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MODULE SYSTEM LOGIC GATE CIRCUIT D Q CMOS Inverter ASIC Full-Custom Semi-Cust om Programmabl e FPGA PLD Cell-Based Gate Arrays General Purpose DRAM & SR AM Microprocessor ASS P Controll er Chip Modem Chi p X Combinational Sequential R E G MEMO RY DECODER M U X Simple Basic FA A B Ci S Co Complex Static Dynamic Parallel Connectio n Series Connectio n p n n + + MOSFET Bipolar Diod e n p n+ n+ p DEVICE WORLD OF DIGITAL IC Copy Right August 2002 Maitham Shams Dept of Electronics Carleton University Ottawa, CANADA

MODULE SYSTEM LOGIC GATE CIRCUIT DQ CMOS Inverter ASIC Full-Custom Semi-Custom Programmable FPGA PLD Cell-Based Gate Arrays General Purpose DRAM & SRAM

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MODULE

SYSTEM

LOGIC GATE

CIRCUIT

D Q

CMOS Inverter

ASIC

Full-Custom

Semi-C

ustomPr

ogra

mm

able

FPGA

PLD

Cell-Based

Gate Arrays

General P

urpose

DRAM & SRAM

Microprocessor

ASSP

Controller Chip

Modem Chip

X

Combinational SequentialREG

MEM

OR

Y

DE

CO

DE

R

MUX

Simple

BasicFA

AB

Ci

S

Co

Complex

Static Dynamic

ParallelConnection

SeriesConnection

p n n+ +

MOSFETBipolar Diode

n pn+ n+p

DEVICE

WORLD O

F DIGITAL IC

Copy Right

August 2002Maitham Shams

Dept of Electronics

Carleton UniversityOttawa, CANADA

The MOSFET

© Maitham Shams 2002

n+ n+

Gate OxideSource Drain

Body

p-substrate

Gate

2Thin Oxide (SiO2))Polycrystalline Silicon

or Polysilicon (conductor)

Lightly doped

Bulk Contact

FieldOxide

p+ p+

Channel stop implantor field implant

2Thick Oxide (SiO2)

Heavily doped byimplantation or diffusion

For insulatingdevices fromeach other

Metal-Oxide-Semiconductor Field-Effect Transistor

Unipolar and symmetric device with four terminals of Gate, Source, Drain, and Body

NMOS: n-type Source and Drain, p-type Body connected to ground (GND)PMOS: p-type Source and Drain, n-type Body connected to power supply (VDD)

CMOS Technology

© Maitham Shams 2002

PMOS NMOS

p+ n+ n+

p-substrate

p+

contact cut

Polysilicon

n-well

MetalGate oxide

Complementary Metal Oxide Silicon Technology combines NMOS and PMOS

Mainstream IC Technology in

Foreseeable FutureHigh Integration

DensitySimple Processing

Steps

Low Power Consumption

Adequate SpeedHigh Reliability

MOSFET Types and Symbols

© Maitham Shams 2002

D

G

S

D

G

S

D

G

S

D

G

S

B

Analog Digital With non standard substrate connection

Enhancement PMOS Depletion PMOS

I DS

VGS +VTp

0

IDS

VGS -V Tp

0

D

G

S

D

G

S

D

G

S

B

D

G

S

Analog Digital With non standard substrate connection

Enhancement NMOS Depletion NMOS

I DS

VGS +VTn0

0

I DS

VGS -VTn

Enhancement mode transistors are normally OFF (non-conducting with zero bias)Depletion mode transistors are normally ON (conduct with zero bias)

Most CMOS ICs use Enhancement type MOS

© Maitham Shams 2002

AccumulationGate

Body

VGS +

-

n+ n+

Source Drain

p-type substrate

+_ +

_

+_ +

_

+_

+_

(B)

(S) (G) (D)

TGS VV 0

Depletion

Cut-off (no current)

TGS VV 0DSV

MOS Theory of Operation

G

Depletion layer

n+ n+

p-type substrate

_DS

B

__ _ __

MOS Operation (Triode Mode)

© Maitham Shams 2002

Threshold voltage, VT, is the potential difference between gate and source, VGS, just enough to invert the channel and let the current flow

Inversion Layer(n-type Channel)

G

Depletion Layer

n+ n+

p-type substrate

DS_

B

___ _ __ _ _ __ _

Inversion

TGS VV

TGSDS VVV

2)(

2DS

DSTGS

VVVVI

Current Flow

In triode (also called linear) mode current flow increases by increasing VGS and VDS

MOS Operation (Saturation Mode)

© Maitham Shams 2002

Current flow is constant almost independent of VDS

Inversion Layer(n-type Channel)

Pinch-off

G

Depletion Layer

n+ n+

p-type substrate

DS_

B

___ _____ _ _ _ _ __ __ _

G

n+ n+

p-type substrate

DS_

B

___ _____ _ _ _ _ __ __ _

Edge of Saturation

TGS VV

VVV GSDS

TGS VV TGSDS VVV

Saturation

)(2

TGSI VV

The Threshold Voltage

© Maitham Shams 2002

VT = ms - 2F -QB

Cox

-QSS

Cox

-QI

Cox= VT - ideal + VFB

Work-functiondifference betweengate material and Si = (gate - Si)

= - (Eg/2 + F)

Ideal VT

Voltage drop acrossDepletion regionAt inversion

Voltage drop across oxide (function of VSB)

Implants: to adjust VT by introducing a small doped

region at oxide/substrate surface

Surface Charge : due to imperfection in the oxide/substrate interface & doping

Depletion Layer Charge

Band gap energy of Si= (1.16 – 0.704x10-3 T2

T + 1108)5

Gate-Oxide Capacitance per unit area

COX =OX

tOX

Oxide permittivity = 3.5 x 10 -13 F/cm

Oxide thickness ~ 20nm (200A)

The Threshold Voltage

© Maitham Shams 2002

VT = VT0 + ( |-2F + VSB| - |-2F |)

VT0 = ms - 2F -QB0

COX-

QSS

COX-

QI

COX

Zero-Bias QB

Zero-Bias VT

= 2qSi NA

COX

Body Effect Coefficient

Body Effectrefers to an increase in absolute value of threshold voltage when body is at lower potential than source in NMOS and higher potential than source in PMOS transistors

C 106.1 19Doping Density

5V?V and

V, -0.6

V, 0.75V if transistor

NMOS an of V isWhat

SB

F

T0

T

Subthreshold Currentis small amount of current that flows through the channelwhen gate-to-sourcepotential is belowthreshold voltage

MOS I – V Relations

© Maitham Shams 2002

ID as a function of VDSID as a function of VGS

ID (mA)

VDS (V)

Triode

Saturation

GSV = 5V

VGS = 4V

VGS = 3V

VGS = 2V

VGS = 1V

1

2

0 54321

VDS = VGS - VT

ID

VGS

(V)VT

0.0 1.0 2.0

0.010

Subthreshold Current

0.020 VDS = 5V

Channel Length Modulation Refers to the fact that due to the enlargement of depletion layer on the drain side and, hence, reduction of channel length, ID slightly increases as VDS increases in saturation

Simple MOSFET Model

© Maitham Shams 2002

G

S

ID

D

VDS > VGS – VT Saturation

Square Law:

ID = ( VGS - VT)2(1 + VDS)k’n

L

W

VDS < VGS – VT Linear

ID = {( VGS - VT)VDS - k’n

L

W

2

VDS2

}

W

Drain

Sourc

e

L

Gat

e

Designers usually change size (usually width) of transistor to get the right amount of current

Saturation (ON) and cut-off (OFF) are the more important modes in operation of digital circuits

oxnn CK '

Process transconductance parameter

n Is electron mobility, about 3times larger than hole mobility

MOS technologies are known by their Feature Length (minimum allowable L)

MOS Capacitances

© Maitham Shams 2002

cGS , cGD are oxide capacitances between gate and channel on the source and drain

sides, respectively

cSB and cDB are junction (also called diffusion) capacitances due to reverse-biased diodes

G

S

B

D

GSC GDC

SBC DBC

GBC

n+ n+

Source Drain

p-substrate

Gatetox

BodySBC DBCGBC

GDCGSC MOS parasitic capacitances govern it’s dynamic

behavior

MOS capacitances are non-linear functions of voltages

across them

cGB is a combination of gate-to-channel and channel-to-body capacitances

Gate-Oxide MOS Capacitances

© Maitham Shams 2002

Average Gate Related Capacitances

Operation Region

Cut-Off

Triode

Saturation

GSC GDCGBC

0

0

0

0

0

WLCox

2/WLCox 2/WLCoxWLCox)3/2(

Junction Capacitance

© Maitham Shams 2002

linear junction

abrupt junctionCj (fF)

VD (V)

0.00.0

0.5

1.0

2.0

Average value of Cj between VH and VL

Ceq = Qj / VD = Keq Cj

Keq = - 0

m

(VH – VL)(1-m)

x [(0 – VH )1-m – (0 – VL )1-m]

Cj = Cj0

(1 – VD / 0)m

Junction capacitance at zero bias given per unit area

Grading coefficient 0.5 for abrupt junction 0.3 for linear junction

Junction behaves like a capacitance becomes its charge depends on the voltage across it

Non-ideal Behaviour of MOSFET

© Maitham Shams 2002

- Power Law for Sub-micron MOS in Saturation ID = W(VGS – VT), 1.25

Short Channel Effects: Velocity Saturation

and Mobility Degradation

Threshold variations

Parasitic Resistances

Subthreshold current

Latch up

The Threshold Voltage

© Maitham Shams 2002

Example:

VT0 = 0.75 V, = 0.542 F = -0.6V, VSB = 5VVT = 1.6V > 2VT0