3 Bellows Liner Flange, Custom, Aluminum 170103830 13 99903B V3 Bellow Valve Door Interface, Aluminum 170103830 14 99904 V3 Bellows Liner, Kapton® 170103830 1

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V3 Bellows Liner Components

G-30-045AH14 Rev 0639 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM QTY1 99483 Faraday Strike Plate, Disc 1 17182570 12 99484 Faraday Strike Plate, Disc 2 17182580 13 99485 Faraday Strike Plate, Disc 3 17182590 14 99486 Faraday Strike Plate, Disc 4 17182600 1

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Faraday Strike Plates

G-30-045AH14 Rev 0640 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

A Resource for Semiconductor Manufacturers

Item P/N Description OEM1 99568C No. 1 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096730 2 99686C No. 2 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096740 3 99688C No. 3 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096750 4 99902A Unclamper Roller Assembly 1180490

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End Station Components