Mega ION: System Diagram

Low Level FloatClosed Fluid

Reservoir

P1

S4S4

S2S2

S2S2

S3S3

S4S4

S5S5

Fill

Wash

Test

Drain

Dry

Process Chamber

IACIAC

IONIC ABSORPTION

CHAMBER( )

RES. SENSO

R

S1S1

S5S5HEAT(option)

NitrogenDryer

High LevelFloat

S2S2

S1S1

S1S1

S3S3

S2S2

P1

S4S4

S2S2

S2S2

S3S3

S4S4

S5S5

注入清洗

测试

排泄

干燥

IACIAC

( )

S1S1

S5S5

S2S2

S1S1

S1S1

S3S3

S2S2

低液位浮标封闭的溶剂槽离子吸附

腔室

清洗腔室

电阻率探头

加热选件氮气干燥

高液位浮标

GLOBAL REACH AND ON-SITE SERVICE CAPABILITY

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