1st MEMS Commercial Tuning Fork Gyroscope Draper Labs

M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, “A micromachined comb-drive tuning fork gyroscope for commercial applications,” in Proc. Sensor Expo, Cleveland, OH, 1994, pp. 187–193.

Area1mm2 !

A Quartz Tuning Fork Gyroscope

Economy of Scale to Lower Cost

A Critical Review of MEMS Gyroscopes Technology and Commercialization StatusSteven Nasiri, 408-988-7339 x108, snasiri@invensense.com3150A Coronado Drive, Santa Clara, California 95054

“..high volume occurred once unit prices achieved $3 target prices.”

• Automotive: vehicle stability control, rollover detection, navigation, load leveling/suspension control, event recording, collision avoidance

• Consumer: computer input devices, handheld computing devices, game controllers, virtual reality gear, sports equipment, camcorders, robots

• Industrial: navigation of autonomous (robotic) guided vehicles, motion control of hydraulic equipment or robots, platform stabilization of heavy machinery,human transporters, yaw rate control of wind-power plants

• Aerospace/military: platform stabilization of avionics, stabilization of pointing systems for antennas, unmanned air vehicles, or land vehicles, inertial measurement units for inertial navigation

Applications

A Critical Review of MEMS Gyroscopes Technology and Commercialization StatusSteven Nasiri, 408-988-7339 x108, snasiri@invensense.com3150A Coronado Drive, Santa Clara, California 95054

UI Research Project- Using AUVs to Measure Magnetic Signature of Naval Vessels

IMU

DAU

Magnetometer

Archangel IM3Data ResolutionBody Rates 0.0006°/second @ 200 HzAccelerations 50 μg @ 200 HzData Accuracy(Gyro IMU Mode) Random Walk 2.5°/√hour (C1)5.2°/√hour (C2)Bias Drift 15°/hourStability 50°/hr/yearScale Factor Accuracy 0.1% of Full ScaleScale Factor Drift 300 ppm, 1 sigmaCross Axis 0.13% maximumData Accuracy(Accelerometer) Bias Drift 0.2 mgScale Factor Accuracy 0.10% of Full ScaleScale Factor Drift 500 ppm, 1 sigmaCross Axis 0.13% maximumDynamic Range - C1 ±150°/s ±10 g(Linear) - C2 ±300°/s ±10 gBandwidth(3 db) Rates 40 Hz MaximumAccelerations 50 Hz Maximum

IMU Specifications