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From Leading-Edge Advanced CMOS to From Leading-Edge Advanced CMOS to Nanotechnology DevicesNanotechnology Devices

EEL 4329 / EEL 5934 FALL 2006Instructor Prof. Scott Thompson

535 Engineering Bldg846-0320

thompson@ece.ufl.edu Office hours: M, W, F 7th period (plus email for more)

MWF 8th period / NEB 102

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Fall 2006 ECS S.E. Thompson

What is Moore’s LawWhat is Moore’s Law

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Fall 2006 ECS S.E. Thompson

Moore’s LawMoore’s Law According to Moore:

• ~ 0.7X linear scale factor

• 2X increase in density / 2 years

• Lower cost

• Higher performance (~30% / 2 years)

• At severe competitive disadvantage if don’t have newer technology

• Has been going on for 40 years and will continue “somewhat” for another decade

1st signs of this being no longer valid is some markets

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Fall 2006 ECS S.E. Thompson

PentiumPentium®® Processors in: Processors in:

19931993 19941994 19951995

0.8µm 0.6µm 0.35µm

19981998

0.25µm0.35µm

19971997 19991999

0.18µm

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Fall 2006 ECS S.E. Thompson

CLASS GOALCLASS GOAL

This class will expose the student to state of the art technology issues and industrial team problem solving. The class will provide links between the short-term topics, which will certainly be in production during the next 10 years such as nano-scale MOSFET, strained Si, high k gates to far-reaching topics, which are well ahead or off the main stream, offering high Potential . Some of these topics will include carbon nanotubes, molecular electronics and single electron devices for logic applications.

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Fall 2006 ECS S.E. Thompson

Relevance: Relevance:

• At present silicon technology is “IT” however Moore’s Law will slow over the next decade and will have a profound effect on industry and university business and engineering jobs. The slowing should not be viewed as an end just a new phase in the $300B microelectronic industry were the rules of business change.

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Fall 2006 ECS S.E. Thompson

Relevance: Relevance:

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Fall 2006 ECS S.E. Thompson

Gordon Moore on Moore’s Law and the Gordon Moore on Moore’s Law and the future of Microelectronicsfuture of Microelectronics

• Show Moore video– Interviews by Grove, Barret, Mead

• Discussion of key takeaways

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Fall 2006 ECS S.E. Thompson

GradingGrading

• Grading: Homework/team project assignments and team project.

• Exams 85% • 25% Exam 1: Sept 27 • 25% Exam 2: Nov 3 • 35% Final exam (Dec 12 10am – 12)

• 15% homework/real world semiconductor team research project

• Class divided into ~ 10 groups• 5 – 10 min group periodic report out• Final report • Part peer evaluation

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Fall 2006 ECS S.E. Thompson

Text book: Text book: Nanoelectronics and Information TechnologyNanoelectronics and Information Technology

Plus many handouts on CD ROM

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Fall 2006 ECS S.E. Thompson

Perquisite:Perquisite:

Basic knowledge of semiconductor physics and devices (EEL 3396 or eq.). The class will be introductory and targeted towards students with a diverse background from electronics to material science. The class will be designed to introduce CMOS, non classical CMOS, and post CMOS device concepts without a quantum mechanical background.

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Fall 2006 ECS S.E. Thompson

Course OutlineCourse Outline

Week 1-2: Moore’s Law and microelectronic industry trendsWeek 3: Logic device: State of the Art for a Si MOSFETWeek 4: Requirements for a logic device replacementWeek 5-6: CMOS devices limits: quantum-statisticalWeek 7-11 Post CMOS logic device

- Multi-Gate CMOS- Carbon nanotubes

- High level overview of Quantum Transport Devices - Single electron devices for Logic applications - SpintronicsMidterm exam: Oct 20thWeek 12-14 Memory devices

DRAM, ferroelectric, magneto resistive, and phase change RAMWeek 16: December 8th and 10thFinal exam: when scheduled by college

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Fall 2006 ECS S.E. Thompson

Course MaterialCourse Material

• Week 1-6• 1.1: Introduction class / Video

– 1.2: short 300mm fab vide: Moore on Moore’s law– 1.3: Intel’s view on nanotechnology– 2.1: IBM view on nanotechnology– 2.2 Taur/Isaac papers– 2.3 State of the art: MOSFET – 3.1: Holiday– 3.2: How work report out – 3.3: How strain works / band structure and strain– 4-6: Requirements and limits of devices

High level overview to put the material in perspective

Equations and mathematics

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Fall 2006 ECS S.E. Thompson

CLASS / Team Project (assigned Mid Year)CLASS / Team Project (assigned Mid Year)

• Compare post CMOS replacement device options to the MOSFET (most successful device technology)

• Which if any post CMOS device options should the microelectronics focus on as a MOSFET replacement?

• Recommendation should be based– Historical and projected future MOSFET trends.– On quantum, statistical mechanics, and device limits.– Potential advantage of post CMOS device option.– Class homework will help shape project– Suggestions: Start with a good literature search. Use

excellent free service of electronic journals on-line. Use Mathlab for calculations and graphs.

• Group divided into 10 Teams

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Fall 2006 ECS S.E. Thompson

Homework 1:Homework 1:

• Why has GaAs or 3-5 devices not “taken off”• Include

– Early history of GaAs—find interesting quotes (see who can find the best quotes) on GaAs potential

– What markets is GaAs used today– What is it not replaceing CMOS

• Expectation– Present 6-7 ppt slides for a “professional” presentation to class– ~1 page report with references– Due Sep 11th

Can pick your own groups ~4-6 people/group

n+

Source

LGATE

TOX

Drain

W

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Fall 2006 ECS S.E. Thompson

Course Material (papers provided on CD)Course Material (papers provided on CD)

Week 1: • Silicon MOSFET – Novel materials and

Alternative concepts Ch-13 text book pages 361-385

– (Skip operation of MOS capacitor / High K deposition

• Isaac paper: The Future of CMOS• Taur CMOS design near the limit of scaling• EEtimes nano technology articleWeek 2: • Denard: Design of ion implanted MOSFET• Sustaining Moore’s Law and the US EconomyWeek 3:• Intel 90nm Strained silicon

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Fall 2006 ECS S.E. Thompson

Course Material (papers on CD)Course Material (papers on CD)Week 4-6:• Miendl- low power microelectronics • Limits to a binary switch• Book pages 323-357 (skip biological system)Week 7-11: • Book chapters 19, 16• Single electron devices and their application• Spintronics: a spin based electronics vision for the futureWeek 12-16: • Book chapters 21-23• Introduction to flash memory

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OtherOther

• Class attendance required. Class attendance/participation used to decide “close” grades (i.e. A or B+?)

• No make-up exam/homework unless very good reason. See me. Will be handled on case by case basis

• Student with disability: Students requesting classroom accommodation must first register with the Dean of Student Office. The Dean of Students Office will provide documentation to the student who must then provide this documentation to the instructor when requesting accommodations.

• Expect on time to class. No cell phones• University honesty policy